| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 12/24/2009 | DE112008000410T5 Epitaxialer Galliumnitridkristall, Verfahren zu dessen Herstellung und Feldeffekttransistor An epitaxial gallium nitride crystal, to methods for its manufacture and field effect transistor |
| 12/24/2009 | DE112008000409T5 Epitaxiales Substrat für einen Feldeffekttransistor Epitaxial substrate for a field effect transistor |
| 12/24/2009 | DE112008000407T5 Integrierte Wasserstofftemperung und Gate-Oxidation für verbesserte Gate-Oxidintegrität Integrated Wasserstofftemperung and gate oxidation for improved gate Oxidintegrität |
| 12/24/2009 | DE112008000209T5 Verfahren zum Bilden von Durch-Substrat-Verbindungen A method for forming through substrate compounds |
| 12/24/2009 | DE10332653B4 Verfahren zur Herstellung eines Halbleiterbauelements mit Stressentlastung während der Halbleiterbauelementherstellung A process for producing a semiconductor device with stress relief during semiconductor device fabrication |
| 12/24/2009 | DE102009024919A1 Verfahren zur Herstellung einer Siliciumcarbidhalbleitervorrichtung mit einer Grabengatestruktur A process for preparing a Siliciumcarbidhalbleitervorrichtung with a grave gate structure |
| 12/24/2009 | DE102009024726A1 Verfahren zum Herstellen eines Halbleiter-Wafers A method of manufacturing a semiconductor wafer |
| 12/24/2009 | DE102009019095A1 Integrierter Schaltkreis, Herstellungverfahren, Speichermodul und Computersystem An integrated circuit manufacturing process, memory module and computer system |
| 12/24/2009 | DE102009012594A1 Durch-Substrat-Via-Halbleiterkomponenten By substrate via semiconductor components |
| 12/24/2009 | DE102009002046A1 Verfahren zum Bilden eines flachen Basisbereiches eines Bipolartransistors A method for forming a flat base region of a bipolar transistor |
| 12/24/2009 | DE102008030629A1 Wafermagazin Wafer magazine |
| 12/24/2009 | DE102008029622A1 Process to manufacture high-resolution liquid crystal display with rectangular laser beam directed at semiconductor film |
| 12/24/2009 | DE102008029498A1 Verfahren und System zur quantitativen produktionslinieninternen Materialcharakterisierung in Halbleiterherstellung auf der Grundlage von Strukturmessungen und zugehörigen Wellen Method and system for quantitative production line internal material characterization in semiconductor manufacturing based on structural measurements and associated shafts |
| 12/24/2009 | DE102008029385A1 Verfahren zur Herstellung von Seltenerdmetalloxidschichten A process for preparing Seltenerdmetalloxidschichten |
| 12/24/2009 | DE102008028104A1 Metallisierungsverfahren für Solarzellen Metallization process for solar cells |
| 12/24/2009 | DE102008026792A1 Apparatus for laser-machining substrate such as copper indium diselenide-thin film solar cell elements arranged in machining area, comprises laser operable in pulsed mode, beam distribution unit, machining units, and beam expansion optic |
| 12/24/2009 | DE102008022476B3 Method for mechanical treatment of disk, involves allocating disk separated by wire saw from work piece having sawing edge to their extent |
| 12/24/2009 | DE102007041885B4 Verfahren zum Herstellen einer Halbleiterschaltungsanordnung A method for fabricating a semiconductor circuit arrangement |
| 12/24/2009 | DE102006052694B4 Waferprodukt und Herstellungsverfahren dafür Wafer product and manufacturing method thereof |
| 12/24/2009 | DE10122036B4 Substrathaltevorrichtung für Prober zum Testen von Schaltungsanordnungen auf scheibenförmigen Substraten Substrate holder for Prober for testing circuits on disc substrates |
| 12/24/2009 | DE10057998B4 Poliergerät und Polierverfahren Polishing apparatus and polishing method |
| 12/24/2009 | DE10043212B4 Schneidverfahren Cutting process |
| 12/23/2009 | WO2009155508A2 A platen for reducing particle contamination on a substrate and a method thereof |
| 12/23/2009 | WO2009155506A2 Melt purification and delivery system |
| 12/23/2009 | WO2009155502A2 Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a wafer |
| 12/23/2009 | WO2009155500A2 Method and apparatus for controlling beam current uniformity in an ion implanter |
| 12/23/2009 | WO2009155498A2 Use of pattern recognition to align patterns in a downstream process |
| 12/23/2009 | WO2009155352A2 Matching circuit for a complex radio frequency (rf) waveform |
| 12/23/2009 | WO2009155247A2 Semiconductor die separation method |
| 12/23/2009 | WO2009155221A2 Methods for controlling time scale of gas delivery into a processing chamber |
| 12/23/2009 | WO2009155166A2 Techniques for measuring ion beam emittance |
| 12/23/2009 | WO2009155157A2 Methods of forming buffer layer architecture on silicon and structures formed thereby |
| 12/23/2009 | WO2009155122A2 Epitaxial lift off stacks and methods |
| 12/23/2009 | WO2009155119A2 Methods and apparatus for a chemical vapor deposition reactor |
| 12/23/2009 | WO2009155117A2 Method and apparatus for detecting the substrate temperature in a laser anneal system |
| 12/23/2009 | WO2009155090A2 Fast substrate support temperature control |
| 12/23/2009 | WO2009155073A2 Fixture drying apparatus and method |
| 12/23/2009 | WO2009155067A2 Method for forming fine pitch structures |
| 12/23/2009 | WO2009155028A1 Method and system for supplying a cleaning gas into a process chamber |
| 12/23/2009 | WO2009154975A1 Method to create three-dimensional images of semiconductor structures using a focused ion beam device and a scanning electron microscope |
| 12/23/2009 | WO2009154965A2 Automated determination of height and tilt of a substrate surface within a lithography system |
| 12/23/2009 | WO2009154953A2 Sample inspection methods, systems and components |
| 12/23/2009 | WO2009154952A2 Systems and methods for determining two or more characteristics of a wafer |
| 12/23/2009 | WO2009154896A1 Thermocouple |
| 12/23/2009 | WO2009154889A2 Gas distribution showerhead skirt |
| 12/23/2009 | WO2009154882A2 Semiconductor power switches having trench gates |
| 12/23/2009 | WO2009154827A2 Floating sheet measurement apparatus and method |
| 12/23/2009 | WO2009154789A1 Direct loading to and from a conveyor system |
| 12/23/2009 | WO2009154761A1 Stacking of wafer-level chip scale packages having edge contacts |
| 12/23/2009 | WO2009154696A2 Microstructure device including a metallization structure with self-aligned air gaps between closely spaced metal lines |
| 12/23/2009 | WO2009154617A1 Selective activation of hydrogen passivated silicon and germanium surfaces |
| 12/23/2009 | WO2009154578A1 Adaptive clamp width adjusting device |
| 12/23/2009 | WO2009154567A1 A wear-resistant high-pressure water jet nozzle |
| 12/23/2009 | WO2009154464A1 An integrated circuit comprising light absorbing adhesive |
| 12/23/2009 | WO2009154388A2 Photomask baking apparatus |
| 12/23/2009 | WO2009154386A2 Worm memory using nanoparticles contained in a polymer thin film |
| 12/23/2009 | WO2009154381A2 Sputtering apparatus and multi-chamber comprising the same |
| 12/23/2009 | WO2009154379A2 Organic/inorganic composite comprising three- dimensional carbon nanotube networks, method for preparing the organic/inorganic composite and electronic device using the organic/inorganic composite |
| 12/23/2009 | WO2009154293A1 Semiconductor memory device |
| 12/23/2009 | WO2009154242A1 Method for manufacturing mis-type field effect transistor |
| 12/23/2009 | WO2009154238A1 Reflective mask blank for euv lithography |
| 12/23/2009 | WO2009154217A1 Contact structure for inspection |
| 12/23/2009 | WO2009154213A1 Magnetron sputtering method, and magnetron sputtering device |
| 12/23/2009 | WO2009154196A1 Bias sputtering apparatus |
| 12/23/2009 | WO2009154182A1 Edge surface observation apparatus |
| 12/23/2009 | WO2009154173A1 Method for manufacturing multistep substrate |
| 12/23/2009 | WO2009154163A1 Organic thin-film transistor |
| 12/23/2009 | WO2009154156A1 Patterning method, device manufacturing method using the patterning method, and device |
| 12/23/2009 | WO2009154145A1 Functionalized molecular element, manufacturing method thereof, and functionalized molecular device |
| 12/23/2009 | WO2009154129A1 Iii-group nitride semiconductor light emitting element, method for manufacturing the element, and lamp |
| 12/23/2009 | WO2009154085A1 Seed light generating device, light source device and method for adjusting the same, optical irradiation device, exposure device, and device manufacturing method |
| 12/23/2009 | WO2009154075A1 Processing device |
| 12/23/2009 | WO2009154034A1 Method, apparatus and program for manufacturing silicon structure |
| 12/23/2009 | WO2009154009A1 Method for manufacturing magnetoresistive device, sputter film-forming chamber, apparatus for manufacturing magnetoresistive device having sputter film-forming chamber, program and storage medium |
| 12/23/2009 | WO2009154002A1 Vacuum processing apparatus, vacuum processing method, and manufacturing method of an electronic device |
| 12/23/2009 | WO2009153956A1 Semiconductor device with a balun |
| 12/23/2009 | WO2009153926A1 Template manufacturing method, template inspecting method and inspecting apparatus, nanoimprint apparatus, nanoimprint system, and device manufacturing method |
| 12/23/2009 | WO2009153925A1 Nano-imprint method and apparatus |
| 12/23/2009 | WO2009153909A1 Method for manufacturing a semiconductor device, and a semiconductor device |
| 12/23/2009 | WO2009153887A1 Fret bar for ingot slicing, ingot to which fret bar is stuck, and ingot cutting method using fret bar |
| 12/23/2009 | WO2009153880A1 Semiconductor storage device |
| 12/23/2009 | WO2009153857A1 Semiconductor device and method for manufacturing the same |
| 12/23/2009 | WO2009153835A1 Circuit board, semiconductor device, and their manufacturing method |
| 12/23/2009 | WO2009153834A1 Semiconductor device and method for manufacturing the same |
| 12/23/2009 | WO2009153728A1 Through wafer via filling method |
| 12/23/2009 | WO2009153712A1 Finfet method and device |
| 12/23/2009 | WO2009153422A1 Nitrogen-plasma surface treatment in a direct bonding method |
| 12/23/2009 | WO2009153356A1 Semiconductor component with isolation trench intersections |
| 12/23/2009 | WO2009153129A2 Method for the manufacture of an electronic assembly |
| 12/23/2009 | WO2009153061A1 Method and device for transporting objects |
| 12/23/2009 | WO2009153059A1 Process device for processing in particular stacked processed goods |
| 12/23/2009 | WO2009153048A1 Method for producing a metal structure on a surface of a semiconductor substrate |
| 12/23/2009 | WO2009152672A1 Encapsulating apparatus for solar cells and encapsulating method for solar cells |
| 12/23/2009 | WO2009152670A1 Radio frequency electrode and apparatus for film formation |
| 12/23/2009 | WO2009152648A1 Method for the production of thin film |
| 12/23/2009 | WO2009131857A3 A hardware set for growth of high k and capping material films |
| 12/23/2009 | WO2009131379A3 Polycrystalline silicon film, a thin-film transistor comprising the same, and a production method thereof |
| 12/23/2009 | WO2009128790A3 Component handler |
| 12/23/2009 | WO2009127932A3 Wire saw device and method for operating same |
| 12/23/2009 | WO2009126352A3 Novel micropores and methods of making and using thereof |