| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 12/23/2009 | CN100573855C Encapsulation structure of the crystal particle and its making method |
| 12/23/2009 | CN100573854C Semiconductor device, circuit substrate and electronic apparatus |
| 12/23/2009 | CN100573853C Active element array structure and manufacturing method thereof |
| 12/23/2009 | CN100573852C Building fully-depleted and partially-depleted transistors on same chip |
| 12/23/2009 | CN100573851C CMOS device and its manufacture method |
| 12/23/2009 | CN100573850C Image sensor structure and manufacturing method thereof |
| 12/23/2009 | CN100573849C Method for forming semiconductor device having fin structure |
| 12/23/2009 | CN100573848C Semiconductor device and manufacture method thereof and electric appliance |
| 12/23/2009 | CN100573847C Method of manufacturing a composite of copper and resin |
| 12/23/2009 | CN100573846C Circuitry component structure and method for forming the same |
| 12/23/2009 | CN100573845C Capping of metal interconnects in integrated circuit electronic devices |
| 12/23/2009 | CN100573844C Method of manufacturing semiconductor device |
| 12/23/2009 | CN100573843C Cassette with air inlet valve |
| 12/23/2009 | CN100573842C Probe card manufacture method and device |
| 12/23/2009 | CN100573841C 半导体装置 Semiconductor device |
| 12/23/2009 | CN100573840C Mounted body and method of producing the same |
| 12/23/2009 | CN100573839C Electronic circuit device and method for manufacturing same |
| 12/23/2009 | CN100573838C Preparation method of mixed integrated circuit structure of tri-dimensional CMOS and molecular switch device |
| 12/23/2009 | CN100573837C Method for preparing printed circuit board and light emitting diode |
| 12/23/2009 | CN100573836C Doped metal oxide films and systems for fabricating the same |
| 12/23/2009 | CN100573835C Method for manufacturing longitudinal double-grid metal-oxide-semiconductor element |
| 12/23/2009 | CN100573834C Semiconductor device and method for fabricating the same, semiconductor substrate production method |
| 12/23/2009 | CN100573833C Manufacturing method of thin film transistor |
| 12/23/2009 | CN100573832C Phosphorous doping methods of manufacturing field effect transistors having multiple stacked channels |
| 12/23/2009 | CN100573831C Semiconductor device and process for preparing a low-temperature polycrystalline silicon layer |
| 12/23/2009 | CN100573830C Plasma processing apparatus and plasma processing method |
| 12/23/2009 | CN100573829C Silicon slice etching equipment |
| 12/23/2009 | CN100573828C Plasma treatment method and plasma etching method |
| 12/23/2009 | CN100573827C Electromagnetic field supply apparatus and plasma processing device |
| 12/23/2009 | CN100573826C Substrate processing equipment, substrate processing method, recording medium and software |
| 12/23/2009 | CN100573825C Device and method for chemical vapour deposition (CVD) |
| 12/23/2009 | CN100573824C Single crystal silicon and SOI base board, semiconductor device and its producing method and display device |
| 12/23/2009 | CN100573823C Production method of discrete components front metal |
| 12/23/2009 | CN100573822C Substrate and method of fabricating the same, and semiconductor device and method of fabricating the same |
| 12/23/2009 | CN100573821C A direct bonding method for shortwave light auxiliary silicon slice |
| 12/23/2009 | CN100573820C Substrate processing apparatus |
| 12/23/2009 | CN100573819C Substrate processing apparatus and substrate processing method |
| 12/23/2009 | CN100573818C Vertical heat treating apparatus and control method for transfer mechanism of vertical heat treating apparatus |
| 12/23/2009 | CN100573817C Pressure reduction vessel and pressure reduction processing apparatus |
| 12/23/2009 | CN100573816C Reaction cavity lining and reaction cavity including the same |
| 12/23/2009 | CN100573815C Method and device for implementing alarm in transmission module of semiconductor etching equipment |
| 12/23/2009 | CN100573814C An exception monitoring device and method for controlled components in a micro-electronic engraving system |
| 12/23/2009 | CN100573813C Apparatus for fabricating semiconductor device, control method, and method of fabricating semiconductor device |
| 12/23/2009 | CN100573812C Technique and apparatus for depositing thin layers of semiconductors for solar cell fabricaton |
| 12/23/2009 | CN100573800C Rod shaped probe type DC gas activation device in low pressure |
| 12/23/2009 | CN100573771C Microswitching device and method of manufacturing the same |
| 12/23/2009 | CN100573716C Dual cell reading and writing technique |
| 12/23/2009 | CN100573401C Semiconductor device |
| 12/23/2009 | CN100573384C Control system and method of silicon chip transmission equipment |
| 12/23/2009 | CN100573373C Controlling device and controlling method for substrate processing device |
| 12/23/2009 | CN100573343C Method for cleaning wafer edge |
| 12/23/2009 | CN100573338C Immersion photolithography system and method using inverted wafer-projection optics interface |
| 12/23/2009 | CN100573336C Off-axis projection optical system and extreme ultraviolet lithography apparatus using the same |
| 12/23/2009 | CN100573335C Stage apparatus, lithographic apparatus and device manufacturing method |
| 12/23/2009 | CN100573333C Lithographic apparatus, illumination system and filter system |
| 12/23/2009 | CN100573332C Radiation system, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 12/23/2009 | CN100573331C Exposure system and pattern formation method |
| 12/23/2009 | CN100573330C An image forming method and apparatus |
| 12/23/2009 | CN100573328C Coating and developing apparatus and coating and developing method |
| 12/23/2009 | CN100573327C Composition for forming underlying film containing dextrin ester compound |
| 12/23/2009 | CN100573326C Method for evaluating sensitivity of photoresist, method for preparation of photoresist |
| 12/23/2009 | CN100573320C Pattern forming method |
| 12/23/2009 | CN100573319C Anti-reflective coating and its design method |
| 12/23/2009 | CN100573317C Continuous-surface shape mask moving photoetching exposure device |
| 12/23/2009 | CN100573241C Array substrate, method of manufacturing the same and liquid crystal display apparatus having the same |
| 12/23/2009 | CN100573222C Refractive projection objective for immersion lithography |
| 12/23/2009 | CN100573199C Microlens device and its making method |
| 12/23/2009 | CN100573173C Method for inspecting LED chip |
| 12/23/2009 | CN100573161C Probe measurement device and system |
| 12/23/2009 | CN100573010C Radiation shield |
| 12/23/2009 | CN100572613C Feedback controlling system for producing nanometer gap electrode |
| 12/23/2009 | CN100572609C Apparatus and method for treating a substrate electrochemically while reducing metal corrosion |
| 12/23/2009 | CN100572602C Etching solution composition for metal films |
| 12/23/2009 | CN100572596C Film forming equipment and film forming method |
| 12/23/2009 | CN100572592C Method for forming copper film |
| 12/23/2009 | CN100572591C Method for increasing deposition rates of metal layers from metal-carbonyl precursors |
| 12/23/2009 | CN100572422C Polymer compound, photoresist composition containing such polymer compound, and method for forming resist pattern |
| 12/23/2009 | CN100572261C Method of preparing multistage silicon nano component |
| 12/23/2009 | CN100572260C Method for manufacturing unidimensional nano material device |
| 12/23/2009 | CN100572198C IC full-automatic method for testing brede and full-automatic tray type machine for testing brede |
| 12/23/2009 | CN100571982C Polishing pad with optical sensor |
| 12/23/2009 | CN100571961C Method of producing laser-processed product and adhesive sheet for laser processing used therefor |
| 12/23/2009 | CN100571921C Mold special for processing grinding silicon chip carrier |
| 12/23/2009 | CN100571904C Cleaning method of quartz material parts |
| 12/23/2009 | CN100571903C Method of cleaning silicon chip erosion chamber |
| 12/22/2009 | US7636910 Photomask quality estimation system and method for use in manufacturing of semiconductor device, and method for manufacturing the semiconductor device |
| 12/22/2009 | US7636608 Method for dynamic sensor configuration and runtime execution |
| 12/22/2009 | US7636135 TFT-LCD array substrate and method for manufacturing the same |
| 12/22/2009 | US7635910 Semiconductor package and method |
| 12/22/2009 | US7635908 Corresponding capacitor arrangement and method for making the same |
| 12/22/2009 | US7635907 Semiconductor device with electric fuse having a flowing-out region |
| 12/22/2009 | US7635901 Microcomponent comprising a hermetically-sealed cavity and a plug, and method of producing one such microcomponent |
| 12/22/2009 | US7635900 Insulating film and electronic device |
| 12/22/2009 | US7635898 Methods for fabricating semiconductor devices |
| 12/22/2009 | US7635895 Display device |
| 12/22/2009 | US7635894 Semiconductor thin film, thin film transistor, method for manufacturing same, and manufacturing equipment of semiconductor thin film |
| 12/22/2009 | US7635893 Transistor, memory cell array and method of manufacturing a transistor |
| 12/22/2009 | US7635892 Semiconductor device |
| 12/22/2009 | US7635885 Semiconductor device and manufacturing method of the same |
| 12/22/2009 | US7635883 Method for manufacturing semiconductor device |