| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/28/2010 | WO2009151009A3 Plasma processing apparatus |
| 01/28/2010 | WO2009148678A9 Optical cavity furnace for semiconductor wafer processing |
| 01/28/2010 | WO2009140094A3 Method for critical dimension shrink using conformal pecvd films |
| 01/28/2010 | WO2009138739A3 Source controlled sram |
| 01/28/2010 | WO2009137032A3 Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation |
| 01/28/2010 | WO2009134328A3 Methods for forming electrodes in phase change memory devices |
| 01/28/2010 | WO2009131892A3 Methods and apparatus for measuring substrate edge thickness during polishing |
| 01/28/2010 | WO2009131825A3 Adhesion and electromigration improvement between dielectric and conductive layers |
| 01/28/2010 | WO2009126823A3 A polishing system having a track |
| 01/28/2010 | WO2009105556A4 Dual-layer light-sensitive developer-soluble bottom anti-reflective coatings for 193-nm lithography |
| 01/28/2010 | US20100023909 Voltage fluctuation estimating method and apparatus, semiconductor device operation verification apparatus, semiconductor device designing method, printed circuit board designing method, and program |
| 01/28/2010 | US20100023692 Modular three-dimensional chip multiprocessor |
| 01/28/2010 | US20100023158 Wafer cassette transportation method and system thereof |
| 01/28/2010 | US20100023146 Control method for semiconductor manufacturing apparatus, control system for semiconductor manufacturing apparatus, and manufacturing method for semiconductor device |
| 01/28/2010 | US20100022156 Color filter on thin film transistor type liquid crystal display device and method of fabricating the same |
| 01/28/2010 | US20100022102 Laser annealing method and device |
| 01/28/2010 | US20100022101 Method for changing physical vapor deposition film form |
| 01/28/2010 | US20100022100 Bi-layer capping of low-k dielectric films |
| 01/28/2010 | US20100022099 Method of forming non-conformal layers |
| 01/28/2010 | US20100022098 Method for manufacturing semiconductor device |
| 01/28/2010 | US20100022097 Vaporizer, semiconductor production apparatus and process of semiconductor production |
| 01/28/2010 | US20100022096 Material removal methods employing solutions with reversible etch selectivities |
| 01/28/2010 | US20100022095 Selective Etching and Formation of Xenon Difluoride |
| 01/28/2010 | US20100022094 Elevator and apparatus and method for processing substrate using the same |
| 01/28/2010 | US20100022093 Vacuum processing apparatus, method of operating same and storage medium |
| 01/28/2010 | US20100022092 Method of producing semiconductor device using resist underlayer film by photo-crosslinking curing |
| 01/28/2010 | US20100022091 Method for plasma etching porous low-k dielectric layers |
| 01/28/2010 | US20100022090 Resist underlayer film forming composition for lithography, containing aromatic fused ring-containing resin |
| 01/28/2010 | US20100022089 Method for manufacturing semiconductor device using quadruple-layer laminate |
| 01/28/2010 | US20100022088 Multiple exposure and single etch integration method |
| 01/28/2010 | US20100022087 Semiconductor device and method of fabricating the same |
| 01/28/2010 | US20100022086 Method of manufacturing a metal wiring structure |
| 01/28/2010 | US20100022085 Method of Forming Support Structures for Semiconductor Devices |
| 01/28/2010 | US20100022084 Method for Forming Interconnect Structures |
| 01/28/2010 | US20100022083 Carbon nanotube interconnect structures |
| 01/28/2010 | US20100022082 Method for making a nanotube-based electrical connection between two facing surfaces |
| 01/28/2010 | US20100022081 Non-volatile sonos-type memory device |
| 01/28/2010 | US20100022080 Method of manufacturing semiconductor device |
| 01/28/2010 | US20100022079 Systems and methods for reducing contact to gate shorts |
| 01/28/2010 | US20100022078 Aluminum Inks and Methods of Making the Same, Methods for Depositing Aluminum Inks, and Films Formed by Printing and/or Depositing an Aluminum Ink |
| 01/28/2010 | US20100022077 Semiconductor device and method of fabricating a semiconductor device |
| 01/28/2010 | US20100022076 Ion Implantation with Heavy Halogenide Compounds |
| 01/28/2010 | US20100022075 Semiconductor device and method of manufacturing the semiconductor device |
| 01/28/2010 | US20100022074 Substrate release methods and apparatuses |
| 01/28/2010 | US20100022073 Method of Fabricating CMOS Inverter and Integrated Circuits Utilizing Strained Silicon Surface Channel MOSFETS |
| 01/28/2010 | US20100022072 Semiconductor Fabrication |
| 01/28/2010 | US20100022071 Method of manufacturing semiconductor chip |
| 01/28/2010 | US20100022070 Method for manufacturing soi substrate |
| 01/28/2010 | US20100022069 Method for manufacturing semiconductor device |
| 01/28/2010 | US20100022068 Sti film property using sod post-treatment |
| 01/28/2010 | US20100022067 Deposition methods for releasing stress buildup |
| 01/28/2010 | US20100022066 Method for producing high-resistance simox wafer |
| 01/28/2010 | US20100022065 Deep trench device with single sided connecting structure and fabrication method thereof |
| 01/28/2010 | US20100022064 High voltage sensor device and method therefor |
| 01/28/2010 | US20100022063 Method of forming on-chip passive element |
| 01/28/2010 | US20100022062 Transitor having a germanium implant region located therein and a method of manufacture therefor |
| 01/28/2010 | US20100022061 Spacer Shape Engineering for Void-Free Gap-Filling Process |
| 01/28/2010 | US20100022060 Bi-axial texturing of high-k dielectric films to reduce leakage currents |
| 01/28/2010 | US20100022059 Method of fabricating high voltage semiconductor devices with JFET regions containing dielectrically isolated junctions |
| 01/28/2010 | US20100022058 Method for preparing multi-level flash memory |
| 01/28/2010 | US20100022057 Method for forming a semiconductor device having a fin channel transistor |
| 01/28/2010 | US20100022056 Method of manufacturing a bipolar transistor |
| 01/28/2010 | US20100022055 Thin film transistor, thin film transistor substrate including the same and method of manufacturing the same |
| 01/28/2010 | US20100022054 Semiconductor package and method for manufacturing the same |
| 01/28/2010 | US20100022053 Method for Packaging Components |
| 01/28/2010 | US20100022052 Method for manufacturing package on package with cavity |
| 01/28/2010 | US20100022051 Method of fabricating electronic device having stacked chips |
| 01/28/2010 | US20100022050 Standoff Height Improvement for Bumping Technology Using Solder Resist |
| 01/28/2010 | US20100022049 Mid-IR Microchip Laser: ZnS:Cr2+ Laser with Saturable Absorber Material |
| 01/28/2010 | US20100022048 Semiconductor device and manufacturing method therefor |
| 01/28/2010 | US20100022046 Method for fabricating semiconductor device |
| 01/28/2010 | US20100022045 Sensor platform using a non-horizontally oriented nanotube element |
| 01/28/2010 | US20100022044 Laser device, laser module, semiconductor laser and fabrication method of semiconductor laser |
| 01/28/2010 | US20100022043 Semiconductor laser device and method of manufacturing the same |
| 01/28/2010 | US20100022042 Method for fabricating an in-plane switching mode liquid crystal display device |
| 01/28/2010 | US20100022041 Thin film transistor array panel including layered line structure and method for manufacturing the same |
| 01/28/2010 | US20100022039 Method of making light emitting diodes |
| 01/28/2010 | US20100022038 Method for evaluating semiconductor wafer |
| 01/28/2010 | US20100022037 Method for fabricating cmos image sensor |
| 01/28/2010 | US20100022036 Method for forming pattern, and template |
| 01/28/2010 | US20100022035 Electronic apparatus and manufacturing method thereof |
| 01/28/2010 | US20100022034 Manufacture of devices including solder bumps |
| 01/28/2010 | US20100022033 Process for wafer temperature verification in etch tools |
| 01/28/2010 | US20100022031 Semiconductor device and method of manufacturing the same |
| 01/28/2010 | US20100021826 Reflective mask, manufacturing method for reflective mask, and manufacturing method for semiconductor device |
| 01/28/2010 | US20100021688 Wafer manufacturing method and wafer obtained through the method |
| 01/28/2010 | US20100021624 Film Formation Apparatus and Method for Forming a Film |
| 01/28/2010 | US20100021273 Concrete vacuum chamber |
| 01/28/2010 | US20100021047 Automatic defect review and classification system |
| 01/28/2010 | US20100021041 Pattern defect inspection method and apparatus |
| 01/28/2010 | US20100020518 RF shielding arrangement for semiconductor packages |
| 01/28/2010 | US20100020517 Mems bump pattern die alignment systems and methods |
| 01/28/2010 | US20100020503 Lid edge capping load |
| 01/28/2010 | US20100020311 Integrated quartz biological sensor and method |
| 01/28/2010 | US20100020297 Method for improving surface roughness of processed film of substrate and apparatus for processing substrate |
| 01/28/2010 | US20100020258 Thin film transistor substrate, method of manufacturing thereof and liquid crystal display device |
| 01/28/2010 | US20100020257 Liquid crystal display device and manufacturing method thereof |
| 01/28/2010 | US20100019998 Array substrate, method of manufacturing the array substrate, and liquid crystal display device having the array substrate |
| 01/28/2010 | US20100019996 Display substrate and method of manufacturing the same |
| 01/28/2010 | US20100019791 Electronic component pressing device and electronic component test apparatus |