Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/2010
02/02/2010US7656087 Flat panel display
02/02/2010US7656045 Cap layer for an aluminum copper bond pad
02/02/2010US7656041 Semiconductor device and its manufacturing method
02/02/2010US7656034 Semiconductor device and method for manufacturing the same
02/02/2010US7656032 Semiconductor chip mounting wiring board, manufacturing method for same, and semiconductor module
02/02/2010US7656023 Electronic parts packaging structure and method of manufacturing the same
02/02/2010US7656012 Apparatus for use in semiconductor wafer processing for laterally displacing individual semiconductor devices away from one another
02/02/2010US7656006 Antifuse circuit with well bias transistor
02/02/2010US7656002 Integrated bipolar transistor and field effect transistor
02/02/2010US7655999 High density photodiodes
02/02/2010US7655994 Low threshold voltage semiconductor device with dual threshold voltage control means
02/02/2010US7655993 Method for manufacturing semiconductor integrated circuit device
02/02/2010US7655992 Semiconductor device
02/02/2010US7655985 Methods and semiconductor structures for latch-up suppression using a conductive region
02/02/2010US7655983 SOI FET with source-side body doping
02/02/2010US7655981 Superjunction semiconductor device
02/02/2010US7655979 High voltage gate driver integrated circuit including high voltage junction capacitor and high voltage LDMOS transistor
02/02/2010US7655968 Semiconductor devices
02/02/2010US7655960 A1xInyGa1-x-yN mixture crystal substrate, method of growing same and method of producing same
02/02/2010US7655959 Semiconductor light emitting device having textured structure and method of manufacturing the same
02/02/2010US7655952 Thin films transistor array panel and manufacturing method thereof
02/02/2010US7655950 Method of manufacturing an active matrix substrate and an image display device using the same
02/02/2010US7655947 Thin film transistor used as a switching element in an active matrix type liquid crystal display device
02/02/2010US7655939 Memory cell, memory device and method for the production thereof
02/02/2010US7655904 Target workpiece inspection apparatus, image alignment method, and computer-readable recording medium with program recorded thereon
02/02/2010US7655881 Laser irradiation stage, laser irradiation optical system, laser irradiation apparatus, laser irradiation method, and method of manufacturing a semiconductor device
02/02/2010US7655579 Method for improving heat transfer of a focus ring to a target substrate mounting device
02/02/2010US7655578 Method for nanostructuring of the surface of a substrate
02/02/2010US7655577 Method of forming silicon-containing insulation film having low dielectric constant and low film stress
02/02/2010US7655576 Insulator film, manufacturing method of multilayer wiring device and multilayer wiring device
02/02/2010US7655575 InN/InP/TiO2 photosensitized electrode
02/02/2010US7655574 Method of modifying insulating film
02/02/2010US7655573 Method of forming a mask pattern
02/02/2010US7655572 Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, control program and computer storage medium
02/02/2010US7655571 Integrated method and apparatus for efficient removal of halogen residues from etched substrates
02/02/2010US7655570 Etching method, program, computer readable storage medium and plasma processing apparatus
02/02/2010US7655569 Method of manufacturing semiconductor device
02/02/2010US7655568 Method for manufacturing underlying pattern of semiconductor device
02/02/2010US7655567 Methods for improving uniformity and resistivity of thin tungsten films
02/02/2010US7655566 Method for manufacturing semiconductor device
02/02/2010US7655565 Electroprocessing profile control
02/02/2010US7655564 Method for forming Ta-Ru liner layer for Cu wiring
02/02/2010US7655563 Method for preventing the formation of dentrites in a semiconductor
02/02/2010US7655562 Method of manufacturing semiconductor memory device
02/02/2010US7655561 Method for making an opening for electrical contact by etch back profile control
02/02/2010US7655560 Wiring board, manufacturing method thereof, semiconductor device and manufacturing method thereof
02/02/2010US7655559 Post-CMP treating liquid and manufacturing method of semiconductor device using the same
02/02/2010US7655558 Method and system for determining semiconductor characteristics
02/02/2010US7655557 CMOS silicide metal gate integration
02/02/2010US7655556 Interconnect structures for semiconductor devices
02/02/2010US7655555 In-situ co-deposition of Si in diffusion barrier material depositions with improved wettability, barrier efficiency, and device reliability
02/02/2010US7655554 Method for eliminating loading effect using a via plug
02/02/2010US7655553 Microstructure sealing tool and methods of using the same
02/02/2010US7655552 Double density method for wirebond interconnect
02/02/2010US7655551 Control of poly-Si depletion in CMOS via gas phase doping
02/02/2010US7655550 Method of making metal gate transistors
02/02/2010US7655549 Method for depositing a metal gate on a high-k dielectric film
02/02/2010US7655548 Programmable power management using a nanotube structure
02/02/2010US7655547 Metal spacer in single and dual damascene processing
02/02/2010US7655546 Monolithic integrated enhancement mode and depletion mode field effect transistors and method of making the same
02/02/2010US7655545 Image sensor and method of fabricating the same
02/02/2010US7655544 Self-assembled nanostructures
02/02/2010US7655543 Separate injection of reactive species in selective formation of films
02/02/2010US7655542 Methods and apparatus for depositing a microcrystalline silicon film for photovoltaic device
02/02/2010US7655541 Wafer processing method and laser processing apparatus
02/02/2010US7655540 Method and jig structure for positioning bare dice
02/02/2010US7655539 Dice by grind for back surface metallized dies
02/02/2010US7655538 MEMS device and interposer and method for integrating MEMS device and interposer
02/02/2010US7655537 Semiconductor substrates having useful and transfer layers
02/02/2010US7655536 Methods of forming flash devices with shared word lines
02/02/2010US7655535 Method for fabricating semiconductor device having trench isolation layer
02/02/2010US7655534 Method of forming fin transistor
02/02/2010US7655533 Semiconductor device having reduced standby leakage current and increased driving current and method for manufacturing the same
02/02/2010US7655532 STI film property using SOD post-treatment
02/02/2010US7655531 Semiconductor device and method for fabricating the same
02/02/2010US7655530 Segmented end electrode capacitor and method of segmenting an end electrode of a capacitor
02/02/2010US7655529 InP based heterojunction bipolar transistors with emitter-up and emitter-down profiles on a common wafer
02/02/2010US7655528 Manufacturing method of semiconductor device
02/02/2010US7655527 Semiconductor element and process of manufacturing semiconductor element
02/02/2010US7655526 Method for manufacturing semiconductor device
02/02/2010US7655525 Semiconductor device free of gate spacer stress and method of manufacturing the same
02/02/2010US7655524 Method for manufacturing isolation layer having barrier layer formed thereon
02/02/2010US7655523 Advanced CMOS using super steep retrograde wells
02/02/2010US7655522 Metal oxide semiconductor (MOS) transistor having a recessed gate electrode and methods of fabricating the same
02/02/2010US7655521 Method of fabricating semiconductor memory device
02/02/2010US7655520 Non-volatile memory having three states and method for manufacturing the same
02/02/2010US7655519 Methods of fabricating metal-insulator-metal capacitors with a chemical barrier layer in a lower electrode
02/02/2010US7655518 On-chip bypass capacitor and method of manufacturing the same
02/02/2010US7655517 Spin polarization amplifying transistor
02/02/2010US7655516 Semiconductor device and method of manufacturing the same
02/02/2010US7655515 Lateral DMOS structure with lateral extension structure for reduced charge trapping in gate oxide
02/02/2010US7655514 Method of fabricating a MESFET with a sloped MESA structure
02/02/2010US7655513 Method of manufacturing a semiconductor device
02/02/2010US7655512 Method for forming electrodes of organic electronic devices, organic thin film transistors comprising such electrodes, and display devices comprising such transistors
02/02/2010US7655510 Manufacturing method of display device and exposure system for that
02/02/2010US7655509 Silicide-silicon oxide-semiconductor antifuse device and method of making
02/02/2010US7655508 Overmolding encapsulation process and encapsulated article made therefrom
02/02/2010US7655507 Microelectronic imaging units and methods of manufacturing microelectronic imaging units
02/02/2010US7655506 Leadless type semiconductor package, and production process for manufacturing such leadless type semiconductor package
02/02/2010US7655505 Manufacturing method of semiconductor device