| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/29/2010 | WO2010025060A3 Method for design and manufacture of a reticle using variable shaped beam lithography |
| 04/29/2010 | WO2010024988A3 Methods of forming a photoresist-comprising pattern on a substrate |
| 04/29/2010 | WO2010023608A3 Low cost mos transistor for rf applications |
| 04/29/2010 | WO2010019500A4 Methods for forming copper interconnects for semiconductor devices |
| 04/29/2010 | WO2010017142A3 Closed loop control of pad profile based on metrology feedback |
| 04/29/2010 | WO2010017114A3 An ion source and a method for in-situ cleaning thereof |
| 04/29/2010 | WO2010016663A3 Flat plate folding type coil spring, pogo pin using the same, and manufacturing method thereof |
| 04/29/2010 | WO2010014974A3 Phase transition devices and smart capacitive devices |
| 04/29/2010 | WO2010009323A3 Phase mask and method of fabrication |
| 04/29/2010 | WO2010005543A3 Method of polishing nickel-phosphorous |
| 04/29/2010 | WO2010005246A3 Substrate-conveying device |
| 04/29/2010 | WO2009152284A3 Improved method and apparatus for wafer bonding |
| 04/29/2010 | WO2009152066A4 Gas delivery system for reducing oxidation in wire bonding operations |
| 04/29/2010 | WO2008148089A8 Semiconductor device with channel alignment and strained silicon and method of manufacture |
| 04/29/2010 | US20100106443 Defect Inspection Apparatus and Defect Inspection Method |
| 04/29/2010 | US20100106279 Server device, information processing method and program |
| 04/29/2010 | US20100105295 Polishing pad seasoning method, seasoning plate, and semiconductor polishing device |
| 04/29/2010 | US20100105217 Defectivity of post thin layer separation by modification of its separation annealing |
| 04/29/2010 | US20100105216 Plasma oxidizing method, storage medium, and plasma processing apparatus |
| 04/29/2010 | US20100105215 Method of modifying insulating film |
| 04/29/2010 | US20100105214 Method of manufacturing semiconductor device |
| 04/29/2010 | US20100105213 Forming method of amorphous carbon film, amorphous carbon film, multilayer resist film, manufacturing method of semiconductor device, and computer-readable storage medium |
| 04/29/2010 | US20100105212 Method for fabricating semiconductor device |
| 04/29/2010 | US20100105211 Nano-crystal etch process |
| 04/29/2010 | US20100105210 Method of making pillars using photoresist spacer mask |
| 04/29/2010 | US20100105209 Silicon etch with passivation using plasma enhanced oxidation |
| 04/29/2010 | US20100105208 Silicon etch with passivation using chemical vapor deposition |
| 04/29/2010 | US20100105207 Method for forming fine pattern of semiconductor device |
| 04/29/2010 | US20100105206 Method for manufacturing semiconductor device |
| 04/29/2010 | US20100105205 Cleaning solution and semicondcutor process using the same |
| 04/29/2010 | US20100105204 Method to modulate coverage of barrier and seed layer using titanium nitride |
| 04/29/2010 | US20100105203 Methods for reducing damage to substrate layers in deposition processes |
| 04/29/2010 | US20100105202 Method of forming an interconnect structure |
| 04/29/2010 | US20100105201 Semiconductor device and method of manufacturing the same |
| 04/29/2010 | US20100105200 Semiconductor Package with Passivation Island for Reducing Stress on Solder Bumps |
| 04/29/2010 | US20100105199 Non-volatile semiconductor device and method of fabricating embedded non-volatile semiconductor memory device with sidewall gate |
| 04/29/2010 | US20100105198 Gate Electrode of semiconductor device and method of forming the same |
| 04/29/2010 | US20100105197 Wide-bandgap semiconductor devices |
| 04/29/2010 | US20100105196 Method for patterning polycrystalline indium tin oxide |
| 04/29/2010 | US20100105195 Method and apparatus for forming a film by deposition from a plasma |
| 04/29/2010 | US20100105194 Method of Integrating Epitaxial Film onto Assembly Substrate |
| 04/29/2010 | US20100105193 Storage nodes and methods of manufacturing and operating the same, phase change memory devices and methods of manufacturing and operating the same |
| 04/29/2010 | US20100105192 Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus |
| 04/29/2010 | US20100105191 Method for manufacturing silicon single crystal wafer |
| 04/29/2010 | US20100105190 Semiconductor device manufacturing method, semiconductor device and semiconductor device manufacturing installation |
| 04/29/2010 | US20100105189 Method of fabricating semiconductor memory device |
| 04/29/2010 | US20100105188 Double trench for isolation of semiconductor devices |
| 04/29/2010 | US20100105187 Ultrathin soi cmos devices employing differential sti liners |
| 04/29/2010 | US20100105186 Methods For Forming Semiconductor Constructions, And Methods For Selectively Etching Silicon Nitride Relative To Conductive Material |
| 04/29/2010 | US20100105185 Reducing poly-depletion through co-implanting carbon and nitrogen |
| 04/29/2010 | US20100105184 Method of manufacturing a semiconductor device |
| 04/29/2010 | US20100105183 Semiconductor device with increased channel area and fabrication method thereof |
| 04/29/2010 | US20100105182 Shallow source MOSFET |
| 04/29/2010 | US20100105181 Methods of fabricating vertical twin-channel transistors |
| 04/29/2010 | US20100105180 Semiconductor integrated circuit device having improved punch-through resistance and production method thereof, semiconductor integrated circuit device including a low-voltage transistor and high-voltage transistor |
| 04/29/2010 | US20100105179 Method for manufacturing flash memory device |
| 04/29/2010 | US20100105177 Nonvolatile semiconductor memory with resistance elements and method of manufacturing the same |
| 04/29/2010 | US20100105176 Thin Film Transistor Array Panel Used For Liquid Crystal Display And A Manufacturing Method Thereof |
| 04/29/2010 | US20100105175 SOI FET With Source-Side Body Doping |
| 04/29/2010 | US20100105174 Semiconductor device |
| 04/29/2010 | US20100105173 Method of producing semiconductor device provided with flip-chip mounted semiconductor element |
| 04/29/2010 | US20100105172 Direct die attach utilizing heated bond head |
| 04/29/2010 | US20100105171 Semiconductor chip, method of manufacturing the semiconductor chip and semiconductor chip package |
| 04/29/2010 | US20100105170 Method for manufacturing a semiconductor device having a heat spreader |
| 04/29/2010 | US20100105169 Semiconductor chip having via electrodes and stacked semiconductor chips interconnected by the via electrodes |
| 04/29/2010 | US20100105168 Microelecronic assembly and method for forming the same |
| 04/29/2010 | US20100105167 Mems devices and methods of assembling micro electromechanical systems (mems) |
| 04/29/2010 | US20100105166 Method for manufacturing semiconductor devices having gallium nitride epilayers on diamond substrates |
| 04/29/2010 | US20100105165 Multilevel-cell memory structures employing multi-memory layers with tungsten oxides and manufacturing method |
| 04/29/2010 | US20100105164 Method for manufacturing semiconductor device |
| 04/29/2010 | US20100105163 Method for manufacturing semiconductor device |
| 04/29/2010 | US20100105162 Method for manufacturing semiconductor device |
| 04/29/2010 | US20100105160 Techniques for Glass Attachment in an Image Sensor Package |
| 04/29/2010 | US20100105158 Method of fabricating semiconductor device |
| 04/29/2010 | US20100105157 Process of micro-display |
| 04/29/2010 | US20100105154 Method and apparatus for processing substrate |
| 04/29/2010 | US20100105153 Method for measuring expansion/contraction, method for processing substrate, method for producing device, apparatus for measuring expansion/contraction, and apparatus for processing substrate |
| 04/29/2010 | US20100105152 Semiconductor device and method for manufacturing the same |
| 04/29/2010 | US20100104988 Substrate treating method, substrate-processing apparatus, developing method, method of manufacturing a semiconductor device, and method of cleaning a developing solution nozzle |
| 04/29/2010 | US20100104986 Method for forming pattern |
| 04/29/2010 | US20100104983 Pattern forming method, semiconductor device manufacturing method and exposure mask set |
| 04/29/2010 | US20100104955 Mask blank substrate manufacturing method, reflective mask blank manufacturing method, and mask blank substrate |
| 04/29/2010 | US20100104403 Apparatus for transferring a wafer |
| 04/29/2010 | US20100104402 High temperature sheet handling system and methods |
| 04/29/2010 | US20100104235 Distributed Bragg Reflector Waveguide and Fabricating Method Thereof |
| 04/29/2010 | US20100103972 Photonic crystal laser and method of manufacturing photonic crystal laser |
| 04/29/2010 | US20100103968 Bar-shaped semiconductor laser chip and method of fabrication thereof |
| 04/29/2010 | US20100103741 Nonvolatile semiconductor memory device including plural memory cells and a dummy cell coupled to an end of a memory cell |
| 04/29/2010 | US20100103648 Light emitting diode, backlight assembly having the same and method thereof |
| 04/29/2010 | US20100103584 Electrostatic chucking apparatus and method for manufacturing the same |
| 04/29/2010 | US20100103583 Wafer grounding methodology |
| 04/29/2010 | US20100103494 Counter-balanced mems mirror with hidden hinge |
| 04/29/2010 | US20100103396 Exposure apparatus and device fabrication method |
| 04/29/2010 | US20100103299 Solid-state imaging device and method of manufacturing the same, and imaging apparatus |
| 04/29/2010 | US20100103087 Thin film transistor array panel and liquid crystal display including the panel |
| 04/29/2010 | US20100102670 Method and system for packaging and mounting surface acoustic wave sensor elements to a flex plate |
| 04/29/2010 | US20100102461 Semiconductor device and method of manufacturing the same |
| 04/29/2010 | US20100102460 Semiconductor device and manufacturing method thereof |
| 04/29/2010 | US20100102458 Semiconductor package system with cavity substrate and manufacturing method therefor |
| 04/29/2010 | US20100102457 Hybrid Semiconductor Chip Package |