Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2010
05/11/2010US7713380 Method and apparatus for backside polymer reduction in dry-etch process
05/11/2010US7713379 Plasma confinement rings including RF absorbing material for reducing polymer deposition
05/11/2010US7713378 Ozone processing device
05/11/2010US7713369 Detachable substrate or detachable structure and method for the production thereof
05/11/2010US7713346 Vapor deposition using amine containing organosilicon compound; integrated circuits; disilane derivative compound that is fully substituted with alkylamino and/or dialkylamino functional groups
05/11/2010US7713107 Polishing tool
05/11/2010US7713106 Device grinding method
05/11/2010US7712806 Thin film forming apparatus, film supplier, film cassette, transport mechanism and transport method
05/11/2010US7712435 Plasma processing apparatus with insulated gas inlet pore
05/11/2010US7712434 Apparatus including showerhead electrode and heater for plasma processing
05/11/2010US7712211 Method for packaging circuits and packaged circuits
05/11/2010US7712177 Cleaning sheet and its production method as well as transporting member having such cleaning sheet
05/11/2010CA2572194C Carbon columnar container
05/11/2010CA2366320C Sensor design and process
05/06/2010WO2010051536A1 Method of fabricating semi-insulating gallium nitride using an aluminum gallium nitride blocking layer
05/06/2010WO2010051351A2 Chalcogenide alloy sputter targets for photovoltaic applications and methods of manufacturing the same
05/06/2010WO2010051286A2 Photolithographic reticles with electrostatic discharge protection structures
05/06/2010WO2010051284A2 Self cleaning and adjustable slurry delivery arm
05/06/2010WO2010051282A1 Low-temperature pulsed dc reactive sputtering deposition of thin films from metal targets
05/06/2010WO2010051269A2 Method to reduce surface damage and defects
05/06/2010WO2010051266A2 Improving the conformal doping in p3i chamber
05/06/2010WO2010051233A2 Adjustable gas distribution apparatus
05/06/2010WO2010051212A2 Cyclic olefin compositions for temporary wafer bonding
05/06/2010WO2010051192A1 Molded components
05/06/2010WO2010051184A2 Removal of a sheet from a production apparatus
05/06/2010WO2010051133A2 Semiconductor devices having faceted silicide contacts, and related fabrication methods
05/06/2010WO2010051024A1 Facilitating adhesion between substrate and patterned layer
05/06/2010WO2010051010A1 A high density spin-transfer torque mram process
05/06/2010WO2010050937A1 Electrically actuated device and method of controlling the formation of dopants therein
05/06/2010WO2010050936A1 Methods of forming multi-doped junctions on a substrate
05/06/2010WO2010050929A1 Wire threading tensioner for a wire bonding machine
05/06/2010WO2010050716A2 Gas scrubbing apparatus and gas scrubbing method
05/06/2010WO2010050679A2 Imprinting apparatus
05/06/2010WO2010050606A1 Thin film mim capacitors and manufacturing method therefor
05/06/2010WO2010050592A1 Phenol resin for photoresist, photoresist composition containing same, and method for producing same
05/06/2010WO2010050556A1 Method for manufacturing silicon thin film transfer insulating wafer
05/06/2010WO2010050520A1 Reflection-type mask blank for euv lithography
05/06/2010WO2010050518A1 Reflection-type mask blank for euv lithography
05/06/2010WO2010050501A1 Semiconductor light-emitting element, manufacturing method, and light-emitting device
05/06/2010WO2010050500A1 Alignment device controller and alignment method
05/06/2010WO2010050488A1 Defect inspection device and defect inspection method
05/06/2010WO2010050447A1 Photomask blank, photomask and method for manufacturing the photomask
05/06/2010WO2010050440A1 Reconfigurable integrated circuit
05/06/2010WO2010050405A1 Contact formation method, semiconductor device manufacturing method, and semiconductor device
05/06/2010WO2010050395A1 Sealant or filler for electrical and electronic components, and electrical and electronic components
05/06/2010WO2010050379A1 Curable composition for transfer material and pattern formation method
05/06/2010WO2010050365A1 Reference wafer for calibrating dark-field inspection device, method for fabricating reference wafer for calibrating dark-field inspection device, method for calibrating dark-field inspection device, dark-field inspection device, and wafer inspection method
05/06/2010WO2010050337A1 Etching process and thin film device
05/06/2010WO2010050292A1 Processes for producing dielectric film and semiconductor device, dielectric film, and recording medium
05/06/2010WO2010050291A1 Dielectric film, process for producing dielectric film, semiconductor device, and recording medium
05/06/2010WO2010050240A1 Exposure device, exposure method, and device manufacturing method
05/06/2010WO2010050185A1 Semiconductor mounting structure and method for manufacturing same
05/06/2010WO2010050169A1 Plasma processing device
05/06/2010WO2010050161A1 Semiconductor device, method for manufacturing same, and display device
05/06/2010WO2010050160A1 Semiconductor device and method for manufacturing same
05/06/2010WO2010050130A1 Semiconductor device and method for manufacturing same
05/06/2010WO2010050125A1 Cpp-gmr element, tmr element, and magnetic recording/reproduction device
05/06/2010WO2010050120A1 Silicon wafer manufacturing method
05/06/2010WO2010050094A1 Nonvolatile semiconductor storage device and manufacturing method therefor
05/06/2010WO2010050091A1 Semiconductor device
05/06/2010WO2010050085A1 Semiconductor wafer and partitioning method therefor
05/06/2010WO2010050078A1 Wire-bonding method, and semiconductor device
05/06/2010WO2010050021A1 Compound semiconductor device and method for manufacturing the same
05/06/2010WO2010049881A1 Biocompatible electrodes
05/06/2010WO2010049859A1 3d integration of a mim capacitor and a resistor
05/06/2010WO2010049852A1 Through-substrate via and redistribution layer with metal paste
05/06/2010WO2010049846A2 Semiconductor chip, method of manufacturing a semiconductor chip, and method of testing a semiconductor chip
05/06/2010WO2010049657A1 Process for forming a single-crystal film in the microelectronics field
05/06/2010WO2010049654A1 Method for producing a hybrid substrate with an embedded electrically insulating continuous layer
05/06/2010WO2010049604A1 Method for mounting passive components on a portable object having a small thickness, and portable object thus obtained
05/06/2010WO2010049497A1 Method of detaching semi-conductor layers at low temperature
05/06/2010WO2010049496A1 Method for producing a stack of semi-conductor thin films
05/06/2010WO2010049250A1 Method to fabricate and treat a structure of semiconductor-on-insulator type, enabling displacement of dislocations, and corresponding structure
05/06/2010WO2010049087A2 A semiconductor device including a reduced stress configuration for metal pillars
05/06/2010WO2010049086A2 Recessed drain and source areas in combination with advanced silicide formation in transistors
05/06/2010WO2010048940A1 Cutting device for cutting graphene and method for cutting graphene using a cutting device
05/06/2010WO2010048654A1 Method for integrating an electronic component into a printed circuit board
05/06/2010WO2010036358A8 Abrasive compositions for chemical mechanical polishing and methods for using same
05/06/2010WO2010030729A3 High speed thin film deposition via pre-selected intermediate
05/06/2010WO2010025218A3 Composite semiconductor substrates for thin-film device layer transfer
05/06/2010WO2010025104A3 Process kit shields and methods of use thereof
05/06/2010WO2010025081A3 Slit valve control
05/06/2010WO2010025005A3 Bulk image modeling for optical proximity correction
05/06/2010WO2010022976A3 Support for solar cells and method for producing a group of solar cells
05/06/2010WO2010021938A3 Showerhead and shadow frame
05/06/2010WO2010021776A9 Thin foil semiconductor package
05/06/2010WO2010017512A3 Enhanced reliability for semiconductor devices using dielectric encasement
05/06/2010WO2010017160A3 Environmentally friendly polymer stripping compositions
05/06/2010WO2010017124A3 A reacted particle deposition (rpd) method for forming a compound semi-conductor thin-film
05/06/2010WO2010017123A3 Methods for forming doped regions in a semiconductor material
05/06/2010WO2010011487A3 Junction field effect transistor using a silicon on insulator architecture
05/06/2010WO2010008824A4 Closed-loop control for effective pad conditioning
05/06/2010WO2010005934A3 Rf-biased capacitively-coupled electrostatic (rfb-cce) probe arrangement for characterizing a film in a plasma processing chamber
05/06/2010WO2010005933A3 Passive capacitively-coupled electrostatic (cce) probe arrangement for detecting plasma instabilities in a plasma processing chamber
05/06/2010WO2010005932A3 Plasma-facing probe arrangement including vacuum gap for use in a plasma processing chamber
05/06/2010WO2010005748A3 Adjustable micro device feeder system and method of operation thereof
05/06/2010WO2010003928A3 Method for doping semiconductor structures and the semiconductor device thereof
05/06/2010WO2010002736A3 Methods for fabricating line/space routing between c4 pads
05/06/2010WO2010002718A3 Method of forming stacked trench contacts and structures formed thereby
05/06/2010WO2010002595A3 Modular base-plate semiconductor polisher architecture
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