Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2010
05/05/2010CN101044593B Exposure apparatus, exposure method, and component producing method
05/05/2010CN101023717B Electrode substrate
05/05/2010CN101023522B Iso/nested cascading trim control with model feedback updates
05/05/2010CN101002299B Exposing device and component manufacturing method
05/04/2010USRE41310 Methods for growing semiconductors and devices thereof the alloy semiconductor gainnas
05/04/2010USRE41307 Mask for clamping apparatus, e.g. for a lithographic apparatus
05/04/2010US7712071 Printing a mask with maximum possible process window through adjustment of the source distribution
05/04/2010US7712070 Method for transferring self-assembled dummy pattern to substrate
05/04/2010US7712069 Method for interlayer and yield based optical proximity correction
05/04/2010US7711526 Simulator and parameter extraction device for transistor, simulation and parameter extraction method for transistor, and associated computer program and storage medium
05/04/2010US7711496 Photometrically modulated delivery of reagents
05/04/2010US7711445 Systems and methods for transferring small lot size substrate carriers between processing tools
05/04/2010US7711178 Pattern inspection method and its apparatus
05/04/2010US7711012 Semiconductor device
05/04/2010US7710785 Semiconductor memory device having a floating storage bulk region capable of holding/emitting excessive majority carriers
05/04/2010US7710634 Pattern generator
05/04/2010US7710544 Optimized polarization illumination
05/04/2010US7710542 Imaging device in a projection exposure machine
05/04/2010US7710525 Thin film transistor, fabrication method thereof, liquid crystal display panel device having the same, and fabrication method thereof
05/04/2010US7710381 Active matrix type display device
05/04/2010US7710276 Radio frequency identification device support and its manufacturing method
05/04/2010US7710157 Nanotube-based switching elements with multiple controls and logic circuits having said elements
05/04/2010US7710142 Semiconductor integrated circuit
05/04/2010US7709968 Micro pin grid array with pin motion isolation
05/04/2010US7709959 Article with a metal layer on a substrate
05/04/2010US7709955 Semiconductor device with a line and method of fabrication thereof
05/04/2010US7709954 Redistribution layer for wafer-level chip scale package and method therefor
05/04/2010US7709949 Densely packed metal segments patterned in a semiconductor die
05/04/2010US7709942 Semiconductor package, including connected upper and lower interconnections
05/04/2010US7709941 Resin-sealed semiconductor device and method of manufacturing the same
05/04/2010US7709939 Metal-base circuit board and its manufacturing method
05/04/2010US7709936 Module with carrier element
05/04/2010US7709935 Reversible leadless package and methods of making and using same
05/04/2010US7709932 Semiconductor wafer having a separation portion on a peripheral area
05/04/2010US7709931 Trenched semiconductor device
05/04/2010US7709930 Tuneable semiconductor device with discontinuous portions in the sub-collector
05/04/2010US7709927 Shallow trench isolation structures for semiconductor devices including wet etch barriers
05/04/2010US7709917 Solid state imaging device and method of manufacturing the same
05/04/2010US7709915 Microelectronic devices having an EMI shield and associated systems and methods
05/04/2010US7709904 Thin film transistor substrate and method for manufacturing the same
05/04/2010US7709899 Semiconductor apparatus
05/04/2010US7709895 Semiconductor device having insulating stripe patterns
05/04/2010US7709894 Semiconductor device including a transistor with a gate electrode having a taper portion
05/04/2010US7709892 Semiconductor device having freestanding semiconductor layer
05/04/2010US7709886 Thin film transistor and pixel structure
05/04/2010US7709884 Non-volatile two transistor semiconductor memory cell and method for producing the same
05/04/2010US7709877 High surface area capacitor structures and precursors
05/04/2010US7709868 Light sensing element, array substrate having the same and liquid crystal display apparatus having the same
05/04/2010US7709866 Method for forming semiconductor contacts
05/04/2010US7709861 Systems and methods for supporting a subset of multiple interface types in a semiconductor device
05/04/2010US7709859 Cap layers including aluminum nitride for nitride-based transistors
05/04/2010US7709846 Light emitting apparatus and method for manufacturing the same
05/04/2010US7709844 Semiconductor device equipped with semiconductor circuits composed of semiconductor elements and processes for production thereof
05/04/2010US7709843 Display device and method for manufacturing the same, and television receiver
05/04/2010US7709837 Semiconductor device and its manufacturing method
05/04/2010US7709836 Detector arrangement, method for the detection of electrical charge carriers and use of an ONO field effect transistor for detection of an electrical charge
05/04/2010US7709835 Method to form high efficiency GST cell using a double heater cut
05/04/2010US7709830 Organic semiconductor structure, manufacturing method of the same, and organic semiconductor device
05/04/2010US7709827 Vertically integrated field-effect transistor having a nanostructure therein
05/04/2010US7709826 Rare earth-oxides, rare earth-nitrides, rare earth-phosphies, and ternary alloys with silicon
05/04/2010US7709766 System and method for manufacturing embedded conformal electronics
05/04/2010US7709403 Silicon carbide-oxide layered structure, production method thereof, and semiconductor device
05/04/2010US7709402 Conductive layers for hafnium silicon oxynitride films
05/04/2010US7709401 Method of making thermally programmable anti-reverse engineering interconnects wherein interconnects only conduct when heated above room temperature
05/04/2010US7709400 Thermal methods for cleaning post-CMP wafers
05/04/2010US7709399 Atomic layer deposition systems and methods including metal β-diketiminate compounds
05/04/2010US7709398 Process and apparatus for depositing semiconductor layers using two process gases, one of which is preconditioned
05/04/2010US7709397 Method and system for etching a high-k dielectric material
05/04/2010US7709396 Integral patterning of large features along with array using spacer mask patterning process flow
05/04/2010US7709395 Semiconductor device fabrication method
05/04/2010US7709394 Substrate processing method and apparatus fabrication process of a semiconductor device
05/04/2010US7709393 Method for manufacturing semiconductor device
05/04/2010US7709392 Low K dielectric surface damage control
05/04/2010US7709391 Methods for in-situ generation of reactive etch and growth specie in film formation processes
05/04/2010US7709390 Methods of isolating array features during pitch doubling processes and semiconductor device structures having isolated array features
05/04/2010US7709389 Method of fabricating a semiconductor device
05/04/2010US7709388 Semiconductor device with a line and method of fabrication thereof
05/04/2010US7709387 Polishing apparatus and two-step method of polishing a metal layer of an integrated circuit
05/04/2010US7709386 Atomic layer deposition method and semiconductor device formed by the same
05/04/2010US7709385 Method for depositing tungsten-containing layers by vapor deposition techniques
05/04/2010US7709384 Tantalum amide complexes for depositing tantalum-containing films, and method of making same
05/04/2010US7709383 Film forming method, and substrate-processing apparatus
05/04/2010US7709382 Electroprocessing profile control
05/04/2010US7709381 Semiconductor device fabricating method
05/04/2010US7709380 Method for gate electrode height control
05/04/2010US7709379 Electrical device comprising conductors made of carbonized plastic, and method and apparatus for the production thereof
05/04/2010US7709378 Method and apparatus for processing thin metal layers
05/04/2010US7709377 Thin film including multi components and method of forming the same
05/04/2010US7709375 Semiconductor device including contact pattern and method for fabricating the same
05/04/2010US7709374 Fabrication method for memory device
05/04/2010US7709373 System and method for imprint lithography to facilitate dual damascene integration in a single imprint act
05/04/2010US7709372 Semiconductor device and method for manufacturing the same
05/04/2010US7709371 Repairing damage to low-k dielectric materials using silylating agents
05/04/2010US7709370 Spin-on antireflective coating for integration of patternable dielectric materials and interconnect structures
05/04/2010US7709369 Method for forming a roughened contact in a semiconductor device
05/04/2010US7709368 Semiconductor device and method for manufacturing the same
05/04/2010US7709367 Method for fabricating storage node contact in semiconductor device
05/04/2010US7709366 Semiconductor device and method of manufacturing the same
05/04/2010US7709365 CMOS well structure and method of forming the same
05/04/2010US7709364 Method and apparatus for low temperature ion implantation
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