Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2010
10/21/2010WO2010078160A3 Dry cleaning of silicon surface for solar cell applications
10/21/2010WO2010077750A3 Substrate support in a reactive sputter chamber
10/21/2010WO2010074973A3 Trigate static random-access memory with indepenent source and drain engineering, and devices made therefrom
10/21/2010WO2010068798A3 System and method for recycling a gas used to deposit a semiconductor layer
10/21/2010WO2010038963A4 Apparatus for manufacturing a stratified structure
10/21/2010WO2009140117A3 Solar cell having a high quality rear surface spin-on dielectric layer
10/21/2010WO2009140116A3 Solar cell spin-on based process for simultaneous diffusion and passivation
10/21/2010WO2008020267A3 Etch method in the manufacture of an integrated circuit
10/21/2010US20100268482 Apparatus of inspecting defect in semiconductor and method of the same
10/21/2010US20100267317 Substrate holder and substrate holding method
10/21/2010US20100267315 Polishing composition
10/21/2010US20100267249 Quartz window having gas feed and processing equipment incorporating same
10/21/2010US20100267248 Post Treatment Methods for Oxide Layers on Semiconductor Devices
10/21/2010US20100267247 Dual Frequency Low Temperature Oxidation of a Semiconductor Device
10/21/2010US20100267246 Silicon Dioxide Deposition Methods Using at Least Ozone and TEOS as Deposition Precursors
10/21/2010US20100267245 High efficiency epitaxial chemical vapor deposition (cvd) reactor
10/21/2010US20100267244 Method for treating germanium surfaces and solutions to be employed therein
10/21/2010US20100267243 Plasma processing method and apparatus
10/21/2010US20100267242 Selective Etching Of Semiconductor Substrate(s) That Preserves Underlying Dielectric Layers
10/21/2010US20100267241 Process for the production of microelectromechanical systems
10/21/2010US20100267240 Pitch multiplication spacers and methods of forming the same
10/21/2010US20100267239 Method and apparatuses for removing polysilicon from semiconductor workpieces
10/21/2010US20100267238 Methods for fabricating finfet semiconductor devices using planarized spacers
10/21/2010US20100267237 Methods for fabricating finfet semiconductor devices using ashable sacrificial mandrels
10/21/2010US20100267236 Method for reducing silicide defects in integrated circuits
10/21/2010US20100267235 Methods for depositing ultra thin low resistivity tungsten film for small critical dimension contacts and interconnects
10/21/2010US20100267234 Focused ion beam deep nano-patterning apparatus and method
10/21/2010US20100267233 Method of manufacturing semiconductor device
10/21/2010US20100267232 Transitional Interface Between Metal and Dielectric in Interconnect Structures
10/21/2010US20100267231 Apparatus for uv damage repair of low k films prior to copper barrier deposition
10/21/2010US20100267230 Method for forming tungsten contacts and interconnects with small critical dimensions
10/21/2010US20100267229 Methods and systems for low interfacial oxide contact between barrier and copper metallization
10/21/2010US20100267228 Copper interconnection structure, semiconductor device, and method for forming copper interconnection structure
10/21/2010US20100267226 Method of forming a structure over a semiconductor substrate
10/21/2010US20100267225 Method of manufacturing semiconductor device
10/21/2010US20100267224 Enhanced scavenging of residual fluorine radicals using silicon coating on process chamber walls
10/21/2010US20100267223 Method of Fabricating Thin Film Interface for Internal Light Reflection and Impurities Isolation
10/21/2010US20100267222 High-Throughput Printing of Semiconductor Precursor Layer from Nanoflake Particles
10/21/2010US20100267221 Group iii nitride semiconductor device and light-emitting device using the same
10/21/2010US20100267220 Methods Of Depositing Antimony-Comprising Phase Change Material Onto A Substrate And Methods Of Forming Phase Change Memory Circuitry
10/21/2010US20100267219 Optical device wafer processing method
10/21/2010US20100267218 Semiconductor Wafer Processing to Increase the Usable Planar Surface Area
10/21/2010US20100267217 Backside Process for a Substrate
10/21/2010US20100267216 Method of manufacturing semiconductor device
10/21/2010US20100267215 Semiconductor device including an improved capacitor and method for manufacturing the same
10/21/2010US20100267214 Semiconductor device and method for manufacturing the same
10/21/2010US20100267213 Self-aligned complementary ldmos
10/21/2010US20100267212 Fabrication methods for radiation hardened isolation structures
10/21/2010US20100267211 Method of manufacturing semiconductor apparatus
10/21/2010US20100267210 Semiconductor device and method of fabricating the same
10/21/2010US20100267209 Power semiconductor device and manufacturing method therefor
10/21/2010US20100267208 Component for semiconductor package and manufacturing method of component for semiconductor package
10/21/2010US20100267207 Integrated circuit module and method of packaging same
10/21/2010US20100267205 Carbon nanotubes for the selective transfer of heat from electronics
10/21/2010US20100267204 Package structure for integrated circuit device and method of the same
10/21/2010US20100267203 Method for isolating flexible film from support substrate
10/21/2010US20100267202 Method of fabricating stacked semiconductor structure
10/21/2010US20100267201 Method and System for Providing a Low-Profile Semiconductor Assembly
10/21/2010US20100267200 Semiconductor die packages using thin dies and metal substrates
10/21/2010US20100267199 Method for producing semiconductor chip with adhesive film, adhesive film for semiconductor used in the method, and method for producing semiconductor device
10/21/2010US20100267198 Field effect transistor manufacturing method
10/21/2010US20100267197 Double self-aligned metal oxide tft
10/21/2010US20100267196 Hybrid synthesis of core/shell nanocrystals
10/21/2010US20100267195 Methods Of Forming Phase Change Materials And Methods Of Forming Phase Change Memory Circuitry
10/21/2010US20100267189 Solution-based fabrication of photovoltaic cell
10/21/2010US20100267188 Diffusion Furnaces Employing Ultra Low Mass Transport Systems and Methods of Wafer Rapid Diffusion Processing
10/21/2010US20100267184 Methods of manufacturing image sensors including gettering regions
10/21/2010US20100267183 Method for manufacturing capped mems components
10/21/2010US20100267182 Wafer bonding of micro-electro mechanical systems to active circuitry
10/21/2010US20100267178 Organic electroluminescent display device and method of fabricating the same
10/21/2010US20100267177 Method for fabricating active device array substrate
10/21/2010US20100267175 Manufacturing method of semiconductor device
10/21/2010US20100267174 LED Substrate Processing
10/21/2010US20100267173 Fiber Laser Substrate Processing
10/21/2010US20100267172 Formation of Shallow Trench Isolation Using Chemical Vapor Etch
10/21/2010US20100267171 Magnetic storage device and method of manufacturing the same
10/21/2010US20100266938 Reflective mask blank and method of manufacturing a reflective mask
10/21/2010US20100266751 Process for producing zirconium oxide thin films
10/21/2010US20100266373 Device for centering wafers
10/21/2010US20100265989 P-n junction based thermal detector
10/21/2010US20100265981 Nitride-based semiconductor light-emitting diode, nitride-based semiconductor laser device, method of manufacturing the same, and method of forming nitride-based semiconductor layer
10/21/2010US20100265979 Horizontal emitting, vertical emitting, beam shaped, distributed feedback (dfb) lasers fabricated by growth over a patterned substrate with multiple overgrowth
10/21/2010US20100265978 Photonic devices formed of high-purity molybdenum oxide
10/21/2010US20100265976 Semiconductor layer structure
10/21/2010US20100265773 3d memory array arranged for fn tunneling program and erase
10/21/2010US20100265767 Nonvolatile semiconductor memory device, method of fabricating the nonvolatile semiconductor memory device and process of writing data on the nonvolatile semiconductor memory device
10/21/2010US20100265752 Semiconductor storage device and method of fabricating the same
10/21/2010US20100265631 Removal of charge between a substrate and an electrostatic clamp
10/21/2010US20100265561 Electro-optic displays, and methods for driving same
10/21/2010US20100265477 Semiconductor manufacturing apparatus and pattern formation method
10/21/2010US20100265476 Lithographic apparatus and device manufacturing method
10/21/2010US20100265447 Array substrate for in-plane switching mode liquid crystal display device and method of fabricating the same
10/21/2010US20100265372 Solid-state imaging device and imaging apparatus
10/21/2010US20100265239 Processes for forming backplanes for electro-optic displays
10/21/2010US20100264956 Inverter, method of manufacturing the same, and logic circuit including the inverter
10/21/2010US20100264553 Packaged electronic device having metal comprising self-healing die attach material
10/21/2010US20100264552 Circuit device, method of manufacturing the circuit device, device mounting board and semiconductor module
10/21/2010US20100264551 Three dimensional integrated circuit integration using dielectric bonding first and through via formation last
10/21/2010US20100264549 Trench Substrate and Method Of Manufacturing The Same
10/21/2010US20100264548 Through substrate vias
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