Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2010
10/26/2010US7820459 Methods relating to the reconstruction of semiconductor wafers for wafer level processing including forming of alignment protrusion and removal of alignment material
10/26/2010US7820458 Test structures and methods
10/26/2010US7820456 Semiconductor device and manufacturing method thereof
10/26/2010US7820455 Method for manufacturing a tunnel junction magnetoresistive sensor with improved performance and having a CoFeB free layer
10/26/2010US7820368 forming copper wire; stripping the photoresist pattern using a photoresist stripper composition, comprising butyl diglycol, N-methylpyrrolidone, diethanolamine, aminopropylmorpholine, and a mercapto compound
10/26/2010US7820364 forming a transfer pattern of desired size with high accuracy, by performing multiple exposure using a plurality of masks having different patterns over different mask substrates
10/26/2010US7820363 Process for forming a solder mask, apparatus thereof and process for forming electric-circuit patterned internal dielectric layer
10/26/2010US7820343 Method for producing a photomask, method for patterning a layer or layer stack and resist stack on a mask substrate
10/26/2010US7820341 Method of two dimensional feature model calibration and optimization
10/26/2010US7820246 Method for growing thin nitride film onto substrate and thin nitride film device
10/26/2010US7820231 superior uniformity in electroluminescence( EL) layer film thickness, superior throughput, and improved utilization efficiency of EL materials
10/26/2010US7820118 Substrate processing apparatus having covered thermocouple for enhanced temperature control
10/26/2010US7820021 Flip chip mounting method and method for connecting substrates
10/26/2010US7820007 Silicon electrode plate for plasma etching with superior durability
10/26/2010US7819985 Method and apparatus for wafer cleaning
10/26/2010US7819975 Deposition method and apparatus
10/26/2010US7819723 Retainer ring and polishing machine
10/26/2010US7819658 Heat treatment system and method therefore
10/26/2010US7819652 Mold for nano-imprinting and method of manufacturing the same
10/26/2010US7819594 Development processing device
10/26/2010US7819376 Techniques for forming interconnects
10/26/2010US7819235 Venturi vacuum generator on an electric component handler
10/26/2010US7819082 Plasma processing apparatus
10/26/2010US7819081 Plasma film forming system
10/26/2010US7819080 Substrate processing apparatus and substrate processing method
10/26/2010US7819079 Cartesian cluster tool configuration for lithography type processes
10/26/2010US7819076 Substrate treatment method and substrate treatment apparatus
10/26/2010US7819033 Process condition sensing wafer and data analysis system
10/26/2010CA2426641C Multi-face forming mask device for vacuum deposition
10/26/2010CA2382662C Systems and methods using sequential lateral solidification for producing single or polycrystalline silicon thin films at low temperatures
10/21/2010WO2010121190A1 Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing
10/21/2010WO2010121144A1 Devices and methods for interfacing microfluidic devices with macrofluidic devices
10/21/2010WO2010121112A2 Method and apparatus for residue detection in the edge deleted area of a substrate
10/21/2010WO2010121068A2 Improved apparatus for temporary wafer bonding and debonding
10/21/2010WO2010121060A1 Low temperature continuous circulation reactor for the aqueous synthesis of zno films, nanostructures, and bulk single crystals
10/21/2010WO2010121029A2 Cyclic self-limiting cmp removal and associated processing tool
10/21/2010WO2010120983A2 Removal of charge between a substrate and an electrostatic clamp
10/21/2010WO2010120956A2 Wafer manufacturing cleaning apparatus, process and method of use
10/21/2010WO2010120948A1 Enhanced focused ion beam etching of dielectrics and silicon
10/21/2010WO2010120842A1 Dual metal and dual dielectric integration for metal high-k fets
10/21/2010WO2010120784A1 Chemical mechanical polishing of silicon carbide comprising surfaces
10/21/2010WO2010120778A2 Chemical mechanical fabrication (cmf) for forming tilted surface features
10/21/2010WO2010120765A2 Implant mask with moveable mask segments
10/21/2010WO2010120704A2 Power semiconductor devices, methods, and structures with embedded dielectric layers containing permanent charges
10/21/2010WO2010120702A1 Apparatus and methods for chemical electrodeposition on a substrate for solar cell fabrication
10/21/2010WO2010120685A1 Scrubber clean before oxide chemical mechanical polish (cmp) for reduced microscratches and improved yields
10/21/2010WO2010120664A2 Ldmos with self aligned vertical ldd and backside drain
10/21/2010WO2010120650A2 Optical sensors and methods for providing optical sensors
10/21/2010WO2010120569A2 Conjugated icp and ecr plasma sources for wide ribbon ion beam generation and control
10/21/2010WO2010120491A2 Self-cleaning wiresaw apparatus and method
10/21/2010WO2010120473A2 Conductive bumps, wire loops, and methods of forming the same
10/21/2010WO2010120458A2 Methods of depositing antimony-comprising phase change material onto a substrate and methods of forming phase change memory circuitry
10/21/2010WO2010120448A2 Through substrate vias
10/21/2010WO2010120437A2 Methods of forming phase change materials and methods of forming phase change memory circuitry
10/21/2010WO2010120428A2 Robust esd protection circuit, method and design structure for tolerant and failsafe designs
10/21/2010WO2010120423A2 Field effect transistor having a plurality of field plates
10/21/2010WO2010120145A2 Solar cell ac electroluminescence image inspecting apparatus
10/21/2010WO2010120128A2 Method for manufacturing a polishing retainer ring and retainer ring manufactured thereby
10/21/2010WO2010119961A1 Liquid jetting apparatus
10/21/2010WO2010119952A1 Thin film transistor and method for manufacturing thin film transistor
10/21/2010WO2010119939A1 Process parameter selection apparatus, process parameter selection method, process parameter selection program, and program storage medium
10/21/2010WO2010119928A1 Ferromagnetic tunnel junction structure, and magnetoresistive effect element and spintronics device each comprising same
10/21/2010WO2010119910A1 Radiation-sensitive resin composition, polymer used therein, and compound used therein
10/21/2010WO2010119894A1 Workmanship prediction apparatus, workmanship prediction method, workmanship prediction program, and program recording medium
10/21/2010WO2010119846A1 Substrate carrier measuring jig, collision preventing jig, and collision preventing method using the collision preventing jig
10/21/2010WO2010119833A1 Method for producing silicon epitaxial wafer
10/21/2010WO2010119808A1 Method and system for manufacturing product
10/21/2010WO2010119792A1 Substrate, substrate provided with thin film, semiconductor device, and method for manufacturing semiconductor device
10/21/2010WO2010119789A1 Semiconductor device and method for manufacturing semiconductor device
10/21/2010WO2010119785A1 Barrier film for semiconductor wiring, sintered sputtering target, and method of manufacturing sputtering targets
10/21/2010WO2010119765A1 Method for chamfering wafer
10/21/2010WO2010119753A1 Photoresist remover composition and method for removing photoresist
10/21/2010WO2010119689A1 Semiconductor device and manufacturing method therefor
10/21/2010WO2010119666A1 Method for measuring electrical characteristics of semiconductor substrate
10/21/2010WO2010119653A1 Semiconductor device and method of producing same
10/21/2010WO2010119647A1 Photosensitive resin composition, adhesive film, and light receiving device
10/21/2010WO2010119641A1 Pattern measuring apparatus and computer program
10/21/2010WO2010119625A1 Semiconductor device and method for testing same
10/21/2010WO2010119614A1 Anneal wafer, method for manufacturing anneal wafer, and method for manufacturing device
10/21/2010WO2010119606A1 Method of preparing polishing head and polishng apparatus
10/21/2010WO2010119570A1 Multilayer semiconductor device and method for manufacturing multilayer semiconductor device
10/21/2010WO2010119506A1 Apparatus and method for separating electronic components
10/21/2010WO2010119491A1 Method for manufacturing silicon carbide semiconductor device
10/21/2010WO2010119470A1 Device for driving photovoltaic cells or their substrates during the process for manufacture of the photovoltaic cells
10/21/2010WO2010119416A2 Foil and method for foil-based clip-and/or wire-bonding and resulting package
10/21/2010WO2010118945A1 Multi-chip sensor module and method for the production thereof
10/21/2010WO2010118687A1 Substrate structure for semiconductor device fabrication and method for fabricating the same
10/21/2010WO2010118640A1 Method and apparatus for preparing thin films using continuous liquid phase epitaxy
10/21/2010WO2010118529A1 Base structure for iii-v semiconductor devices on group iv substrates and method of fabrication thereof
10/21/2010WO2010118479A1 Elongate solar cell and edge contact
10/21/2010WO2010097064A3 Laser crystallisation by irradiation
10/21/2010WO2010096225A3 Cross-point memory structures, and methods of forming memory arrays
10/21/2010WO2010091466A8 Photovoltaic device structure and method
10/21/2010WO2010088141A3 Method and system for sizing polygons in an integrated circuit (ic) layout
10/21/2010WO2010088015A3 Plasma-enhanced atomic layer deposition of conductive material over dielectric layers
10/21/2010WO2010087668A3 Probe structure and a probe card having the same
10/21/2010WO2010085657A3 Memory device power managers and methods
10/21/2010WO2010083271A3 Substrate support with gas introduction openings
10/21/2010WO2010082750A3 Substrate-processing system and substrate transfer method
10/21/2010WO2010081084A3 Polishing pads for chemical mechanical planarization and/or other polishing methods
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