Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2010
11/03/2010CN101013727B Schottky diode structure with enhanced breakdown voltage and method of manufacture
11/02/2010US7826918 Transfer system and transfer method of object to be processed
11/02/2010US7826916 Method and system for controlling semiconductor manufacturing equipment
11/02/2010US7826738 Semiconductor integrated circuit device, data recording device, and layout method for semiconductor integrated circuit device
11/02/2010US7826694 Electrical/optical integration scheme using direct copper bonding
11/02/2010US7826655 Pattern correcting method of mask for manufacturing a semiconductor device
11/02/2010US7826266 Semiconductor device having global and local data lines coupled to memory mats
11/02/2010US7826244 Low cost high density rectifier matrix memory
11/02/2010US7826238 Power system inhibit method and device and structure therefor
11/02/2010US7826035 Lithographic apparatus and device manufacturing method
11/02/2010US7826031 Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method
11/02/2010US7825774 Radio frequency communications devices
11/02/2010US7825588 Electro-optical device and electronic device
11/02/2010US7825569 Ceramic and method of manufacturing the same, dielectric capacitor, semiconductor device, and element
11/02/2010US7825529 Semiconductor device and display device having alignment mark
11/02/2010US7825516 Formation of aligned capped metal lines and interconnections in multilevel semiconductor structures
11/02/2010US7825514 Substrate for semiconductor device, resin-sealed semiconductor device, method for manufacturing said substrate for semiconductor device and method for manufacturing said resin-sealed semiconductor device
11/02/2010US7825512 Electronic package with compliant electrically-conductive ball interconnect
11/02/2010US7825510 Method for filling a contact hole and integrated circuit arrangement with contact hole
11/02/2010US7825489 Semiconductor device and method of producing the same
11/02/2010US7825485 Spin transistor based on the spin-filter effect, and non-volatile memory using spin transistors
11/02/2010US7825478 Polarity dependent switch for resistive sense memory
11/02/2010US7825466 Super-junction semiconductor element and method of fabricating the same
11/02/2010US7825459 Method of operating a SONOS memory device
11/02/2010US7825455 Three terminal nonvolatile memory device with vertical gated diode
11/02/2010US7825450 Sacrificial self-aligned interconnect structures
11/02/2010US7825449 Silicon carbide semiconductor device and related manufacturing method
11/02/2010US7825447 MOS capacitor and semiconductor device
11/02/2010US7825442 Semiconductor device and method of manufacturing the same
11/02/2010US7825441 Junction field effect transistor with a hyperabrupt junction
11/02/2010US7825432 Nitride semiconductor structures with interlayer structures
11/02/2010US7825417 Epitaxial wafers, method for manufacturing of epitaxial wafers, method of suppressing bowing of these epitaxial wafers and semiconductor multilayer structures using these epitaxial wafers
11/02/2010US7825414 Method of forming a thin film transistor
11/02/2010US7825413 Liquid crystal display device and method of fabricating the same
11/02/2010US7825411 Thin film transistor with improved junction region
11/02/2010US7825409 GaN crystal substrate
11/02/2010US7825405 Upon excitation, one carrier confined to core and other carrier confined to overcoating; band gaps; photovoltaic devices, photoconductors
11/02/2010US7825377 Electron beam apparatus with aberration corrector
11/02/2010US7825078 Non-aqueous microelectronic cleaning compositions containing fructose
11/02/2010US7825044 Curing methods for silicon dioxide multi-layers
11/02/2010US7825043 Method for fabricating capacitor in semiconductor device
11/02/2010US7825042 Very low dielectric constant plasma-enhanced CVD films
11/02/2010US7825041 without damage to an organic antireflective coating while performing a developing process to remove entire-surface-exposed photoresist pattern
11/02/2010US7825040 Method for depositing flowable material using alkoxysilane or aminosilane precursor
11/02/2010US7825039 nitriding, oxynitriding, and oxidizing for a semiconductor process; controller for monitoring the supply of a process gas and a blocking gas to inhibit the process gas from flowing into the marginal space
11/02/2010US7825038 Chemical vapor deposition of high quality flow-like silicon dioxide using a silicon containing precursor and atomic oxygen
11/02/2010US7825037 Fabrication of enclosed nanochannels using silica nanoparticles
11/02/2010US7825036 feeding cupric chloride or cupric sulfate in a flowing protective gas to decompose to form a copper catalyst, then introducing a mixture of reactive gas selected from silane and silicon monoxide and the protective gas selected from argon, nitrogen, and helium; cost efficiency for making semiconductor
11/02/2010US7825035 Semiconductor manufacturing method
11/02/2010US7825034 Method of fabricating openings and contact holes
11/02/2010US7825033 Methods of forming variable resistance memory cells, and methods of etching germanium, antimony, and tellurium-comprising materials
11/02/2010US7825032 Fabricating a set of semiconducting nanowires, and electric device comprising a set of nanowires
11/02/2010US7825031 Method of fabricating a semiconductor device
11/02/2010US7825030 Method of forming a spacer
11/02/2010US7825029 Method for the production of structured layers on substrates
11/02/2010US7825028 Method of manufacturing semiconductor device
11/02/2010US7825027 Method for manufacturing memory device
11/02/2010US7825026 catalytic nitriding with ammonia gas to form a copper nitride film as a protective film on the copper surface; and removing the formed copper nitride film by heating, leaving a clean copper surface
11/02/2010US7825025 Method and system for improved nickel silicide
11/02/2010US7825024 Method of forming through-silicon vias
11/02/2010US7825023 Method of manufacturing an interconnection structure
11/02/2010US7825022 Method of enabling solder deposition on a substrate and electronic package formed thereby
11/02/2010US7825021 Method for manufacturing display device
11/02/2010US7825020 Method for manufacturing semiconductor device
11/02/2010US7825019 Structures and methods for reduction of parasitic capacitances in semiconductor integrated circuits
11/02/2010US7825018 Plasma oxidation method and method for manufacturing semiconductor device
11/02/2010US7825017 Method of making silicon carbide semiconductor device having multi-layered passivation film with uneven surfaces
11/02/2010US7825016 Method of producing a semiconductor element
11/02/2010US7825015 Method for implanting ions in semiconductor device
11/02/2010US7825014 Method for fabricating semiconductor device
11/02/2010US7825013 Integrated circuit comprising an amorphous region and method of manufacturing an integrated circuit
11/02/2010US7825012 Method for manufacturing nitride semiconductor device
11/02/2010US7825011 Method of manufacturing a semiconductor device and semiconductor device obtained by means of said method
11/02/2010US7825010 Die singulation methods
11/02/2010US7825009 Manufacturing method for devices
11/02/2010US7825008 Method of fabricating light emitting device and thus-fabricated light emitting device
11/02/2010US7825007 Method of joining a plurality of SOI substrates on a glass substrate by a heat treatment
11/02/2010US7825006 Lift-off process for GaN films formed on SiC substrates and devices fabricated using the method
11/02/2010US7825005 Multiple substrate electrical circuit device
11/02/2010US7825004 Method of producing semiconductor device
11/02/2010US7825003 Method of doping field-effect-transistors (FETs) with reduced stress/strain relaxation and resulting FET devices
11/02/2010US7825002 Method of peeling thin film device and method of manufacturing semiconductor device using peeled thin film device
11/02/2010US7825001 Electronic device, method for manufacturing the same, and silicon substrate for electronic device
11/02/2010US7825000 Method for integration of magnetic random access memories with improved lithographic alignment to magnetic tunnel junctions
11/02/2010US7824999 Method for enhancing field oxide
11/02/2010US7824998 Method of forming a semiconductor capacitor using amorphous carbon
11/02/2010US7824997 Membrane suspended MEMS structures
11/02/2010US7824996 Semiconductor device fabrication method and semiconductor device
11/02/2010US7824994 Method of forming memory devices by performing halogen ion implantation and diffusion processes
11/02/2010US7824993 Field-effect transistor with local source/drain insulation and associated method of production
11/02/2010US7824992 Method of fabricating non-volatile memory device
11/02/2010US7824991 Method for nitridation of the interface between a dielectric and a substrate in a MOS device
11/02/2010US7824990 Multi-metal-oxide high-K gate dielectrics
11/02/2010US7824989 Method for reducing overlap capacitance in field effect transistors
11/02/2010US7824988 Method of forming an integrated circuit
11/02/2010US7824987 Method of manufacturing a semiconductor device including a SRAM section and a logic circuit section
11/02/2010US7824986 Methods of forming a plurality of transistor gates, and methods of forming a plurality of transistor gates having at least two different work functions
11/02/2010US7824985 Method for manufacturing a recessed gate transistor
11/02/2010US7824984 Method of fabricating a trench DMOS (double diffused MOS) transistor
11/02/2010US7824983 Methods of providing electrical isolation in semiconductor structures