Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2011
01/20/2011US20110014798 High quality silicon oxide films by remote plasma cvd from disilane precursors
01/20/2011US20110014797 METHOD FOR Sr-Ti-O-BASED FILM FORMATION AND STORAGE MEDIUM
01/20/2011US20110014796 Dipping solution for use in production of siliceous film and process for producing siliceous film using the dipping solution
01/20/2011US20110014795 Method of Forming Stress-Tuned Dielectric Film Having Si-N Bonds by Modified PEALD
01/20/2011US20110014794 Device made of single-crystal silicon
01/20/2011US20110014793 Post-dry etching cleaning liquid composition and process for fabricating semiconductor device
01/20/2011US20110014792 Fin mask and method for fabricating saddle type fin using the same
01/20/2011US20110014791 Methods for fabricating finfet structures having different channel lengths
01/20/2011US20110014790 Methods for fabricating semiconductor devices
01/20/2011US20110014789 Manufacturing apparatus and method for semiconductor device
01/20/2011US20110014788 Display panel structure and manufacture method thereof
01/20/2011US20110014787 Method of Forming Contacts for a Memory Device
01/20/2011US20110014786 Method, system, and program product for routing an integrated circuit to be manufactured by doubled patterning
01/20/2011US20110014785 Method for manufacturing semiconductor device, and semiconductor manufacturing apparatus used in said method
01/20/2011US20110014784 Semiconductor process
01/20/2011US20110014783 Semiconductor device having electrode and manufacturing method thereof
01/20/2011US20110014782 Apparatus and Method for Growing a Microcrystalline Silicon Film
01/20/2011US20110014781 Method of fabricating semiconductor device
01/20/2011US20110014780 Method for manufacturing semiconductor device
01/20/2011US20110014779 Method of making damascene diodes using sacrificial material
01/20/2011US20110014778 Boron-10 coating process for neutron detector integrated circuit with high aspect ratio trenches
01/20/2011US20110014777 Method for processing a substrate, method for manufacturing a semiconductor chip, and method for manufacturing a semiconductor chip having a resin adhesive layer
01/20/2011US20110014776 Method for producing soi substrate
01/20/2011US20110014775 Method for producing silicon film transferred insulator wafter
01/20/2011US20110014774 Apparatus for temporary wafer bonding and debonding
01/20/2011US20110014773 Method for fabricating a metal gate structure
01/20/2011US20110014772 Aligning method of patterned electrode in a selective emitter structure
01/20/2011US20110014771 Method of making damascene diodes using selective etching methods
01/20/2011US20110014770 Methods of forming a dielectric thin film of a semiconductor device and methods of manufacturing a capacitor having the same
01/20/2011US20110014769 Manufacturing method for planar independent-gate or gate-all-around transistors
01/20/2011US20110014768 Method and system for improved nickel silicide
01/20/2011US20110014767 LOW-TEMPERATURE GROWN HIGH QUALITY ULTRA-THIN CoTiO3 GATE DIELECTRICS
01/20/2011US20110014766 Bottom-drain ldmos power mosfet structure having a top drain strap
01/20/2011US20110014765 Semiconductor device manufacturing method
01/20/2011US20110014764 Method of forming a dual-trench field effect transistor
01/20/2011US20110014763 Method of Forming Low Resistance Gate for Power MOSFET Applications
01/20/2011US20110014762 Semiconductor device and method for manufacturing the same
01/20/2011US20110014761 Semiconductor device and manufacturing method of the same
01/20/2011US20110014760 Method of Forming Lateral Trench Gate FET with Direct Source-Drain Current Path
01/20/2011US20110014759 Method of Fabricating Non-volatile Memory Device
01/20/2011US20110014758 Semiconductor device and method of manufacturing the same
01/20/2011US20110014757 Process integration for flash storage element and dual conductor complementary mosfets
01/20/2011US20110014756 Thin film transistor, method of fabricating the same, and organic light emitting diode display device including the same
01/20/2011US20110014755 Method of fabricating polycrystalline silicon, tft fabricated using the same, method of fabricating the tft, and organic light emitting diode display device including the tft
01/20/2011US20110014754 Semiconductor device having a plurality of stacked transistors and method of fabricating the same
01/20/2011US20110014753 Method of forming thin film transistor array substrate
01/20/2011US20110014752 Substrate for semiconductor device, resin-sealed semiconductor device, method for manufacturing said substrate for semiconductor device and method for manufacturing said resin-sealed semiconductor device
01/20/2011US20110014751 Manufacturing process for embedded semiconductor device
01/20/2011US20110014750 Cap and substrate electrical connection at wafer level
01/20/2011US20110014749 Method for Packaging Semiconductor Dies Having Through-Silicon Vias
01/20/2011US20110014748 Semiconductor packages, stacked semiconductor packages, and methods of manufacturing the semiconductor packages and the stacked semiconductor packages
01/20/2011US20110014747 Stackable packages for three-dimensional packaging of semiconductor dice
01/20/2011US20110014746 Semiconductor Device and Method of Forming Conductive TSV in Peripheral Region of Die Prior to Wafer Singulaton
01/20/2011US20110014745 Method of manufacturing semiconductor device
01/20/2011US20110014741 Three dimensional structure and its manufacturing method
01/20/2011US20110014739 Making an emissive layer for multicolored oleds
01/20/2011US20110014738 LCD TFT array plate and fabricating method thereof
01/20/2011US20110014737 Thin film transistor array and method of manufacturing the same
01/20/2011US20110014731 Method for sealing a photonic device
01/20/2011US20110014729 Donor film for laser induced thermal imaging method, light emitting device using the same, and method of manufacturing light emitting device
01/20/2011US20110014727 Thin film probe sheet and semiconductor chip inspection system
01/20/2011US20110014726 Method of forming shallow trench isolation structure
01/20/2011US20110014725 Method for manufacturing solar cell module
01/20/2011US20110014577 Pellicle inspection device, exposure apparatus using same, and device manufacturing method
01/20/2011US20110014572 Self-powered lithography method and apparatus using radioactive thin films
01/20/2011US20110014562 Substrate processing apparatus and substrate processing method
01/20/2011US20110014551 Reticle and manufacturing method of solid-state image sensor
01/20/2011US20110014489 Method for Strengthening Adhesion Between Dielectric Layers Formed Adjacent to Metal Layers
01/20/2011US20110014016 Equipment Storage for Substrate Processing Apparatus
01/20/2011US20110014015 Substrate transfer robot and vacuum processing apparatus provided with same
01/20/2011US20110013826 Test structure for charged particle beam inspection and method for defect determination using the same
01/20/2011US20110013825 Method and Apparatus for Analyzing Defect Data and a Review System
01/20/2011US20110013787 Mems microphone package and mehtod for making same
01/20/2011US20110013660 Optoelectronic semiconductor body and method for producing an optoelectronic semiconductor body
01/20/2011US20110013659 Semiconductor laser device and method of manufacturing the same
01/20/2011US20110013443 Novel high speed two transistor/two bit NOR read only memory
01/20/2011US20110013393 Surface-emission unit and method for producing the same
01/20/2011US20110013338 Electrostatic chuck device
01/20/2011US20110013164 Shear-Layer Chuck for Lithographic Apparatus
01/20/2011US20110013161 Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method
01/20/2011US20110013133 THIN-FILM TRANSISTOR PHOTOSENSOR, LIQUID CRYSTAL DISPLAY PANEL AND METHOD OF FORMING DIELECTRIC LAYER HAVING F-SiOC: H COMPOUND
01/20/2011US20110013130 Ffs type tft-lcd array substrate and manufacturing method thereof
01/20/2011US20110013113 Tft and tft substrate using the same, method of fabricating tft substrate and liquid crystal display
01/20/2011US20110013107 Semiconductor device, semiconductor device manufacturing method, liquid crystal display device and electronic apparatus
01/20/2011US20110013105 Display panel and display panel device including the same
01/20/2011US20110012880 Tft. shift register, scan signal line driving circuit, display device, and tft trimming method
01/20/2011US20110012873 Display modules
01/20/2011US20110012818 El display device, driving method thereof, and electronic equipment provided with the el display device
01/20/2011US20110012809 Rf printing rectifier using roll to roll printing method
01/20/2011US20110012669 Semiconductor-on-insulator with back side connection
01/20/2011US20110012629 Replacement-gate-compatible programmable electrical antifuse
01/20/2011US20110012478 Thin-Film Device and Method of Fabricating The Same
01/20/2011US20110012270 Integrated circuit package system employing device stacking and method of manufacture thereof
01/20/2011US20110012269 Electronic component used for wiring and method for manufacturing the same
01/20/2011US20110012268 Semiconductor device
01/20/2011US20110012267 Semiconductor integrated device having a contact structure, and corresponding manufacturing process
01/20/2011US20110012266 Semiconductor device and method of manufacturing semiconductor device
01/20/2011US20110012263 Semiconductor device and manufacturing method of the same
01/20/2011US20110012262 Semiconductor device and method of manufacturing the same
01/20/2011US20110012258 Semiconductor Device and Method of Laser-Marking Laminate Layer Formed Over EWLB With Tape Applied to Opposite Surface