| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/01/2011 | US7879635 Method for manufacturing semiconductor optical device |
| 02/01/2011 | US7879634 Process for producing a liquid crystal cell substrate having a TFT driver element, a liquid crystal cell substrate, and liquid crystal display device |
| 02/01/2011 | US7879633 Miniature optical element for wireless bonding in an electronic instrument |
| 02/01/2011 | US7879632 Method for manufacturing surface-emitting laser |
| 02/01/2011 | US7879631 Systems and methods for on-die light sensing with low leakage |
| 02/01/2011 | US7879630 Method for manufacturing a microlens substrate and method for manufacturing a liquid crystal panel |
| 02/01/2011 | US7879629 Method for manufacturing floating structure of microelectromechanical system |
| 02/01/2011 | US7879628 Semiconductro laser device |
| 02/01/2011 | US7879627 Overlay marks and methods of manufacturing such marks |
| 02/01/2011 | US7879626 Structure and manufacturing method of semiconductor memory device |
| 02/01/2011 | US7879533 Etching residue removal method and semiconductor device fabrication method using this method |
| 02/01/2011 | US7879532 Method of manufacturing semiconductor device |
| 02/01/2011 | US7879531 Immersion lithography fluids |
| 02/01/2011 | US7879528 For forming pattern that prevents contamination within the exposure apparatus; lithography |
| 02/01/2011 | US7879513 Decreasing error of line width on coarse/dense pattern; adjusting numerical aperture and/or coherence factor |
| 02/01/2011 | US7879512 Photomask, manufacturing method thereof, and electronic device manufacturing method |
| 02/01/2011 | US7879445 Adhesive for bonding circuit members, circuit board and process for its production |
| 02/01/2011 | US7879251 Thin film removing device and thin film removing method |
| 02/01/2011 | US7879187 Plasma etching apparatus |
| 02/01/2011 | US7879186 Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor |
| 02/01/2011 | US7879185 Dual frequency RF match |
| 02/01/2011 | US7879184 Apparatuses, systems and methods for rapid cleaning of plasma confinement rings with minimal erosion of other chamber parts |
| 02/01/2011 | US7879183 Apparatus and method for front side protection during backside cleaning |
| 02/01/2011 | US7879182 Shower plate, plasma processing apparatus, and product manufacturing method |
| 02/01/2011 | US7879180 Polishing device and polishing method |
| 02/01/2011 | US7879179 Processing apparatus with a chamber having therein a high-corrosion-resistant sprayed film |
| 02/01/2011 | US7879151 Mask etch processing apparatus |
| 02/01/2011 | US7879147 Large area, uniformly low dislocation density GaN substrate and process for making the same |
| 02/01/2011 | US7878755 Load lock and method for transferring objects |
| 02/01/2011 | US7878061 Micromechanical system including a suspension and an electrode positioned movably |
| 02/01/2011 | US7877865 Method of forming a wiring having carbon nanotube |
| 02/01/2011 | CA2539280C High reliability multilayer circuit substrates and methods for their formation |
| 02/01/2011 | CA2460796C Semiconductor nanocrystal composite |
| 01/31/2011 | CA2711066A1 Silicon carbide semiconductor structures, devices, and methods for making the same |
| 01/27/2011 | WO2011011532A2 Hollow cathode showerhead |
| 01/27/2011 | WO2011011525A1 Method of forming nanostructure-based nand flash cells and the periphery circuits thereof |
| 01/27/2011 | WO2011011476A2 Compositions for forming doped regions in semiconductor substrates, methods for fabricating such compositions, and methods for forming doped regions using such compositions |
| 01/27/2011 | WO2011011448A2 Shield contacts in a shielded gate mosfet |
| 01/27/2011 | WO2011011298A2 Method of operating a clamping system of a wire bonding machine |
| 01/27/2011 | WO2011011291A1 Dark field inspection system with ring illumination |
| 01/27/2011 | WO2011011266A2 System and method for plasma arc detection, isolation and prevention |
| 01/27/2011 | WO2011011261A2 Enhancement-mode gallium nitride high electron mobility transistor |
| 01/27/2011 | WO2011011141A1 Vacuum coupled tool apparatus for dry transfer printing semiconductor elements |
| 01/27/2011 | WO2011011140A2 Method and materials for double patterning |
| 01/27/2011 | WO2011011139A2 Method and materials for reverse patterning |
| 01/27/2011 | WO2011011053A1 A novel high speed two transistor/two bit nor read only memory |
| 01/27/2011 | WO2011011013A1 Active pin connection monitoring system and method |
| 01/27/2011 | WO2011010821A2 Clamp for ingot squaring and grinding equipment |
| 01/27/2011 | WO2011010819A2 Multi-selective polishing slurry composition and a semiconductor element production method using the same |
| 01/27/2011 | WO2011010816A1 Nano pattern formation |
| 01/27/2011 | WO2011010749A1 Semiconductor wafer separation mechanism |
| 01/27/2011 | WO2011010739A1 Method for producing microstructure |
| 01/27/2011 | WO2011010727A1 Thermal cvd device, sio2 film or siof film and method for forming said films |
| 01/27/2011 | WO2011010726A1 Plasma cvd device, sio2 film or siof film and method for forming said films |
| 01/27/2011 | WO2011010724A1 Method and device for manufacturing semiconductor crystal, and semiconductor crystal |
| 01/27/2011 | WO2011010702A1 Anti-fuse element |
| 01/27/2011 | WO2011010701A1 Anti-fuse element |
| 01/27/2011 | WO2011010683A1 Wafer conveying method and wafer conveying device |
| 01/27/2011 | WO2011010668A1 Positioning structure and conveying apparatus |
| 01/27/2011 | WO2011010661A1 Treatment device and method for operating same |
| 01/27/2011 | WO2011010660A1 Device and method for forming film |
| 01/27/2011 | WO2011010655A1 Method for forming coating film which is composed of α-tantalum, and the coating film |
| 01/27/2011 | WO2011010654A1 Ohmic electrode for diamond semiconductor device |
| 01/27/2011 | WO2011010653A1 Method for treating a surface coated with a film, and device for treating a surface coated with a film |
| 01/27/2011 | WO2011010650A1 Film forming method |
| 01/27/2011 | WO2011010611A1 Thin-film transistor, manufacturing method therefor, and liquid-crystal display device |
| 01/27/2011 | WO2011010608A1 Method for manufacturing silicon carbide semiconductor device |
| 01/27/2011 | WO2011010585A1 Method and apparatus for treating substrate |
| 01/27/2011 | WO2011010584A1 Wet etching apparatus and wet etching method |
| 01/27/2011 | WO2011010566A1 Pzt film, electronic component, method for manufacturing an oxide film, and steam pressure rapid heating device |
| 01/27/2011 | WO2011010560A1 Lighting optical system, exposure apparatus, and device manufacturing method |
| 01/27/2011 | WO2011010557A1 Device for classifying defects and method for adjusting classification |
| 01/27/2011 | WO2011010546A1 Semiconductor device |
| 01/27/2011 | WO2011010545A1 Semiconductor device and method for manufacturing the same |
| 01/27/2011 | WO2011010544A1 Semiconductor device and method for manufacturing semiconductor device |
| 01/27/2011 | WO2011010543A1 Semiconductor device and method for manufacturing semiconductor device |
| 01/27/2011 | WO2011010542A1 Semiconductor device and method for manufacturing the same |
| 01/27/2011 | WO2011010541A1 Semiconductor device and method for manufacturing the same |
| 01/27/2011 | WO2011010527A1 Composition for film formation, insulating film, and semiconductor device |
| 01/27/2011 | WO2011010460A1 Substrate processing system, substrate holder, substrate holder pair, substrate joining apparatus and device manufacturing method |
| 01/27/2011 | WO2011010452A1 Substrate holder system, substrate joining apparatus and method for manufacturing a device |
| 01/27/2011 | WO2011010450A1 Semiconductor component, semiconductor wafer component, method for manufacturing semiconductor component, and method for manufacturing bonded structural body |
| 01/27/2011 | WO2011010448A1 Rotation transmission mechanism, conveyance device and drive device |
| 01/27/2011 | WO2011010423A1 Method for manufacturing carrier for double-side polishing apparatus, carrier for double-side polishing apparatus, and method for polishing double sides of wafer |
| 01/27/2011 | WO2011010419A1 Nitride semiconductor device |
| 01/27/2011 | WO2011010418A1 Nitride semiconductor device and method for manufacturing same |
| 01/27/2011 | WO2011010415A1 Method for manufacturing thin film transistor substrate |
| 01/27/2011 | WO2011010407A1 Semiconductor device and method for manufacturing same |
| 01/27/2011 | WO2011010074A1 Complete recrystallization of semiconductor wafers |
| 01/27/2011 | WO2011009927A1 Device for cleaning substrates on a carrier |
| 01/27/2011 | WO2011009847A2 Method for manufacturing a device with a display element |
| 01/27/2011 | WO2011009764A1 Etchant composition and etching process for titanium-aluminum complex metal layer |
| 01/27/2011 | WO2011009762A1 Multiple orientation nanowires with gate stack stressors |
| 01/27/2011 | WO2011009658A1 Device having a semiconductor element and a housing and method for producing the device |
| 01/27/2011 | WO2011009654A1 Semiconductor arrangement having a silicon carbide substrate and method for the production thereof |
| 01/27/2011 | WO2011009597A1 Lead free high temperature compound |
| 01/27/2011 | WO2011009444A1 Method for producing a structured coating on a substrate, coated substrate, and semi-finished product having a coated substrate |
| 01/27/2011 | WO2011009413A1 Deep silicon etching method |
| 01/27/2011 | WO2011009361A1 Cmosfet device structure for controlling threshold voltage characteristics and manufacturing method thereof |
| 01/27/2011 | WO2011009159A1 Separation of doping density and minority carrier lifetime in photoluminescence measurements on semiconductor materials |