Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2011
04/06/2011EP2304776A1 Thin sacrificial masking films for protecting semiconductors from pulsed laser process
04/06/2011EP2304775A2 Deposition apparatus for improving the uniformity of material processed over a substrate and method of using the apparatus
04/06/2011EP2304774A2 Apparatuses for atomic layer deposition
04/06/2011EP2304773A1 Method for increasing the nitride of group iii elements
04/06/2011EP2304772A1 A method for producing polycrystalline layers
04/06/2011EP2304771A2 Method for forming fine pitch structures
04/06/2011EP2304770A1 Preventing or mitigating growth formations on metal films
04/06/2011EP2304769A1 Method for automatic measurement and for teaching-in of location positions of objects within a substrate processing system by means of sensor carriers and associated sensor carrier
04/06/2011EP2304402A1 Thermocouple
04/06/2011EP2304336A2 Methods and devices for shipping solar modules
04/06/2011EP2304074A1 Method of reducing memory effects in semiconductor epitaxy
04/06/2011EP2304073A1 Plant for forming electronic circuits on substrates
04/06/2011EP2304071A1 A film depositing apparatus and method
04/06/2011EP2303721A1 Transport package
04/06/2011EP2115767B1 Device for mounting a flip-chip on a substrate
04/06/2011EP1726040B1 Integrated circuit chips utilizing carbon nanotube composite interconnection vias
04/06/2011EP1714330B1 Methods of fabricating vertical carbon nanotube field effect transistors for arrangement in arrays and field effect transistors and arrays formed thereby
04/06/2011EP1713135B1 Method for fabricating piezoelectric element
04/06/2011EP1697981B1 Process for improving the surface roughness of a semiconductor wafer
04/06/2011EP1678767B1 Method for producing a vertical field effect transistor
04/06/2011EP1643004B1 Treating device using raw material gas and reactive gas
04/06/2011EP1485956B1 Process of producing multicrystalline silicon substrate and solar cell
04/06/2011EP1433200B1 Method for fabricating a power semiconductor device having a voltage sustaining layer with a terraced trench facilitating formation of floating islands
04/06/2011EP1417703B1 Chemical mechanical polishing pad having holes and/or grooves
04/06/2011EP1416523B1 Heat treatment method and heat treatment device
04/06/2011EP1323187B1 Method for cleaning the surface of a substrate
04/06/2011EP1166321B1 Plasma processor with coil having variable rf coupling
04/06/2011CN201788965U Stacking structure for material strip of lead frame
04/06/2011CN201788959U Diffusing quartz boat used for manufacturing silicon wafers
04/06/2011CN201788958U Wafer feeding module of integrated circuit chip loading machine
04/06/2011CN201788957U Silicon wafer slide jig
04/06/2011CN201788956U Antistatic image test work table
04/06/2011CN201788955U Insulation bush with functions of fastener and transistor assembling structure with same
04/06/2011CN201788954U Semiconductor chip packaging device
04/06/2011CN201788953U Wafer splitting tool device
04/06/2011CN201788952U Wafer chamfering supporting device
04/06/2011CN201785523U Chemical plating jig
04/06/2011CN201785493U Etching equipment and chip box thereof
04/06/2011CN201783437U Integrated circuit loading machine gluing module
04/06/2011CN1996588B A copper-gas media Damascus structure and its making method
04/06/2011CN1982401B Cmp abrasive and method for polishing substrate
04/06/2011CN1975578B Coating and developing system and coating and developing method
04/06/2011CN1975571B Resist pattern thickening material and process for forming resist pattern, and semiconductor device and method for manufacturing the same
04/06/2011CN1925131B Process for reducing surface reflection index in semiconductor Damascus copper
04/06/2011CN1911779B Semiconductor device and manufacturing method thereof
04/06/2011CN1892441B Lithographic apparatus, contaminant trap, and device manufacturing method
04/06/2011CN1885507B Method of producing a semiconductor device
04/06/2011CN1884618B Etchant, method for fabricating interconnection line using the etchant, and method for fabricating thin film transistor substrate using the etchant
04/06/2011CN1854908B Heating apparatus, coating and developing device and heating method
04/06/2011CN1846313B Metal grid structure of transistor of integrated circuit and its manufacture method
04/06/2011CN1828900B Semiconductor device having transistor with vertical gate electrode and method of fabricating the same
04/06/2011CN1806319B Mis transistor and cmos transistor
04/06/2011CN1801393B 半导体集成电路 The semiconductor integrated circuit
04/06/2011CN1799125B Formation of junctions and silicides with reduced thermal budget
04/06/2011CN1790162B Method of forming pattern having step difference and method of making thin film transistor and liquid crystal display using the same
04/06/2011CN1787223B Local interconnect structure and method for a cmos image sensor
04/06/2011CN1741254B Method for manufacturing semiconductor device and semiconductor device
04/06/2011CN102007826A Back drilling method of through via, circuit board and manufacturing method of circuit board
04/06/2011CN102007611A Nitride semiconductor element and method for producing the same
04/06/2011CN102007610A Nitride-based semiconductor device and method for fabricating the same
04/06/2011CN102007601A Counterdoping for solar cells
04/06/2011CN102007599A Method for the selective doping of silicon and silicon substrate treated therewith
04/06/2011CN102007596A Semiconductor device
04/06/2011CN102007595A Semiconductor device and method of manufacturing the same
04/06/2011CN102007591A Capacitor and process for manufacturing capacitor
04/06/2011CN102007590A Transistor with contact over gate active area
04/06/2011CN102007589A Etch stop layer of reduced thickness for patterning a dielectric material in a contact level of closely spaced transistors
04/06/2011CN102007588A Method for reducing temperature of substrate placing table, computer-readable storage medium, and substrate processing system
04/06/2011CN102007587A Substrate bonding device
04/06/2011CN102007586A Thin film transistor and method for manufacturing the same
04/06/2011CN102007585A Thin film transistor and method for manufacturing the same
04/06/2011CN102007584A Semiconductor device structures and related processes
04/06/2011CN102007583A Processes for producing dielectric film and semiconductor device, dielectric film, and recording medium
04/06/2011CN102007582A Method for roughening substrate surface and method for manufacturing photovoltaic device
04/06/2011CN102007581A Anti-reflection etching of silicon surfaces catalyzed with ionic metal solutions
04/06/2011CN102007580A Methods and apparatus for low cost and high performance polishing tape for substrate bevel and edge polishing in seminconductor manufacturing
04/06/2011CN102007579A Cleaning water for electronic material, method for cleaning electronic material and system for supplying water containing dissolved gas
04/06/2011CN102007578A Method for manufacturing semiconductor device and method for cleaning semiconductor substrate
04/06/2011CN102007577A Polishing liquid for cmp and polishing method
04/06/2011CN102007576A Nitride-based semiconductor device and method for fabricating the same
04/06/2011CN102007575A Chamber and manufacturing method therefor
04/06/2011CN102007574A Method of forming chalcogenide thin film
04/06/2011CN102007573A Selective cobalt deposition on copper surfaces
04/06/2011CN102007572A Wafer processing deposition shielding components
04/06/2011CN102007571A Deposition and selective removal of conducting helplayer for nanostructure processing
04/06/2011CN102007570A Etch with high etch rate resist mask
04/06/2011CN102007569A Station and method for measuring the contamination of an enclosure used for transporting semiconductor substrates
04/06/2011CN102007568A Laser-processing device
04/06/2011CN102007565A Substrate processing system and substrate processing method
04/06/2011CN102007559A Tunable capacitor and switch using mems with phase change material
04/06/2011CN102007543A Recording method for magnetic memory device
04/06/2011CN102007542A Method of making record in magnetic memory device
04/06/2011CN102007329A Valve device, and device for regulating temperature of electronic part
04/06/2011CN102005699A Nitride semiconductor light emitting device and method of fabricating nitride semiconductor laser device
04/06/2011CN102005541A Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same
04/06/2011CN102005516A Led chip and manufacturing method thereof
04/06/2011CN102005499A Solar battery wafer box transportation device and its solar energy battery wafer texture device
04/06/2011CN102005480A High-voltage low-on-resistance LDMOS device and manufacturing method thereof
04/06/2011CN102005479A GaAs MOS (Metal Oxide Semiconductor) device with oxygen-absorbing titanium cap layer and manufacturing method thereof
04/06/2011CN102005477A Integrated circuit, fin field effect transistor (finfet) and fabrication method thereof