| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/13/2011 | CN1983037B Exposure method, exposure device, and method of manufacturing device |
| 04/13/2011 | CN1957106B Film forming apparatus and film forming method |
| 04/13/2011 | CN1953146B Process to open carbon based hardmask |
| 04/13/2011 | CN1947066B Rinsing fluid for lithography |
| 04/13/2011 | CN1901163B Method for fabricating a circuitry component by continuous electroplating and circuitry component structure |
| 04/13/2011 | CN1897784B Reducing electrostatic charge by roughening the susceptor |
| 04/13/2011 | CN1873542B Dual stage lithographic apparatus |
| 04/13/2011 | CN1869811B Reflection mask for EUV photolithography and method of fabricating the reflection mask |
| 04/13/2011 | CN1855495B Field effect transistors with vertically oriented gate electrodes and methods for fabricating the same |
| 04/13/2011 | CN1845007B Substrate and a method for polishing a substrate |
| 04/13/2011 | CN1830083B Semiconductor device and manufacturing method thereof |
| 04/13/2011 | CN1804726B Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus |
| 04/13/2011 | CN1800444B Film formation apparatus and method of using the same |
| 04/13/2011 | CN1713078B Bare aluminum baffles for resist stripping chambers |
| 04/13/2011 | CN1657462B Glass ceramic having a low thermal expansion |
| 04/13/2011 | CN102017819A Bonding method and bonding apparatus |
| 04/13/2011 | CN102017813A Nonplanar faceplate for a plasma processing chamber |
| 04/13/2011 | CN102017216A Device having hole injection/transport layer, method for manufacturing the same, and ink for forming hole injection/transport layer |
| 04/13/2011 | CN102017176A Surface cleaning and texturing process for crystalline solar cells |
| 04/13/2011 | CN102017169A Apparatus for manufacturing thin film solar cell |
| 04/13/2011 | CN102017168A Apparatus for manufacturing thin film solar cell |
| 04/13/2011 | CN102017161A Semiconductor device |
| 04/13/2011 | CN102017159A Silicon carbide semiconductor device and process for producing the silicon carbide semiconductor device |
| 04/13/2011 | CN102017146A Non-volatile resistive-switching memories |
| 04/13/2011 | CN102017138A Die stacking system and method |
| 04/13/2011 | CN102017130A Semiconductor device and method of manufacture thereof |
| 04/13/2011 | CN102017129A Non-volatile semiconductor memory device |
| 04/13/2011 | CN102017128A Magnetic tunnel junction cell including multiple vertical magnetic domains |
| 04/13/2011 | CN102017127A Semiconductor-based, large-area, flexible, electronic devices on {110}<100> oriented substrates |
| 04/13/2011 | CN102017126A Processing of multilayer semiconductor wafers |
| 04/13/2011 | CN102017125A A method of initiating molecular bonding |
| 04/13/2011 | CN102017124A Process for manufacturing a structure comprising a germanium layer on a substrate |
| 04/13/2011 | CN102017123A Plasma reactor electrostatic chuck having a coaxial RF feed and multizone AC heater power transmission through the coaxial feed |
| 04/13/2011 | CN102017122A Low profile process kit |
| 04/13/2011 | CN102017121A Dynamic alignment of wafers using compensation values obtained through a series of wafer movements |
| 04/13/2011 | CN102017120A High throughput cleaner chamber |
| 04/13/2011 | CN102017119A Wafer container with tubular environmental control components |
| 04/13/2011 | CN102017118A Retainer and substrate storage container provided with same retainer |
| 04/13/2011 | CN102017117A Calibration of non-vibrating contact potential difference measurements to detect surface variations that are perpendicular to the direction of sensor motion |
| 04/13/2011 | CN102017116A Device characterisation utilising spatially resolved luminescence imaging |
| 04/13/2011 | CN102017115A Test system and probe apparatus |
| 04/13/2011 | CN102017114A Substrate quality tester |
| 04/13/2011 | CN102017113A Semiconductor device and method for manufacturing the same |
| 04/13/2011 | CN102017112A Electrical bond connection arrangement |
| 04/13/2011 | CN102017111A Lead-free solder joint structure and solder ball |
| 04/13/2011 | CN102017110A Method for producing a hermetically sealed, electrical feedthrough using exothermic nanofilm |
| 04/13/2011 | CN102017109A Methods of teaching bonding locations and inspecting wire loops on a wire bonding machine, and apparatuses for performing the same |
| 04/13/2011 | CN102017108A Improved method for encapsulating the edge of a flexible sheet |
| 04/13/2011 | CN102017107A Joint structure and electronic component |
| 04/13/2011 | CN102017106A Method for mounting member |
| 04/13/2011 | CN102017105A Hermetically-sealed packages for electronic components having reduced unused areas |
| 04/13/2011 | CN102017104A Process for making doped zinc oxide |
| 04/13/2011 | CN102017103A Power device utilizing chemical mechanical planarization |
| 04/13/2011 | CN102017102A Apparatus and methods for hyperbaric rapid thermal processing |
| 04/13/2011 | CN102017101A System for non radial temperature control for rotating substrates |
| 04/13/2011 | CN102017100A Method and apparatus for excimer curing |
| 04/13/2011 | CN102017099A Method for forming through electrode, and semiconductor device |
| 04/13/2011 | CN102017098A Method for formation of oxide film for silicon wafer |
| 04/13/2011 | CN102017097A Method for producing ceramic passivation layers on silicon for solar cell manufacture |
| 04/13/2011 | CN102017096A Film forming device |
| 04/13/2011 | CN102017095A Vacuum processing apparatus |
| 04/13/2011 | CN102017094A Endpoint detection in chemical mechanical polishing using multiple spectra |
| 04/13/2011 | CN102017093A Silicon carbide polishing method utilizing water-soluble oxidizers |
| 04/13/2011 | CN102017092A A progressive trimming method |
| 04/13/2011 | CN102017091A Polishing agent and method for polishing substrate using the polishing agent |
| 04/13/2011 | CN102017090A A mixed trimming method |
| 04/13/2011 | CN102017089A Adhesioin and electromigration improvement between dielectric and conductive layers |
| 04/13/2011 | CN102017088A Engineering flat surfaces on materials doped via pulsed laser irradiation |
| 04/13/2011 | CN102017087A Phosphorus paste for diffusion and process for producing solar battery utilizing the phosphorus paste |
| 04/13/2011 | CN102017086A Method for depositing polysilicon thin film with ultra-fine crystal grains |
| 04/13/2011 | CN102017085A Method for depositing of ultra fine grain poly silicon thin film |
| 04/13/2011 | CN102017084A Heating device, film forming apparatus, film forming method, and device |
| 04/13/2011 | CN102017083A Combinatorial plasma enhanced deposition techniques |
| 04/13/2011 | CN102017082A Group III nitride semiconductor device and method for manufacturing the same, group III nitride semiconductor light-emitting device and method for manufacturing the same, and lamp |
| 04/13/2011 | CN102017081A Boron nitride and boron-nitride derived materials deposition method |
| 04/13/2011 | CN102017080A Method of manufacturing Si(1-v-w-x)CwAlxNv substrate, method of manufacturing epitaxial wafer, Si(1-v-w-x)CwAlxNv substrate, and epitaxial wafer |
| 04/13/2011 | CN102017079A Process for producing Si(1-v-w-x)CwAlxNv base material, process for producing epitaxial wafer, Si(1-v-w-x)CwAlxNv base material, and epitaxial wafer |
| 04/13/2011 | CN102017078A Heat treatment apparatus |
| 04/13/2011 | CN102017077A Process kit for RF physical vapor deposition |
| 04/13/2011 | CN102017076A Amorphous group III-V semiconductor material and preparation thereof |
| 04/13/2011 | CN102017075A Low-cost substrates having high-resistivity properties and methods for their manufacture |
| 04/13/2011 | CN102017074A A method of assembling wafers by molecular bonding |
| 04/13/2011 | CN102017073A Methods of forming isolated active areas, trenches, and conductive lines in semiconductor structures and semiconductor structures including the same |
| 04/13/2011 | CN102017072A Stage apparatus, patterning apparatus, exposure apparatus, stage drive apparatus, exposure method, and device fabrication method |
| 04/13/2011 | CN102017071A Methods of patterning a conductor on a substrate |
| 04/13/2011 | CN102017070A Method for manufacturing silicon thin film transfer insulating wafer |
| 04/13/2011 | CN102017069A Silicon monocrystal wafer, method for manufacturing the silicon monocrystal wafer and method for evaluating the silicon monocrystal wafer |
| 04/13/2011 | CN102017068A Slit valve having increased flow uniformity |
| 04/13/2011 | CN102017067A Debris-extraction exhaust system |
| 04/13/2011 | CN102017066A Method of forming a photovoltaic cell module |
| 04/13/2011 | CN102017065A Tools and methods for processing microelectronic workpices using process chamber designs that easily transition between open and closed modes of operation |
| 04/13/2011 | CN102017064A Semiconductor buried grating fabrication method |
| 04/13/2011 | CN102017063A Wafer stack cleaning |
| 04/13/2011 | CN102017055A Method for manufacturing workpieces with ion-etched surface |
| 04/13/2011 | CN102017016A Connecting material and semiconductor device |
| 04/13/2011 | CN102016722A Robot for in-vacuum use |
| 04/13/2011 | CN102016721A Laser exposure method, photoresist layer working method, and pattern molding manufacturing method |
| 04/13/2011 | CN102016717A Reflective mask blank for EUV lithography, and reflective mask for EUV lithography |
| 04/13/2011 | CN102016615A Method and apparatus for interrogating electronic components |
| 04/13/2011 | CN102016136A AlxGa(1-x)As substrate, epitaxial wafer for infrared leds, infrared led, method of manufacturing AlxGa(1-x)as substrate, method of manufacturing epitaxial wafer for infrared leds, and method of manufacturing infrared leds |