| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/12/2011 | US7926001 Uniformity for semiconductor patterning operations |
| 04/12/2011 | US7925450 Photometrically modulated delivery of reagents |
| 04/12/2011 | US7925367 Defect review and classification system |
| 04/12/2011 | US7925363 Error-correction assistance system |
| 04/12/2011 | US7925124 Electro-optical tunable filter and manufacturing process |
| 04/12/2011 | US7924900 Surface emitting laser, manufacturing method of surface emitting laser, surface emitting laser array, manufacturing method of surface emitting laser array, and optical apparatus including surface emitting laser array |
| 04/12/2011 | US7924544 Low voltage modular room ionization system |
| 04/12/2011 | US7924402 Exposure apparatus and device manufacturing method |
| 04/12/2011 | US7924397 Anti-corrosion layer on objective lens for liquid immersion lithography applications |
| 04/12/2011 | US7924396 Coating/developing apparatus and pattern forming method |
| 04/12/2011 | US7924042 Semiconductor device, and design method, inspection method, and design program therefor |
| 04/12/2011 | US7923850 Semiconductor chip with solder joint protection ring |
| 04/12/2011 | US7923849 Interconnections for flip-chip using lead-free solders and having reaction barrier layers |
| 04/12/2011 | US7923848 High performance sub-system design and assembly |
| 04/12/2011 | US7923841 Method for bonding semiconductor structure with substrate and high efficiency photonic device manufactured by using the same method |
| 04/12/2011 | US7923838 Method and structure for reducing contact resistance between silicide contact and overlying metallization |
| 04/12/2011 | US7923827 Semiconductor module for a switched-mode power supply and method for its assembly |
| 04/12/2011 | US7923815 DRAM having deep trench capacitors with lightly doped buried plates |
| 04/12/2011 | US7923813 Anti-fuse memory device |
| 04/12/2011 | US7923810 Semiconductor devices having active elements with raised semiconductor patterns and related methods of fabricating the same |
| 04/12/2011 | US7923808 Structure of very high insertion loss of the substrate noise decoupling |
| 04/12/2011 | US7923807 Semiconductor device having an insulator including an inductive load driving circuit |
| 04/12/2011 | US7923806 Embedded wiring in copper damascene with void suppressing structure |
| 04/12/2011 | US7923788 Semiconductor device |
| 04/12/2011 | US7923787 MOSFET with isolation structure and fabrication method thereof |
| 04/12/2011 | US7923786 Selective silicon-on-insulator isolation structure and method |
| 04/12/2011 | US7923785 Field effect transistor having increased carrier mobility |
| 04/12/2011 | US7923784 Semiconductor device having saddle fin-shaped channel and method for manufacturing the same |
| 04/12/2011 | US7923780 Thin film transistor and manufacturing method thereof |
| 04/12/2011 | US7923779 Semiconductor device and method of manufacturing the same |
| 04/12/2011 | US7923778 Thin film integrated circuit and method for manufacturing the same, CPU, memory, electronic card and electronic device |
| 04/12/2011 | US7923773 Semiconductor device, manufacturing method thereof, and data processing system |
| 04/12/2011 | US7923772 Semiconductor device with a semiconductor body and method for producing it |
| 04/12/2011 | US7923766 Semiconductor device including capacitorless RAM |
| 04/12/2011 | US7923760 Dielectric spacers for metal interconnects and method to form the same |
| 04/12/2011 | US7923759 Metal gate semiconductor device and manufacturing method |
| 04/12/2011 | US7923756 Metal oxide semiconductor (MOS) device comprising a buried region under drain |
| 04/12/2011 | US7923754 Bipolar transistor |
| 04/12/2011 | US7923753 Field effect transistor having Ohmic electrode in a recess |
| 04/12/2011 | US7923752 Thin-film crystal wafer having pn junction and method for fabricating the wafer |
| 04/12/2011 | US7923749 III-nitride compound semiconductor light emitting device |
| 04/12/2011 | US7923743 Semiconductor structure including mixed rare earth oxide formed on silicon |
| 04/12/2011 | US7923736 Flat panel display |
| 04/12/2011 | US7923735 Thin film transistor and method of manufacturing the same |
| 04/12/2011 | US7923729 Active matrix substrate and its manufacturing method |
| 04/12/2011 | US7923720 Organic luminescence transistor device and manufacturing method thereof |
| 04/12/2011 | US7923719 Semiconductor memory device wherein wiring contact is made through an opening in an organic compound layer |
| 04/12/2011 | US7923699 Tracking control method and electron beam writing system |
| 04/12/2011 | US7923684 Methods, systems and computer program products for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profiles |
| 04/12/2011 | US7923660 Pulsed laser anneal system architecture |
| 04/12/2011 | US7923629 Method for fabricating flexible semiconductor electrode, semiconductor electrode fabricated thereby, and solar cell using the semiconductor electrode |
| 04/12/2011 | US7923628 Method of controlling the composition of a photovoltaic thin film |
| 04/12/2011 | US7923576 Multifunctional linker molecules for tuning electronic charge transport through organic-inorganic composite structures and uses thereof |
| 04/12/2011 | US7923386 Method to improve the step coverage and pattern loading for dielectric films |
| 04/12/2011 | US7923385 Methods for producing low stress porous and CDO low-K dielectric materials using precursors with organic functional groups |
| 04/12/2011 | US7923384 Formation method of porous insulating film, manufacturing apparatus of semiconductor device, manufacturing method of semiconductor device, and semiconductor device |
| 04/12/2011 | US7923383 Method and apparatus for treating a semi-conductor substrate |
| 04/12/2011 | US7923382 Method for forming roughened surface |
| 04/12/2011 | US7923381 Methods of forming electronic devices containing Zr-Sn-Ti-O films |
| 04/12/2011 | US7923380 Substrate processing apparatus and substrate processing method |
| 04/12/2011 | US7923379 Multi-step process for forming high-aspect-ratio holes for MEMS devices |
| 04/12/2011 | US7923378 Film formation method and apparatus for forming silicon-containing insulating film |
| 04/12/2011 | US7923377 Method for forming amorphous carbon film |
| 04/12/2011 | US7923376 Method of reducing defects in PECVD TEOS films |
| 04/12/2011 | US7923375 Method for manufacturing semiconductor device |
| 04/12/2011 | US7923374 Method and apparatus for production of metal film or the like |
| 04/12/2011 | US7923373 Pitch multiplication using self-assembling materials |
| 04/12/2011 | US7923372 Method for fabricating semiconductor device |
| 04/12/2011 | US7923371 Method of manufacturing semiconductor device having contact plugs |
| 04/12/2011 | US7923370 Method for stacking serially-connected integrated circuits and multi-chip device made from same |
| 04/12/2011 | US7923369 Through-via and method of forming |
| 04/12/2011 | US7923368 Junction formation on wafer substrates using group IV nanoparticles |
| 04/12/2011 | US7923367 Multilayer wiring substrate mounted with electronic component and method for manufacturing the same |
| 04/12/2011 | US7923366 Post passivation interconnection schemes on top of IC chip |
| 04/12/2011 | US7923365 Methods of forming field effect transistors having stress-inducing sidewall insulating spacers thereon |
| 04/12/2011 | US7923364 Tunnel dielectric comprising nitrogen for use with a semiconductor device and a process for forming the device |
| 04/12/2011 | US7923363 SONOS memory device with optimized shallow trench isolation |
| 04/12/2011 | US7923362 Method for manufacturing a metal-semiconductor contact in semiconductor components |
| 04/12/2011 | US7923361 Method for manufacturing a semiconductor integrated circuit device |
| 04/12/2011 | US7923360 Method of forming dielectric films |
| 04/12/2011 | US7923359 Reduction of sheet resistance of phosphorus implanted poly-silicon |
| 04/12/2011 | US7923357 Method for forming poly-silicon film |
| 04/12/2011 | US7923356 Semiconductor film, semiconductor device and method for manufacturing same |
| 04/12/2011 | US7923355 Manufacturing method for semiconductor device and manufacturing apparatus for semiconductor device |
| 04/12/2011 | US7923354 Methods for depositing a microcrystalline silicon film for a photovoltaic device |
| 04/12/2011 | US7923353 Gettering method and a wafer using the same |
| 04/12/2011 | US7923352 Thermal treatment equipment and method for heat-treating |
| 04/12/2011 | US7923351 Manufacturing method of semiconductor devices |
| 04/12/2011 | US7923350 Method of manufacturing a semiconductor device including etching to etch stop regions |
| 04/12/2011 | US7923349 Wafer level surface passivation of stackable integrated circuit chips |
| 04/12/2011 | US7923348 Semiconductor device and manufacturing method thereof |
| 04/12/2011 | US7923347 Controlling warping in integrated circuit devices |
| 04/12/2011 | US7923346 Field effect transistor structure with an insulating layer at the junction |
| 04/12/2011 | US7923345 Methods relating to trench-based support structures for semiconductor devices |
| 04/12/2011 | US7923343 Capacitor of semiconductor device and method for forming the same |
| 04/12/2011 | US7923342 Nonvolatile memory element and production method thereof and storage memory arrangement |
| 04/12/2011 | US7923341 Higher selectivity, method for passivating short circuit current paths in semiconductor devices |
| 04/12/2011 | US7923340 Method to reduce collector resistance of a bipolar transistor and integration into a standard CMOS flow |
| 04/12/2011 | US7923339 Method of producing an epitaxial layer on semiconductor substrate and device produced with such a method |
| 04/12/2011 | US7923338 Increasing stress transfer efficiency in a transistor by reducing spacer width during the drain/source implantation sequence |