| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/07/2011 | WO2011041274A1 Forming catalyzed ii-vi semiconductor nanowires |
| 04/07/2011 | WO2011041268A1 Method for reworking a silicon-containing arc layer on a substrate |
| 04/07/2011 | WO2011041140A2 Method of filling deep trench in a substrate |
| 04/07/2011 | WO2011041110A1 Electronic devices and systems, and methods for making and using the same |
| 04/07/2011 | WO2011041109A1 Electronic devices and systems, and methods for making and using the same |
| 04/07/2011 | WO2011040965A2 Coal fine drying method and system |
| 04/07/2011 | WO2011040953A1 Method of high density memory fabrication |
| 04/07/2011 | WO2011040883A1 A method and system for determining charge carrier lifetime |
| 04/07/2011 | WO2011040838A2 Method for making a beam junction, and electromagnetic-radiation beam converter |
| 04/07/2011 | WO2011040745A2 Image processing-based lithography system and target object coating method |
| 04/07/2011 | WO2011040701A2 Brush roll for semiconductor wafer |
| 04/07/2011 | WO2011040685A1 Method for fabricating flexible board using solution process |
| 04/07/2011 | WO2011040635A1 Curable composition for imprints, patterning method and pattern |
| 04/07/2011 | WO2011040611A1 Catalytic cvd device, film forming method and solar cell manufacturing method |
| 04/07/2011 | WO2011040610A1 Catalytic cvd device, method for formation of film, process for production of solar cell, and substrate holder |
| 04/07/2011 | WO2011040566A1 Cdte semiconductor substrate for epitaxial growth and substrate container |
| 04/07/2011 | WO2011040543A1 Bonding capillary |
| 04/07/2011 | WO2011040538A1 Substrate processing system |
| 04/07/2011 | WO2011040537A1 Plasma treatment method and plasma treatment apparatus |
| 04/07/2011 | WO2011040536A1 Heat treating apparatus for semiconductor substrate |
| 04/07/2011 | WO2011040488A1 Illumination optical system, exposure system and method for manufacturing device |
| 04/07/2011 | WO2011040484A1 Silicon etching solution and etching method |
| 04/07/2011 | WO2011040477A1 Method for manufacturing mold for imprint, mold with unremoved remaining hard mask layer, method for manufacturing mold with unremoved remaining hard mask layer, and mask blank |
| 04/07/2011 | WO2011040476A1 Process for producing imprinting mold |
| 04/07/2011 | WO2011040466A1 Template processing device, imprint system, template processing method, and computer storage medium |
| 04/07/2011 | WO2011040465A1 Plasma processing apparatus and slow-wave plate used therein |
| 04/07/2011 | WO2011040462A1 Base-generating agent, photosensitive resin composition, material for pattern-forming comprising said photosensitive resin composition, pattern-forming method using said photosensitive resin composition, and article |
| 04/07/2011 | WO2011040458A1 Anisotropic conducting film and method for producing same |
| 04/07/2011 | WO2011040455A1 Selective plasma nitriding method and plasma nitriding device |
| 04/07/2011 | WO2011040442A1 Conductive connection material, method for connection between terminals and method for manufacturing connecting terminal |
| 04/07/2011 | WO2011040426A1 Process for manufacturing semiconductor device |
| 04/07/2011 | WO2011040396A1 Method for forming silicon nitride film, and method for producing semiconductor memory device |
| 04/07/2011 | WO2011040394A1 Method for forming crystalline silicon film and plasma cvd device |
| 04/07/2011 | WO2011040385A1 PROCESS FOR PRODUCTION OF Ni FILM |
| 04/07/2011 | WO2011040349A1 Redox capacitor and manufacturing method thereof |
| 04/07/2011 | WO2011040345A1 Electrochemical capacitor |
| 04/07/2011 | WO2011040340A1 Pattern forming method and composition for forming resist underlayer film |
| 04/07/2011 | WO2011040328A1 Antenna for generating surface wave plasma, microwave introducing mechanism, and apparatus for processing surface wave plasma |
| 04/07/2011 | WO2011040324A1 Semiconductor element substrate |
| 04/07/2011 | WO2011040301A1 Method for transferring subject to be processed and apparatus for processing subject to be processed |
| 04/07/2011 | WO2011040300A1 Transfer apparatus |
| 04/07/2011 | WO2011040279A1 Semiconductor device and method for manufacturing same |
| 04/07/2011 | WO2011040232A1 Inorganic optical filter, optical element, and light source |
| 04/07/2011 | WO2011040213A1 Semiconductor device and method for manufacturing the same |
| 04/07/2011 | WO2011040189A1 Metal microparticle dispersion, process for production of electrically conductive substrate, and electrically conductive substrate |
| 04/07/2011 | WO2011040175A1 Polymer, radiation-sensitive composition, monomer, and manufacturing method therefor |
| 04/07/2011 | WO2011040173A1 Film forming apparatus, film forming method and substrate processing apparatus |
| 04/07/2011 | WO2011040172A1 Semiconductor device, and process for production of semiconductor device |
| 04/07/2011 | WO2011040155A1 Method for manufacturing organic semiconductor film, and organic semiconductor film array |
| 04/07/2011 | WO2011040147A1 Plasma etching apparatus |
| 04/07/2011 | WO2011040140A1 Developing method |
| 04/07/2011 | WO2011040134A1 Probe card |
| 04/07/2011 | WO2011040116A1 Bonding apparatus and bonding method |
| 04/07/2011 | WO2011040108A1 Iii nitride semiconductor substrate, epitaxial substrate, and semiconductor device |
| 04/07/2011 | WO2011040106A1 Method for preserving a gallium nitride substrate, preserved gallium nitride substrate, semiconductor device, and manufacturing method therefor |
| 04/07/2011 | WO2011040081A1 Substrate module and manufacturing method thereof |
| 04/07/2011 | WO2011040067A1 Liquid vaporization system |
| 04/07/2011 | WO2011040064A1 Adhesive for semiconductor bonding, adhesive film for semiconductor bonding, method for mounting semiconductor chip, and semiconductor device |
| 04/07/2011 | WO2011040051A1 Iii nitride semiconductor substrate, epitaxial substrate, and semiconductor device |
| 04/07/2011 | WO2011040047A1 Semiconductor device, method for fabricating the same and apparatus for fabricating the same |
| 04/07/2011 | WO2011040028A1 SINTERED In-Ga-Zn-O-TYPE OXIDE |
| 04/07/2011 | WO2011040016A1 High voltage semiconductor device and driving circuit |
| 04/07/2011 | WO2011039972A1 Cleaning nozzle and dust removal device equipped with same |
| 04/07/2011 | WO2011039948A1 Adhesive resin composition for silicon wafers |
| 04/07/2011 | WO2011039946A1 Inspection apparatus and inspection method |
| 04/07/2011 | WO2011039945A1 Inspection device and method |
| 04/07/2011 | WO2011039908A1 Charged-particle microscope device and method for inspecting sample using same |
| 04/07/2011 | WO2011039907A1 Semiconductor device and manufacturing method therefor |
| 04/07/2011 | WO2011039898A1 Semiconductor device manufacturing method and semiconductor device |
| 04/07/2011 | WO2011039881A1 Positioning pin compatible with deformation caused by difference in coefficient of thermal expansion |
| 04/07/2011 | WO2011039853A1 Thin-film transistor |
| 04/07/2011 | WO2011039800A1 Semiconductor device |
| 04/07/2011 | WO2011039795A1 Semiconductor device and method for manufacturing same |
| 04/07/2011 | WO2011039793A1 Substrate processing device |
| 04/07/2011 | WO2011039181A1 Method for producing a light-emitting diode |
| 04/07/2011 | WO2011039167A1 Method of producing a semiconductor device and semiconductor device having a through-wafer interconnect |
| 04/07/2011 | WO2011038995A1 Patternable low-k dielectric interconnect structure with a graded cap layer and method of fabrication |
| 04/07/2011 | WO2011038938A1 Sample receiving device for sample materials in ultra-high vacuum chambers |
| 04/07/2011 | WO2011038788A1 A method of generating a hole or recess or well in a substrate, a device for carrying out the method, and a high frequency high voltage source for use in such a device |
| 04/07/2011 | WO2011038560A1 Invert device |
| 04/07/2011 | WO2011008925A3 Methods for forming dielectric layers |
| 04/07/2011 | WO2011007745A8 Microwave plasma processing device and microwave plasma processing method |
| 04/07/2011 | WO2011006146A3 Substantially rigid collapsible liner and flexible gusseted or non-gusseted liners and methods of manufacturing the same and methods for limiting choke-off in liners |
| 04/07/2011 | WO2011005055A3 Wafer drying device and a wafer drying method employing the same |
| 04/07/2011 | WO2011002800A3 Methods and arrangements for in-situ process monitoring and control for plasma processing tools |
| 04/07/2011 | WO2010149579A3 Method for producing a structured metal coating |
| 04/07/2011 | WO2010129289A4 Decontamination of mocvd chamber using nh3 purge after in-situ cleaning |
| 04/07/2011 | WO2010116886A9 Insulated gate bipolar transistor |
| 04/07/2011 | WO2010057671A3 Method and device for handling a cut wafer block |
| 04/07/2011 | WO2010035126A3 Diffusion device for the production of solar cells and method for producing solar cells |
| 04/07/2011 | WO2010030493A3 Transistor with a passive gate and methods of fabricating the same |
| 04/07/2011 | WO2010025228A8 Method and apparatus for extended temperature pyrometry |
| 04/07/2011 | WO2010025124A8 Methods of fabricating complex two-dimensional conductive silicides |
| 04/07/2011 | US20110081955 Enhanced parimutuel wagering |
| 04/07/2011 | US20110081832 Polishing device and polishing method |
| 04/07/2011 | US20110081829 Polishing endpoint detection method and polishing endpoint detection apparatus |
| 04/07/2011 | US20110081787 Plasma processing method and apparatus |
| 04/07/2011 | US20110081786 Methods of reducing defect formation on silicon dioxide formed by atomic layer deposition (ald) processes |
| 04/07/2011 | US20110081785 Solution for the selective removal of metal from aluminum substrates |
| 04/07/2011 | US20110081784 Manufacturing method of semiconductor device |