Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2011
04/06/2011CN102001044A System and method for supplying grinding fluid by chemically mechanical polishing (CMP)
04/06/2011CN102001036A Polishing apparatus
04/06/2011CN102001035A Chemical mechanical polishing system
04/06/2011CN102000676A Surface treatment method of metal member and cleaning nozzle
04/06/2011CN101719516B Low gate charge deep trench power MOS device and manufacturing method thereof
04/06/2011CN101681909B Vertical current controlled silicon on insulator (soi) device and method of forming same
04/06/2011CN101677076B Vacuum lock in semiconductor transmitting system
04/06/2011CN101645391B Manufacturing cross-structures of nanostructures
04/06/2011CN101630648B Method and apparatus for repairing wiring of circuit board
04/06/2011CN101630471B LED display matrix based on gallium nitride luminescent material and manufacturing method thereof
04/06/2011CN101621064B Silicon device on insulator and preparation method thereof
04/06/2011CN101613091B CIGS powder, CIGS target, CIGS film and preparation method thereof
04/06/2011CN101604683B Air gap structure for interconnection and manufacture method thereof
04/06/2011CN101604085B Flat display panel, ultraviolet light sensor and manufacturing method thereof
04/06/2011CN101599452B Method for corroding edges of substrate with insulating buried layer
04/06/2011CN101598876B Array substrate for liquid crystal display device and method of fabricating the same
04/06/2011CN101593801B Method for preparing inverted light-emitting diodes
04/06/2011CN101587822B Method for separating semiconductor and base plate thereof
04/06/2011CN101582391B Method for forming a pattern, method for manufacturing semiconductor apparatus, and method for manufacturing display
04/06/2011CN101576719B Lithographic apparatus and device manufacturing method
04/06/2011CN101572208B Plasma processing apparatus and method
04/06/2011CN101567328B 芯片卡盘 Chip chuck
04/06/2011CN101546709B Etching method and manufacturing method of semiconductor device
04/06/2011CN101546701B Substrate treating apparatus and substrate treating method
04/06/2011CN101542711B Substrate position detecting apparatus and method for adjusting position of imaging component of the substrate position detecting apparatus
04/06/2011CN101540297B Method for manufacturing monolithic-integrated enhancement/depletion-type GaAs MHEMT annular oscillators
04/06/2011CN101540294B Method for fabricating semiconductor device with interface barrier
04/06/2011CN101533794B Chip surface detecting system inside bearing tray, material inlet/outlet device of bearing tray and method thereof
04/06/2011CN101529592B Method for evaluating semiconductor wafer
04/06/2011CN101527258B Cover part, process gas diffusing and supplying unit, and substrate processing apparatus
04/06/2011CN101517732B Semiconductor device and method for manufacturing same
04/06/2011CN101517702B Gate valve
04/06/2011CN101515585B Flash memory device and method of fabricating the same
04/06/2011CN101512745B Pogo pin, the fabrication method thereof and test socket using the same
04/06/2011CN101510506B Ion implantation method and apparatus
04/06/2011CN101506963B Double arm robot
04/06/2011CN101496148B Interrupted deposition process for selective deposition of si-containing films
04/06/2011CN101496143B Polishing composition
04/06/2011CN101496141B Method for providing characteristic in etching layer
04/06/2011CN101488507B Photodiode array, method of manufacturing the same, and radiation detector
04/06/2011CN101483171B Airgap-containing interconnect structure with patternable low-K material and method of fabricating
04/06/2011CN101483147B Method and structure to control thermal gradients in semiconductor wafers during rapid thermal processing
04/06/2011CN101481812B Electrolytic solution for integrated circuit copper wire laying electrodeposition
04/06/2011CN101471275B Device for holding substance to be processed
04/06/2011CN101467257B Light-emitting device and image display apparatus using the same
04/06/2011CN101454872B Stripper composition for photoresist and method for stripping photoresist stripping composition using the composition
04/06/2011CN101452949B Method of manufacturing organic EL device, organic el device, and electronic apparatus
04/06/2011CN101452857B Manufacture method of trench dmos transistor structure
04/06/2011CN101447480B Integrated circuit wafer structure simplifying test program and testing method thereof
04/06/2011CN101447408B Substrate processing system and substrate processing method
04/06/2011CN101435100B Fluid region control device and operation method thereof
04/06/2011CN101432854B Polishing liquid for CMP and method of polishing
04/06/2011CN101425457B High dielectric constant grid dielectric material forming method and a semiconductor device
04/06/2011CN101419912B Method for producing group iii nitride-based compound semiconductor
04/06/2011CN101419911B SOI substrats with fine concealed insulating layer
04/06/2011CN101416278B Simplified technological process for doubling range interval
04/06/2011CN101410939B Method of separating a structure in a semiconductor device
04/06/2011CN101395706B Method for crystallization of amorphous silicon by joule heating
04/06/2011CN101393844B Semiconductor machining system and method for protecting vacuum pressure sensitive elements thereof
04/06/2011CN101387825B Compensation gray level mask plate structure
04/06/2011CN101385134B Flip chip MLP with conductive ink
04/06/2011CN101383320B Method for forming isolation layer in semiconductor device
04/06/2011CN101373739B Semiconductor structure manufacturing method
04/06/2011CN101361177B Substrate transferring apparatus, substrate processing apparatus, substrate transferring arm and substrate transferring method
04/06/2011CN101359703B Manufacturing method for strip material of embedded ejection forming conductive wire frame
04/06/2011CN101355858B Electronic component-embedded board and method of manufacturing the same
04/06/2011CN101350322B Method for forming IC structure
04/06/2011CN101340779B Carrier and method for manufacturing printed circuit board
04/06/2011CN101339928B Inter-connecting structure for semiconductor device package and method of the same
04/06/2011CN101339916B Electrostatic chuck
04/06/2011CN101335195B Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device form them
04/06/2011CN101325230B Method for manufacturing photoelectricity semiconductor element of semiconductor containing P-type three-tribe nitrogen compound
04/06/2011CN101325206B Image sensor and method for manufacturing thereof
04/06/2011CN101315878B Heat processing furnace and method of manufacturing the same
04/06/2011CN101311806B Lower substrate, display apparatus having the same and method of manufacturing the same
04/06/2011CN101304034B Display substrate, method of manufacturing thereof and display apparatus having the same
04/06/2011CN101299421B Semiconductor device including ruthenium electrode and manufacture method thereof
04/06/2011CN101299150B Method for monitoring and predicting uniformity of a wafer and manufacture method of semiconductor wafer
04/06/2011CN101281860B Semiconductor manufacturing apparatus and manufacturing method of semiconductor device
04/06/2011CN101276840B Semiconductor memory device and method for manufacturing the same
04/06/2011CN101276783B Method for manufacturing semiconductor integrated circuit device
04/06/2011CN101276781B Gang flipping for ic packaging
04/06/2011CN101276106B In-plane switching mode liquid crystal display panel and method for fabricating the same
04/06/2011CN101273429B Apparatus for the removal of a fluorinated polymer from a substrate and methods therefor
04/06/2011CN101266975B Semiconductor device and method for manufacturing the same
04/06/2011CN101261934B Method of manufacturing device
04/06/2011CN101256982B Method for manufacturing strain silicium complementary metal oxide semiconductor transistor
04/06/2011CN101252150B Thin film transistor, method of fabricating the same, and organic light emitting diode display device including the same
04/06/2011CN101236991B Semiconductor device and manufacturing method thereof
04/06/2011CN101233072B A method of processing substrates
04/06/2011CN101231881B Shared global word line magnetic random access memory
04/06/2011CN101231437B Liquid crystal display device and method of manufacturing the same
04/06/2011CN101226907B Heat sinking gain type chip sizing level encapsulation body and method for forming the same
04/06/2011CN101223629B Semiconductor device manufacturing method
04/06/2011CN101221941B Substrate and production method for packaging structure
04/06/2011CN101217150B Semiconductor element and semiconductor device using the same
04/06/2011CN101211969B High speed high power nitride semiconductor device and manufacturing method thereof
04/06/2011CN101211687B Inductance coupling coil and inductance coupling plasma device applying same
04/06/2011CN101198905B Positive resist composition and method for forming resist pattern
04/06/2011CN101184817B Polymer restrainer for improving flatness