| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/19/2011 | US7927425 Power-delivery mechanism and apparatus of plasma-enhanced chemical vapor deposition using the same |
| 04/19/2011 | US7927424 Padded clamp ring with edge exclusion for deposition of thick AlCu/AlSiCu/Cu metal alloy layers |
| 04/19/2011 | US7927187 Method of polishing a target surface |
| 04/19/2011 | US7927183 Polishing pad |
| 04/19/2011 | US7926700 Solder pastes comprising nonresinous fluxes |
| 04/19/2011 | US7926446 Multi-place coating apparatus and process for plasma coating |
| 04/19/2011 | US7926445 Oxidizing method and oxidizing unit for object to be processed |
| 04/19/2011 | CA2535703C Group i-iii-vi quaternary or higher alloy semiconductor films |
| 04/19/2011 | CA2467806C Method for polishing a substrate surface |
| 04/19/2011 | CA2432300C Semiconductor wafer processing to increase the usable planar surface area |
| 04/19/2011 | CA2399547C Group iii nitride based fets and hemts with reduced trapping and method for producing the same |
| 04/14/2011 | WO2011044451A2 Multi-gas centrally cooled showerhead design |
| 04/14/2011 | WO2011044407A2 Apparatus and method for improved control of heating and cooling of substrates |
| 04/14/2011 | WO2011044392A1 Three dimensional inductor and transformer |
| 04/14/2011 | WO2011044360A2 Process for manufacturing solar cells including ambient pressure plasma torch step |
| 04/14/2011 | WO2011044359A2 Remote plasma apparatus for manufacturing solar cells |
| 04/14/2011 | WO2011044115A2 Method for thin film thermoelectric module fabrication |
| 04/14/2011 | WO2011044053A1 Method of providing stable and adhesive interface between fluorine-based low-k material and metal barrier layer |
| 04/14/2011 | WO2011044046A2 Improved multichamber split processes for led manufacturing |
| 04/14/2011 | WO2011043961A2 Epitaxial chamber with cross flow |
| 04/14/2011 | WO2011043933A2 Post-planarization densification |
| 04/14/2011 | WO2011043870A2 Split level shallow trench isolation for area efficient body contacts in soi mosfets |
| 04/14/2011 | WO2011043869A2 Semiconductor device having a copper plug |
| 04/14/2011 | WO2011043866A1 Roller assembly for a brush cleaning device in a cleaning module |
| 04/14/2011 | WO2011043613A2 Method for manufacturing an mim capacitor having a nanostructure |
| 04/14/2011 | WO2011043580A2 Method for fabricating a plastic electrode film |
| 04/14/2011 | WO2011043567A2 Wafer-supporting member, method for manufacturing same, and wafer-polishing unit comprising same |
| 04/14/2011 | WO2011043566A2 Apparatus and method for processing substrate |
| 04/14/2011 | WO2011043490A1 Vacuum heating/cooling device |
| 04/14/2011 | WO2011043481A1 Pattern forming method, chemical amplification resist composition and resist film |
| 04/14/2011 | WO2011043474A1 Curable resin composition and cured products thereof |
| 04/14/2011 | WO2011043448A1 Semiconductor device and method for manufacturing same |
| 04/14/2011 | WO2011043426A1 Silicon carbide joined body and method for joining silicon carbide members |
| 04/14/2011 | WO2011043425A1 Process for production of silicon carbide molded article |
| 04/14/2011 | WO2011043417A1 Semiconductor device and method for manufacturing same |
| 04/14/2011 | WO2011043414A1 Thin film, method for forming same, and semiconductor light-emitting element comprising the thin film |
| 04/14/2011 | WO2011043402A1 Semiconductor device |
| 04/14/2011 | WO2011043337A1 Low dielectric constant insulating film and formation method therefor |
| 04/14/2011 | WO2011043320A1 Photosensitive resin composition and use thereof |
| 04/14/2011 | WO2011043300A1 Semiconductor device and method for manufacturing same |
| 04/14/2011 | WO2011043284A1 Semiconductor integrated circuit device |
| 04/14/2011 | WO2011043264A1 Coating liquid for forming insulation film, insulation film using the same, and method for producing compound used in the same |
| 04/14/2011 | WO2011043263A1 Film-forming method and plasma processing apparatus |
| 04/14/2011 | WO2011043223A1 Actuator element and sheet-like actuator |
| 04/14/2011 | WO2011043222A1 Cleaning water for wafer and method for cleaning wafer |
| 04/14/2011 | WO2011043221A1 Rotational positioning device |
| 04/14/2011 | WO2011043218A1 Semiconductor device and method for manufacturing the same |
| 04/14/2011 | WO2011043206A1 Semiconductor device |
| 04/14/2011 | WO2011043183A1 Semiconductor device, process for production of the semiconductor device, and display device equipped with the semiconductor device |
| 04/14/2011 | WO2011043182A1 Method for removing electricity and method for manufacturing semiconductor device |
| 04/14/2011 | WO2011043178A1 Reprocessing method of semiconductor substrate, manufacturing method of reprocessed semiconductor substrate, and manufacturing method of soi substrate |
| 04/14/2011 | WO2011043177A1 Method for cutting silicon ingot using wire saw, and wire saw |
| 04/14/2011 | WO2011043176A1 Oxide semiconductor layer and semiconductor device |
| 04/14/2011 | WO2011043170A1 Semiconductor device and manufacturing method thereof |
| 04/14/2011 | WO2011043164A1 Semiconductor device and method for manufacturing the semiconductor device |
| 04/14/2011 | WO2011043163A1 Semiconductor device and manufacturing method thereof |
| 04/14/2011 | WO2011043162A1 Semiconductor device and method for manufacturing the semiconductor device |
| 04/14/2011 | WO2011043139A1 Raw material for chemical vapor deposition and method for forming silicon-containing thin film using the raw material |
| 04/14/2011 | WO2011043120A1 Method for manufacturing a semiconductor device |
| 04/14/2011 | WO2011043116A1 Semiconductor device |
| 04/14/2011 | WO2011043110A1 Semiconductor device and method for manufacturing same |
| 04/14/2011 | WO2011043063A1 Substrate cooling device, sputtering device, and method for producing an electronic device |
| 04/14/2011 | WO2011043058A1 Semiconductor device |
| 04/14/2011 | WO2011043052A1 Flat plate-conveying device |
| 04/14/2011 | WO2011043048A1 Apparatus and method for measuring semiconductor carrier lifetime |
| 04/14/2011 | WO2011043019A1 Method for mounting member |
| 04/14/2011 | WO2011043009A1 Semiconductor manufacturing device and method for manufacturing semiconductor device using same |
| 04/14/2011 | WO2011042982A1 Semiconductor device manufacturing method |
| 04/14/2011 | WO2011042965A1 Semiconductor device and semiconductor logic circuit device |
| 04/14/2011 | WO2011042955A1 Semiconductor device and method of producing same |
| 04/14/2011 | WO2011042666A1 Supporting device for loading plates |
| 04/14/2011 | WO2011042256A1 Chip package with a chip embedded in a wiring body |
| 04/14/2011 | WO2011042093A1 Device for aligning two substrates |
| 04/14/2011 | WO2011042017A1 Recycling method and device for recycling waste water containing slurry from a semi-conductor treatment process, in particular from a chemico-mechanical polishing process |
| 04/14/2011 | WO2011020038A3 Interconnect structure with elements of varying height or different materials that allows a balanced stress to prevent thin die warpage |
| 04/14/2011 | WO2011019824A3 Pulsed deposition and recrystallization and tandem solar cell design utilizing crystallized/amorphous material |
| 04/14/2011 | WO2011011261A3 Enhancement-mode gallium nitride high electron mobility transistor |
| 04/14/2011 | WO2011009847A3 Method for manufacturing a device with a display element |
| 04/14/2011 | WO2011009002A3 Flow control features of cvd chambers |
| 04/14/2011 | WO2011008943A3 Storage device temperature sensing |
| 04/14/2011 | WO2011008937A3 Conductive heating |
| 04/14/2011 | WO2011004987A3 Substrate-processing apparatus and substrate-processing method for selectively inserting diffusion plates |
| 04/14/2011 | WO2011003057A3 Method of forming monolithic cmos-mems hybrid integrated, packaged structures |
| 04/14/2011 | WO2011002810A3 Methods for constructing an optimal endpoint algorithm |
| 04/14/2011 | WO2010151855A3 Iii-v semiconductor structures including aluminum-silicon nitride passivation |
| 04/14/2011 | WO2010151087A3 Manufacturing method of half tone mask |
| 04/14/2011 | WO2010138930A9 Tpir apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same |
| 04/14/2011 | WO2010115632A8 Method for automatic measurement and for teaching-in of location positions of objects within a substrate processing system by means of sensor carriers and associated sensor carrier |
| 04/14/2011 | US20110086756 Method for preparing silicon intercalated monolayer graphene |
| 04/14/2011 | US20110086569 Method for producing semiconductor device and display device |
| 04/14/2011 | US20110086518 Post chromium alloy plasma etch ashing process |
| 04/14/2011 | US20110086517 Process for producing silicon nitride film, process for producing silicon nitride film laminate, computer-readable storage medium, and plasma cvd device |
| 04/14/2011 | US20110086516 METHOD OF DEPOSITING DIELECTRIC FILM HAVING Si-N BONDS BY MODIFIED PEALD METHOD |
| 04/14/2011 | US20110086515 Mask pattern verification apparatus, mask pattern verification method and method of fabricating a semiconductor device |
| 04/14/2011 | US20110086514 Substrate processing method and apparatus |
| 04/14/2011 | US20110086513 Upper electrode backing member with particle reducing features |
| 04/14/2011 | US20110086512 Semiconductor device fabrication method and semiconductor device |
| 04/14/2011 | US20110086511 Photomask having a reduced field size and method of using the same |
| 04/14/2011 | US20110086510 Semiconductor device and method of manufacture thereof |
| 04/14/2011 | US20110086509 Process for forming cobalt and cobalt silicide materials in tungsten contact applications |