Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2011
05/11/2011EP2319070A2 Passivation of aluminum nitride substrates
05/11/2011EP2319069A1 A method of growing a thin film, a method of forming a structure and a device.
05/11/2011EP2318322A1 Device and method for accommodating and retaining flat objects without contact and for conveying flat objects
05/11/2011EP2318156A1 Clean room-suitable linear guide
05/11/2011EP2084734B1 Plasma etching method for producing positive etching profiles in silicon substrates
05/11/2011EP2075839B1 Method for evaluating soi wafer
05/11/2011EP2074652B1 Silicide formation on a wafer
05/11/2011EP1732118B1 Heater, reflow apparatus with such heater
05/11/2011EP1672681B1 Exposure apparatus, substrate carrying method, exposure method, and method for producing device
05/11/2011EP1639638B1 Flash memory cell array
05/11/2011EP1618599B1 Method of making a nanogap for variable capacitive elements
05/11/2011EP1600530B1 (001)-orientated perovskite film formation method and device having perovskite film
05/11/2011EP1485953B1 Field effect transistor
05/11/2011EP1434253B1 Production method of a semiconductor device fabricated on surface of silicon having <110> direction of crystal plane
05/11/2011EP1305829B1 Solder bar for high power flip chips
05/11/2011EP1292991B1 Method of making a vertical MOS transistor having a buried gate
05/11/2011EP1268882B1 Axial gradient transport apparatus and process for producing large size, single crystals of silicon carbide
05/11/2011EP1245044B1 Method for determining optimal process targets in microelectronic fabrication
05/11/2011EP1057206B1 Low pressure inductively coupled high density plasma reactor
05/11/2011CN201829505U 半导体器件 Semiconductor devices
05/11/2011CN201829492U Through silicon via connecting structure
05/11/2011CN201829476U Straight-side metal cover semiconductor package
05/11/2011CN201829474U Clamp for manufacturing flat-panel display
05/11/2011CN201829473U Boat structure
05/11/2011CN201829472U Accommodating container for carrying processing clamp of base plate
05/11/2011CN201829471U Glue removal equipment with marking function
05/11/2011CN201829470U Carrying car
05/11/2011CN201829469U Integrated manufacture equipment of semiconductor element
05/11/2011CN201824235U Novel chemical machinery polishing device
05/11/2011CN1983573B Semiconductor device and method for fabricating the same
05/11/2011CN1961167B Gravity compensation device and method for manufacturing electronic device
05/11/2011CN1959542B Composition for removing immersion lithography solution and method for manufacturing semiconductor device
05/11/2011CN1955849B Cooling plate, bake unit, and substrate treating apparatus
05/11/2011CN1936112B Low defect density silicon
05/11/2011CN1922722B Reduction of feature critical dimensions
05/11/2011CN1906493B Electrically connecting apparatus and contactor
05/11/2011CN1866492B System and method for identification of a reference integrated circuit for a pick-and-place equipment
05/11/2011CN1851922B Semiconductor device and method for manufacturing the same
05/11/2011CN1841098B Multi-layer spectral purity filter and lithographic apparatus, device manufacturing method, and device
05/11/2011CN1832134B Method of forming a gate electrode pattern in semiconductor device
05/11/2011CN1812687B Atmospheric radio-frequency discharging high-speed cold plasma array generator
05/11/2011CN1728347B Apparatus and method for plating semiconductor wafers
05/11/2011CN1712333B Substrate turning over apparatus and method, substrate transporting device and method, substrate processing apparatus and method
05/11/2011CN1677569B NAND flash memory device and method of reading the same
05/11/2011CN1519573B Integrated circuit device including scan test circuit and methods of testing same
05/11/2011CN102057762A Plasma processing apparatus and plasma processing method
05/11/2011CN102057761A Plasma processing apparatus
05/11/2011CN102057503A Crystal growth apparatus for solar cell manufacturing
05/11/2011CN102057489A Semiconductor device, method for manufacturing semiconductor device, transistor substrate, light emitting device and display device
05/11/2011CN102057488A Method for manufacturing semiconductor device
05/11/2011CN102057482A Wiring board and liquid crystal display device
05/11/2011CN102057480A Dicing a semiconductor wafer
05/11/2011CN102057479A Method and apparatus for UV curing with water vapor
05/11/2011CN102057478A Electrode tuning method and apparatus for a layered heater structure
05/11/2011CN102057477A Stage with alignment function, treatment device equipped with stage with the alignment function, and substrate alignment method
05/11/2011CN102057476A Fast substrate support temperature control
05/11/2011CN102057475A Manufacturing method for semiconductor device and semiconductor device
05/11/2011CN102057474A Crimped-ball diameter detecting device and method
05/11/2011CN102057473A Methods for coating the backside of semiconductor wafers
05/11/2011CN102057472A Plasma processing systems with mechanisms for controlling temperatures of components
05/11/2011CN102057471A Showerhead electrode assemblies for plasma processing apparatuses
05/11/2011CN102057470A Functional solution supply system
05/11/2011CN102057469A Cleaning device
05/11/2011CN102057468A Method for cleaning substrate and substrate cleaning apparatus
05/11/2011CN102057467A Laser annealing method and laser annealing apparatus
05/11/2011CN102057466A Phosphorous-comprising dopants and methods for forming phosphorous-doped regions in semiconductor substrates using phosphorous-comprising dopants
05/11/2011CN102057465A Plasma processing device and plasma processing method
05/11/2011CN102057464A Spin processing apparatus and spin processing method
05/11/2011CN102057463A Method for manufacturing nitrogen compound semiconductor substrate, nitrogen compound semiconductor substrate, method for manufacturing single crystal SiC substrate, and single crystal SiC substrate
05/11/2011CN102057462A Short thermal profile oven useful for screen printing
05/11/2011CN102057437A Semiconductor memory device
05/11/2011CN102057383A Subset selection of RFID tags using light
05/11/2011CN102057332A Method and system for thermally conditioning an optical element
05/11/2011CN102057078A Method of reducing memory effects in semiconductor epitaxy
05/11/2011CN102057076A Coating system and method for coating a substrate
05/11/2011CN102057000A Ink composition for forming an insulating film and an insulating film formed from said ink composition
05/11/2011CN102056954A Antirelective coating compositions
05/11/2011CN102056860A Corrosion-resistant member and method for manufacture thereof
05/11/2011CN102056658A Light applying device and light applying method
05/11/2011CN102056394A Plasma processing apparatus
05/11/2011CN102056393A Inductively coupled plasma apparatus
05/11/2011CN102055053A Bonding technology based method for manufacturing microwave transmission line
05/11/2011CN102054877A Silicon carbide semiconductor device
05/11/2011CN102054876A Fast recovery diode
05/11/2011CN102054875A Power type GaN base Schottky diode and manufacture method thereof
05/11/2011CN102054874A 薄膜晶体管及其制造方法 A thin film transistor and its manufacturing method
05/11/2011CN102054872A Semiconductor devices and methods
05/11/2011CN102054871A High-speed semiconductor device structure and forming method thereof
05/11/2011CN102054870A Semiconductor structure and forming method thereof
05/11/2011CN102054869A Graphene device and manufacturing method thereof
05/11/2011CN102054868A Semiconductor device and manufacturing method thereof
05/11/2011CN102054867A Structure and method for improving working frequency of power metal oxide semiconductor (MOS) transistor
05/11/2011CN102054866A Transverse high-voltage MOS device and manufacturing method thereof
05/11/2011CN102054865A MOS (Metal Oxide Semiconductor) transistor used as electrostatic protection structure and manufacturing method thereof
05/11/2011CN102054864A LDMOS (laterally diffused metal oxide semiconductor) and manufacturing method thereof
05/11/2011CN102054863A Source follower transistor, pixel structure and circuit
05/11/2011CN102054862A Antimonide transistor with high electron mobility and manufacturing method thereof
05/11/2011CN102054859A Bipolar semiconductor device and manufacturing method
05/11/2011CN102054858A Amorphous ternary high-K gate dielectric material and preparation method thereof
05/11/2011CN102054857A 集成电路结构 Integrated circuit structure