| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/12/2011 | WO2011055960A2 Apparatus and method for polishing and washing a semiconductor wafer |
| 05/12/2011 | WO2011055825A1 Etching liquid for etching silicon substrate rear surface in through silicon via process and method for manufacturing semiconductor chip having through silicon via using the etching liquid |
| 05/12/2011 | WO2011055822A1 Substrate processing apparatus, substrate transfer apparatus, and method for controlling substrate processing apparatus |
| 05/12/2011 | WO2011055774A1 Epitaxial substrate for semiconductor element, semiconductor element, and method for producing epitaxial substrate for semiconductor element |
| 05/12/2011 | WO2011055769A1 Method for manufacturing semiconductor element and semiconductor device, and deposition apparatus |
| 05/12/2011 | WO2011055758A1 Focus test mask, focus measuring method, exposure apparatus, and exposure method |
| 05/12/2011 | WO2011055755A1 Method for writing in non-volatile semiconductor memory device and non-volatile semiconductor memory device |
| 05/12/2011 | WO2011055691A1 Method for manufacturing semiconductor device |
| 05/12/2011 | WO2011055673A1 Hybrid silicon wafer |
| 05/12/2011 | WO2011055672A1 Hybrid silicon wafer |
| 05/12/2011 | WO2011055671A1 Film forming method and method for forming capacitor |
| 05/12/2011 | WO2011055669A1 Semiconductor device |
| 05/12/2011 | WO2011055668A1 Semiconductor device |
| 05/12/2011 | WO2011055664A1 Semiconductor light emitting element and method for manufacturing semiconductor light emitting element |
| 05/12/2011 | WO2011055660A1 Semiconductor device |
| 05/12/2011 | WO2011055645A1 Semiconductor device |
| 05/12/2011 | WO2011055644A1 Method for manufacturing semiconductor device |
| 05/12/2011 | WO2011055620A1 Semiconductor device and manufacturing method thereof |
| 05/12/2011 | WO2011055618A1 Apparatus and method for formation of low-temperature polysilicon film |
| 05/12/2011 | WO2011055611A1 Signal transmission circuit device, semiconductor device, method and apparatus for inspecting semiconductor device, signal transmission device, and motor drive apparatus using signal transmission device |
| 05/12/2011 | WO2011055588A1 Adhesive composition |
| 05/12/2011 | WO2011055580A1 Adhesive composition, circuit connecting structure, semiconductor device and adhesion improvement agent for glass |
| 05/12/2011 | WO2011055543A1 Epitaxially laminated iii-nitride substrate |
| 05/12/2011 | WO2011055502A1 Electronic component cleaning device and cleaning method |
| 05/12/2011 | WO2011055492A1 Semiconductor storage device |
| 05/12/2011 | WO2011055482A1 Contact-less holding device, transfer device, and contact-less holding method |
| 05/12/2011 | WO2011055474A1 Active matrix substrate, liquid crystal display panel provided with same, and method for manufacturing active matrix substrate |
| 05/12/2011 | WO2011055433A1 Nonvolatile semiconductor storage device |
| 05/12/2011 | WO2011055420A1 Semiconductor device |
| 05/12/2011 | WO2011054968A1 Epitaxial graphene on sic, having an open gap and mobility comparable to that of standard zero-gap graphene |
| 05/12/2011 | WO2011054852A1 Hybrid double box back gate silicon-on-insulator wafers with enhanced mobility channels |
| 05/12/2011 | WO2011054779A1 Measuring system and method for checking a workpiece, in particular a semiconductor substrate |
| 05/12/2011 | WO2011054776A1 High-k/metal gate cmos finfet with improved pfet threshold voltage |
| 05/12/2011 | WO2011054713A1 Stabilization of bicycloheptadiene |
| 05/12/2011 | WO2011054685A1 Two pfet soi memory cells |
| 05/12/2011 | WO2011054670A1 High-voltage transistor having multiple dielectrics and production method |
| 05/12/2011 | WO2011054664A1 Multiple width features in integrated circuits |
| 05/12/2011 | WO2011054611A2 Method for the self-assembly of electrical, electronic or micromechanical components on a substrate |
| 05/12/2011 | WO2011054569A1 Template-registered diblock copolymer mask for mram device formation |
| 05/12/2011 | WO2011054560A1 Method for fabricating an integrated circuit |
| 05/12/2011 | WO2011054554A1 Metallurgical clamshell methods for micro land grid array fabrication |
| 05/12/2011 | WO2011054454A1 Method and device for crystallizing an amorphous semiconductor layer with a laser beam |
| 05/12/2011 | WO2011054282A1 Ldmos device with lateral diffusion buried layer under gate and method for fabricating the same |
| 05/12/2011 | WO2011054280A1 Ldmos device with multiple field plates and manufacturing method thereof |
| 05/12/2011 | WO2011054037A1 Method and apparatus for light induced plating of solar cells |
| 05/12/2011 | WO2011034778A3 Memory devices with enhanced isolation of memory cells, systems including same and methods of forming same |
| 05/12/2011 | WO2011028359A3 Mems device with stress isolation and method of fabrication |
| 05/12/2011 | WO2011020712A3 Oligothiophenes derivatives |
| 05/12/2011 | WO2011019692A3 Ultrasonic transducers for wire bonding and methods for forming wire bonds using ultrasonic transducers |
| 05/12/2011 | WO2010150135A3 Method for treating a semiconductor wafer |
| 05/12/2011 | WO2010147357A4 Heterogeneous substrate, nitride-based semiconductor device using same and manufacturing method thereof |
| 05/12/2011 | WO2010088501A3 Material sheet handling system and processing methods |
| 05/12/2011 | US20110111604 Plasma surface treatment to prevent pattern collapse in immersion lithography |
| 05/12/2011 | US20110111603 Atomic layer deposition apparatus |
| 05/12/2011 | US20110111602 Plasma processing method |
| 05/12/2011 | US20110111601 Plasma processing apparatus and plasma processing method |
| 05/12/2011 | US20110111600 Processing method for soi substrate |
| 05/12/2011 | US20110111599 Method for patterned etching of selected material |
| 05/12/2011 | US20110111598 Method for preparing patterned substrate by using nano- or micro- particles |
| 05/12/2011 | US20110111597 Methods of Utilizing Silicon Dioxide-Containing Masking Structures |
| 05/12/2011 | US20110111596 Sidewall Image Transfer Using the Lithographic Stack as the Mandrel |
| 05/12/2011 | US20110111595 Chemical mechanical polishing composition and methods relating thereto |
| 05/12/2011 | US20110111594 Wafer bonding method |
| 05/12/2011 | US20110111593 Pattern formation method, pattern formation system, and method for manufacturing semiconductor device |
| 05/12/2011 | US20110111592 Angle ion implant to re-shape sidewall image transfer patterns |
| 05/12/2011 | US20110111591 Semiconductor Wafer Having Through-Hole Vias on Saw Streets With Backside Redistribution Layer |
| 05/12/2011 | US20110111590 Device and methodology for reducing effective dielectric constant in semiconductor devices |
| 05/12/2011 | US20110111589 Barrier-metal-free copper camascence technology using atomic hydrogen enhanced reflow |
| 05/12/2011 | US20110111588 Wiring forming method |
| 05/12/2011 | US20110111587 Method for forming post bump |
| 05/12/2011 | US20110111586 Method of Setting a Work Function of a Fully Silicided Semiconductor Device, and Related Device |
| 05/12/2011 | US20110111585 Manufacturing method of semiconductor device |
| 05/12/2011 | US20110111584 Sram cell having a rectangular combined active area for planar pass gate and planar pull-down nfets |
| 05/12/2011 | US20110111583 Method of reducing coupling between floating gates in nonvolatile memory |
| 05/12/2011 | US20110111582 Method for depositing ultra fine grain polysilicon thin film |
| 05/12/2011 | US20110111581 Deposition apparatus and manufacturing method of thin film device |
| 05/12/2011 | US20110111580 Method of fabricating a semiconductor device |
| 05/12/2011 | US20110111579 Non-volatile semiconductor storage device and method of manufacturing the same |
| 05/12/2011 | US20110111578 METHOD OF FORMING p-TYPE GALLIUM NITRIDE BASED SEMICONDUCTOR, METHOD OF FORMING NITRIDE SEMICONDUCTOR DEVICE, AND METHOD OF FORMING EPITAXIAL WAFER |
| 05/12/2011 | US20110111577 Semiconductor carbon nanotubes and method of selectively growing semiconductor carbon nanotubes using light irradiation |
| 05/12/2011 | US20110111576 Laser-scribing system for structuring substrates for thin layer solar modules |
| 05/12/2011 | US20110111575 Method for manufacturing soi substrate |
| 05/12/2011 | US20110111574 Method for manufacturing semiconductor substrate |
| 05/12/2011 | US20110111573 Low parasitic capacitance bit line process for stack dram |
| 05/12/2011 | US20110111572 Memory Including Bipolar Junction Transistor Select Devices |
| 05/12/2011 | US20110111571 Method for obtaining quality ultra-shallow doped regions and device having same |
| 05/12/2011 | US20110111570 Methods of fabricating non-volatile memory devices including double diffused junction regions |
| 05/12/2011 | US20110111569 Mos transistor with gate trench adjacent to drain extension field insulation |
| 05/12/2011 | US20110111568 Methods of fabricating vertical channel transistors |
| 05/12/2011 | US20110111567 Semiconductor device and method of manufacturing the same |
| 05/12/2011 | US20110111566 Semiconductor device and manufacturing method of the same |
| 05/12/2011 | US20110111565 Dual gate finfet |
| 05/12/2011 | US20110111564 Method and apparatus for optical modulation |
| 05/12/2011 | US20110111563 Adhesive tape for resin-encapsulating and method of manufacture of resin-encapsulated semiconductor device |
| 05/12/2011 | US20110111562 Partially Patterned Lead Frames and Methods of Making and Using the Same in Semiconductor Packaging |
| 05/12/2011 | US20110111561 Interconnect structures for stacked dies, including penetrating structures for through-silicon vias, and associated systems and methods |
| 05/12/2011 | US20110111560 Lock and Key Through-Via Method for Wafer Level 3D Integration and Structures Produced Thereby |
| 05/12/2011 | US20110111559 Integrated-circuit package for proximity communication |
| 05/12/2011 | US20110111558 Method for manufacturing semiconductor element and semiconductor device, and deposition apparatus |
| 05/12/2011 | US20110111557 Method for manufacturing semiconductor device |