Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2011
05/25/2011EP2325873A1 Method for manufacturing a suspended membrane and double-gated MOS transistor
05/25/2011EP2325872A1 Bipolar semiconductor device and method for manufacturing same
05/25/2011EP2325871A2 Semiconductor device and method of manufacturing the same
05/25/2011EP2325870A1 Method of fabricating polysilicon layer, thin film transistor, organic light emitting diode display device including the same, and method of fabricating the same
05/25/2011EP2325869A2 Methods of fabricating silicon carbide devices having channel regions with a smooth surface
05/25/2011EP2325868A1 Method for manufacturing laminated wafer
05/25/2011EP2325867A1 High-dielectric constant capacitor
05/25/2011EP2325866A1 Substrate holding device, exposure apparatus and device manufacturing method
05/25/2011EP2325694A1 Radiation-sensitive resin composition, and resist pattern formation method
05/25/2011EP2325592A1 Method and fixture for manufacturing coplanar evaporators with multiple heat pipes and evaporator obtained by this method
05/25/2011EP2324968A1 Robot and its teaching method
05/25/2011EP2324950A1 Semiconductor substrate to be cut with treated and minute cavity region
05/25/2011EP2324932A1 Inkjet image-drawing device
05/25/2011EP2324497A1 3d chip-stack with fuse-type through silicon via
05/25/2011EP2324496A1 Semiconductor device with isolation trench liner, and related fabrication methods
05/25/2011EP2324495A2 Localized substrate geometry characterization
05/25/2011EP2324494A1 Salicide structures for heat-influenced semiconductor applications
05/25/2011EP2324493A2 Relaxation of strained layers
05/25/2011EP2324492A2 Stable amorphous metal oxide semiconductor
05/25/2011EP2324491A1 A progressive trimming method
05/25/2011EP2324490A2 Methods utilizing microwave radiation during formation of semiconductor constructions
05/25/2011EP2324489A2 A reacted particle deposition (rpd) method for forming a compound semi-conductor thin-film
05/25/2011EP2324488A1 Methods of fabricating semiconductor structures or devices using layers of semiconductor material having selected or controlled lattice parameters
05/25/2011EP2324487A1 Methods of fabricating complex two-dimensional conductive silicides
05/25/2011EP2324392A1 Photosensitive composition, pattern-forming method using the composition and resin used in the composition
05/25/2011EP2324344A2 Improved capacitive sensor and method for making the same
05/25/2011EP2324085A2 Process of preparing an electrical isolation film and application for the metallisation of through vias
05/25/2011EP2324074A1 A heat radiator composed of a combination of a graphite-metal complex and an aluminum extruded material
05/25/2011EP2323932A1 Conveyor assembly and method for conveying a substrate carrier
05/25/2011EP2073254B1 Method of forming amorphous silica coating of low dielectric constant and amorphous silica coating of low dielectric constant obtained thereby
05/25/2011EP1794799B1 Semiconductor device and method of forming a semiconductor device
05/25/2011EP1502283B1 Method of etching substrates
05/25/2011EP1436827B1 Device for soldering contacts on semiconductor chips
05/25/2011EP1229990B1 Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels
05/25/2011EP1189495B1 Method of manufacturing multilayer ceramic substrate
05/25/2011EP1138088B1 Melt through contact formation method
05/25/2011EP1060285B1 Apparatus and method for depositing a semiconductor material
05/25/2011CN201846534U Solder paste coating aid
05/25/2011CN201845784U High-power high-current density rectifier diode chip
05/25/2011CN201845778U Silicon-on-insulator P-type semiconductor combined device for increasing current density
05/25/2011CN201845756U Improved lead connecting structure for electric elements and substrate
05/25/2011CN201845753U Wafer clamp
05/25/2011CN201845752U Substrate aligning device, substrate aligning platform and substrate conveying equipment
05/25/2011CN201845751U Transmission system
05/25/2011CN201845750U Solar wafer transfer device with flexible near-end rotary components
05/25/2011CN201845749U Feeding device
05/25/2011CN201845748U Feeding and discharging device
05/25/2011CN201845747U Quartz boat for furnace tube
05/25/2011CN201845746U Boat
05/25/2011CN201845745U Switching system
05/25/2011CN201845335U Device used for determining process model for photoetching process
05/25/2011CN201845154U Thin-film transistor array substrate
05/25/2011CN201841546U Mechanical arm and protective suite
05/25/2011CN201841472U Grinding fluid arm and chemical mechanical grinding equipment
05/25/2011CN201841468U Gas transmission device
05/25/2011CN1998099B High efficiency organic photovoltaic cells employing hybridized mixed-planar heterojunctions
05/25/2011CN1971849B Laser irradiation apparatus
05/25/2011CN1967388B Composition for removing photoresist and method of forming a pattern using the same
05/25/2011CN1950929B Exposure equipment, exposure method and device manufacturing method
05/25/2011CN1940721B Photoresistance material for immersion lithography and immersion lithography method
05/25/2011CN1881090B Substrate processing system for performing exposure process in gas atmosphere
05/25/2011CN1877451B Substrate processing system and substrate processing method
05/25/2011CN1821878B Photresist compositions comprising resin blends
05/25/2011CN1806321B Plasma spraying for joining silicon parts
05/25/2011CN1770974B Method of and apparatus for mounting an electronic part to a substrate
05/25/2011CN1728401B Semiconductor device and manufacturing method of semiconductor device
05/25/2011CN1680860B Liquid crystal display and thin film transistor array panel therefor
05/25/2011CN1641485B Exposure system method for evaluating lithography process
05/25/2011CN102077369A Device for structuring a solar module
05/25/2011CN102077355A Organic thin film transistor, method for manufacturing the same, display member using the organic thin film transistor, and display
05/25/2011CN102077354A Thin film transistor, semiconductor device and electronic device
05/25/2011CN102077353A Double gate and tri-gate transistor formed on a bulk substrate and method for forming the transistor
05/25/2011CN102077346A Method for fabricating high density pillar structures by double patterning using positive photoresist
05/25/2011CN102077340A Method of reducing erosion of metal cap layer during via patterning in semiconductor devices
05/25/2011CN102077339A Big foot lift pin
05/25/2011CN102077338A Pedestal heater for low temperature pecvd application
05/25/2011CN102077337A Non-contact type conveyor plate having a suction force
05/25/2011CN102077336A Low thermal mass semiconductor wafer support
05/25/2011CN102077335A Apparatus and method for measuring radiation energy during thermal processing
05/25/2011CN102077334A Bonding device
05/25/2011CN102077333A Substrate heating apparatus, liquid material applying apparatus provided with substrate heating apparatus, and substrate heating method
05/25/2011CN102077332A Sandwich piezoelectric device with solid copper electrode
05/25/2011CN102077331A 薄膜晶体管 The thin film transistor
05/25/2011CN102077330A Rapid thermal processing chamber with shower head
05/25/2011CN102077329A Selective activation of hydrogen passivated silicon and germanium surfaces
05/25/2011CN102077328A RF power delivery system in a semiconductor apparatus
05/25/2011CN102077327A Methods and apparatus for in-situ chamber dry clean during photomask plasma etching
05/25/2011CN102077326A Protective film composition for wafer dicing
05/25/2011CN102077325A Film forming method and processing system
05/25/2011CN102077324A Prevention and reduction of solvent and solution penetration into porous dielectrics using a thin barrier layer
05/25/2011CN102077323A Wiring structure, thin film transistor substrate, method for manufacturing thin film transistor substrate, and display device
05/25/2011CN102077322A Laser annealing device
05/25/2011CN102077321A CMOS device comprising mos transistors with recessed drain and source areas and non-conformal metal silicide regions
05/25/2011CN102077320A Plasma processing device, plasma processing method, and mechanism for regulating temperature of dielectric window
05/25/2011CN102077319A Film deposition method
05/25/2011CN102077318A Method and apparatus for laser annealing
05/25/2011CN102077317A Triangle two dimensional complementary patterning of pillars
05/25/2011CN102077316A Superimposition of rapid periodic and extensive post multiple substrate uv-ozone clean sequences for high throughput and stable substrate to substrate performance
05/25/2011CN102077315A System and method to fabricate magnetic random access memory
05/25/2011CN102077144A Resin composition for making insoluble resist pattern, and method for formation of resist pattern by using the same