| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 06/01/2011 | CN101492834B Method for preventing reaction liquid from polluting wafer |
| 06/01/2011 | CN101483206B Processing method for enhancing solar cell working stability and apparatus thereof |
| 06/01/2011 | CN101465365B Method of manufacturing non-volatility electric impedance memory |
| 06/01/2011 | CN101452956B High voltage PMOS device and production method |
| 06/01/2011 | CN101452872B High-voltage region shallow trench top angle rounding method |
| 06/01/2011 | CN101452817B Method for monitoring obliteration of wafer support platform and corresponding system |
| 06/01/2011 | CN101447425B Method of preventing etch profile bending and bowing by treating a polymer formed on the opening sidewalls |
| 06/01/2011 | CN101443157B 抛光垫 Polishing pad |
| 06/01/2011 | CN101419985B Hetero junction field effect transistor for insulated gate type source field board |
| 06/01/2011 | CN101409213B Gas supply device, semiconductor manufacturing device and component for gas supply device |
| 06/01/2011 | CN101393918B Dual-bit SONOS EEPROM storage construction unit and preparation method thereof |
| 06/01/2011 | CN101393897B Method for manufacturing liquid crystal display device |
| 06/01/2011 | CN101393427B Cue system and method for cleaning wafer box |
| 06/01/2011 | CN101388377B Silicon chip mark, implementing and reading method thereof |
| 06/01/2011 | CN101375377B Plasma reactor with a dynamically adjustable plasma source power applicator |
| 06/01/2011 | CN101350360B Three-dimensional stacking non-phase-change caused resistance conversion storage apparatus and manufacturing method thereof |
| 06/01/2011 | CN101326634B Semiconductor device |
| 06/01/2011 | CN101322232B Solder deposition and thermal processing of thin-die thermal interface material |
| 06/01/2011 | CN101300320B Chemical mechanical polishing slurry compositions, methods of preparing the same and methods of using the same |
| 06/01/2011 | CN101276776B 卡盘工作台机构 Chuck table mechanism |
| 06/01/2011 | CN101241929B Semiconductor structure and method of forming the structure |
| 06/01/2011 | CN101241854B A wafer production technology |
| 06/01/2011 | CN101220958B Combustion heater and exhaust gas combustion device |
| 06/01/2011 | CN101211112B Method of forming pattern |
| 06/01/2011 | CN101162368B Method, an alignment mark and use of a hard mask material |
| 06/01/2011 | CN101154686B Power MOSFET, semiconductor device including the power MOSFET, and method for making the power MOSFET |
| 06/01/2011 | CN101140847B An ion beam guide tube |
| 06/01/2011 | CN101106077B Method to improve metal defects in semiconductor device fabrication |
| 06/01/2011 | CN101101860B Adhesive chuck, and apparatus and method for assembling substrates using the same |
| 06/01/2011 | CN101086961B Method of forming a semiconductor device |
| 06/01/2011 | CN101008789B Method and arrangement for predicting thermally-induced deformation of a substrate, and a semiconductor device |
| 05/31/2011 | USRE42409 Method of manufacturing flash memory device |
| 05/31/2011 | USRE42403 Laterally diffused MOS transistor having N+ source contact to N-doped substrate |
| 05/31/2011 | USRE42402 300 mm microenvironment pod with door on side |
| 05/31/2011 | US7953956 Reconfigurable circuit with a limitation on connection and method of determining functions of logic circuits in the reconfigurable circuit |
| 05/31/2011 | US7953569 On die thermal sensor of semiconductor memory device and method thereof |
| 05/31/2011 | US7953567 Defect inspection apparatus and defect inspection method |
| 05/31/2011 | US7953512 Substrate processing system, control method for substrate processing apparatus and program stored on medium |
| 05/31/2011 | US7953511 System and method for reducing processing errors during wafer fabrication employing a 2D wafer scribe and monitoring system |
| 05/31/2011 | US7953269 Method for inspecting pattern defect occured on patterns formed on a substrate |
| 05/31/2011 | US7953129 Laser light source device, exposure device, and mask inspection device using this laser light source device |
| 05/31/2011 | US7952925 Nonvolatile semiconductor memory device having protection function for each memory block |
| 05/31/2011 | US7952907 Ferroelectric random access memory device |
| 05/31/2011 | US7952851 Wafer grounding method for electrostatic clamps |
| 05/31/2011 | US7952803 Lithographic apparatus and device manufacturing method |
| 05/31/2011 | US7952725 Surface shape measurement apparatus and exposure apparatus |
| 05/31/2011 | US7952700 Method of apparatus for detecting particles on a specimen |
| 05/31/2011 | US7952699 Apparatus of inspecting defect in semiconductor and method of the same |
| 05/31/2011 | US7952696 Exposure measurement method and apparatus, and semiconductor device manufacturing method |
| 05/31/2011 | US7952372 Contacting component, method of producing the same, and test tool having the contacting component |
| 05/31/2011 | US7952211 Semiconductor assembly with component pads attached on die back side |
| 05/31/2011 | US7952204 Semiconductor die packages with multiple integrated substrates, systems using the same, and methods using the same |
| 05/31/2011 | US7952202 Method of embedding passive component within via |
| 05/31/2011 | US7952201 Semiconductor device including stacked semiconductor chips |
| 05/31/2011 | US7952195 Stacked packages with bridging traces |
| 05/31/2011 | US7952189 Hermetic packaging and method of manufacture and use therefore |
| 05/31/2011 | US7952188 Semiconductor module with a dielectric layer including a fluorocarbon compound on a chip |
| 05/31/2011 | US7952184 Distributed semiconductor device methods, apparatus, and systems |
| 05/31/2011 | US7952182 Semiconductor device with package to package connection |
| 05/31/2011 | US7952180 Integrated circuit, interface circuit used in the integrated circuit, and apparatus using the integrated circuit |
| 05/31/2011 | US7952162 Semiconductor device and method for manufacturing the same |
| 05/31/2011 | US7952160 Packaged voltage regulator and inductor array |
| 05/31/2011 | US7952153 Differential pressure sensing device and fabricating method therefor |
| 05/31/2011 | US7952152 Semiconductor device and fabrication method thereof |
| 05/31/2011 | US7952147 Semiconductor device having analog transistor with improved operating and flicker noise characteristics and method of making same |
| 05/31/2011 | US7952146 Grain growth promotion layer for semiconductor interconnect structures |
| 05/31/2011 | US7952135 Semiconductor integrated circuit device and a method of manufacturing the same |
| 05/31/2011 | US7952123 Thin film transistor substrate and display device |
| 05/31/2011 | US7952102 Display device and manufacturing method thereof |
| 05/31/2011 | US7952098 Active matrix electronic array device |
| 05/31/2011 | US7952097 Semiconductor device and method of fabricating the same |
| 05/31/2011 | US7952095 Display device and manufacturing method therefor |
| 05/31/2011 | US7952093 Semiconductor device and method of fabricating the same |
| 05/31/2011 | US7952088 Semiconducting device having graphene channel |
| 05/31/2011 | US7952085 Surface inspection apparatus and method thereof |
| 05/31/2011 | US7951730 Decreasing the etch rate of silicon nitride by carbon addition |
| 05/31/2011 | US7951729 Semiconductor device including a coupled dielectric layer and metal layer, method of fabrication thereor, and material for coupling a dielectric layer and a metal layer in a semiconductor device |
| 05/31/2011 | US7951728 Method of improving oxide growth rate of selective oxidation processes |
| 05/31/2011 | US7951727 Capacitor fabrication method |
| 05/31/2011 | US7951726 Organic/inorganic hybrid thin film passivation layer for blocking moisture/oxygen transmission and improving gas barrier property |
| 05/31/2011 | US7951725 Manufacturing method of translucent solar cell |
| 05/31/2011 | US7951724 Wafer fixture for wet process applications |
| 05/31/2011 | US7951723 Integrated etch and supercritical CO2 process and chamber design |
| 05/31/2011 | US7951722 Double exposure semiconductor process for improved process margin |
| 05/31/2011 | US7951721 Etching technique for creation of thermally-isolated microstructures |
| 05/31/2011 | US7951720 Method of forming a contact hole for a semiconductor device |
| 05/31/2011 | US7951719 Self-masking defect removing method |
| 05/31/2011 | US7951718 Edge removal of silicon-on-insulator transfer wafer |
| 05/31/2011 | US7951717 Dhemical mechanical polishing; using mixture of water, amphoteric surfactants, anionic surfactant, complexign agents, resin particles and tetramethylammonium hydroxide |
| 05/31/2011 | US7951716 Wafer and method of producing the same |
| 05/31/2011 | US7951715 Semiconductor device fabrication method |
| 05/31/2011 | US7951714 High aspect ratio electroplated metal feature and method |
| 05/31/2011 | US7951712 Interconnections having double capping layer and method for forming the same |
| 05/31/2011 | US7951711 Metal precursors for semiconductor applications |
| 05/31/2011 | US7951710 Method for manufacturing thin film transistor and display device |
| 05/31/2011 | US7951709 Method and apparatus providing integrated circuit having redistribution layer with recessed connectors |
| 05/31/2011 | US7951708 Copper interconnect structure with amorphous tantalum iridium diffusion barrier |
| 05/31/2011 | US7951707 Etching method for semiconductor element |
| 05/31/2011 | US7951706 Method of manufacturing metal interconnection |
| 05/31/2011 | US7951705 Multilayered cap barrier in microelectronic interconnect structures |