Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2011
06/01/2011CN102082122A Manufacturing method of electric fuse, resistor and transistor
06/01/2011CN102082121A Wafer processing method
06/01/2011CN102082120A Chip package and fabrication method thereof
06/01/2011CN102082119A Method for selectively depositing tungsten contact hole or through hole
06/01/2011CN102082118A Method for producing dual-damascene structure
06/01/2011CN102082117A Method for forming side contact in semiconductor device through self-aligned damascene process
06/01/2011CN102082116A Method for fabricating side contact in semiconductor device using double trench process
06/01/2011CN102082115A Aluminum interconnection structure and method for forming aluminum interconnection structure
06/01/2011CN102082114A Forming method of dual damascene structure
06/01/2011CN102082113A Manufacturing method for deep isolation slot with air gaps
06/01/2011CN102082112A Deep silicon isolation trench forming method
06/01/2011CN102082111A Manufacture method of deep isolation groove with air clearance
06/01/2011CN102082110A Method for obtaining tilting groove structure or changing tilting angle of groove structure
06/01/2011CN102082109A Susceptor unit and apparatus for processing substrate by using the susceptor unit
06/01/2011CN102082108A Method and device for rapidly measuring sidewall appearance of micro-nano deep groove structure
06/01/2011CN102082107A Method and device for measuring temperature of chip
06/01/2011CN102082106A Thermoacoustic flip-chip bonding method of copper salient points
06/01/2011CN102082105A Thermal wind sensor based on anodic bonding technology and preparation method thereof
06/01/2011CN102082104A Method for manufacturing semiconductor device
06/01/2011CN102082103A Apparatus for manufacturing electronic component and method for manufacturing electronic component
06/01/2011CN102082102A Semiconductor device and method of forming compliant stress relief buffer
06/01/2011CN102082101A Packaging process method of photosensitive element
06/01/2011CN102082100A Packaging method for semiconductor devices with bulged pins
06/01/2011CN102082099A Process method for packaging semiconductor with exposed pins
06/01/2011CN102082098A Method for producing low-temperature polysilicon thin-film transistor
06/01/2011CN102082097A Trench metal oxide semiconductor field effect transistor, a method for fabricating same and power conversion system
06/01/2011CN102082096A Method for preparing Ge or SiGe nanowire field effect transistor
06/01/2011CN102082095A Method for fabricating semiconductor device
06/01/2011CN102082094A Method for forming transistor
06/01/2011CN102082093A Chip for two-way voltage regulator diode DB3 and manufacturing technique thereof
06/01/2011CN102082092A Acid corrosion technology for glass passivated mesa diode
06/01/2011CN102082091A Method for improving appearance of phosphosilicate glass by virtue of high-density plasma chemical vapor deposition (HDP CVD)
06/01/2011CN102082090A Self-aligning silicide membrane etching method
06/01/2011CN102082089A Method for removing photoresist
06/01/2011CN102082088A Method for sharing SL mask plate in products of DCMP (direct chemically mechanical polishing) process
06/01/2011CN102082087A Semiconductor device including carbon-containing electrode and method for fabricating the same
06/01/2011CN102082086A Semiconductor manufacturing method
06/01/2011CN102082085A Forming method of ultra shallow junction structure and forming method of PMOS (P-Channel Metal Oxide Semiconductor) transistor
06/01/2011CN102082084A Method for forming epitaxial layer by utilizing selective epitaxial process
06/01/2011CN102082083A Method for growing polysilicon layer on back surface of silicon wafer
06/01/2011CN102082082A Epitaxial technique for filling high aspect ratio groove
06/01/2011CN102082081A Method of manufacturing fine patterns of semiconductor device
06/01/2011CN102082080A Electron radiation processing method for chips of semiconductor element
06/01/2011CN102082079A Method of forming capacitor and dielectric layer thereof and formed capacitor
06/01/2011CN102082078A Method and device suitable for laminating film for ultrathin wafer
06/01/2011CN102082077A Method of fabricating polysilicon layer, thin film transistor, display device and method of fabricating the same
06/01/2011CN102082076A fixing device and fixing method
06/01/2011CN102082075A Device and method for centering nozzle and wafer
06/01/2011CN102082074A Film laminating device for saving adhesive film
06/01/2011CN102082073A Production device, production method, test apparatus and integrated circuit package
06/01/2011CN102082072A Gas injection device and processing chamber equipped with the gas injection device
06/01/2011CN102082071A Manufacturing method of ceramic spraying part
06/01/2011CN102082070A Method for protecting metal layer in process of thinning wafer
06/01/2011CN102082069A Method for processing back surface of wafer
06/01/2011CN102082068A Method for improving speed of seeking chips on probe table
06/01/2011CN102081310A Lithographic apparatus and lithographic apparatus cleaning method
06/01/2011CN102081300A Photoetching method of round-hole pattern
06/01/2011CN102081299A A pellicle for lithography
06/01/2011CN102081236A Optical processing device in laser annealing equipment
06/01/2011CN102081139A Method for accurately calculating waiting time in semiconductor test
06/01/2011CN102080949A Silicon epitaxial film thickness measuring method and device
06/01/2011CN102080897A Cooling system for semiconductor manufacturing and testing processes
06/01/2011CN102080230A Etching control method
06/01/2011CN102080216A Chemical vapor deposition of chalcogenide materials
06/01/2011CN102079112A Cutting method applied in diamond wire squaring machine
06/01/2011CN102078850A Liquid processing apparatus, liquid processing method and storage medium
06/01/2011CN101771039B BCD device and manufacturing method thereof
06/01/2011CN101764152B Reinforced transistor structure with high electron mobility and fabrication method thereof
06/01/2011CN101752288B Shallow slot isolation technology for improving marginal trough
06/01/2011CN101740585B Structure of front end of gallium arsenide base monolithic photoelectron integrated receiver and manufacturing method thereof
06/01/2011CN101740386B Method for manufacturing flash memories
06/01/2011CN101728292B Wafer detection device
06/01/2011CN101697352B Multi-point insulated silicon transistor with double ultra shallow isolation structures
06/01/2011CN101697054B A pixel design for a liquid crystal display capable of increasing opening rate
06/01/2011CN101685786B Method for automatically monitoring peripheral deburring and flaw of silicon slice by using optical microscope
06/01/2011CN101664745B Method for removing aluminum film deposited on surface of heat exchanger in aluminum technology
06/01/2011CN101663132B Process for manufacturing polishing pad
06/01/2011CN101661955B Transverse diffusion metal oxide semiconductor device and manufacturing method thereof
06/01/2011CN101661888B Method for preparing source-drain injection structures in semiconductor devices
06/01/2011CN101650529B Mask for manufacturing TFT and method for manufacturing source and drain of TFT
06/01/2011CN101645395B Electric removing method of static electricity absorption plant and substrate processing device
06/01/2011CN101635249B Heater interlocking device
06/01/2011CN101630716B Platy LED metal substrate, platy LED light emitting device and manufacturing method thereof
06/01/2011CN101627465B Adhesive film for semiconductor and semiconductor device using the adhesive film
06/01/2011CN101626025B GaN-based multi-band detector and preparation method thereof
06/01/2011CN101621066B GaN-based solar-blind UV detector area array and manufacturing method thereof
06/01/2011CN101621044B Chip lug structure and manufacturing method thereof
06/01/2011CN101614965B Lithographic apparatus and device manufacturing method
06/01/2011CN101604625B Apparatus for cleaning circuit substrate
06/01/2011CN101593717B Preparation method of shallow trench isolation structure
06/01/2011CN101577241B Method for realizing isolation structure in preparation of mixed circuit of triode and MOS tube
06/01/2011CN101563758B Methods and systems for barrier layer surface passivation
06/01/2011CN101556838B Anisotropic conductive film
06/01/2011CN101552308B Constant temperature diffusion technology applied on silicon solar cell
06/01/2011CN101527278B Through via process and method for forming wafer stack
06/01/2011CN101521254B Semiconductor device and method of fabricating the same
06/01/2011CN101521162B Method for manufacturing transient voltage suppressor with changeable withstand voltage
06/01/2011CN101501835B Method of manufacturing STI using self-aligned Si3N4 as mask
06/01/2011CN101499430B Automatic testing, detecting and packaging machine for 49S/SMD crystal
06/01/2011CN101496168B Substrate and process for semiconductor flip chip package
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