| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 05/19/2011 | WO2011057494A1 Method of manufacturing semiconductor device and a semiconductor device |
| 05/19/2011 | WO2011057492A1 Semiconductor device and manufacturing method thereof |
| 05/19/2011 | WO2011034284A3 Epi wafer and silicon single crystal ingot for the same and fabrication method thereof |
| 05/19/2011 | WO2011031749A3 Dram cell utilizing a doubly gated vertical channel |
| 05/19/2011 | WO2011031556A3 Gas distribution showerhead and method of cleaning |
| 05/19/2011 | WO2011031521A3 Method of decontamination of process chamber after in-situ chamber clean |
| 05/19/2011 | WO2011028581A3 Charge-trap based memory |
| 05/19/2011 | WO2011025655A3 Silicon-selective dry etch for carbon-containing films |
| 05/19/2011 | WO2011025256A3 Deposition gas supply apparatus |
| 05/19/2011 | WO2011022180A3 Vias and conductive routing layers in semiconductor substrates |
| 05/19/2011 | WO2011017333A3 Apparatus and method for low-k dielectric repair |
| 05/19/2011 | WO2011017179A3 Systems, methods and materials including crystallization of substrates via sub-melt laser anneal, as well as products produced by such processes |
| 05/19/2011 | WO2011017060A3 Dual temperature heater |
| 05/19/2011 | WO2011016940A3 Group iii-nitride semiconductor device and method of manufacturing the same |
| 05/19/2011 | WO2011008894A3 Semiconductor-on-insulator with back side support layer |
| 05/19/2011 | WO2011007287A3 Method for drying a semiconductor wafer |
| 05/19/2011 | WO2010151857A9 Method for forming iii-v semiconductor structures including aluminum-silicon nitride passivation |
| 05/19/2011 | WO2010141237A3 High voltage insulated gate bipolar transistors with minority carrier diverter |
| 05/19/2011 | US20110117753 Heat treatment apparatus and semiconductor device manufacturing method |
| 05/19/2011 | US20110117752 Method and system for etching a silicon dioxide film using densified carbon dioxide |
| 05/19/2011 | US20110117751 Non-selective oxide etch wet clean composition and method of use |
| 05/19/2011 | US20110117750 Novel wet etching agent for ii-vi semiconductors and method |
| 05/19/2011 | US20110117749 Method for reducing line width roughness with plasma pre-etch treatment on photoresist |
| 05/19/2011 | US20110117748 Localized Plasma Processing |
| 05/19/2011 | US20110117747 Method of fabricating single chip for integrating field-effect transistor into mems structure |
| 05/19/2011 | US20110117746 Coating composition and pattern forming method |
| 05/19/2011 | US20110117745 Method of manufacturing semiconductor device |
| 05/19/2011 | US20110117744 Pattern forming method and pattern forming apparatus |
| 05/19/2011 | US20110117743 Multiple deposition for integration of spacers in pitch multiplication process |
| 05/19/2011 | US20110117742 Plasma processing method |
| 05/19/2011 | US20110117741 Method of fabricating SOI wafer |
| 05/19/2011 | US20110117740 Method for polishing heterostructures |
| 05/19/2011 | US20110117739 Methods for forming semiconductor device structures |
| 05/19/2011 | US20110117738 Method to alter silicide properties using gcib treatment |
| 05/19/2011 | US20110117737 Method of Forming Metal Interconnect Structures in Ultra Low-K Dielectrics |
| 05/19/2011 | US20110117736 Manufacturing method of semiconductor integrated circuit device |
| 05/19/2011 | US20110117735 Methods of fabricating non-volatile memory devices having carbon nanotube layer and passivation layer |
| 05/19/2011 | US20110117734 Method of Fabricating High-K Poly Gate Device |
| 05/19/2011 | US20110117733 Methods Of Utilizing Block Copolymers To Form Patterns |
| 05/19/2011 | US20110117732 Cyclical epitaxial deposition and etch |
| 05/19/2011 | US20110117731 Laser mask and sequential lateral solidification crystallization method using the same |
| 05/19/2011 | US20110117730 Growing III-V Compound Semiconductors from Trenches Filled with Intermediate Layers |
| 05/19/2011 | US20110117729 Fluid bed reactor |
| 05/19/2011 | US20110117728 Method of decontamination of process chamber after in-situ chamber clean |
| 05/19/2011 | US20110117727 Method for manufacturing soi wafer and soi wafer |
| 05/19/2011 | US20110117726 Bonded intermediate substrate and method of making same |
| 05/19/2011 | US20110117725 Methods of Forming Recessed Access Devices Associated with Semiconductor Constructions |
| 05/19/2011 | US20110117724 Isolation structure for strained channel transistors |
| 05/19/2011 | US20110117723 Nano imprint technique with increased flexibility with respect to alignment and feature shaping |
| 05/19/2011 | US20110117722 Semiconductor Device With Charge Storage Pattern And Method For Fabricating The Same |
| 05/19/2011 | US20110117721 Method of forming isolation layer structure and method of manufacturing a semiconductor device including the same |
| 05/19/2011 | US20110117720 Method for preparing cerium oxide, cerium oxide prepared therefrom and cmp slurry comprising the same |
| 05/19/2011 | US20110117719 Methods of processing semiconductor substrates in forming scribe line alignment marks |
| 05/19/2011 | US20110117718 Method of forming semiconductor device |
| 05/19/2011 | US20110117717 Programmable resistive memory cell with filament placement structure |
| 05/19/2011 | US20110117716 Programmable capacitor associated with an input/output pad |
| 05/19/2011 | US20110117715 Methods of Forming Capacitors For Semiconductor Memory Devices |
| 05/19/2011 | US20110117714 Integration of Multiple Gate Oxides with Shallow Trench Isolation Methods to Minimize Divot Formation |
| 05/19/2011 | US20110117713 Method of making flash memory cells and peripheral circuits having sti, and flash memory devices and computer systems having the same |
| 05/19/2011 | US20110117712 Semiconductor device with high k dielectric control terminal spacer structure |
| 05/19/2011 | US20110117711 Double gate depletion mode mosfet |
| 05/19/2011 | US20110117710 Method of fabricating efuse, resistor and transistor |
| 05/19/2011 | US20110117709 Semiconductor device fabricating method |
| 05/19/2011 | US20110117708 Method of manufacturing semiconductor device |
| 05/19/2011 | US20110117707 Pixel structure and method for manufacturing the same |
| 05/19/2011 | US20110117706 Protective tape joining method and protective tape joining apparatus |
| 05/19/2011 | US20110117705 Multi-layer thick-film rf package |
| 05/19/2011 | US20110117704 Circuit member, manufacturing method of the circuit member, and semiconductor device including the circuit member |
| 05/19/2011 | US20110117703 Fabrication of electronic devices including flexible electrical circuits |
| 05/19/2011 | US20110117702 Apparatus and method for processing a substrate |
| 05/19/2011 | US20110117701 Fiducial Scheme Adapted for Stacked Integrated Circuits |
| 05/19/2011 | US20110117700 Stackable semiconductor device packages |
| 05/19/2011 | US20110117699 Method of manufacturing semiconductor device |
| 05/19/2011 | US20110117698 Method for manufacturing semiconductor device |
| 05/19/2011 | US20110117697 Semiconductor Device and Manufacturing Method Thereof |
| 05/19/2011 | US20110117696 CdTe SURFACE TREATMENT FOR STABLE BACK CONTACTS |
| 05/19/2011 | US20110117693 Device and method for tempering objects in a treatment chamber |
| 05/19/2011 | US20110117691 Mixed trimming method |
| 05/19/2011 | US20110117690 Fabrication of Nanovoid-Imbedded Bismuth Telluride with low dimensional system |
| 05/19/2011 | US20110117689 Semiconductor sensor and manufacturing method of sensor body for semiconductor sensor |
| 05/19/2011 | US20110117683 Chip quality determination method and marking mechanism using same |
| 05/19/2011 | US20110117682 Apparatus and method for plasma processing |
| 05/19/2011 | US20110117681 Thin film imaging method and apparatus |
| 05/19/2011 | US20110117680 Inline detection of substrate positioning during processing |
| 05/19/2011 | US20110117679 Sacrificial offset protection film for a finfet device |
| 05/19/2011 | US20110117678 Carbon containing low-k dielectric constant recovery using uv treatment |
| 05/19/2011 | US20110117514 Silicon Firnaceware for Stressed Film |
| 05/19/2011 | US20110117480 Titania and sulfur co-doped quartz glass member and making method |
| 05/19/2011 | US20110117479 Reflective exposure mask, method of manufacturing reflective exposure mask, and method of manufacturing semiconductor device |
| 05/19/2011 | US20110117373 Compound material, method of producing the same and apparatus for producing the same |
| 05/19/2011 | US20110117365 Single-walled carbon nanotube and aligned single-walled carbon nanotube bulk structure, and their production process, production apparatus and application use |
| 05/19/2011 | US20110116900 Substrate alignment apparatus |
| 05/19/2011 | US20110116663 Magnetostrictive microloudspeaker |
| 05/19/2011 | US20110116323 Semiconductor device, method of controlling the same, and method of manufacturing the same |
| 05/19/2011 | US20110116210 Capacitor and its manufacturing method |
| 05/19/2011 | US20110116207 Substrate mounting table of substrate processing apparatus |
| 05/19/2011 | US20110116085 Defect detection recipe definition |
| 05/19/2011 | US20110116061 Lithographic apparatus and device manufacturing method |
| 05/19/2011 | US20110115589 Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor |
| 05/19/2011 | US20110115464 Chemical-selective device |