| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/25/2011 | CN102074455A Scrubbing device for wafer |
| 05/25/2011 | CN102074454A Monitoring method and system of etching process |
| 05/25/2011 | CN102074453A 晶圆清洗方法 Wafer cleaning method |
| 05/25/2011 | CN102074452A Exposure menu creation method |
| 05/25/2011 | CN102073227A Photoresist removing method |
| 05/25/2011 | CN102073224A Pattern formation method using levenson-type mask and method of manufacturing levenson-type mask |
| 05/25/2011 | CN102073214A Heat treatment unit of gluing developing machine |
| 05/25/2011 | CN102073212A Nano grade thickness masking film for deep-UV lithography and preparation method thereof |
| 05/25/2011 | CN102073211A Half tone mask and fabricating method and flat panel display |
| 05/25/2011 | CN102071090A Wire cutting solution for solar silicon slice |
| 05/25/2011 | CN102070991A Lamelliform adhesive and adhesive tape for wafer processing |
| 05/25/2011 | CN102070735A Polymer, composition for protective layer, and patterning method using the same |
| 05/25/2011 | CN102069492A Arm mechanism and vacuum robot with the mechanism |
| 05/25/2011 | CN102069448A Method for producing a semiconductor wafer |
| 05/25/2011 | CN102069446A Polishing device for polygonal column member, and method for polishing same |
| 05/25/2011 | CN102069297A Laser irradiation apparatus, laser irradiation method, and method for manufacturing crystalline semiconductor film |
| 05/25/2011 | CN102069296A Laser processing method |
| 05/25/2011 | CN102069186A Methods for performing surface treatment on micron silver sheet and preparing high-conductivity conducting adhesive |
| 05/25/2011 | CN102069057A Transfer apparatus for multiple adhesives |
| 05/25/2011 | CN101807606B n-type zinc oxide/p-type diamond heterojunction tunnel diode and manufacturing method thereof |
| 05/25/2011 | CN101800214B Construction method of anti-electromagnetic interference electronic module |
| 05/25/2011 | CN101714552B High-low voltage device for plasma display driving chip and preparation method |
| 05/25/2011 | CN101710573B Clamping device for precalibration of COG chip |
| 05/25/2011 | CN101707213B Memory and preparation method thereof |
| 05/25/2011 | CN101689509B Method for forming a dual metal gate structure |
| 05/25/2011 | CN101681805B SOI wafer manufacturing method |
| 05/25/2011 | CN101673670B Method for reducing warpage of III-nitride self-supporting wafer |
| 05/25/2011 | CN101625989B Wire feeding/drawing device and method thereof |
| 05/25/2011 | CN101622700B Conductive via formation utilizing electroplating |
| 05/25/2011 | CN101620983B Thin film production method |
| 05/25/2011 | CN101609801B Groove-type Schottky diode and manufacture method thereof |
| 05/25/2011 | CN101599448B Automatic feeding and clamping device |
| 05/25/2011 | CN101587850B Bearing structure and testing device |
| 05/25/2011 | CN101573787B Method of making an interconnect structure |
| 05/25/2011 | CN101572271B Short channel lateral mosfet and preparation method thereof |
| 05/25/2011 | CN101552230B Semiconductor manufacturing device |
| 05/25/2011 | CN101546772B Semiconductor device including capacitor element and method of manufacturing the same |
| 05/25/2011 | CN101542701B Bonding method of three dimensional wafer lamination based on silicon through holes |
| 05/25/2011 | CN101538734B Method for growing Zn(1-x)MgxO crystal thin film on Si substrate |
| 05/25/2011 | CN101533803B Manufacturing method of nonvolatile semiconductor storage device and nonvolatile semiconductor storage device |
| 05/25/2011 | CN101529579B Method for sealing vias in a substrate |
| 05/25/2011 | CN101528978B Method for forming thin film |
| 05/25/2011 | CN101521174B Manufacturing method for semiconductor devices |
| 05/25/2011 | CN101517711B Cutting method |
| 05/25/2011 | CN101517709B Polishing agent for semiconductor integrated circuit device, polishing method, and method for manufacturing semiconductor integrated circuit device |
| 05/25/2011 | CN101501859B High power insulated gate bipolar transistors |
| 05/25/2011 | CN101496157B Device for the transport, storage and transfer of substrates |
| 05/25/2011 | CN101494946B Impedance matcher |
| 05/25/2011 | CN101494160B Technology end-point control method and device |
| 05/25/2011 | CN101473419B A dry non-plasma treatment system and method of using |
| 05/25/2011 | CN101472808B Fluid container and fluid-containing container using the same |
| 05/25/2011 | CN101471374B Image sensor and method for manufacturing the sensor |
| 05/25/2011 | CN101468786B Manufacturing method of silicon carbide microchannel for microelectron mechanical system |
| 05/25/2011 | CN101432866B Method and apparatus for matching defect distribution pattern |
| 05/25/2011 | CN101425504B Semiconductor device, method and apparatus for testing same, and method for manufacturing semiconductor device |
| 05/25/2011 | CN101425474B Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing |
| 05/25/2011 | CN101419963B Wafer-wafer encapsulation body and manufacturing process therefor |
| 05/25/2011 | CN101410962B Programmable structure including control gate overlying select gate formed in a trench |
| 05/25/2011 | CN101404198B Dilute magnetic semiconductor material with high curie temperature and its production method |
| 05/25/2011 | CN101383353B Memory device having memory cell array and manufacturing process thereof |
| 05/25/2011 | CN101383304B Slot type MOSFET and manufacturing method thereof |
| 05/25/2011 | CN101383278B Plasma body restraint apparatus and plasma body processing device |
| 05/25/2011 | CN101379603B Contact-bonding device |
| 05/25/2011 | CN101366106B Method of manufacturing a semiconductor device and semiconductor device obtained with such a method |
| 05/25/2011 | CN101364615B Nonvolatile memory and forming method for the same |
| 05/25/2011 | CN101364607B Solid-state image pickup device and fabrication method thereof |
| 05/25/2011 | CN101346633B Probe card |
| 05/25/2011 | CN101333418B CMP polishing compound and method for polishing substrate |
| 05/25/2011 | CN101326629B Process chamber for dielectric gapfill |
| 05/25/2011 | CN101317247B Epitaxial growth of nitride compound semiconductors structures |
| 05/25/2011 | CN101312158B Complementary type gold oxygen semiconductor devices and methods for making the same |
| 05/25/2011 | CN101297407B Transistor device and manufacturing method thereof |
| 05/25/2011 | CN101271917B Antistatic structure of semiconductor lighting device and manufacturing method thereof |
| 05/25/2011 | CN101271880B Semiconductor device and method of manufacturing the same |
| 05/25/2011 | CN101260517B Treatment system and treatment method |
| 05/25/2011 | CN101257743B Light emitting device, method of driving a light emitting device |
| 05/25/2011 | CN101246815B Vertical type heat processing apparatus and vertical type heat processing method |
| 05/25/2011 | CN101221949B Face-centered cubic structure capacitor and manufacturing method thereof |
| 05/25/2011 | CN101199042B Integrated circuit |
| 05/25/2011 | CN101192615B Method for manufacturing semiconductor device |
| 05/25/2011 | CN101183649B Semiconductor device and method for manufacturing the same |
| 05/25/2011 | CN101136312B Method for manufacturing semiconductor device and method for manufacturing display device |
| 05/25/2011 | CN101128514B Benzoxazole resin precursor, polybenzoxazole resin, resin film and semiconductor device |
| 05/25/2011 | CN101114676B Thin-film transistor substrate, method of manufacturing the same and display panel having the same |
| 05/25/2011 | CN101088046B Compound for resist and radiation-sensitive composition |
| 05/25/2011 | CN101086973B A sealing and pressing method of organic illuminant part and encapsulation device for this method |
| 05/25/2011 | CN101086972B Multiple row exposed leads for mlp high density packages |
| 05/25/2011 | CN101071752B High current ionic current implanted system and improved device and insulator thereof |
| 05/25/2011 | CN101052919B Sulfonic-ester-containing composition for formation of antireflection film for lithography |
| 05/25/2011 | CN101025571B Device manufacturing method |
| 05/25/2011 | CN101005094B Novel metal oxide silicon field effect transistor grid structure and its preparing process |
| 05/24/2011 | US7949983 High tolerance TCR balanced high current resistor for RF CMOS and RF SiGe BiCMOS applications and cadenced based hierarchical parameterized cell design kit with tunable TCR and ESD resistor ballasting feature |
| 05/24/2011 | US7949982 Semiconductor integrated circuit design system, semiconductor integrated circuit design method, and computer readable medium |
| 05/24/2011 | US7949967 Design Pattern correcting method, process proximity effect correcting method, and semiconductor device manufacturing method |
| 05/24/2011 | US7949966 Data verification method, charged particle beam writing apparatus, and computer-readable storage medium with program |
| 05/24/2011 | US7949237 Heating configuration for use in thermal processing chambers |
| 05/24/2011 | US7949178 Pattern inspection method and its apparatus |
| 05/24/2011 | US7948795 Thin film magnetic memory device including memory cells having a magnetic tunnel junction |
| 05/24/2011 | US7948768 Tape circuit substrate with reduced size of base film |
| 05/24/2011 | US7948735 Electrostatic chuck and method for manufacturing the same |