| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/19/2015 | WO2015022989A1 Semiconductor device |
| 02/19/2015 | WO2015022861A1 Semiconductor production device and semiconductor device production method |
| 02/19/2015 | WO2015022826A1 Substrate processing device, substrate processing method, and substrate processing system |
| 02/19/2015 | WO2015022812A1 Transport vehicle system |
| 02/19/2015 | WO2015022779A1 Reagent for enhancing generation of chemical species |
| 02/19/2015 | WO2015022777A1 Tunnel field-effect transistor, method for manufacturing same, and switch element |
| 02/19/2015 | WO2015022744A1 Method for manufacturing semiconductor device having sgt |
| 02/19/2015 | WO2015022739A1 Semiconductor inspection method, semiconductor inspection apparatus, and method for manufacturing semiconductor device |
| 02/19/2015 | WO2015022316A1 Handling device for inserting workpiece supports into stackable boxes, system, and handling method |
| 02/19/2015 | WO2015021932A1 Substrate etching method |
| 02/19/2015 | WO2015021720A1 Array substrate and manufacturing method thereof, and display device |
| 02/19/2015 | WO2015021713A1 Apparatus for separating flexible substrate from glass substrate, and production device |
| 02/19/2015 | WO2015021708A1 Array substrate, manufacturing method therefor, display panel, and display apparatus |
| 02/19/2015 | WO2015021698A1 Preparation method for transparent conductive oxide film layer |
| 02/19/2015 | WO2015021691A1 Method for growth of germanium quantum dots, germanium quantum dot composite material and application thereof |
| 02/19/2015 | WO2015021670A1 Semiconductor device and manufacturing method therefor |
| 02/19/2015 | WO2015021663A1 Correction device and correction method for cassette |
| 02/19/2015 | WO2015021622A1 Glass substrate supporting device and liquid crystal panel manufacturing process |
| 02/19/2015 | WO2015021539A1 Structure and method of manufacturing a stacked memory array for junction-free cell transistors |
| 02/19/2015 | US20150050863 Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method |
| 02/19/2015 | US20150050862 Polishing composition and method using said polishing composition to manufacture compound semiconductor substrate |
| 02/19/2015 | US20150050819 Support cylinder for thermal processing chamber |
| 02/19/2015 | US20150050818 Substrate processing apparatus and semiconductor device producing method |
| 02/19/2015 | US20150050817 Method of preventing voltage breakdown at a surface of a semiconductor substrate of a superjunction semiconductor device |
| 02/19/2015 | US20150050816 Method of electrochemically preparing silicon film |
| 02/19/2015 | US20150050815 Semiconductor device manufacturing method, substrate processing method, and substrate processing apparatus |
| 02/19/2015 | US20150050814 Line-edge roughness improvement for small pitches |
| 02/19/2015 | US20150050813 Lithography apparatus, and method of manufacturing article |
| 02/19/2015 | US20150050812 Wafer-less auto clean of processing chamber |
| 02/19/2015 | US20150050811 Critical dimension and pattern recognition structures for devices manufactured using double patterning techniques |
| 02/19/2015 | US20150050810 Method for preventing photoresist corner rounding effects |
| 02/19/2015 | US20150050809 CMP Slurry/Method for Polishing Ruthenium and Other Films |
| 02/19/2015 | US20150050808 Adhesion layer for through silicon via metallization |
| 02/19/2015 | US20150050807 Tungsten deposition with tungsten hexafluoride (wf6) etchback |
| 02/19/2015 | US20150050806 METHOD FOR FORMING TiSiN THIN FILM LAYER BY USING ATOMIC LAYER DEPOSITION |
| 02/19/2015 | US20150050805 Method of forming semiconductor device having multilayered plug and related device |
| 02/19/2015 | US20150050803 Methods of forming semiconductor devices, including forming patterns by performing an oxidation process |
| 02/19/2015 | US20150050802 Method of manufacturing a nonvolatile memory device |
| 02/19/2015 | US20150050801 Method of forming the gate with the lele double pattern |
| 02/19/2015 | US20150050800 Fin formation by epitaxial deposition |
| 02/19/2015 | US20150050799 Method for fabricating semiconductor device |
| 02/19/2015 | US20150050798 Production method for a semiconductor device |
| 02/19/2015 | US20150050797 Method of implantation for fragilization of substrates |
| 02/19/2015 | US20150050794 Method for fabricating electronic devices having semiconductor memory unit |
| 02/19/2015 | US20150050792 Extra narrow diffusion break for 3d finfet technologies |
| 02/19/2015 | US20150050791 Method for manufacturing rectifier with vertical mos structure |
| 02/19/2015 | US20150050790 Semiconductor device and method of manufacturing the same |
| 02/19/2015 | US20150050789 Meander Line Resistor Structure |
| 02/19/2015 | US20150050788 Current steering element formation for memory arrays |
| 02/19/2015 | US20150050786 Thin film transistor |
| 02/19/2015 | US20150050785 Method of forming a complementary metal-oxidesemiconductor (cmos) device |
| 02/19/2015 | US20150050783 Molding Chamber Apparatus and Curing Method |
| 02/19/2015 | US20150050781 Semiconductor package with embedded die and its methods of fabrication |
| 02/19/2015 | US20150050779 Packaged Semiconductor Devices, Methods of Packaging Semiconductor Devices, and PoP Devices |
| 02/19/2015 | US20150050776 Sputtering target, method for manufacturing the same, and method for manufacturing semiconductor device |
| 02/19/2015 | US20150050775 Method for manufacturing semiconductor device |
| 02/19/2015 | US20150050774 Semiconductor device and method for manufacturing the semiconductor device |
| 02/19/2015 | US20150050765 Photolithographic methods of producing structures in radiation-emitting semiconductor components |
| 02/19/2015 | US20150050757 Method for testing susceptor of chemical vapor deposition apparatus and method for manufacturing organic light emitting display apparatus by using the same |
| 02/19/2015 | US20150050756 Method of manufacturing organic light-emitting display apparatus |
| 02/19/2015 | US20150050755 Metrology marks for bidirectional grating superposition patterning processes |
| 02/19/2015 | US20150050754 Method for postdoping a semiconductor wafer |
| 02/19/2015 | US20150050753 Accelerated relaxation of strain-relaxed epitaxial buffers by use of integrated or stand-alone thermal processing |
| 02/19/2015 | US20150050752 Methods for cleaning a wafer edge including a notch |
| 02/19/2015 | US20150050751 Method of controlling threshold voltage and method of fabricating semiconductor device |
| 02/19/2015 | US20150050471 Method for producing iii-n templates and the reprocessing thereof and iii-n template |
| 02/19/2015 | US20150050118 Rapid Thermal Processing Chamber with Micro-Positioning System |
| 02/19/2015 | US20150050112 Apparatus for transferring substrates |
| 02/19/2015 | US20150050105 Vapor dryer module with reduced particle generation |
| 02/19/2015 | US20150049557 Non-volatile memory device and operation and fabricating methods thereof |
| 02/19/2015 | US20150049411 Wafer grounding and biasing method, apparatus, and application |
| 02/19/2015 | US20150049410 Electrostatic chuck |
| 02/19/2015 | US20150049314 Inspection method, inspection apparatus, exposure control method, exposure system, and semiconductor device |
| 02/19/2015 | US20150048862 Detecting arcing using processing chamber data |
| 02/19/2015 | US20150048525 Metrology marks for unidirectional grating superposition patterning processes |
| 02/19/2015 | US20150048523 Chip-on-wafer bonding method and bonding device, and structure comprising chip and wafer |
| 02/19/2015 | US20150048519 Semiconductor devices with through via electrodes, methods of fabricaring the same, memory cards including the same, and electronic systems including the same |
| 02/19/2015 | US20150048516 Integrated circuit with a sidewall layer and an ultra-thick metal layer and method of making |
| 02/19/2015 | US20150048515 Fabrication of a substrate with an embedded die using projection patterning and associated package configurations |
| 02/19/2015 | US20150048514 Stacked via structures and methods of fabrication |
| 02/19/2015 | US20150048512 Semiconductor devices including multiple interconnection structures and methods of manufacturing the same |
| 02/19/2015 | US20150048511 Opening Fill Process and Structure Formed Thereby |
| 02/19/2015 | US20150048510 Semiconductor device |
| 02/19/2015 | US20150048509 Cmos compatible wafer bonding layer and process |
| 02/19/2015 | US20150048508 Nanowires coated on traces in electronic devices |
| 02/19/2015 | US20150048507 Conductive diffusion barrier structure for ohmic contacts |
| 02/19/2015 | US20150048504 Package assembly for chip and method of manufacturing same |
| 02/19/2015 | US20150048500 Multi-Chip Structure and Method of Forming Same |
| 02/19/2015 | US20150048497 Interposer with electrostatic discharge protection |
| 02/19/2015 | US20150048489 Edge termination technique for high voltage power devices |
| 02/19/2015 | US20150048488 Semiconductor Devices, Methods of Manufacture Thereof, and Inter-metal Dielectric (IMD) Structures |
| 02/19/2015 | US20150048487 Plasma polymerized thin film having high hardness and low dielectric constant and manufacturing method thereof |
| 02/19/2015 | US20150048486 Spatial semiconductor structure and method of fabricating the same |
| 02/19/2015 | US20150048485 Methods of forming films including germanium tin and structures and devices including the films |
| 02/19/2015 | US20150048484 Passivation for Group III-V Semiconductor Devices Having a Plated Metal Layer over an Interlayer Dielectric Layer |
| 02/19/2015 | US20150048480 Integrated passive device (ipd) on subtrate |
| 02/19/2015 | US20150048479 Self-aligned via fuse |
| 02/19/2015 | US20150048477 Semiconductor structure and manufacturing method thereof |
| 02/19/2015 | US20150048475 Semiconductor Structures With Shallow Trench Isolations |
| 02/19/2015 | US20150048471 Semiconductor module having an integrated waveguide for radar signals |