Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2011
09/20/2011US8021920 Method for producing a metal-ceramic substrate for electric circuits on modules
09/20/2011US8021919 Method of manufacturing a semiconductor device
09/20/2011US8021918 Integrated circuit chips with fine-line metal and over-passivation metal
09/20/2011US8021917 Semiconductor device and method for manufacturing the semiconductor device
09/20/2011US8021916 Method for manufacturing semiconductor device
09/20/2011US8021914 Manufacture of cadmium mercury telluride
09/20/2011US8021913 Method and apparatus for forming the separating lines of a photovoltaic module with series-connected cells
09/20/2011US8021912 Method of fabricating an image sensor having an annealing layer
09/20/2011US8021911 Method for producing a photovoltaic module
09/20/2011US8021910 Method for producing single crystal silicon solar cell and single crystal silicon solar cell
09/20/2011US8021909 Method for making a planar concentrating solar cell assembly with silicon quantum dots
09/20/2011US8021907 Method and apparatus for thermally enhanced semiconductor package
09/20/2011US8021906 Hermetic sealing and electrical contacting of a microelectromechanical structure, and microsystem (MEMS) produced therewith
09/20/2011US8021905 Machine and process for sequential multi-sublayer deposition of copper indium gallium diselenide compound semiconductors
09/20/2011US8021904 Ohmic contacts to nitrogen polarity GaN
09/20/2011US8021903 Method for fabricating micro-lens and micro-lens integrated optoelectronic devices using selective etch of compound semiconductor
09/20/2011US8021902 Method for fabricating light emitting diode
09/20/2011US8021901 Method of fabricating vertical structure nitride semiconductor light emitting device
09/20/2011US8021900 Planar waveguide with patterned cladding and method for producing same
09/20/2011US8021899 Method of manufacturing a semiconductor device including optical test pattern above a light shielding film
09/20/2011US8021897 Methods of fabricating a cross point memory array
09/20/2011US8021896 Method of manufacturing semiconductor device, method of manufacturing semiconductor substrate and semiconductor substrate
09/20/2011US8021819 Sulfonium compound, photosensitive composition containing the compound and pattern-forming method using the photosensitive composition
09/20/2011US8021807 Reflective mask blank and method of producing the same, and method of producing a reflective mask
09/20/2011US8021804 Photomask manufacturing method
09/20/2011US8021712 Wafer and manufacturing method of electronic component
09/20/2011US8021623 Examination method and examination assistant device for quartz product of semiconductor processing apparatus
09/20/2011US8021566 Method for pre-conditioning CMP polishing pad
09/20/2011US8021563 Etch depth determination for SGT technology
09/20/2011US8021562 Method for manufacturing a filter substrate, inkjet recording head, and method for manufacturing the inkjet recording head
09/20/2011US8021515 Inductively coupled plasma processing apparatus
09/20/2011US8021513 Substrate carrying apparatus and substrate carrying method
09/20/2011US8021512 Method of preventing premature drying
09/20/2011US8021487 Wafer carrier with hub
09/20/2011US8021486 Protective self-aligned buffer layers for damascene interconnects
09/20/2011US8021485 Positioning apparatus
09/20/2011US8021210 Polishing head and polishing apparatus having the same
09/20/2011US8021203 Electroluminescent element
09/20/2011US8020967 Liquid discharge apparatus and method for producing liquid discharge apparatus
09/20/2011US8020689 Break-away positioning conveyor mount for accommodating conveyor belt bends
09/20/2011US8020514 Batch-type remote plasma processing apparatus
09/20/2011US8020513 Cooled device for plasma depositing a barrier layer onto a container
09/20/2011US8020490 Method of fabricating MEMS-based micro detonators
09/20/2011CA2325799C Heat sink and method of fabricating same
09/15/2011WO2011113033A2 Thin wafer shipper
09/15/2011WO2011112968A1 Method for performing preventative maintenance in a substrate processing system
09/15/2011WO2011112963A2 Defect capping for reduced defect density epitaxial articles
09/15/2011WO2011112823A2 Apparatus and methods for cyclical oxidation and etching
09/15/2011WO2011112818A1 Processing to reduce wafer level warpage on moulding
09/15/2011WO2011112812A2 Apparatus and methods for cyclical oxidation and etching
09/15/2011WO2011112802A2 Apparatus and methods for cyclical oxidation and etching
09/15/2011WO2011112617A2 Atomic layer deposition chamber with multi inject
09/15/2011WO2011112574A1 Semiconductor device including a superlattice and dopant diffusion retarding implants and related methods
09/15/2011WO2011112546A1 Methods and compositions for doping silicon substrates with molecular monolayers
09/15/2011WO2011112518A2 Methods for forming low moisture dielectric films
09/15/2011WO2011112461A1 A strippable hybrid tray system for electronic devices
09/15/2011WO2011112402A2 Improving conformality of oxide layers along sidewalls of deep vias
09/15/2011WO2011112330A2 REDUCED PATTERN LOADING USING BIS(DIETHYLAMINO)SILANE (C8H22N2Si) AS SILICON PRECURSOR
09/15/2011WO2011112303A2 Methods of forming an array of memory cells, methods of forming a plurality of field effect transistors, methods of forming source/drain regions and isolation trenches, and methods of forming a series of spaced trenches into a substrate
09/15/2011WO2011112301A2 Semiconductor device and method of fabricating same
09/15/2011WO2011112198A1 Interconnection architecture for memory structures
09/15/2011WO2011112197A1 Device having memristive memory
09/15/2011WO2011111960A1 Power source device for a chemical vapour deposition device and a method for controlling the same
09/15/2011WO2011111907A1 Magnetic vertical transfer apparatus for a single crystal silicon ingot growing system
09/15/2011WO2011111886A1 Automatic loading and unloading apparatus for semiconductor package lead frame magazine
09/15/2011WO2011111834A1 Probe apparatus
09/15/2011WO2011111815A1 Method for formation of concave-convex pattern using photocurable transcription sheet, and device for use in the method
09/15/2011WO2011111807A1 Polymerizable monomer, polymer, resist material using same, and pattern formation method therefor
09/15/2011WO2011111805A1 Actinic ray-sensitive or radiation-sensitive resin composition, and resist film and pattern forming method using the same
09/15/2011WO2011111792A1 Fine structure transfer apparatus and fine structure transfer method
09/15/2011WO2011111789A1 Magnetic device and process for production thereof
09/15/2011WO2011111781A1 Semiconductor device and method for manufacturing the same
09/15/2011WO2011111754A1 Semiconductor device and method for manufacturing semiconductor device
09/15/2011WO2011111741A1 Resin mold
09/15/2011WO2011111736A1 Field-effect transistor and method for manufacturing the same
09/15/2011WO2011111673A1 Curable composition, hardened material, and method for using curable composition
09/15/2011WO2011111667A1 Curable composition, hardened material, and method for using curable composition
09/15/2011WO2011111659A1 Heating apparatus and annealing apparatus
09/15/2011WO2011111647A1 Method for producing nitride compound semiconductor substrate, nitride compound semiconductor substrate and self-supporting nitride compound semiconductor substrate
09/15/2011WO2011111641A1 Radiation-sensitive resin composition
09/15/2011WO2011111627A1 Silicon carbide semiconductor device, and process for production thereof
09/15/2011WO2011111626A1 Surface treatment device
09/15/2011WO2011111593A1 Magnetic device
09/15/2011WO2011111582A1 Collector mirror assembly and extreme ultraviolet light source device using said collector mirror assembly
09/15/2011WO2011111574A1 Method of manufacturing semiconductor device
09/15/2011WO2011111565A1 Joining system, joining method, program and computer memory media
09/15/2011WO2011111546A1 Apparatus for detecting position of sheet-like mold, transfer apparatus and transfer method
09/15/2011WO2011111524A1 Substrate wiring method and semiconductor manufacturing device
09/15/2011WO2011111523A1 Method for cleaning a substrate, and semiconductor manufacturing device
09/15/2011WO2011111507A1 Semiconductor device and method for manufacturing the same
09/15/2011WO2011111505A1 Semiconductor device and method for manufacturing semiconductor device
09/15/2011WO2011111503A1 Semiconductor device and method for manufacturing semiconductor device
09/15/2011WO2011111498A1 Method for producing semiconductor device and substrate treatment device
09/15/2011WO2011111486A1 Grasping apparatus
09/15/2011WO2011111479A1 Photomask, exposure device, and method for producing liquid crystal display panel
09/15/2011WO2011111473A1 Magnetoresistive element and magnetic memory
09/15/2011WO2011111441A1 Microstructure transfer method and device for same
09/15/2011WO2011111421A1 Slurry, polishing fluid set, polishing fluid, and substrate polishing method using same
09/15/2011WO2011111409A1 Method for manufacturing optical element
09/15/2011WO2011111403A1 Exhaust-gas treatment system