| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/22/2011 | WO2011090641A3 Method of using a mask to provide a patterned substrate |
| 09/22/2011 | WO2011081309A3 Resistance change memory device, and manufacturing method and driving method for same |
| 09/22/2011 | WO2011078488A3 Grounding structure, and heater and chemical vapor deposition apparatus having the same |
| 09/22/2011 | WO2011072061A3 Enhanced passivation process to protect silicon prior to high dose implant strip |
| 09/22/2011 | WO2011072027A3 Reverse side engineered iii-nitride devices |
| 09/22/2011 | WO2011068660A3 Method for improving performance of a substrate carrier |
| 09/22/2011 | WO2011066055A3 Formation of electrically conductive pattern by surface energy modification |
| 09/22/2011 | WO2011063262A3 Methods and apparatus for detecting the confinement state of plasma in a plasma processing system |
| 09/22/2011 | WO2011060443A3 Laminar flow tank |
| 09/22/2011 | WO2011056671A3 Resin bonded abrasive |
| 09/22/2011 | WO2011037961A3 Method and system for forming germanium on silicon |
| 09/22/2011 | WO2010122028A3 Method for producing a semiconductor component, in particular a solar cell, having a locally open dielectric layer and corresponding semiconductor component |
| 09/22/2011 | US20110231174 Process simulation method, semiconductor device manufacturing method, and process simulator |
| 09/22/2011 | US20110231134 Charged particle beam writing apparatus and method therefor |
| 09/22/2011 | US20110230061 Manufacturing method of semiconductor device |
| 09/22/2011 | US20110230060 Method of improving oxide growth rate of selective oxidation processes |
| 09/22/2011 | US20110230059 Formation of Carbon-Containing Material |
| 09/22/2011 | US20110230058 Composition for forming resist underlayer film with reduced outgassing |
| 09/22/2011 | US20110230057 Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus |
| 09/22/2011 | US20110230056 Methods of fabricating semiconductor devices including multilayer dielectric layers |
| 09/22/2011 | US20110230055 Film forming apparatus and film-forming method |
| 09/22/2011 | US20110230054 Semiconductor substrate cleaning method |
| 09/22/2011 | US20110230053 Etching agent, etching method and liquid for preparing etching agent |
| 09/22/2011 | US20110230052 Invertable pattern loading with dry etch |
| 09/22/2011 | US20110230051 Method of manufacturing semiconductor device |
| 09/22/2011 | US20110230050 Method of polishing a substrate comprising polysilicon and at least one of silicon oxide and silicon nitride |
| 09/22/2011 | US20110230049 Method of polishing a substrate comprising polysilicon and at least one of silicon oxide and silicon nitride |
| 09/22/2011 | US20110230048 Method of polishing a substrate comprising polysilicon, silicon oxide and silicon nitride |
| 09/22/2011 | US20110230047 Method of etching organosiloxane dielectric material and semiconductor device thereof |
| 09/22/2011 | US20110230046 Semiconductor dice with backside trenches filled with elastic material for improved attachment, packages using the same, and methods of making the same |
| 09/22/2011 | US20110230045 Method of manufacturning semiconductor device |
| 09/22/2011 | US20110230044 Contact structure having a compliant bump and a testing area and manufacturing method for the same |
| 09/22/2011 | US20110230043 Tape residue-free bump area after wafer back grinding |
| 09/22/2011 | US20110230042 Method for improving thermal stability of metal gate |
| 09/22/2011 | US20110230041 Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical misfet and a vertical misfet, and a method of manufacturing a semiconductor device and a semiconductor device |
| 09/22/2011 | US20110230040 Inductively coupled dual zone processing chamber with single planar antenna |
| 09/22/2011 | US20110230039 Dopant profile tuning for mos devices by adapting a spacer width prior to implantation |
| 09/22/2011 | US20110230038 Plasma doping method |
| 09/22/2011 | US20110230037 Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device |
| 09/22/2011 | US20110230036 Use of cl2 and/or hcl during silicon epitaxial film formation |
| 09/22/2011 | US20110230035 Transfer Method for Thin Film Nanomembrane Structures |
| 09/22/2011 | US20110230034 Method of thinning a structure |
| 09/22/2011 | US20110230033 Fabrication of finned memory arrays |
| 09/22/2011 | US20110230032 High Voltage Tolerant Metal-Oxide-Semiconductor Device |
| 09/22/2011 | US20110230031 bipolar junction transistor having a high germanium concentration in a silicon-germanium layer and a method for forming the bipolar junction transistor |
| 09/22/2011 | US20110230030 Strain-preserving ion implantation methods |
| 09/22/2011 | US20110230029 Method of fabricating gate electrode using a hard mask with spacers |
| 09/22/2011 | US20110230028 Manufacturing method of straight word line nor type flash memory array |
| 09/22/2011 | US20110230027 Methods of Forming Semiconductor Devices Having Faceted Semiconductor Patterns |
| 09/22/2011 | US20110230026 Biaxial Strained Field Effect Transistor Devices |
| 09/22/2011 | US20110230025 Fabrication method of trenched metal-oxide-semiconductor device |
| 09/22/2011 | US20110230024 Method for manufacturing non-volatile memory |
| 09/22/2011 | US20110230023 Dram cell with enhanced capacitor area and the method of manufacturing the same |
| 09/22/2011 | US20110230022 Source/Drain Strained Layers |
| 09/22/2011 | US20110230021 Inverter, method of manufacturing the same, and logic circuit including the inverter |
| 09/22/2011 | US20110230020 Schottky-barrier mos transistor on a fully-depleted semiconductor film and process for fabricating such a transistor |
| 09/22/2011 | US20110230019 Method of manufacturing a thin-film transistor and method of manufacturing a display substrate using the same |
| 09/22/2011 | US20110230018 Semiconductor device and method of fabricating the same |
| 09/22/2011 | US20110230017 Method for Forming an SOI Schottky Source/Drain Device to Control Encroachment and Delamination of Silicide |
| 09/22/2011 | US20110230016 Thin-film semiconductor device, lateral bipolar thin-film transistor, hybrid thin-film transistor, mos thin-film transistor, and method of fabricating thin-film transistor |
| 09/22/2011 | US20110230015 Semiconductor Device, Manufacturing Method of Semiconductor Device, and RFID Tag |
| 09/22/2011 | US20110230014 Method of providing an electronic device including dies, a dielectric layer, and an encapsulating layer |
| 09/22/2011 | US20110230013 Stacked packages with bridging traces |
| 09/22/2011 | US20110230012 Method for filling multi-layer chip-stacked gaps |
| 09/22/2011 | US20110230011 Fabrication method for integrated circuit chip component, multi-chip module, and their integration structure |
| 09/22/2011 | US20110230009 Pixel layout structure for raising capability of detecting amorphous silicon residue defects and method for manufacturing the same |
| 09/22/2011 | US20110230007 Semiconductor fabrication method and system |
| 09/22/2011 | US20110230005 Process for fabricating a multilayer structure with trimming using thermo-mechanical effects |
| 09/22/2011 | US20110230003 Process for fabricating a multilayer structure with post-grinding trimming |
| 09/22/2011 | US20110230002 Local Oxidation of Silicon Processes with Reduced Lateral Oxidation |
| 09/22/2011 | US20110230001 Multibit electro-mechanical memory device and method of manufacturing the same |
| 09/22/2011 | US20110230000 Mems device manufacturing method |
| 09/22/2011 | US20110229997 Method for manufacturing semiconductor light emitting device |
| 09/22/2011 | US20110229993 Method of fabricating a light emitting diode chip having phosphor coating layer |
| 09/22/2011 | US20110229990 Forming and training processes for resistance-change memory cell |
| 09/22/2011 | US20110229989 Large scale method and furnace system for selenization of thin film photovoltaic materials |
| 09/22/2011 | US20110229988 Pattern forming method, processing method, and processing apparatus |
| 09/22/2011 | US20110229987 Method for low temperature ion implantation |
| 09/22/2011 | US20110229985 Fabrication of Magnetic Tunnel Junction (MTJ) Devices with Reduced Surface Roughness for Magnetic Random Access Memory (MRAM) |
| 09/22/2011 | US20110229827 Method and Lithography Device with a Mask Reflecting Light |
| 09/22/2011 | US20110229824 method of manufacturing a semiconductor integrated circuit device |
| 09/22/2011 | US20110229805 Photomask with assist features |
| 09/22/2011 | US20110229717 Method for producing crack-free polycrystalline silicon rods |
| 09/22/2011 | US20110229697 Label sheet for cleaning and conveying member having cleaning function |
| 09/22/2011 | US20110229675 Label sheet for cleaning and conveying member having cleaning function |
| 09/22/2011 | US20110229639 Non-polar gallium nitride thin films grown by metalorganic chemical vapor deposition |
| 09/22/2011 | US20110229299 Method of detecting stop of transport apparatus |
| 09/22/2011 | US20110229289 Vacuum processing apparatus |
| 09/22/2011 | US20110229120 Rinsing method and developing method |
| 09/22/2011 | US20110229009 Pattern inspection apparatus and pattern inspection method |
| 09/22/2011 | US20110228803 Vcsel with integral resistive region |
| 09/22/2011 | US20110228587 Nonvolatile semiconductor memory and manufacturing method of nonvolatile semiconductor memory |
| 09/22/2011 | US20110228582 Stacked memory device and method of fabricating same |
| 09/22/2011 | US20110228501 Electronic device, and method of manufacturing electronic device |
| 09/22/2011 | US20110228464 System-in-package using embedded-die coreless substrates, and processes of forming same |
| 09/22/2011 | US20110228439 Substrate mounting and demounting method |
| 09/22/2011 | US20110228376 Active matrix electrochromic device and method of manufacturing the same |
| 09/22/2011 | US20110228370 Manufacturing method for stress compensated x-y gimbaled mems mirror array |
| 09/22/2011 | US20110228262 Apparatus of inspecting defect in semiconductor and method of the same |
| 09/22/2011 | US20110228258 Method of apparatus for detecting particles on a specimen |