Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2011
09/27/2011US8026558 Semiconductor power device having a top-side drain using a sinker trench
09/27/2011US8026545 Eeprom
09/27/2011US8026543 Semiconductor devices having phase change memory cells, electronic systems employing the same and methods of fabricating the same
09/27/2011US8026537 Semiconductor integrated circuit having an oblique global signal wiring and semiconductor integrated circuit wiring method
09/27/2011US8026535 Thin film transistor and organic electroluminescence display using the same
09/27/2011US8026534 III-V semiconductor device structures
09/27/2011US8026533 Light emitting device and method of manufacturing the same
09/27/2011US8026525 Boron phosphide-based semiconductor light-emitting device
09/27/2011US8026522 Thin film transistor array panel and method for manufacturing the same, and liquid crystal display
09/27/2011US8026520 Thin film transistor, method of fabricating the same, and organic light emitting diode display device having the thin film transistor
09/27/2011US8026518 Semiconductor device and method of fabricating the same
09/27/2011US8026507 Two terminal quantum device using MOS capacitor structure
09/27/2011US8026200 Low pH mixtures for the removal of high density implanted resist
09/27/2011US8026187 Method of forming silicon oxide film and method of production of semiconductor memory device using this method
09/27/2011US8026186 Microwave annealing method for device processing with plastic substrate
09/27/2011US8026185 Method for manufacturing electronic circuit component
09/27/2011US8026183 Method of forming a resist pattern
09/27/2011US8026182 Heat treatment jig and heat treatment method for silicon wafer
09/27/2011US8026181 Manufacturing method for semiconductor chips
09/27/2011US8026179 Patterning method and integrated circuit structure
09/27/2011US8026178 Patterning method for high density pillar structures
09/27/2011US8026177 Silicon dioxide cantilever support and method for silicon etched structures
09/27/2011US8026176 Film forming method, plasma film forming apparatus and storage medium
09/27/2011US8026175 Cleaning apparatus of semiconductor substrate and method of manufacturing semiconductor device
09/27/2011US8026174 Sequential station tool for wet processing of semiconductor wafers
09/27/2011US8026173 Semiconductor structure, in particular phase change memory device having a uniform height heater
09/27/2011US8026172 Method of forming contact hole arrays using a hybrid spacer technique
09/27/2011US8026171 Method of fabricating metal interconnection and method of fabricating image sensor using the same
09/27/2011US8026170 Method of forming a single-layer metal conductors with multiple thicknesses
09/27/2011US8026169 Cu annealing for improved data retention in flash memory devices
09/27/2011US8026168 Semiconductor device containing an aluminum tantalum carbonitride barrier film and method of forming
09/27/2011US8026167 Semiconductor device and method of manufacturing the same
09/27/2011US8026166 Interconnect structures comprising capping layers with low dielectric constants and methods of making the same
09/27/2011US8026165 Process for producing air gaps in microstructures, especially of the air gap interconnect structure type for integrated circuits
09/27/2011US8026164 Semiconductor device and method of manufacturing the same
09/27/2011US8026163 Manufacturing method of semiconductor integrated circuit device
09/27/2011US8026162 Method of manufacturing layer-stacked wiring
09/27/2011US8026161 Highly reliable amorphous high-K gate oxide ZrO2
09/27/2011US8026160 Semiconductor device and semiconductor device manufacturing method
09/27/2011US8026159 Method of manufacturing semiconductor device and substrate processing apparatus
09/27/2011US8026158 Systems and methods for processing semiconductor structures using laser pulses laterally distributed in a scanning window
09/27/2011US8026157 Gas mixing method realized by back diffusion in a PECVD system with showerhead
09/27/2011US8026156 Method of fabricating nitride-based compound layer, GaN substrate and vertical structure nitride-based semiconductor light emitting device
09/27/2011US8026155 Method for producing semiconductor device
09/27/2011US8026154 Laser working method
09/27/2011US8026153 Wafer processing method
09/27/2011US8026152 Separation method of semiconductor device
09/27/2011US8026151 Method with high gapfill capability for semiconductor devices
09/27/2011US8026150 Semiconductor device manufacturing method and storage medium
09/27/2011US8026148 Methods of utilizing silicon dioxide-containing masking structures
09/27/2011US8026147 Method of fabricating a semiconductor microstructure
09/27/2011US8026146 Method of manufacturing a bipolar transistor
09/27/2011US8026145 Arsenic and phosphorus doped silicon wafer substrates having intrinsic gettering
09/27/2011US8026144 Method for manufacturing semiconductor device
09/27/2011US8026143 Semiconductor element and manufacturing method thereof
09/27/2011US8026142 Method of fabricating semiconductor transistor devices with asymmetric extension and/or halo implants
09/27/2011US8026141 Method of producing semiconductor
09/27/2011US8026140 Method of forming flash memory device
09/27/2011US8026139 Method of fabricating a non-volatile memory device
09/27/2011US8026138 Method for manufacturing semiconductor apparatus having saddle-fin transistor and semiconductor apparatus fabricated thereby
09/27/2011US8026137 Production method of a capacitor
09/27/2011US8026136 Methods of forming low hydrogen concentration charge-trapping layer structures for non-volatile memory
09/27/2011US8026135 Formation of shallow junctions by diffusion from a dielectric doped by cluster or molecular ion beams
09/27/2011US8026134 Recessed drain and source areas in combination with advanced silicide formation in transistors
09/27/2011US8026132 Leakage barrier for GaN based HEMT active device
09/27/2011US8026131 SOI radio frequency switch for reducing high frequency harmonics
09/27/2011US8026130 Method for manufacturing a semiconductor integrated circuit device
09/27/2011US8026129 Stacked integrated circuits package system with passive components
09/27/2011US8026128 Semiconductor device and method of self-confinement of conductive bump material during reflow without solder mask
09/27/2011US8026127 Integrated circuit package system with slotted die paddle and method of manufacture thereof
09/27/2011US8026126 Apparatus and method for thin die detachment
09/27/2011US8026125 Phase change RAM device and method for fabricating the same
09/27/2011US8026124 Method for fabricating copper/indium/gallium/selenium solar cell by wet process under non-vacuum condition
09/27/2011US8026123 Integrated circuit including a memory apparatus and production method
09/27/2011US8026122 Metal species surface treatment of thin film photovoltaic cell and manufacturing method
09/27/2011US8026121 Method for producing electronic components and pressure sensor
09/27/2011US8026120 Method of manufacturing MEMS device
09/27/2011US8026119 Method of fabricating semiconductor substrate and method of fabricating light emitting device
09/27/2011US8026118 Gallium nitride based compound semiconductor light-emitting device and method for manufacturing same
09/27/2011US8026117 Semiconductor light emitting device with lateral current injection in the light emitting region
09/27/2011US8026116 Display device and method of manufacturing the same
09/27/2011US8026115 Optical bonding composition for LED light source
09/27/2011US8026114 Emitter, manufacturing method and manufacturing apparatus thereof, electro-optical apparatus and electronic apparatus
09/27/2011US8026113 Method of monitoring a semiconductor processing system using a wireless sensor network
09/27/2011US8026112 Method of manufacturing semiconductor device
09/27/2011US8026111 Dielectric enhancements to chip-to-chip capacitive proximity communication
09/27/2011US8026048 Developing apparatus and developing method
09/27/2011US8026047 Resist pattern forming method, supercritical processing solution for lithography process, and antireflection film forming method
09/27/2011US8026042 Polymer for organic anti-reflective coating layer and composition including the same
09/27/2011US8026037 Si-polymers and photoresists comprising same
09/27/2011US8026025 Mask blank transparent substrate manufacturing method, mask blank manufacturing method, and exposure mask manufacturing method
09/27/2011US8025809 Polishing methods
09/27/2011US8025759 Polishing apparatus and polishing method
09/27/2011US8025732 Apparatus for processing a substrate
09/27/2011US8025731 Gas injection system for plasma processing
09/27/2011US8025554 Method of polishing work
09/27/2011US8025473 Carrying system, substrate treating device, and carrying method
09/27/2011US8025204 Method of wire bond encapsulation profiling
09/27/2011US8025201 Methods and apparatus for integrated circuit ball bonding with substantially perpendicular wire bond profiles
09/27/2011US8025086 Electronic component manufacturing apparatus