H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2011
09/27/2011	US8024857 Substrate for semiconductor package having a reinforcing member that prevents distortions and method for fabricating the same
09/27/2011	CA2394426C Device for fast and uniform heating of a substrate with infrared radiation
09/23/2011	DE202011000715U1 Groß ausgelegtes MOCVD-System für Dünnfilm-Photovoltaikvorrichtungen Great out blank MOCVD system for thin film photovoltaic devices
09/22/2011	WO2011116326A1 Through-silicon via fabrication with etch stop film
09/22/2011	WO2011116325A1 Through glass via manufacturing process
09/22/2011	WO2011116106A2 System-in-package using embedded-die coreless substrates, and processes of forming same
09/22/2011	WO2011116009A2 Vapor deposition reactor system
09/22/2011	WO2011115997A2 Silicon nitride passivation layer for covering high aspect ratio features
09/22/2011	WO2011115894A1 Chalcogenide-based materials and improved methods of making such materials
09/22/2011	WO2011115887A1 Photoelectronically active, chalcogen-based thin film structures incorporating tie layers
09/22/2011	WO2011115859A2 Biaxial strained field effect transistor devices
09/22/2011	WO2011115773A2 Thin-box metal backgate extremely thin soi device
09/22/2011	WO2011115761A2 Invertable pattern loading with dry etch
09/22/2011	WO2011115697A2 A method for imaging workpiece surfaces at high robot transfer speeds with correction of motion-induced distortion
09/22/2011	WO2011115696A2 Metrology system for imaging workpiece surfaces at high robot transfer speeds
09/22/2011	WO2011115675A2 Vapor compression refrigeration chuck for ion implanters
09/22/2011	WO2011115332A1 Methed of manufacturing single crystal ingot and wafer manufactured by thereby
09/22/2011	WO2011115321A1 Micro gas sensor array
09/22/2011	WO2011115299A1 Substrate attachment and detachment method
09/22/2011	WO2011115294A1 Silicon carbide electrode, silicon carbide semiconductor element, silicon carbide semiconductor device, and method for forming electrode for silicon carbide
09/22/2011	WO2011115282A1 Liquid application apparatus, liquid application method and imprinting system
09/22/2011	WO2011115250A1 Film forming device, film forming method, rotational frequency optimisation method, and storage medium
09/22/2011	WO2011115249A1 Substrate treatment apparatus
09/22/2011	WO2011115217A1 Radiation-sensitive resin composition and resist pattern formation method
09/22/2011	WO2011115190A1 Radiation-sensitive resin composition
09/22/2011	WO2011115174A1 Semiconductor manufacturing system
09/22/2011	WO2011115172A1 Sheet cutting method and sheet cutting device
09/22/2011	WO2011115157A1 Resist removal device and resist removal method
09/22/2011	WO2011115155A1 Substrate cleaning device and substrate cleaning method
09/22/2011	WO2011115139A1 Electron-beam exposure method and electron-beam exposure device
09/22/2011	WO2011115138A1 Radiation-sensitive resin composition and resist pattern formation method
09/22/2011	WO2011115131A1 Optical member base material for euv lithography, and method for producing same
09/22/2011	WO2011115126A1 Solid-state image capture element, production method for same, and image capture device
09/22/2011	WO2011115105A1 Conductive particle, method for manufacturing conductive particle, anisotropic conductive material, and connection structure
09/22/2011	WO2011115082A1 Connection terminal and connection jig
09/22/2011	WO2011115041A1 Semiconductor device manufacturing method and semiconductor device
09/22/2011	WO2011115038A1 Semiconductor device, detection method, and program
09/22/2011	WO2011115023A1 System, method, and program for predicting finished shape resulting from plasma processing
09/22/2011	WO2011115022A1 Bonding apparatus and bonding method
09/22/2011	WO2011115008A1 Etching method and etching device
09/22/2011	WO2011114999A1 Method for producing gan semiconductor
09/22/2011	WO2011114995A1 Silane coupling agent, negative-type photosensitive resin composition, curable film and touch panel component
09/22/2011	WO2011114989A1 Thin film formation method
09/22/2011	WO2011114968A1 Mold manufacture method and mold formed by said method
09/22/2011	WO2011114961A1 Silicon oxide film forming method, and plasma oxidation apparatus
09/22/2011	WO2011114960A1 Film forming method and film forming apparatus
09/22/2011	WO2011114958A1 Extreme ultraviolet light light-source apparatus
09/22/2011	WO2011114945A1 Method and apparatus for determining acceptance/rejection of fine diameter wire bonding
09/22/2011	WO2011114940A1 Deposition device
09/22/2011	WO2011114926A1 Template processing method, computer storage medium and template processing apparatus
09/22/2011	WO2011114919A1 Semiconductor device
09/22/2011	WO2011114905A1 Semiconductor memory device
09/22/2011	WO2011114890A1 Semiconductor apparatus and manufacturing method of same
09/22/2011	WO2011114889A1 Extreme ultraviolet light source device and location adjustment method for light focusing optical means
09/22/2011	WO2011114887A1 Irradiance distribution detection method in extreme ultraviolet light source device, and location adjustment method for light focusing optical means
09/22/2011	WO2011114885A1 Method of cleaning electronic material and cleaning system
09/22/2011	WO2011114883A1 Resist pattern formation device, resist pattern formation method, and wafer lens production method
09/22/2011	WO2011114868A1 Semiconductor device
09/22/2011	WO2011114867A1 Semiconductor device and driving method of semiconductor device
09/22/2011	WO2011114866A1 Memory device and semiconductor device
09/22/2011	WO2011114858A1 Semiconductor thin-film manufacturing method, seminconductor thin-film manufacturing apparatus, susceptor, and susceptor holding tool
09/22/2011	WO2011114855A1 Sheet-mold transfer/positioning device
09/22/2011	WO2011114854A1 Transfer device
09/22/2011	WO2011114840A1 Plasma processing device, plasma processing method, and method for manufacturing a semiconductor element
09/22/2011	WO2011114793A1 Plasma processing apparatus
09/22/2011	WO2011114759A1 Method for mounting electronic components, and electronic device
09/22/2011	WO2011114751A1 Conductive connecting member and manufacturing method of same
09/22/2011	WO2011114747A1 Electrically conductive paste, and electrically conductive connection member produced using the paste
09/22/2011	WO2011114741A1 Method for disposing a microstructure
09/22/2011	WO2011114734A1 Thin-film forming device
09/22/2011	WO2011114713A1 Nanoink composition
09/22/2011	WO2011114696A1 Method for disposing a component
09/22/2011	WO2011114695A1 Method for disposing a component
09/22/2011	WO2011114677A1 Plasma-treatment apparatus and plasma-treatment method
09/22/2011	WO2011114675A1 Method for etching a silicon wafer, etching solution, etching device, and semiconductor device
09/22/2011	WO2011114658A1 Polishing apparatus, polishing pad, and polishing information management system
09/22/2011	WO2011114618A1 Tape adhering apparatus and tape adhering method
09/22/2011	WO2011114581A1 Deposition method
09/22/2011	WO2011114543A1 Bonding material and bonding method using same
09/22/2011	WO2011114535A1 Compound semiconductor device and manufacturing method for same
09/22/2011	WO2011114503A1 Nonvolatile semiconductor storage device and method for producing same
09/22/2011	WO2011114502A1 Nonvolatile semiconductor storage device and method for producing same
09/22/2011	WO2011114428A1 Semiconductor device, and test method for same
09/22/2011	WO2011114416A1 Power supply voltage determination method for semiconductor integrated circuit and power supply voltage control system for semiconductor integrated circuit
09/22/2011	WO2011114407A1 Method for measuring wavefront aberration and device of same
09/22/2011	WO2011114404A1 Active matrix substrate
09/22/2011	WO2011114403A1 Sem type defect observation device and defect image acquiring method
09/22/2011	WO2011114046A1 Process for producing a conducting electrode
09/22/2011	WO2011114020A1 Process for manufacturing an electrode for medical use and electrode obtained by the implementation of this process
09/22/2011	WO2011114018A2 Method of forming a pattern on the surface of a substrate
09/22/2011	WO2011113775A1 Method for finishing a substrate of the semiconductor-on-insulator type
09/22/2011	WO2011113518A1 Apparatus for the deposition of semiconductor material on a glass sheet
09/22/2011	WO2011113414A2 Method for sintering a semiconductor device using a low-temperature joining technique
09/22/2011	WO2011113347A1 Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof
09/22/2011	WO2011113271A1 Semiconductor device and fabrication method thereof
09/22/2011	WO2011113270A1 Semiconductor device and method of manufacturing the same
09/22/2011	WO2011113268A1 Semiconductor device and fabrication method thereof
09/22/2011	WO2011113177A1 Method and apparatus for remote plasma source assisted silicon-containing film deposition
09/22/2011	WO2011113136A1 Multi-chip package with offset die stacking and method of making same
09/22/2011	WO2011090737A3 Oxygen radical generation for radical-enhanced thin film deposition

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