H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2011
10/04/2011	US8028654 Planar controlled zone microwave plasma system
10/04/2011	US8028652 Batch-type remote plasma processing apparatus
10/02/2011	CA2734937A1 Additive for robust metal ink formulations
09/2011
09/29/2011	WO2011120041A2 Method of forming monolithic cmos-mems hybrid integrated, packaged structures
09/29/2011	WO2011119952A2 Integrated system for vapor generation and thin film deposition
09/29/2011	WO2011119947A1 Three dimensional inductor and transformer design methodology of glass technology
09/29/2011	WO2011119944A2 Sacrificial material to facilitate thin die attach
09/29/2011	WO2011119916A1 Substrate processing apparatus with composite seal
09/29/2011	WO2011119895A2 Method for forming phase change memory device
09/29/2011	WO2011119779A1 Biomechatronic device
09/29/2011	WO2011119733A2 Reduction of particle contamination produced by moving mechanisms in a process tool
09/29/2011	WO2011119729A2 Airflow management for low particulate count in a process tool
09/29/2011	WO2011119503A2 Segmented substrate loading for multiple substrate processing
09/29/2011	WO2011119471A2 Dc voltage charging of cathode for plasma striking
09/29/2011	WO2011119424A2 Fortification of charge-storing material in high-k dielectric environments and resulting apparatuses
09/29/2011	WO2011119373A2 Integrated circuit guard rings
09/29/2011	WO2011119293A2 Formation of liner and barrier for tungsten as gate electrode and as contact plug to reduce resistance and enhance device performance
09/29/2011	WO2011119231A2 Irradiation assisted nucleation of quantum confinements by atomic layer deposition
09/29/2011	WO2011119192A1 Backside dummy plugs for 3d integration
09/29/2011	WO2011119184A1 Split laser scribe
09/29/2011	WO2011119113A1 Photoelectric transducer using iron silicide and aluminum and method for preparing the same
09/29/2011	WO2011118983A2 Lithography apparatus and lithography method
09/29/2011	WO2011118911A2 Pad for touch panel and touch panel using same
09/29/2011	WO2011118865A1 Method for manufacturing substrate
09/29/2011	WO2011118864A1 Method for slicing synthetic corundum single-crystal ingot
09/29/2011	WO2011118855A1 Pattern forming method and resist composition
09/29/2011	WO2011118853A1 Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the same
09/29/2011	WO2011118847A1 Region temperature-controlled structure
09/29/2011	WO2011118824A1 Pattern forming method, chemical amplification resist composition and resist film
09/29/2011	WO2011118786A1 Manufacturing method for glass-embedded silicon substrate
09/29/2011	WO2011118745A1 Image processing apparatus, image processing method, and image processing program
09/29/2011	WO2011118741A1 Method for manufacturing semiconductor device
09/29/2011	WO2011118719A1 Adhesive composition, use thereof, connection structure for circuit members, and method for producing same
09/29/2011	WO2011118664A1 Liquid adhesive for electronic parts and adhesive tape
09/29/2011	WO2011118659A1 Electrostatic chuck
09/29/2011	WO2011118658A1 Electrostatic chuck
09/29/2011	WO2011118657A1 Electrostatic chuck
09/29/2011	WO2011118644A1 Surface layer film-forming composition and resist pattern formation method
09/29/2011	WO2011118610A1 Substrate processing apparatus
09/29/2011	WO2011118591A1 Method for producing molds and method for producing products with superfine concave-convex structures on surface
09/29/2011	WO2011118583A1 Anodizing device, treatment tank, method for producing roll-shaped mold for imprinting, and method for producing article having plurality of protruding parts on surface
09/29/2011	WO2011118532A1 Processing method
09/29/2011	WO2011118515A1 Display device, and method for producing array substrate for display device
09/29/2011	WO2011118510A1 Method for manufacturing semiconductor device
09/29/2011	WO2011118505A1 Polishing pad, manufacturing method therefor, and method for manufacturing a semiconductor device
09/29/2011	WO2011118490A1 Radiation-sensitive resin composition
09/29/2011	WO2011118467A1 Atmosphere stabilizing method and laser processing device
09/29/2011	WO2011118463A1 Laser annealing device
09/29/2011	WO2011118461A1 Magnetic memory
09/29/2011	WO2011118433A1 Epitaxial substrate for semiconductor element and semiconductor element
09/29/2011	WO2011118419A1 Laminate polishing pad
09/29/2011	WO2011118395A1 Magnetic memory element, magnetic memory, and method for manufacturing the same
09/29/2011	WO2011118374A1 Heat-type sensor and platform
09/29/2011	WO2011118355A1 Polishing pad
09/29/2011	WO2011118351A1 Semiconductor device
09/29/2011	WO2011118346A1 Substrate processing device, substrate processing method, program, and computer recording medium
09/29/2011	WO2011118321A1 Semiconductor device
09/29/2011	WO2011118319A1 Apparatus for production of particles, process for production of particles, and process for production of resin composition for semiconductor sealing purposes
09/29/2011	WO2011118300A1 Electronic component, conductive paste, and method for manufacturing an electronic component
09/29/2011	WO2011118297A1 Glass composition and conductive paste for aluminum electrode wiring, electronic component provided with that aluminum electrode wiring and method for producing this electronic component
09/29/2011	WO2011118289A1 Stamp for micropattern transfer
09/29/2011	WO2011118247A1 Bonding device and process for production of semiconductor device using same
09/29/2011	WO2011118238A1 Irregular-surface forming method using plasma-etching process, and electrode member
09/29/2011	WO2011118205A1 Process for producing soi wafer
09/29/2011	WO2011118176A1 Integrated circuit containing carbon nanotube field-effect transistors, and manufacturing method thereof
09/29/2011	WO2011118171A1 Photosensitive resin composition and light receiving device
09/29/2011	WO2011118159A1 Substrate holding device
09/29/2011	WO2011118149A1 Semiconductor light-emitting element manufacturing method
09/29/2011	WO2011118119A1 Semiconductor integrated circuit
09/29/2011	WO2011118116A1 Semiconductor device and method for producing same
09/29/2011	WO2011118104A1 Semiconductor device and method for producing same
09/29/2011	WO2011118101A1 Semiconductor device and method for producing same
09/29/2011	WO2011118099A1 Field effect transistor, method of manufacture for field effect transistor, and electronic device
09/29/2011	WO2011118098A1 Field effect transistor, method of manufacture for field effect transistor, and electronic device
09/29/2011	WO2011118076A1 Semiconductor device, active matrix substrate, and display device
09/29/2011	WO2011118010A1 Film for holding glass substrate and method for polishing glass substrate
09/29/2011	WO2011118009A1 HIGH-PURITY Cu BONDING WIRE
09/29/2011	WO2011118006A1 Transfer apparatus and method, and computer program
09/29/2011	WO2011118005A1 Transfer apparatus and method, and computer program
09/29/2011	WO2011117948A1 Bidirectional switch element and bidirectional switch circuit using same
09/29/2011	WO2011117947A1 Optical semiconductor device
09/29/2011	WO2011117945A1 Sputtering device and manufacturing method for electronic device
09/29/2011	WO2011117939A1 Semiconductor device and manufacturing method of same
09/29/2011	WO2011117936A1 Transistor and method for manufacturing same
09/29/2011	WO2011117920A1 Semiconductor device and method for manufacturing same
09/29/2011	WO2011117916A1 Manufacturing method for electronic device, and sputtering method
09/29/2011	WO2011117849A1 Thienocoronene-imide semiconducting compounds and polymers
09/29/2011	WO2011117522A1 Method for preparing an elastomeric composite material
09/29/2011	WO2011117407A1 Method for etching conductive metal oxide layer using microelectrode
09/29/2011	WO2011117182A1 Method for making an electronic module comprising an electronic chip attached to a substrate including an antenna
09/29/2011	WO2011117064A1 Process and apparatus for deposition of multicomponent semiconductor layers
09/29/2011	WO2011117056A1 Radiation-emitting semiconductor component and method for producing a radiation-emitting semiconductor component
09/29/2011	WO2011116964A1 Method for providing a metal electrode on the surface of a hydrophobic material
09/29/2011	WO2011116644A1 Single-gate non-volatile flash memory cell, memory device, and manufacturing method thereof
09/29/2011	WO2011116643A1 Stacked-gate non-volatile flash memory cell, memory device, and manufacturing method thereof
09/29/2011	WO2011097630A3 Systems and methods providing arrangements of vias
09/29/2011	WO2011094060A3 Pump baffle design for integrated pump and sputter source
09/29/2011	WO2011093353A3 Thermally conductive silicone rubber composition
09/29/2011	WO2011089178A3 Integrated dram memory device
09/29/2011	WO2011087573A3 Through mold via polymer block package

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