Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2011
10/05/2011CN102208337A Silicon-base compound substrate and manufacturing method thereof
10/05/2011CN102208336A Technical method for forming alternately arranged P type and N type semiconductor thin layers
10/05/2011CN102208335A Method and apparatus for template surface treatment, and pattern forming method
10/05/2011CN102208334A Method for preparing local oxidization termination ring of semiconductor device
10/05/2011CN102208333A Plasma etching method
10/05/2011CN102208332A Thick nitride semiconductor structures with interlayer structures and methods of fabricating thick nitride semiconductor structures
10/05/2011CN102208331A Crystal growth method and substrate manufacturing method
10/05/2011CN102208330A Method for forming fine pattern
10/05/2011CN102208329A Substrate treatment apparatus and substrate treatment method
10/05/2011CN102208328A Defective product resection fixture
10/05/2011CN102208327A Device and method for managing semiconductor cleaning solution
10/05/2011CN102208322A Plasma processing apparatus and semiconductor device manufacturing method
10/05/2011CN102207693A Heating device and heating method
10/05/2011CN102207682A Resist coating method, resist coating device, and method for manufacturing photomask plate and photomask using the resist coating method
10/05/2011CN102207675A Photo mask and manufacturing method thereof
10/05/2011CN102207655A Array substrate and manufacturing method thereof, and liquid crystal display device
10/05/2011CN102207654A Transflective fringe-field-switching-type liquid crystal display panel and manufacturing method
10/05/2011CN102206799A Surface passivation method for germanium-based MOS (Metal Oxide Semiconductor) device substrate
10/05/2011CN102206559A Cleaning composition, cleaning process, and process for producing semiconductor device
10/05/2011CN102206469A Adhesive tape for wafer processing
10/05/2011CN102206465A Method of chemical mechanical polishing a substrate with polishing composition adapted to enhance silicon oxide removal
10/05/2011CN102206098A Ceramic copper-clad substrate and preparation method thereof
10/05/2011CN102205911A Substrate processing apparatus, conversion method and load-shifting method
10/05/2011CN102205562A Cutting device and cutting method
10/05/2011CN102205540A Substrate transport hand and substrate transport robot
10/05/2011CN102205522A Gas path positive pressure system used for chemico-mechanical polishing and chemico-mechanical polishing equipment
10/05/2011CN102205521A Method for polishing a semiconductor wafer
10/05/2011CN102205520A Method for the double-side polishing of a semiconductor wafer
10/05/2011CN102205470A Filling composition, semiconductor device including the same, and method of fabricating the semiconductor device
10/05/2011CN102205468A Device and method for etching silver syrup on electronic product
10/05/2011CN102205296A Coating device
10/05/2011CN101894796B Method for utilizing laser scribing to cleave tube core of gallium nitride-based laser
10/05/2011CN101894736B Coating developing machine
10/05/2011CN101866932B Voltage modulation mid-wavelength and long-wavelength two-color quantum well infrared detector and manufacturing method thereof
10/05/2011CN101866868B Monitoring method of semiconductor process
10/05/2011CN101863447B Method for manufacturing sloped sidewall silicon dioxide structure by adopting photoetching and dry etching
10/05/2011CN101853833B Embedded basic island and multi-convex point basic island lead framework and first-etching last-plating method thereof
10/05/2011CN101840901B Lead frame structure of static release ring without paddle and production method thereof
10/05/2011CN101831628B Method for growing high-quality In ingredient enriched InGaN thin film material
10/05/2011CN101826546B Resistor conversion memory cell limited by nano-scale side wall and manufacturing method thereof
10/05/2011CN101826525B NOR type flash memory structure with double ion implantation and manufacturing method thereof
10/05/2011CN101819923B Method for manufacturing polysilicon nanometer thin film strain resistor
10/05/2011CN101800167B Method for preparing metal-oxide-semiconductor capacitor on germanium substrate
10/05/2011CN101789401B CMOS (Complementary Metal-Oxide-Semiconductor Transistor) and manufacture method thereof
10/05/2011CN101789376B VDMOS and preparation method thereof
10/05/2011CN101789371B Cleaning method of semiconductor component
10/05/2011CN101789362B Plasma processing device and processing method thereof
10/05/2011CN101777491B Method for opening contact hole
10/05/2011CN101770947B Poly(p-phenylene benzobisoxazole) fiber surface-processing method
10/05/2011CN101770931B Method for removing organic particle impurities on wafer surface
10/05/2011CN101764083B Formation method of barrier layer
10/05/2011CN101764075B Monitoring method of backside defect of wafer and system thereof
10/05/2011CN101752298B Manufacturing method for metal interconnecting structure
10/05/2011CN101752267B Chip scale package structure of CMOS (complementary metal-oxide-semiconductor) image sensor and packaging method
10/05/2011CN101752266B Chip scale package structure of CMOS (complementary metal-oxide-semiconductor) image sensor and packaging method
10/05/2011CN101743630B Mos transistors for thin soi integration and methods for fabricating the same
10/05/2011CN101740424B Manufacturing process for a chip package structure
10/05/2011CN101740410B Manufacturing process for a chip package structure
10/05/2011CN101740333B Incineration treatment method
10/05/2011CN101728264B Method for controlling source/drain junction capacitance and method for forming PMOS transistor
10/05/2011CN101728252B Method for forming flash memory grid electrode and flash memory
10/05/2011CN101721821B Radiofrequency receiving chip and method for manufacturing same
10/05/2011CN101714543B Ceramic substrate for three-dimensional packaging of multi-chip system and packaging method thereof
10/05/2011CN101689521B Method and apparatus for monitoring vias in a semiconductor fab
10/05/2011CN101689495B Polishing apparatus
10/05/2011CN101685776B Method for improving ohmic contact of ZnO film
10/05/2011CN101673718B Semiconductor device, method of manufacturing thereof, circuit board and electronic apparatus
10/05/2011CN101651116B Method for forming contact hole
10/05/2011CN101651099B Method for removing photoresist layer
10/05/2011CN101647106B Surface-hydrophobicized film, material for formation of surface-hydrophobicized film, wiring layer, semiconductor device and process for producing semiconductor device
10/05/2011CN101630678B Luminous device and method for manufacturing same
10/05/2011CN101625974B Method for forming dielectric layer on quick heat treatment semiconductor substrate by adopting high-energy electromagnetic radiation
10/05/2011CN101621037B Tft sas memory unit structure
10/05/2011CN101621016B Method and system for detecting defects in manufacture of integrated circuit
10/05/2011CN101600540B Polishing pad and process for production of polishing pad
10/05/2011CN101599419B Forming method of groove
10/05/2011CN101593690B Laminated dielectric layer forming method and metal foredielectric layer forming method
10/05/2011CN101593686B Metal grid forming method
10/05/2011CN101593684B Polysilicon gate, semiconductor device and formation method thereof
10/05/2011CN101593674B Forming method of semiconductor substrate and manufacturing method of solar cell
10/05/2011CN101593668B Method for monitoring gluing developing equipment
10/05/2011CN101589473B Nanowire-based transparent conductors and applications thereof
10/05/2011CN101587836B Dry etching method for removing silicon nitride film
10/05/2011CN101582431B Thin film transistor (TFT) array substrate and manufacture method thereof
10/05/2011CN101577252B Shallow trench isolation structure and method for forming same
10/05/2011CN101577230B Manufacturing method of semiconductor device
10/05/2011CN101562143B Method for manufacturing a semiconductor device, method and structure for mounting the semiconductor device
10/05/2011CN101546135B Charged-particle beam writing method and charged-particle beam writing apparatus
10/05/2011CN101546134B Electron beam writing apparatus and method
10/05/2011CN101533799B Semiconductor device and method for manufacturing the same
10/05/2011CN101523566B bonding method of chips and chips stacking pieces
10/05/2011CN101510505B Ion implantation method and apparatus
10/05/2011CN101499436B Method for improving breakdown voltage between two adjacent N traps
10/05/2011CN101488545B Surface roughening method for LED substrate
10/05/2011CN101488464B Method for forming an encapsulated device and structure
10/05/2011CN101459199B Semiconductor device and method of fabricating the same
10/05/2011CN101459037B Substrate rack control device, substrate rack mobility control method and sediment apparatus
10/05/2011CN101458180B Method for preprocessing TEM example and carrying out TEM test for example
10/05/2011CN101452854B Method for producing MOS device
10/05/2011CN101439492B Polysilicon finishing method capable of improving performance of relief polishing