Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2012
01/31/2012US8105850 Process for selectively patterning a magnetic film structure
01/31/2012US8105765 Method of manufacturing a semiconductor device
01/31/2012US8105757 Method of making a semiconductor device
01/31/2012US8105524 Compression molding method for electronic component and compression molding apparatus employed therefor
01/31/2012US8105445 Method and apparatus for fast and local anneal of anti-ferromagnetic (AF) exchange-biased magnetic stacks
01/31/2012US8105440 Method of cleaning a CVD device
01/31/2012US8105437 Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration
01/31/2012US8105435 Beam homogenizer and laser irradiation apparatus and method of manufacturing semiconductor device
01/31/2012US8105063 Three piece mold cavity design for packaging integrated circuits
01/31/2012US8104951 Temperature uniformity measurements during rapid thermal processing
01/31/2012US8104863 Method for the printing of homogeneous electronic material with a multi-ejector print head
01/31/2012US8104428 Plasma processing apparatus
01/31/2012US8104354 Capacitive sensor and manufacturing method thereof
01/31/2012CA2543909C High temperature electronic devices
01/26/2012WO2012012795A1 In-line metrology system and method
01/26/2012WO2012012745A2 Hermetically sealed electronic device using solder bonding
01/26/2012WO2012012699A1 Platen cleaning
01/26/2012WO2012012691A2 Nonvolatile flash memory structures including fullerene molecules and methods for manufacturing the same
01/26/2012WO2012012457A2 Polycrystalline silicon production
01/26/2012WO2012012384A1 Polycrystalline aluminum nitride material and method of production thereof
01/26/2012WO2012012381A1 Treating surface of substrate using inert gas plasma in atomic layer deposition
01/26/2012WO2012012335A2 Ultrasonic bonding systems including workholder and ribbon feeding system
01/26/2012WO2012012323A2 Stackable molded microelectronic packages
01/26/2012WO2012012321A2 Stackable molded microelectronic packages with area array unit connectors
01/26/2012WO2012012220A2 Metal-contamination -free through-substrate via structure
01/26/2012WO2012012167A1 Methods of forming a floating junction on a solar cell with a particle masking layer
01/26/2012WO2012012166A1 Methods of forming a metal contact on a silicon substrate
01/26/2012WO2012012154A2 Method of fabricating isolated capacitors and structure thereof
01/26/2012WO2012012138A2 Method for finishing silicon on insulator substrates
01/26/2012WO2012012132A1 Lead foil loop formation
01/26/2012WO2012012056A2 Substrate holder to reduce substrate edge stress during chemical mechanical polishing
01/26/2012WO2012012052A2 Endpoint control during chemical mechanical polishing by detecting interface between different layers through selectivity change
01/26/2012WO2012012031A1 Electronic device structure including a buffer layer on a base layer
01/26/2012WO2012012026A2 Metal film deposition
01/26/2012WO2012011931A1 Microelectronic elements having metallic pads overlying vias
01/26/2012WO2012011930A1 Non-lithographic formation of three-dimensional conductive elements
01/26/2012WO2012011929A1 Active chip on carrier or laminated chip having microelectronic element embedded therein
01/26/2012WO2012011928A1 Microelectronic elements with rear contacts connected with via first or via middle structures
01/26/2012WO2012011629A1 Multi-cantilever beam structure of probe card and manufacturing method therefor
01/26/2012WO2012011628A1 Probe card and manufacturing method therefor
01/26/2012WO2012011627A1 Probe card and manufacturing method therefor
01/26/2012WO2012011539A1 Cu alloy film for display device, and display device
01/26/2012WO2012011536A1 Semiconductor device
01/26/2012WO2012011535A1 Substrate processing device
01/26/2012WO2012011512A1 Exposure method, exposure apparatus and cleaning method
01/26/2012WO2012011497A1 Light irradiation device for exposure apparatus, method for controlling light irradiation device, exposure apparatus, and exposure method
01/26/2012WO2012011488A1 Placing table structure and processing apparatus
01/26/2012WO2012011480A1 Interlayer insulating layer formation method and semiconductor device
01/26/2012WO2012011457A1 Anisotropic conductive film, connection structure body, and processes for production of these materials
01/26/2012WO2012011446A1 Laser processing method
01/26/2012WO2012011423A1 Device for treating substrate and method for producing semiconductor device
01/26/2012WO2012011411A1 Fluid processing device and fluid processing method
01/26/2012WO2012011397A1 Substrate heating furnace
01/26/2012WO2012011372A1 Fluorite
01/26/2012WO2012011258A1 Substrate and process for production thereof, and display device
01/26/2012WO2012011230A1 Method for filling through hole of substrate with metal and substrate
01/26/2012WO2012011225A1 Semiconductor device and method for manufacturing same
01/26/2012WO2012011207A1 Semiconductor device manufacturing method comprising step of removing pad electrode for inspection
01/26/2012WO2012011203A1 Apparatus for heat-treating semiconductor substrate
01/26/2012WO2012011202A1 Laser lift-off method and laser lift-off apparatus
01/26/2012WO2012011171A1 Etching device
01/26/2012WO2012011161A1 Semiconductor storage device
01/26/2012WO2012011149A1 Power input device and vacuum processing apparatus using power input device
01/26/2012WO2012011005A2 Device for holding wafer shaped articles
01/26/2012WO2012010934A1 Method for optimising cell variant selection within a design process for an integrated circuit device
01/26/2012WO2012010816A1 Method of fabrication of semiconductor device
01/26/2012WO2012010812A1 Process for producing an integrated circuit
01/26/2012WO2012010662A2 Process for direct bonding two elements comprising copper portions and dielectric materials
01/26/2012WO2012010517A1 A method and apparatus for bonding together two wafers by molecular adhesion
01/26/2012WO2012010479A1 Method and structure to improve the conductivity of narrow copper filled vias
01/26/2012WO2012010473A1 Device and process for forming, on a nanowire made of a semiconductor, an alloy of this semiconductor with a metal or metalloid
01/26/2012WO2012010186A1 Handling device for handling a wafer
01/26/2012WO2012010139A2 Precision machine tool
01/26/2012WO2012009968A1 Photoresist cleaning solution
01/26/2012WO2012009941A1 Cleaning method of multi-layered copper wiring of super-large-scale integrated circuit after chemical-mechanical-polishing
01/26/2012WO2012009940A1 Surface cleaning method after chemical mechanical polishing(cmp) of super large scale integration plugged by tungsten
01/26/2012WO2012009939A1 Processing method for cleaning wafer surface after polishing aluminum wiring of vlsi
01/26/2012WO2012009938A1 Anti-oxidation method for multilayer wiring of ultra large scale integrated circuit after alkaline polishing
01/26/2012WO2012009937A1 Low-pressure chemical-mechanical polishing method for surface of copper wiring in ultra-large scale integrated circuit
01/26/2012WO2012009927A1 Process for producing soi super junction ldmos structure completely eliminating effect of substrate assisted depletion
01/26/2012WO2012009864A1 Mounting method for integrated circuit chip
01/26/2012WO2012009831A1 Wiring board and manufacturing method thereof
01/26/2012WO2011149790A3 Component temperature control by coolant flow control and heater duty cycle control
01/26/2012WO2011142850A3 Etchant-free methods of producing a gap between two layers, and devices produced thereby
01/26/2012WO2011141516A3 Method and apparatus to control surface texture modification of silicon wafers for photovoltaic cell devices
01/26/2012WO2011139435A3 High-temperature selective dry etch having reduced post-etch solid residue
01/26/2012WO2011139039A3 Gas discharge unit, manufacturing method for the same, and substrate processing apparatus having the same
01/26/2012WO2011132903A3 Plasma processing apparatus
01/26/2012WO2011132885A3 Substrate processing apparatus
01/26/2012WO2011132867A3 Sputter target having stepped structure and sputtering device using same
01/26/2012WO2011130252A3 Ball-grid array device having chip assembled on half-etched metal leadframe
01/26/2012WO2011126770A3 Ldmos with no reverse recovery
01/26/2012WO2011126680A3 Methods of forming a plurality of spaced features
01/26/2012WO2011122882A3 Semiconductor template substrate, light-emitting element using a semiconductor template substrate, and a production method therefor
01/26/2012WO2011119952A3 Integrated system for vapor generation and thin film deposition
01/26/2012WO2011118911A3 Pad for touch panel and touch panel using same
01/26/2012WO2011109078A3 Cleaning solution for sidewall polymer of damascene processes
01/26/2012WO2011087485A3 Microelectronic assembly with joined bond elements having lowered inductance
01/26/2012WO2011084531A9 Mobile vacuum carriers for thin wafer processing
01/26/2012WO2010149294A3 Method for producing a ewt solar cell