Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2012
01/24/2012US8101445 Thin film transistor array panel and method for manufacturing the same
01/24/2012US8101444 Method for manufacturing semiconductor device
01/24/2012US8101442 Method for manufacturing EL display device
01/24/2012US8101441 Method of manufacturing light-emitting device
01/24/2012US8101439 Method of driving a light emitting device
01/24/2012US8101438 Method of fabricating printhead integrated circuit with backside electrical connections
01/24/2012US8101437 Method of forming three-terminal solar cell array
01/24/2012US8101436 Dicing method, method of inspecting integrated circuit element, substrate holding device, and pressure sensitive adhesive film
01/24/2012US8101435 Fabrication method for semiconductor device
01/24/2012US8101433 Semiconductor device and manufacturing method of the same
01/24/2012US8101432 Method of repairing an image display unit
01/24/2012US8101337 Method of synthesizing ITO electron-beam resist and method of forming ITO pattern using the same
01/24/2012US8101324 Photomask manufacturing method, photomask manufacturing apparatus and photomask
01/24/2012US8101093 Chemical-mechanical polishing composition and method for using the same
01/24/2012US8101092 Method for controlling ADI-AEI CD difference ratio of openings having different sizes
01/24/2012US8101060 Methods and apparatuses for electrochemical-mechanical polishing
01/24/2012US8101025 Method for controlling corrosion of a substrate
01/24/2012US8101021 Flow method and reactor for manufacturing nanocrystals
01/24/2012US8101018 Method for fabricating a semiconductor device and apparatus for inspecting a semiconductor
01/24/2012US8100743 Polishing apparatus
01/24/2012US8100739 Substrate holding apparatus, polishing apparatus, and polishing method
01/24/2012US8100620 Vacuum processing apparatus
01/24/2012US8100314 Carbon nanotubes solder composite for high performance interconnect
01/24/2012US8100147 Particle-measuring system and particle-measuring method
01/24/2012US8100082 Method and system for introducing process fluid through a chamber component
01/24/2012US8100081 Edge removal of films using externally generated plasma species
01/24/2012US8099817 Wafer edge cleaning
01/24/2012CA2485230C Thermally or electrically conductive gap filler
01/24/2012CA2438048C Process for mask-free localized organic grafting onto conductive or semiconductive portions of composite surfaces
01/19/2012WO2012009639A2 Aqueous cleaner for the removal of post-etch residues
01/19/2012WO2012009636A1 Firing furnace configuration for thermal processing system
01/19/2012WO2012009520A2 Conductive sidewall for microbumps
01/19/2012WO2012009371A2 Compartmentalized chamber
01/19/2012WO2012009313A2 3 transistor (n/p/n) non-volatile memory cell without program disturb
01/19/2012WO2012009308A2 Methods for forming barrier/seed layers for copper interconnect structures
01/19/2012WO2012009257A2 P-gan fabrication process utilizing a dedicated chamber and method of minimizing magnesium redistribution for sharper decay profile
01/19/2012WO2012009188A2 Neutron detector with wafer-to-wafer bonding
01/19/2012WO2012009183A2 Method for fast estimation of lithographic binding patterns in an integrated circuit layout
01/19/2012WO2012009140A2 Three dimensional memory and methods of forming the same
01/19/2012WO2012009076A2 Memory arrays having substantially vertical, adjacent semiconductor structures and their formation
01/19/2012WO2012009061A1 Multilayer construction
01/19/2012WO2012008989A2 Forming memory using high power impulse magnetron sputtering
01/19/2012WO2012008954A1 Process chamber pressure control system and method
01/19/2012WO2012008783A2 Air knife chamber having shield member
01/19/2012WO2012008729A2 Pulsed laser deposition apparatus and deposition method using same
01/19/2012WO2012008686A2 Printing plate and method of manufacturing the same
01/19/2012WO2012008555A1 Colloidal-processed silicon particle devices and methods for forming colloidal-processed silicon particle devices
01/19/2012WO2012008554A1 Precursor composition and method for forming amorphous conductive oxide film
01/19/2012WO2012008552A1 Processes of silicon surface modification for the electrochemical synthesis of silicon particles in suspension
01/19/2012WO2012008545A1 Method for producing aluminum nitride crystals
01/19/2012WO2012008538A1 Polysiloxane composition and method of pattern formation
01/19/2012WO2012008525A1 Plasma processing device and plasma processing method
01/19/2012WO2012008523A1 Plasma treatment device
01/19/2012WO2012008521A1 Plasma processing apparatus and plasma processing method
01/19/2012WO2012008510A1 Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the same
01/19/2012WO2012008491A1 Dicing / die bonding integral film, dicing / die bonding integral film manufacturing method, and semiconductor chip manufacturing method
01/19/2012WO2012008440A1 Film-forming apparatus
01/19/2012WO2012008439A1 Substrate processing method and substrate processing system
01/19/2012WO2012008409A1 Etching method
01/19/2012WO2012008390A1 Semiconductor device
01/19/2012WO2012008349A1 Magnetic resistance element, magnetic memory cell and magnetic random access memory
01/19/2012WO2012008321A1 Industrial robot, method for controlling industrial robot, and method for teaching industrial robot
01/19/2012WO2012008320A1 Industrial robot
01/19/2012WO2012008316A1 Multilayer adhesive sheet and method for manufacturing electronic component
01/19/2012WO2012008310A1 Developer liquid for photoresist and developing apparatus
01/19/2012WO2012008304A1 Semiconductor device
01/19/2012WO2012008286A1 Semiconductor device
01/19/2012WO2012008282A1 Dry etching agent and dry etching method
01/19/2012WO2012008252A1 Chemical-mechanical polishing pad and chemical-mechanical polishing method
01/19/2012WO2012008237A1 Polishing solution for copper polishing, and polishing method using same
01/19/2012WO2012008203A1 Method of manufacturing tft using photosensitive applying-type electrode material
01/19/2012WO2012008192A1 Circuit board, display device, and process for production of circuit board
01/19/2012WO2012008179A1 Etching method
01/19/2012WO2012008156A1 Sealing device and conveyance device
01/19/2012WO2012008141A1 Electric field-effect transistor
01/19/2012WO2012008121A1 Semiconductor device
01/19/2012WO2012008103A1 Method for manufacturing crystalline semiconductor film and apparatus for manufacturing crystalline semiconductor film
01/19/2012WO2012008096A1 Charged particle beam device, defect supervision device, and management server
01/19/2012WO2012008091A1 Charged particle beam device
01/19/2012WO2012008087A1 Method of manufacturing silicon substrate, and silicon substrate
01/19/2012WO2012008079A1 Thin film transistor and shift register
01/19/2012WO2012008075A1 Nitride semiconductor device
01/19/2012WO2012008074A1 Diode
01/19/2012WO2012008067A1 Semiconductor storage device and method for manufacturing same
01/19/2012WO2012008027A1 Compound semiconductor device and process for production thereof
01/19/2012WO2012008018A1 Semiconductor device and method for manufacturing same
01/19/2012WO2012007865A2 Metallization processes, mixtures, and electronic devices
01/19/2012WO2012007655A1 Method for assembling a chip in a flexible substrate
01/19/2012WO2012007525A1 Method for rinsing and/or drying an ecpr chamber, and chucks and chuck assemblies therefore
01/19/2012WO2012007523A1 Leveling of master electrode and substrate in ecpr, and a chuck therefor
01/19/2012WO2012007521A1 A contact sheet for arrangement between a chuck and a master electrode in an ecpr process
01/19/2012WO2012007520A1 A chuck, and a method for bringing a first and a second substrate together
01/19/2012WO2012007435A1 Temporary substrate, processing method and production method
01/19/2012WO2012007386A1 Conductivity modulation in a silicon carbide bipolar junction transistor
01/19/2012WO2012007350A1 Semiconductor component, substrate and method for producing a semiconductor layer sequence
01/19/2012WO2012007252A1 Module package and production method
01/19/2012WO2012007191A1 System for automated handling of masters and substrate
01/19/2012WO2012007165A1 Method and device for the plasma treatment of flat substrates
01/19/2012WO2012007060A1 Capacitor structures for semiconductor device
01/19/2012WO2012006881A1 Structure of semiconductor device and manufacturing method thereof