Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/2012
02/09/2012WO2012018449A2 Dual plasma volume processing apparatus for neutral/ion flux control
02/09/2012WO2012018448A2 Plasma processing chamber with dual axial gas injection and exhaust
02/09/2012WO2012018425A2 Real-time monitoring of retaining ring thickness and lifetime
02/09/2012WO2012018398A1 N-well/p-well strap structures
02/09/2012WO2012018368A2 Parasitic plasma prevention in plasma processing chambers
02/09/2012WO2012018365A2 Systems, methods and apparatus for choked flow element extraction
02/09/2012WO2012018215A2 Large substrate, and polishing method of large substrate for uniform polishing
02/09/2012WO2012018211A2 Method for depositing cyclic thin film
02/09/2012WO2012018210A2 Method for depositing cyclic thin film
02/09/2012WO2012018116A1 Sapphire substrate and semiconductor light-emitting element
02/09/2012WO2012018083A1 Electronic component manufacturing method
02/09/2012WO2012018075A1 Surface treatment device and surface treatment method
02/09/2012WO2012018051A1 Cleaning method, device production method, cleaning substrate, immersed member, immersion exposure device, and dummy substrate
02/09/2012WO2012018048A1 Resin mold for nanoimprinting and manufacturing method thereof
02/09/2012WO2012018046A1 Semiconductor device bonding material
02/09/2012WO2012018045A1 Resin mold, production method thereof, and use thereof
02/09/2012WO2012018043A1 Resin mold for nanoimprinting
02/09/2012WO2012018024A1 Plasma treatment device
02/09/2012WO2012018013A1 Support substrate
02/09/2012WO2012018010A1 Substrate processing method and substrate processing device
02/09/2012WO2012018008A1 Substrate processing apparatus, substrate processing method, and semiconductor device manufacturing method
02/09/2012WO2012017972A1 Exhaust system
02/09/2012WO2012017958A1 Process for production of semiconductor device
02/09/2012WO2012017955A1 Method for manufacturing semiconductor wafer provided with adhesive layer, photosensitive adhesive, and semiconductor device
02/09/2012WO2012017947A1 Aqueous processing solution for fixed abresive grain wire saw
02/09/2012WO2012017878A1 Semiconductor device
02/09/2012WO2012017875A1 Manufacturing method of microcrystalline silicon film and manufacturing method of thin film transistor
02/09/2012WO2012017844A1 Semiconductor device
02/09/2012WO2012017843A1 Semiconductor integrated circuit
02/09/2012WO2012017819A1 Composition for removal of nickel-platinum alloy metal
02/09/2012WO2012017814A1 Etchant composition and method for forming metal wiring
02/09/2012WO2012017808A1 Microlens exposure device
02/09/2012WO2012017798A1 Semiconductor device and process for production thereof
02/09/2012WO2012017796A1 Semiconductor device and process for production thereof
02/09/2012WO2012017790A1 Composition for forming resist underlayer film and method for forming resist pattern using same
02/09/2012WO2012017783A1 Transmission optical system, illumination optical system, exposure device, and device manufacturing method
02/09/2012WO2012017771A1 Light emitting element manufacturing method
02/09/2012WO2012017762A1 Light quantity detection method and device therefor
02/09/2012WO2012017761A1 Defect inspection method and device using same
02/09/2012WO2012017746A1 Semiconductor device, method for manufacturing same, and nonvolatile semiconductor memory device
02/09/2012WO2012017743A1 Goods transport facility
02/09/2012WO2012017723A1 Group iii nitride crystal growing method
02/09/2012WO2012017717A1 Vacuum processing apparatus and plasma processing method
02/09/2012WO2012017703A1 Method for producing photoelectric conversion device
02/09/2012WO2012017653A1 Substrate processing system, transfer module, substrate processing method, and method for manufacturing semiconductor element
02/09/2012WO2012017626A1 Thin-film transistor substrate, method for producing same, and liquid crystal display panel
02/09/2012WO2012017588A1 Semiconductor device and method for manufacturing same
02/09/2012WO2012017584A1 Thin film transistor substrate
02/09/2012WO2012017568A1 Adhesive film and tape for semiconductor wafer processing
02/09/2012WO2012017565A1 Laser lift-off apparatus
02/09/2012WO2012017535A1 Semiconductor device
02/09/2012WO2012017533A1 Method for manufacturing semiconductor device and method for growing graphene
02/09/2012WO2012017530A1 Photocurable composition and method for producing molded body having surface that is provided with fine pattern
02/09/2012WO2012017506A1 Semiconductor device, and method for manufacturing same
02/09/2012WO2012017389A1 Manufacturing of scalable gate length high electron mobility transistors
02/09/2012WO2012017378A2 Methods for stabilizing contact surfaces of electrostatic chucks
02/09/2012WO2012017227A1 Semiconductor device
02/09/2012WO2012016997A1 Method for the purification of fluorine
02/09/2012WO2012016693A1 Apparatus for blocking and unblocking a loading/unloading opening of a process chamber
02/09/2012WO2012016477A1 Chemical mechanical polisher and chemical mechanical polishing equipment with same
02/09/2012WO2012016425A1 Photo-resist washing fluid
02/09/2012WO2012016422A1 Heat retention barrel and vertical heat treatment apparatus provided with heat retention barrel
02/09/2012WO2012016361A1 Method for forming strained semiconductor channel and semiconductor device
02/09/2012WO2012016258A2 Adhesive for fixing and/or embedding an electronic component and metnod and use
02/09/2012WO2011159035A3 Bond head of die bonding device
02/09/2012WO2011137373A3 Vertical inline cvd system
02/09/2012WO2011133351A3 Hybrid deposition chamber for in-situ formation of group iv semiconductors & compounds with group iii-nitrides
02/09/2012WO2011130072A3 Composition and method for polishing bulk silicon
02/09/2012WO2011105830A3 Method for producing a polycrystalline silicon layer, and apparatus for forming a metal mixed layer for same
02/09/2012WO2011103391A3 High efficiency high accuracy heater driver
02/09/2012WO2011102254A9 Silicon carbide insulated gate semiconductor element and method for producing same
02/09/2012WO2011090577A3 Multi-gate iii-v quantum well structures
02/09/2012WO2011047875A3 Method for the light-induced, galvanic pulsed deposition for forming a seed layer for a metal contact of a solar cell and for the subsequent reinforcement of said seed layer or said metal contact and arrangement for carrying out the method
02/09/2012WO2009072717A3 Method for forming semiconductor p-n junction layer by using aqueous phosphoric acid and device for applying the same
02/09/2012US20120035766 Systems, methods and apparatus for choked flow element extraction
02/09/2012US20120035684 Multiplexed, Multi-Electrode Neurostimulation Devices with Integrated Circuits Having Integrated Electrodes
02/09/2012US20120035351 Volatile Imidazoles and Group 2 Imidazole Based Metal Precursors
02/09/2012US20120034794 Enhancing the width of polycrystalline grains with mask
02/09/2012US20120034793 Method for forming metal nitride film
02/09/2012US20120034792 Coating treatment method
02/09/2012US20120034791 Method of flattening a recess in a substrate and fabricating a semiconductor structure
02/09/2012US20120034790 Method of producing semiconductor device
02/09/2012US20120034789 Method for manufacturing semiconductor device
02/09/2012US20120034788 Substrate processing apparatus and producing method of semiconductor device
02/09/2012US20120034787 Defect Etching of Germanium
02/09/2012US20120034786 Plasma Processing Chamber with Dual Axial Gas Injection and Exhaust
02/09/2012US20120034785 Semiconductor device manufacturing method
02/09/2012US20120034784 Methods of Forming Fine Patterns in Semiconductor Devices
02/09/2012US20120034783 Manufacturing integrated circuit components having multiple gate oxidations
02/09/2012US20120034782 Method of Forming Fine Patterns
02/09/2012US20120034781 Method for fabricating a semiconductor structure
02/09/2012US20120034780 Method for fabricating a semiconductor device
02/09/2012US20120034779 Apparatus for manufacturing a semiconductor device
02/09/2012US20120034778 Double Patterning Strategy for Contact Hole and Trench in Photolithography
02/09/2012US20120034777 Through Hole Vias at Saw Streets Including Protrusions or Recesses for Interconnection
02/09/2012US20120034776 Device of filling metal in through-via-hole of semiconductor wafer and method using the same
02/09/2012US20120034775 Method for Forming a Patterned Thick Metallization atop a Power Semiconductor Chip
02/09/2012US20120034774 Energy Conditioning Circuit Arrangement for Integrated Circuit
02/09/2012US20120034773 Transistor having an etch stop layer including a metal compound that is selectively formed over a metal gate, and method therefor
02/09/2012US20120034772 Nonvolatile Semiconductor Memory Device Having Multi-Layered Oxide/(OXY) Nitride Film as Inter-Electrode Insulating Film and Manufacturing Method Thereof
1 ... 1117 1118 1119 1120 1121 1122 1123 1124 1125 1126 1127 1128 1129 1130 1131 1132 1133 1134 1135 1136 1137 ... 6590