Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2012
03/01/2012WO2011150154A3 Apparatus and method for detaping an adhesive layer from the surface of ultra thin wafers
03/01/2012WO2011149918A3 High surface resistivity electrostatic chuck
03/01/2012WO2011149278A3 Large-area deposition device for gas-mixing prevention
03/01/2012WO2011146212A3 Ultra high selectivity ashable hard mask film
03/01/2012WO2011146208A3 Feedback for polishing rate correction in chemical mechanical polishing
03/01/2012WO2011143012A3 Heater with independent center zone control
03/01/2012WO2011142975A3 Pad window insert
03/01/2012WO2011139775A3 Process chamber lid design with built-in plasma source for short lifetime species
03/01/2012WO2011139642A3 Nmos metal gate materials, manufacturing methods, and equipment using cvd and ald processes with metal based precursors
03/01/2012WO2011139640A3 Improved radiation heating efficiency by increasing absorption of a silicon containing material
03/01/2012WO2011139571A3 Dynamically or adaptively tracking spectrum features for endpoint detection
03/01/2012WO2011139127A3 Double boat structure of wafer processing apparatus
03/01/2012WO2011139126A3 Apparatus and method for processing wafers
03/01/2012WO2011137371A3 Vertical inline cvd system
03/01/2012WO2011137071A3 Methods and apparatus for calibrating flow controllers in substrate processing systems
03/01/2012WO2011137069A3 Twin chamber processing system
03/01/2012WO2011136974A3 Process chambers having shared resources and methods of use thereof
03/01/2012WO2011136604A3 Substrate treating apparatus
03/01/2012WO2011136594A3 Copper and titanium composition for metal layer etching solution
03/01/2012WO2011130717A3 Forming functionalized carrier structures with coreless packages
03/01/2012WO2011127183A3 Memomy programming methods and memory programming devices
03/01/2012WO2011109537A3 Substrate transport carrier
03/01/2012WO2011109266A3 Method and apparatus for single step selective nitridation
03/01/2012WO2011103048A3 Method and system for providing process tool correctables using an optimzed sampling scheme with smart interpolation
03/01/2012WO2010110489A9 Substrate for growing group-iii nitride semiconductors, epitaxial substrate for group-iii nitride semiconductors, group-iii nitride semiconductor element, stand-alone substrate for group-iii nitride semiconductors, and methods for manufacturing the preceding
03/01/2012US20120054705 Manufacturing method, manufacturing program and manufacturing system for semiconductor device
03/01/2012US20120054695 Pattern Verification Method, Pattern Verification System, Mask Manufacturing Method and Semiconductor Device Manufacturing Method
03/01/2012US20120053892 Pattern measurement apparatus
03/01/2012US20120053721 Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles
03/01/2012US20120052694 Techniques to improve characteristics of processed semiconductor substrates
03/01/2012US20120052693 Film deposition apparatus, film deposition method, and computer program storage medium
03/01/2012US20120052692 Fabrication of porogen residues free low-k materials with improved mechanical and chemical resistance
03/01/2012US20120052691 Method for treating group III nitride semiconductor
03/01/2012US20120052690 Temperature enhanced electrostatic chucking in plasma processing apparatus
03/01/2012US20120052689 Plasma etching method and apparatus thereof
03/01/2012US20120052688 Plasma Etching Method
03/01/2012US20120052687 Enhanced stripping of implanted resists
03/01/2012US20120052686 Cleaning solution and damascene process using the same
03/01/2012US20120052685 Silicon-containing film-forming composition, silicon-containing film-formed substrate, and patterning process
03/01/2012US20120052684 Method of manufacturing semiconductor device
03/01/2012US20120052683 Pitch reduction using oxide spacer
03/01/2012US20120052682 Polishing slurry and method of manufacturing semiconductor device using the same
03/01/2012US20120052681 Methods of selectively forming a material
03/01/2012US20120052680 Manufacturing method of semiconductor substrate
03/01/2012US20120052679 Method of Fabricating an Ohmic contact to n-type Gallium Nitride
03/01/2012US20120052678 Methods of removing a metal nitride material
03/01/2012US20120052677 Method for Forming Lead-Free Solder Balls with a Stable Oxide Layer Based on a Plasma Process
03/01/2012US20120052676 Methods of Fabricating Semiconductor Memory Devices
03/01/2012US20120052675 Method of fabricating semiconductor device
03/01/2012US20120052674 Semiconductor devices and methods of fabricating the same
03/01/2012US20120052673 Method for fabricating nonvolatile memory device
03/01/2012US20120052672 Methods for fabricating a cell string and a non-volatile memory device including the cell string
03/01/2012US20120052671 Non-volatile memory device and method of manufacturing the same
03/01/2012US20120052670 Patterning a gate stack of a non-volatile memory (nvm) with simultaneous etch in non-nvm area
03/01/2012US20120052669 Patterning a gate stack of a non-volatile memory (nvm) using a dummy gate stack
03/01/2012US20120052668 Split word line fabrication process
03/01/2012US20120052667 Method of fabricating semiconductor device
03/01/2012US20120052666 Method of fabricating a semiconductor device using compressive material with a replacement gate technique
03/01/2012US20120052665 Methods of using a silicon nanoparticle fluid to control in situ a set of dopant diffusion profiles
03/01/2012US20120052664 Manufacturing method of semiconductor device
03/01/2012US20120052663 Transferring and resizing of epitaxial film arrays and method thereof
03/01/2012US20120052662 Method for purification of semiconducting single wall nanotubes
03/01/2012US20120052661 Etching method and method for manufacturing semiconductor device
03/01/2012US20120052660 Directed reagents to improve material uniformity
03/01/2012US20120052659 Manufacturing method and apparatus for semiconductor device
03/01/2012US20120052658 Quantum dot forming method, storage medium storing a program and substrate processing apparatus for execution of the method
03/01/2012US20120052657 Method of forming film and substrate processing apparatus
03/01/2012US20120052656 Dimensional silica-based porous silicon structures and methods of fabrication
03/01/2012US20120052655 Adhesive, adhesive sheet, and process for producing electronic components
03/01/2012US20120052654 Carrier bonding and detaching processes for a semiconductor wafer
03/01/2012US20120052653 Silicon device on si: c-oi and sgoi and method of manufacture
03/01/2012US20120052652 Self-aligned implants to reduce cross-talk of imaging sensors
03/01/2012US20120052651 Method and Apparatus for Thin Film Memory
03/01/2012US20120052650 Methods for Forming Semiconductor Constructions, and Methods for Selectively Etching Silicon Nitride Relative to Conductive Material
03/01/2012US20120052649 Bistable nanoswitch
03/01/2012US20120052648 Methods of manufacturing semiconductor devices
03/01/2012US20120052647 Method Of Fabricating Semiconductor Device
03/01/2012US20120052646 Semiconductor device and method of fabricating the same
03/01/2012US20120052645 Semiconductor device production method
03/01/2012US20120052644 Method for fabricating mos transistor
03/01/2012US20120052643 Method for fabricating semiconductor device
03/01/2012US20120052642 Method of manufacturing silicon carbide semiconductor device
03/01/2012US20120052641 Methods of Manufacturing MOS Transistors
03/01/2012US20120052640 Methods Of Forming Pluralities Of Vertical Transistors, And Methods Of Forming Memory Arrays
03/01/2012US20120052639 Semiconductor device and method of manufacturing the same
03/01/2012US20120052638 Method of fabricating thin-film transistor substrate
03/01/2012US20120052637 Method for forming microcrystalline semiconductor film and method for manufacturing semiconductor device
03/01/2012US20120052636 Method of manufacturing thin film transistor
03/01/2012US20120052635 Conductive layer buried-type substrate, method of forming the conductive layer buried-type substrate, and method of fabricating semiconductor device using the conductive layer buried-type substrate
03/01/2012US20120052634 Method of manufacturing semiconductor device including exposing a dicing line on a wafer
03/01/2012US20120052633 Electronic component mounting method and electronic component mount structure
03/01/2012US20120052632 Method for manufacturing semiconductor device
03/01/2012US20120052631 Leadless array plastic package with various ic packaging configurations
03/01/2012US20120052630 Method for manufacturing chip package
03/01/2012US20120052629 Process for assembling two parts of a circuit
03/01/2012US20120052628 Method of manufacturing semiconductor device
03/01/2012US20120052627 Method for manufacturing semiconductor devices
03/01/2012US20120052626 Thin film transistor array panel and manufacturing method thereof
03/01/2012US20120052625 Manufacturing methods of thin film transistor, liquid crystal display device, and semiconductor device
03/01/2012US20120052624 Manufacturing method of semiconductor device
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