Patents for G03B 27 - Photographic printing apparatus (25,157)
08/2011
08/25/2011US20110205515 Calibration of Lithographic Apparatus
08/25/2011US20110205514 Measuring method and measuring apparatus of pupil transmittance distribution, exposure method and exposure apparatus, and device manufacturing method
08/25/2011US20110205513 Lithographic Apparatus and Device Manufacturing Method
08/25/2011US20110205512 Active Spectral Control of Optical Source
08/25/2011US20110205511 Lithographic Apparatus and Device Manufacturing Method
08/25/2011US20110205510 Method and Apparatus for Controlling a Lithographic Apparatus
08/25/2011US20110205509 Test method for determining reticle transmission stability
08/25/2011US20110205508 Digital Exposure Method and Digital Exposure Device for Performing the Method
08/25/2011US20110205507 Device for damping vibrations in projection exposure apparatuses for semiconductor lithography
08/25/2011US20110205506 Stress-decoupling devices and methods for cooled mirror systems
08/25/2011US20110205505 Line pattern collapse mitigation through gap-fill material application
08/23/2011US8004766 Illuminating device, illuminating method, image signal processing device, image signal processing method, and image projecting apparatus
08/23/2011US8004690 Device and method for the optical measurement of an optical system, measurement structure support, and microlithographic projection exposure apparatus
08/23/2011US8004658 Lighting optical device, exposure system, and exposure method
08/23/2011US8004657 Exposure apparatus, control method for the same, and device manufacturing method
08/23/2011US8004656 Illumination system for a microlithographic projection exposure apparatus
08/23/2011US8004655 Automatic focus adjusting mechanism and optical image acquisition apparatus
08/23/2011US8004654 Lithographic apparatus and device manufacturing method
08/23/2011US8004653 Exposure apparatus and method for producing device
08/23/2011US8004652 Lithographic apparatus and device manufacturing method
08/23/2011US8004651 Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
08/23/2011US8004650 Exposure apparatus and device manufacturing method
08/23/2011US8004649 Immersion photolithography system and method using microchannel nozzles
08/23/2011US8003968 Lithographic apparatus and substrate edge seal
08/18/2011US20110200953 Developing apparatus, developing method and storage medium
08/18/2011US20110200952 Developing apparatus, developing method and storage medium
08/18/2011US20110200946 Microlithography projection exposure apparatus having at least two operating states
08/18/2011US20110200922 Lithographic Apparatus and Method
08/18/2011US20110199601 substrate table, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatus
08/18/2011US20110199600 Collector assembly, radiation source, lithographic apparatus and device manufacturing method
08/18/2011US20110199599 six-mirror euv projection system with low incidence angles
08/18/2011US20110199598 Lithographic fabrication of general periodic structures
08/18/2011US20110199597 Imaging device in a projection exposure facility
08/18/2011US20110199596 Method and Apparatus for Estimating Model Parameters of and Controlling a Lithographic Apparatus
08/18/2011US20110199595 Printing linticular images and lenses on printers with uv-cured gel deposition capability
08/18/2011US20110199594 Exposure apparatus and method for producing device
08/18/2011US20110199593 Lithographic apparatus and a device manufacturing method
08/18/2011US20110199592 Lithographic apparatus, removable member and device manufacturing method
08/18/2011US20110199591 Exposure apparatus, exposing method, maintenance method and device fabricating method
08/16/2011US7999920 Method of performing model-based scanner tuning
08/16/2011US7999919 Substrate holding technique
08/16/2011US7999918 Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method
08/16/2011US7999917 Illumination system and microlithographic projection exposure apparatus including same
08/16/2011US7999916 Microlithographic projection exposure apparatus
08/16/2011US7999915 Laser system
08/16/2011US7999914 Lithographic apparatus and device manufacturing method
08/16/2011US7999913 Microlithography projection system with an accessible diaphragm or aperture stop
08/16/2011US7999912 Lithographic apparatus and sensor calibration method
08/16/2011US7999910 System and method for manufacturing a mask for semiconductor processing
08/16/2011US7998759 Maunfacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server
08/11/2011US20110196646 Alignment System, Lithographic System and Method
08/11/2011US20110195361 Solution to optical constraint on microtruss processing
08/11/2011US20110195237 System and resin for rapid prototyping
08/11/2011US20110194096 Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method
08/11/2011US20110194095 Exposure apparatus and photomask
08/11/2011US20110194094 Lithographic apparatus with support for an object and method for positioning same
08/11/2011US20110194093 Polarization-influencing optical arrangement and an optical system of a microlithographic projection exposure apparatus
08/11/2011US20110194092 Substrate, an Inspection Apparatus, and a Lithographic Apparatus
08/11/2011US20110194091 Low-contamination optical arrangement
08/11/2011US20110194090 Optical raster element, optical integrator and illumination system of a microlithographic projection exposure apparatus
08/11/2011US20110194089 Optical system with aperture device
08/11/2011US20110194088 Projection System, Lithographic Apparatus, Method of Projecting a Beam of Radiation onto a Target and Device Manufacturing Method
08/11/2011US20110194087 Reflective optical element and method of manufacturing the same
08/11/2011US20110194086 Wafer edge exposure module
08/11/2011US20110194085 Lithographic Apparatus, and Motor Cooling Device
08/11/2011US20110194084 Fluid handling structure, lithographic apparatus and device manufacturing method
08/11/2011DE102010007530A1 Vorrichtung zum Reproduzieren von auf Vorlagen befindlichen Abbildungen Apparatus for reproducing located on templates pictures
08/10/2011CN102150081A Method and system for producing a Pepper's ghost
08/10/2011CN101430508B Device and method for supplying fluid for immersion lithography
08/09/2011US7995186 Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
08/09/2011US7995185 Systems and methods for thermally-induced aberration correction in immersion lithography
08/09/2011US7993008 Optical element and exposure apparatus
08/04/2011US20110188023 Lithographic imaging and printing without defects of electrostatic origin
08/04/2011US20110188022 Substrate carrying device, substrate carrying method, and exposure device
08/04/2011US20110188021 Printing apparatus
08/04/2011US20110188020 Overlay Measurement Apparatus, Lithographic Apparatus and Device Manufacturing Method Using Such Overlay Measurement Apparatus
08/04/2011US20110188019 Polarization-modulating optical element
08/04/2011US20110188018 Alignment of Collector Device in Lithographic Apparatus
08/04/2011US20110188017 Methods and devices for driving micromirrors
08/04/2011US20110188016 Lithographic apparatus, programmable patterning device and lithographic method
08/04/2011US20110188015 Lithographic apparatus and device manufacturing method
08/04/2011US20110188014 Radiation source, lithographic apparatus and device manufacturing method
08/04/2011US20110188013 Lithographic apparatus and contamination removal or prevention method
08/04/2011US20110188012 Lithographic apparatus and a device manufacturing method
08/04/2011US20110188011 Particle cleaning of optical elements for microlithography
08/03/2011CN101689016B Anti-piracy coding technique
08/02/2011US7991281 Illumination source having programmable rise and fall times
08/02/2011US7990609 Catadioptric imaging system with prolate spheroidal-shaped mirrors
08/02/2011US7990583 Image reading apparatus
08/02/2011US7990582 Image reading apparatus and image reading method
08/02/2011US7990520 Microlithography illumination systems, components and methods
08/02/2011US7990519 Exposure apparatus and device manufacturing method
08/02/2011US7990518 Immersion exposure apparatus and device manufacturing method
08/02/2011US7990517 Immersion exposure apparatus and device manufacturing method with residual liquid detector
08/02/2011US7990516 Immersion exposure apparatus and device manufacturing method with liquid detection apparatus
08/02/2011US7989151 Resolution enhancement in optical lithography via absorbance-modulation enabled multiple exposures
07/2011
07/28/2011US20110181860 Cooled spider and method for grazing-incidence collectors
07/28/2011US20110181859 Lithographic apparatus and device manufacturing method
07/28/2011US20110181858 Variable slit device, illumination device, exposure apparatus, exposure method, and device manufacturing method
07/28/2011US20110181857 Optical assembly
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