Patents for G03B 27 - Photographic printing apparatus (25,157) |
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08/25/2011 | US20110205515 Calibration of Lithographic Apparatus |
08/25/2011 | US20110205514 Measuring method and measuring apparatus of pupil transmittance distribution, exposure method and exposure apparatus, and device manufacturing method |
08/25/2011 | US20110205513 Lithographic Apparatus and Device Manufacturing Method |
08/25/2011 | US20110205512 Active Spectral Control of Optical Source |
08/25/2011 | US20110205511 Lithographic Apparatus and Device Manufacturing Method |
08/25/2011 | US20110205510 Method and Apparatus for Controlling a Lithographic Apparatus |
08/25/2011 | US20110205509 Test method for determining reticle transmission stability |
08/25/2011 | US20110205508 Digital Exposure Method and Digital Exposure Device for Performing the Method |
08/25/2011 | US20110205507 Device for damping vibrations in projection exposure apparatuses for semiconductor lithography |
08/25/2011 | US20110205506 Stress-decoupling devices and methods for cooled mirror systems |
08/25/2011 | US20110205505 Line pattern collapse mitigation through gap-fill material application |
08/23/2011 | US8004766 Illuminating device, illuminating method, image signal processing device, image signal processing method, and image projecting apparatus |
08/23/2011 | US8004690 Device and method for the optical measurement of an optical system, measurement structure support, and microlithographic projection exposure apparatus |
08/23/2011 | US8004658 Lighting optical device, exposure system, and exposure method |
08/23/2011 | US8004657 Exposure apparatus, control method for the same, and device manufacturing method |
08/23/2011 | US8004656 Illumination system for a microlithographic projection exposure apparatus |
08/23/2011 | US8004655 Automatic focus adjusting mechanism and optical image acquisition apparatus |
08/23/2011 | US8004654 Lithographic apparatus and device manufacturing method |
08/23/2011 | US8004653 Exposure apparatus and method for producing device |
08/23/2011 | US8004652 Lithographic apparatus and device manufacturing method |
08/23/2011 | US8004651 Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method |
08/23/2011 | US8004650 Exposure apparatus and device manufacturing method |
08/23/2011 | US8004649 Immersion photolithography system and method using microchannel nozzles |
08/23/2011 | US8003968 Lithographic apparatus and substrate edge seal |
08/18/2011 | US20110200953 Developing apparatus, developing method and storage medium |
08/18/2011 | US20110200952 Developing apparatus, developing method and storage medium |
08/18/2011 | US20110200946 Microlithography projection exposure apparatus having at least two operating states |
08/18/2011 | US20110200922 Lithographic Apparatus and Method |
08/18/2011 | US20110199601 substrate table, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatus |
08/18/2011 | US20110199600 Collector assembly, radiation source, lithographic apparatus and device manufacturing method |
08/18/2011 | US20110199599 six-mirror euv projection system with low incidence angles |
08/18/2011 | US20110199598 Lithographic fabrication of general periodic structures |
08/18/2011 | US20110199597 Imaging device in a projection exposure facility |
08/18/2011 | US20110199596 Method and Apparatus for Estimating Model Parameters of and Controlling a Lithographic Apparatus |
08/18/2011 | US20110199595 Printing linticular images and lenses on printers with uv-cured gel deposition capability |
08/18/2011 | US20110199594 Exposure apparatus and method for producing device |
08/18/2011 | US20110199593 Lithographic apparatus and a device manufacturing method |
08/18/2011 | US20110199592 Lithographic apparatus, removable member and device manufacturing method |
08/18/2011 | US20110199591 Exposure apparatus, exposing method, maintenance method and device fabricating method |
08/16/2011 | US7999920 Method of performing model-based scanner tuning |
08/16/2011 | US7999919 Substrate holding technique |
08/16/2011 | US7999918 Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method |
08/16/2011 | US7999917 Illumination system and microlithographic projection exposure apparatus including same |
08/16/2011 | US7999916 Microlithographic projection exposure apparatus |
08/16/2011 | US7999915 Laser system |
08/16/2011 | US7999914 Lithographic apparatus and device manufacturing method |
08/16/2011 | US7999913 Microlithography projection system with an accessible diaphragm or aperture stop |
08/16/2011 | US7999912 Lithographic apparatus and sensor calibration method |
08/16/2011 | US7999910 System and method for manufacturing a mask for semiconductor processing |
08/16/2011 | US7998759 Maunfacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server |
08/11/2011 | US20110196646 Alignment System, Lithographic System and Method |
08/11/2011 | US20110195361 Solution to optical constraint on microtruss processing |
08/11/2011 | US20110195237 System and resin for rapid prototyping |
08/11/2011 | US20110194096 Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method |
08/11/2011 | US20110194095 Exposure apparatus and photomask |
08/11/2011 | US20110194094 Lithographic apparatus with support for an object and method for positioning same |
08/11/2011 | US20110194093 Polarization-influencing optical arrangement and an optical system of a microlithographic projection exposure apparatus |
08/11/2011 | US20110194092 Substrate, an Inspection Apparatus, and a Lithographic Apparatus |
08/11/2011 | US20110194091 Low-contamination optical arrangement |
08/11/2011 | US20110194090 Optical raster element, optical integrator and illumination system of a microlithographic projection exposure apparatus |
08/11/2011 | US20110194089 Optical system with aperture device |
08/11/2011 | US20110194088 Projection System, Lithographic Apparatus, Method of Projecting a Beam of Radiation onto a Target and Device Manufacturing Method |
08/11/2011 | US20110194087 Reflective optical element and method of manufacturing the same |
08/11/2011 | US20110194086 Wafer edge exposure module |
08/11/2011 | US20110194085 Lithographic Apparatus, and Motor Cooling Device |
08/11/2011 | US20110194084 Fluid handling structure, lithographic apparatus and device manufacturing method |
08/11/2011 | DE102010007530A1 Vorrichtung zum Reproduzieren von auf Vorlagen befindlichen Abbildungen Apparatus for reproducing located on templates pictures |
08/10/2011 | CN102150081A Method and system for producing a Pepper's ghost |
08/10/2011 | CN101430508B Device and method for supplying fluid for immersion lithography |
08/09/2011 | US7995186 Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method |
08/09/2011 | US7995185 Systems and methods for thermally-induced aberration correction in immersion lithography |
08/09/2011 | US7993008 Optical element and exposure apparatus |
08/04/2011 | US20110188023 Lithographic imaging and printing without defects of electrostatic origin |
08/04/2011 | US20110188022 Substrate carrying device, substrate carrying method, and exposure device |
08/04/2011 | US20110188021 Printing apparatus |
08/04/2011 | US20110188020 Overlay Measurement Apparatus, Lithographic Apparatus and Device Manufacturing Method Using Such Overlay Measurement Apparatus |
08/04/2011 | US20110188019 Polarization-modulating optical element |
08/04/2011 | US20110188018 Alignment of Collector Device in Lithographic Apparatus |
08/04/2011 | US20110188017 Methods and devices for driving micromirrors |
08/04/2011 | US20110188016 Lithographic apparatus, programmable patterning device and lithographic method |
08/04/2011 | US20110188015 Lithographic apparatus and device manufacturing method |
08/04/2011 | US20110188014 Radiation source, lithographic apparatus and device manufacturing method |
08/04/2011 | US20110188013 Lithographic apparatus and contamination removal or prevention method |
08/04/2011 | US20110188012 Lithographic apparatus and a device manufacturing method |
08/04/2011 | US20110188011 Particle cleaning of optical elements for microlithography |
08/03/2011 | CN101689016B Anti-piracy coding technique |
08/02/2011 | US7991281 Illumination source having programmable rise and fall times |
08/02/2011 | US7990609 Catadioptric imaging system with prolate spheroidal-shaped mirrors |
08/02/2011 | US7990583 Image reading apparatus |
08/02/2011 | US7990582 Image reading apparatus and image reading method |
08/02/2011 | US7990520 Microlithography illumination systems, components and methods |
08/02/2011 | US7990519 Exposure apparatus and device manufacturing method |
08/02/2011 | US7990518 Immersion exposure apparatus and device manufacturing method |
08/02/2011 | US7990517 Immersion exposure apparatus and device manufacturing method with residual liquid detector |
08/02/2011 | US7990516 Immersion exposure apparatus and device manufacturing method with liquid detection apparatus |
08/02/2011 | US7989151 Resolution enhancement in optical lithography via absorbance-modulation enabled multiple exposures |
07/28/2011 | US20110181860 Cooled spider and method for grazing-incidence collectors |
07/28/2011 | US20110181859 Lithographic apparatus and device manufacturing method |
07/28/2011 | US20110181858 Variable slit device, illumination device, exposure apparatus, exposure method, and device manufacturing method |
07/28/2011 | US20110181857 Optical assembly |