Patents
Patents for G01B 9 - Instruments as specified in the subgroups and characterised by the use of optical measuring means (14,810)
03/2000
03/07/2000US6034773 Length measuring machine and method using laser beams
03/07/2000US6034772 Method for processing interferometric measurement data
03/07/2000US6032377 Non-spherical surface shape measuring device
03/02/2000WO2000011430A1 Apparatus and method for the non-destructive testing of articles using optical metrology
03/01/2000EP0982573A1 Reference fringe counting in fourier transform spectroscopy
03/01/2000EP0981733A1 Grating based phase control optical delay line
03/01/2000EP0981717A1 Interferometer tunable in a non-mechanical manner by a pancharatnam phase
03/01/2000EP0943075A4 A system and method for performing selected optical measurements
03/01/2000EP0777853B1 Device for carrying out spectroscopic measurements
02/2000
02/29/2000US6031612 Apparatus and methods for contour measurement using movable sources
02/29/2000US6031602 Method and apparatus for inspecting or testing a sample by optical metrology
02/24/2000WO2000009978A1 Apparatus for measuring a light beam wavelength
02/23/2000CN1245284A Instrument for measuring shift and vibration of object by polarized light interference of optical fibre
02/22/2000US6028670 Interferometric methods and systems using low coherence illumination
02/17/2000WO1999042785A3 Apparatus and method for measuring the refractive index and optical path length effects of air using multiple-pass interferometry
02/15/2000US6025913 Digital signal processing (DSP) techniques for FT-IR multiple modulation measurements using a photoelastic modulator
02/15/2000US6025912 Interferometer having a micromirror
02/10/2000DE19833904A1 Sample stage positioner offering lift and tilt down to picometer range under low temperatures comprises metal bellows containing expansible medium and electrical heater
02/09/2000EP0977973A1 Circuitry for processing signals occurring in a heterodyne interferometer
02/09/2000CN1049287C Method for real-time measuring crystal growth solid/liquid boundary and boundary layer structure
02/02/2000EP0977455A2 Fast, environmentally-stable fiber switches using a sagnac interferometer
02/02/2000EP0977022A2 Optical waveguide sensor system for remote detection
02/01/2000US6020964 Interferometer system and lithograph apparatus including an interferometer system
02/01/2000US6020963 Optical quadrature Interferometer
02/01/2000US6020962 Digital signal processing for a FT-IR spectrometer using multiple modulations
02/01/2000US6018990 Flatness measuring and analyzing method
01/2000
01/27/2000DE19757567C2 Einrichtung zur Verstellung des Meßtisches an einem Meßmikroskop Means for adjusting the measurement table in a measuring microscope
01/25/2000CA2109510C Step scanning technique for interferometer
01/19/2000EP0971626A1 Instrument for optically scanning of living tissue
01/19/2000EP0776457B1 Method and interference microscope for imaging an object, with the aim of achieving a resolution beyond the diffraction limit
01/18/2000US6016199 Interferometric device for performing spectroscopic measurements with a stepped Fabry Perot
01/13/2000DE19829382A1 Measurement signal reconstruction method
01/12/2000EP0971218A2 Intergrated optical measurement instruments
01/12/2000EP0795116A4 Phase shifting diffraction interferometer
01/12/2000CN1048333C Optical fine interference method for measuring displacement
01/11/2000US6014216 Architecture for air-turbulence-compensated dual-wavelength heterodyne interferometer
01/11/2000US6014214 High speed inspection of a sample using coherence processing of scattered superbroad radiation
01/06/2000WO2000000783A1 Method and apparatus for ultrasonic laser testing
01/06/2000WO2000000782A1 Method and apparatus for detecting ultrasonic surface displacements using post-collection optical amplification
01/05/2000DE19912420A1 Computer joystick for detecting and converting positional changes of control stick into digital signals
01/05/2000DE19829944A1 Equipment configuration method for confocal microscopes
01/04/2000US6011624 Geometrically-Desensitized interferometer with adjustable range of measurement depths
12/1999
12/29/1999EP0828989A4 Method and apparatus for integrating an automated system to a laboratory
12/29/1999CN2356314Y 激光扫描力显微镜 Laser scanning force microscopy
12/29/1999CN1047841C Combined interferometer and refractometer
12/28/1999US6008904 Apparatus and methods for detecting and correcting distortion of interference fringes
12/28/1999US6008902 Method and device for heterodyne interferometer error correction
12/28/1999US6008898 Method and apparatus for measuring acceleration and vibration using freely suspended fiber sensor
12/28/1999CA2134275C Interferometry with multipath nulling
12/21/1999US6006128 Doppler flow imaging using optical coherence tomography
12/21/1999US6005666 Apparatus for and method of optical inspection in total internal reflection holographic imaging system
12/21/1999US6004314 Optical coherence tomography assisted surgical apparatus
12/16/1999WO1999064817A1 Interferometer
12/16/1999WO1999064814A1 Method and apparatus for determining processing chamber cleaning or wafer etching endpoint
12/16/1999DE19825037A1 Short coherence light source for optical coherence tomography
12/16/1999DE19824277A1 Method of spectroscopic analysis of electromagnetic beam using Fourier spectrometer, especially FTIR spectrometer
12/14/1999US6002482 Disposable calibration device
12/14/1999US6002480 Depth-resolved spectroscopic optical coherence tomography
12/14/1999CA2125997C Polarization rotator with frequency shifting phase conjugate mirror and simplified interferometric output coupler
12/09/1999WO1999063304A1 Apparatus and methods for surface contour measurement
12/09/1999WO1999063302A1 Compensation for measurement uncertainty due to atmospheric effects
12/09/1999WO1999063300A1 Methods and apparatus for confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation
12/09/1999CA2334037A1 Compensation for measurement uncertainty due to atmospheric effects
12/08/1999EP0961914A1 Interferometer system with two wavelengths, and lithographic apparatus provided with such a system
12/08/1999EP0815411B1 Process and device for determining three-dimensional structures in the submicron range
12/08/1999CN1238041A 集成干涉仪 Integrated interferometer
12/07/1999US5999263 Method and apparatus for performing interferometric measurements with reduced sensitivity to vibration
12/07/1999US5999261 Split phase high performance, high frequency, high dynamic range interferometer
12/02/1999WO1999061865A1 Heterodyne confocal microscopy
12/01/1999CN2351742Y Optical proof machine for stamp or print
11/1999
11/30/1999US5995530 Interferometric semiconductor laser with low-loss coupling of light therefrom and an arrangement with such a laser
11/30/1999US5995227 Method and interference microscope for microscoping an object in order to obtain a resolution beyond the diffraction limit (high resolution)
11/30/1999US5995222 Subject positioning device for optical interferometer
11/30/1999US5994690 Image enhancement in optical coherence tomography using deconvolution
11/25/1999WO1999060331A1 Method and apparatus for recording three-dimensional distribution of light scattering
11/25/1999DE19819762A1 Interferometrische Meßeinrichtung Interferometric measurement device
11/25/1999CA2333198A1 Method and apparatus for recording three-dimensional distribution of light scattering
11/24/1999CN2350722Y Diffractometer for measuring
11/23/1999US5991035 Interferometric method of measuring toric surfaces at grazing incidence
11/23/1999US5991033 Interferometer with air turbulence compensation
11/23/1999US5991028 Spectral bio-imaging methods for cell classification
11/17/1999EP0956809A1 Interferometer for optical coherence tomography
11/17/1999EP0956518A1 Interferometer system and lithographic apparatus comprising such a system
11/16/1999US5986760 Shape measurement method and high-precision lens manufacturing process
11/16/1999US5986759 Optical interferometer measurement apparatus and method
11/11/1999WO1999057507A1 Method and apparatus for subsurface imaging
11/11/1999WO1999057506A1 Modulation interferometer and fiberoptically divided measuring p robe with light guided
11/10/1999CN2348351Y Humidification angle detecting controller
11/09/1999US5982488 Compensator which experiences thermal expansion to compensate for changes in optical distance through a transparent material
11/03/1999EP0953821A2 Achromatic quarter wave plate for air turbulence compensating interferometer
11/03/1999EP0832417A4 Method for simultaneous detection of multiple fluorophores for in situ hybridization and chromosome painting
11/02/1999US5978086 Method and apparatus for correcting shifts between a reference focal point and a reference surface as a result of thermal effects in an interferometric optical objective
11/02/1999US5978084 Open loop signal processing circuit and method for a fiber optic interferometric sensor
11/02/1999US5975757 Method and apparatus for providing surface images
11/02/1999US5975744 Real-time compensation system and method
10/1999
10/28/1999WO1999054677A1 A phase shifting interferometer
10/26/1999US5973828 Confocal scanning microscope with angled objective lenses for improved axial resolution
10/26/1999US5973786 Method for absolutely measuring the diffraction grating spacing and apparatus thereof
10/26/1999US5973784 Common path, interferometric systems and methods using a birefringent material for topographic imaging
10/26/1999US5973782 Phaseless wavelength modulation spectroscopy