Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862)
12/2002
12/03/2002US6489607 Optical detector
12/03/2002US6488591 Method and apparatus to determine golf ball trajectory and flight
12/03/2002US6487914 Structural monitoring sensor system
12/03/2002US6487785 Method and circuit for adjusting a switching threshold of a touch probe
11/2002
11/28/2002WO2002095372A1 Thin-film characteristic measuring method using spectroellipsometer
11/28/2002WO2002095329A1 Optical distributed sensor with bragg grating sensing structure
11/28/2002WO2002095328A1 Method and apparatus for dimension measurement of a pattern formed by lithographic exposure tools
11/28/2002WO2002095327A1 Method and apparatus for defining the position of the edge surface of piled, e.g. boardlike objects
11/28/2002WO2002095326A1 System and method for determining coordinates on three-dimensional space using beam phase interference
11/28/2002WO2002073122A3 Cyclic error reduction in average interferometric position measurements
11/28/2002WO2002045214A3 System and method for optically sensing motion of objects
11/28/2002US20020177980 Specimen topography reconstruction
11/28/2002US20020177245 Method and apparatus for controlling feature critical dimensions based on scatterometry derived profile
11/28/2002US20020177057 Measurement of critical dimensions of etched features
11/28/2002US20020176608 Surface-profiling system and method therefor
11/28/2002US20020176098 Technique for fabricating high quality optical components
11/28/2002US20020176097 Apparatus and method for thin film deposition onto substrates
11/28/2002US20020176096 Position detecting method and apparatus, exposure apparatus and device manufacturing method
11/28/2002US20020176095 Imaging system and method for positioning a measuring tip onto a contact region of a microchip
11/28/2002US20020176091 Method and apparatus for using quasi-stable light sources in interferometry applications
11/28/2002US20020176090 Interferometer and interferance measurement method
11/28/2002US20020176085 Feedback position control system and method for an interferometer
11/28/2002US20020176081 Thin film optical measurement system and method with calibrating ellipsometer
11/28/2002US20020176059 Media width detecting system for an imaging apparatus
11/28/2002US20020175994 Image pickup system
11/28/2002US20020175300 Position detection method and apparatus
11/28/2002US20020174707 Work center position determining method and apparatus
11/28/2002US20020174556 Measuring probe with diaphragms and modules
11/28/2002DE10124287A1 Device for aligning two interlinked machine shafts has a reflector to reflect laser light picked up by a receiver, a computer to determine parallel/angular misalignment and a device to define distance between fastenings and shafts
11/28/2002CA2448055A1 Optical distributed sensor with bragg grating sensing structure
11/28/2002CA2447708A1 Method and apparatus for defining the position of the edge surface of piled, e.g. boardlike objects
11/27/2002EP1260871A2 Position detecting method and apparatus, exposure apparatus and device manufacturing method
11/27/2002EP1260832A1 System for verifying the alignment of a vehicle radar system
11/27/2002EP1259776A2 Systems and methods for mapping and marking the thickness of bioprosthetic sheet
11/27/2002EP1208352A4 Profiling of a component having reduced sensitivity to anomalous off-axis reflections
11/27/2002EP1058812B1 Interferometric measuring device for determining the profile or the distance, especially of rough surfaces
11/27/2002EP1034462B1 Method and device for measuring the position and/or orientation of interacting machine units
11/27/2002CN2522829Y Double-light-path large diameter measuring instrument
11/27/2002CN1381715A Nozzle detecting device for synthetic fibre-optical substrate
11/27/2002CN1381707A Method for measuring thickness of measured article and its device
11/27/2002CN1095094C Automated non-visual method of locating periodically arranged sub-micron objects
11/27/2002CN1095068C Method for measuring center positions of optical transmission members
11/26/2002US6487303 Object detector
11/26/2002US6486965 Apparatus for measuring depth and gradient of trench in semiconductor device and method thereof
11/26/2002US6486964 Measuring apparatus
11/26/2002US6486963 Precision 3D scanner base and method for measuring manufactured parts
11/26/2002US6486955 Shape measuring method and shape measuring device, position control method, stage device, exposure apparatus and method for producing exposure apparatus, and device and method for manufacturing device
11/26/2002US6486954 Overlay alignment measurement mark
11/26/2002US6486675 In-situ method for measuring the endpoint of a resist recess etch process
11/26/2002US6486467 Optical detector for measuring relative displacement of an object on which a grated scale is formed
11/26/2002US6485872 Method and apparatus for measuring the composition and other properties of thin films utilizing infrared radiation
11/26/2002US6485413 Methods and apparatus for forward-directed optical scanning instruments
11/26/2002US6484381 System and method for aligning aircraft coordinate systems
11/26/2002CA2240745C Image processing apparatus
11/26/2002CA2205820C Optic position sensor
11/21/2002WO2002093108A1 Laser line generating device
11/21/2002WO2002093107A1 Measuring apparatus for thickness of score lines
11/21/2002WO2002091913A1 Method and apparatus for obtaining geometrical data relating to a canal
11/21/2002US20020173367 Performance measurement system with fluorescent markers for golf equipment
11/21/2002US20020173084 Recording using light reflected from substrate; accuracy measuring thickness
11/21/2002US20020173045 Method for determining the size of a spherical or elipsoidal molecule
11/21/2002US20020172514 LED illumination device for a scannerless range imaging system
11/21/2002US20020171848 Optical reflection sensor
11/21/2002US20020171847 Three-dimensional shape-measuring system
11/21/2002US20020171846 System and method for controlling tube thickness
11/21/2002US20020171845 System and method for controlling wafer temperature
11/21/2002US20020171844 Cyclic error reduction in average interferometric position measurements
11/21/2002US20020171833 Aligning apparatus and method for aligning mask patterns with regions on a substrate
11/21/2002US20020171822 Thin optical microphone/sensor
11/21/2002US20020171821 Traversing laser locating system
11/21/2002US20020170190 Spotting device
11/21/2002US20020170187 Marked plate for a rotational angle sensor element, an angular sensor element for rotating structural parts, and a process for determining a reference value
11/21/2002DE10124839A1 Control of a prosthesis attached to a limb such as an upper arm or leg in which electrical detection of muscle impulses is replaced by optical detection of deformation of a code object placed on the limb surface
11/21/2002DE10123470A1 Acquiring geometric and optical properties of the different layers of a layer system comprises using a measuring device and measuring methods for acquiring the properties of one of the layers
11/21/2002DE10122313A1 Verfahren und Vorrichtung zur berührungsfreien Untersuchung eines Gegenstandes, insbesondere hinsichtlich dessen Oberflächengestalt Method and apparatus for non-contact inspection of an object, in particular regarding the surface shape
11/21/2002DE10064122A1 Anordnung und Verfahren zum Ermitteln der Ausrichtung zweier Körper relativ zueinander Arrangement and method for determining the orientation of two bodies relative to each other
11/20/2002EP1259067A2 Image pickup device
11/20/2002EP1258916A1 Thickness measuring apparatus, thickness measuring method, and wet etching apparatus and wet etching method utilizing them
11/20/2002EP1258781A2 Interferometer system
11/20/2002EP1258711A2 Angular position sensor, code disc and procedure to determine a reference value
11/20/2002EP1258702A2 Device and method for machine shafts alignment
11/20/2002EP1258701A2 A process for reading fractions of an interval between contiguous photo-sensitive elements in a linear optical sensor
11/20/2002EP1257806A1 Method and apparatus for measuring the composition and other properties of thin films
11/20/2002EP1257782A1 Key measurement apparatus and method
11/20/2002EP1257781A1 Caching of intra-layer calculations for rapid rigorous coupled-wave analyses
11/20/2002EP1257471A1 System and method for check-weighing the content of a blister
11/20/2002EP1019670A4 Highly accurate three-dimensional surface digitizing system and methods
11/20/2002CN2521583Y Optical coding device
11/20/2002CN1380968A Position detemrining apparatus for coordinate positioning machine
11/20/2002CN1380540A Static force loading measuring and controlling equipment for material microstructure tester and its method
11/20/2002CN1380531A Standardized photo-electric measurement and calculation equipment for room area
11/20/2002CN1380530A Method for making auxiliary measurement by using back light to irradiate line array CCD
11/20/2002CN1094601C Observation apparatus and fusion splicer for optical fibers
11/19/2002US6484086 Method for detecting road slope and system for controlling vehicle speed using the method
11/19/2002US6484066 Image life tunnel scanner inspection system using extended depth of field technology
11/19/2002US6483950 Determining a depth
11/19/2002US6483594 Apparatus and method for determining the active dopant profile in a semiconductor wafer
11/19/2002US6483585 Instruments for analyzing binding assays based on attenuation of light by thin films
11/19/2002US6483580 Spectroscopic scatterometer system
11/19/2002US6483577 Vehicle alignment sensor system