Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862) |
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12/03/2002 | US6489607 Optical detector |
12/03/2002 | US6488591 Method and apparatus to determine golf ball trajectory and flight |
12/03/2002 | US6487914 Structural monitoring sensor system |
12/03/2002 | US6487785 Method and circuit for adjusting a switching threshold of a touch probe |
11/28/2002 | WO2002095372A1 Thin-film characteristic measuring method using spectroellipsometer |
11/28/2002 | WO2002095329A1 Optical distributed sensor with bragg grating sensing structure |
11/28/2002 | WO2002095328A1 Method and apparatus for dimension measurement of a pattern formed by lithographic exposure tools |
11/28/2002 | WO2002095327A1 Method and apparatus for defining the position of the edge surface of piled, e.g. boardlike objects |
11/28/2002 | WO2002095326A1 System and method for determining coordinates on three-dimensional space using beam phase interference |
11/28/2002 | WO2002073122A3 Cyclic error reduction in average interferometric position measurements |
11/28/2002 | WO2002045214A3 System and method for optically sensing motion of objects |
11/28/2002 | US20020177980 Specimen topography reconstruction |
11/28/2002 | US20020177245 Method and apparatus for controlling feature critical dimensions based on scatterometry derived profile |
11/28/2002 | US20020177057 Measurement of critical dimensions of etched features |
11/28/2002 | US20020176608 Surface-profiling system and method therefor |
11/28/2002 | US20020176098 Technique for fabricating high quality optical components |
11/28/2002 | US20020176097 Apparatus and method for thin film deposition onto substrates |
11/28/2002 | US20020176096 Position detecting method and apparatus, exposure apparatus and device manufacturing method |
11/28/2002 | US20020176095 Imaging system and method for positioning a measuring tip onto a contact region of a microchip |
11/28/2002 | US20020176091 Method and apparatus for using quasi-stable light sources in interferometry applications |
11/28/2002 | US20020176090 Interferometer and interferance measurement method |
11/28/2002 | US20020176085 Feedback position control system and method for an interferometer |
11/28/2002 | US20020176081 Thin film optical measurement system and method with calibrating ellipsometer |
11/28/2002 | US20020176059 Media width detecting system for an imaging apparatus |
11/28/2002 | US20020175994 Image pickup system |
11/28/2002 | US20020175300 Position detection method and apparatus |
11/28/2002 | US20020174707 Work center position determining method and apparatus |
11/28/2002 | US20020174556 Measuring probe with diaphragms and modules |
11/28/2002 | DE10124287A1 Device for aligning two interlinked machine shafts has a reflector to reflect laser light picked up by a receiver, a computer to determine parallel/angular misalignment and a device to define distance between fastenings and shafts |
11/28/2002 | CA2448055A1 Optical distributed sensor with bragg grating sensing structure |
11/28/2002 | CA2447708A1 Method and apparatus for defining the position of the edge surface of piled, e.g. boardlike objects |
11/27/2002 | EP1260871A2 Position detecting method and apparatus, exposure apparatus and device manufacturing method |
11/27/2002 | EP1260832A1 System for verifying the alignment of a vehicle radar system |
11/27/2002 | EP1259776A2 Systems and methods for mapping and marking the thickness of bioprosthetic sheet |
11/27/2002 | EP1208352A4 Profiling of a component having reduced sensitivity to anomalous off-axis reflections |
11/27/2002 | EP1058812B1 Interferometric measuring device for determining the profile or the distance, especially of rough surfaces |
11/27/2002 | EP1034462B1 Method and device for measuring the position and/or orientation of interacting machine units |
11/27/2002 | CN2522829Y Double-light-path large diameter measuring instrument |
11/27/2002 | CN1381715A Nozzle detecting device for synthetic fibre-optical substrate |
11/27/2002 | CN1381707A Method for measuring thickness of measured article and its device |
11/27/2002 | CN1095094C Automated non-visual method of locating periodically arranged sub-micron objects |
11/27/2002 | CN1095068C Method for measuring center positions of optical transmission members |
11/26/2002 | US6487303 Object detector |
11/26/2002 | US6486965 Apparatus for measuring depth and gradient of trench in semiconductor device and method thereof |
11/26/2002 | US6486964 Measuring apparatus |
11/26/2002 | US6486963 Precision 3D scanner base and method for measuring manufactured parts |
11/26/2002 | US6486955 Shape measuring method and shape measuring device, position control method, stage device, exposure apparatus and method for producing exposure apparatus, and device and method for manufacturing device |
11/26/2002 | US6486954 Overlay alignment measurement mark |
11/26/2002 | US6486675 In-situ method for measuring the endpoint of a resist recess etch process |
11/26/2002 | US6486467 Optical detector for measuring relative displacement of an object on which a grated scale is formed |
11/26/2002 | US6485872 Method and apparatus for measuring the composition and other properties of thin films utilizing infrared radiation |
11/26/2002 | US6485413 Methods and apparatus for forward-directed optical scanning instruments |
11/26/2002 | US6484381 System and method for aligning aircraft coordinate systems |
11/26/2002 | CA2240745C Image processing apparatus |
11/26/2002 | CA2205820C Optic position sensor |
11/21/2002 | WO2002093108A1 Laser line generating device |
11/21/2002 | WO2002093107A1 Measuring apparatus for thickness of score lines |
11/21/2002 | WO2002091913A1 Method and apparatus for obtaining geometrical data relating to a canal |
11/21/2002 | US20020173367 Performance measurement system with fluorescent markers for golf equipment |
11/21/2002 | US20020173084 Recording using light reflected from substrate; accuracy measuring thickness |
11/21/2002 | US20020173045 Method for determining the size of a spherical or elipsoidal molecule |
11/21/2002 | US20020172514 LED illumination device for a scannerless range imaging system |
11/21/2002 | US20020171848 Optical reflection sensor |
11/21/2002 | US20020171847 Three-dimensional shape-measuring system |
11/21/2002 | US20020171846 System and method for controlling tube thickness |
11/21/2002 | US20020171845 System and method for controlling wafer temperature |
11/21/2002 | US20020171844 Cyclic error reduction in average interferometric position measurements |
11/21/2002 | US20020171833 Aligning apparatus and method for aligning mask patterns with regions on a substrate |
11/21/2002 | US20020171822 Thin optical microphone/sensor |
11/21/2002 | US20020171821 Traversing laser locating system |
11/21/2002 | US20020170190 Spotting device |
11/21/2002 | US20020170187 Marked plate for a rotational angle sensor element, an angular sensor element for rotating structural parts, and a process for determining a reference value |
11/21/2002 | DE10124839A1 Control of a prosthesis attached to a limb such as an upper arm or leg in which electrical detection of muscle impulses is replaced by optical detection of deformation of a code object placed on the limb surface |
11/21/2002 | DE10123470A1 Acquiring geometric and optical properties of the different layers of a layer system comprises using a measuring device and measuring methods for acquiring the properties of one of the layers |
11/21/2002 | DE10122313A1 Verfahren und Vorrichtung zur berührungsfreien Untersuchung eines Gegenstandes, insbesondere hinsichtlich dessen Oberflächengestalt Method and apparatus for non-contact inspection of an object, in particular regarding the surface shape |
11/21/2002 | DE10064122A1 Anordnung und Verfahren zum Ermitteln der Ausrichtung zweier Körper relativ zueinander Arrangement and method for determining the orientation of two bodies relative to each other |
11/20/2002 | EP1259067A2 Image pickup device |
11/20/2002 | EP1258916A1 Thickness measuring apparatus, thickness measuring method, and wet etching apparatus and wet etching method utilizing them |
11/20/2002 | EP1258781A2 Interferometer system |
11/20/2002 | EP1258711A2 Angular position sensor, code disc and procedure to determine a reference value |
11/20/2002 | EP1258702A2 Device and method for machine shafts alignment |
11/20/2002 | EP1258701A2 A process for reading fractions of an interval between contiguous photo-sensitive elements in a linear optical sensor |
11/20/2002 | EP1257806A1 Method and apparatus for measuring the composition and other properties of thin films |
11/20/2002 | EP1257782A1 Key measurement apparatus and method |
11/20/2002 | EP1257781A1 Caching of intra-layer calculations for rapid rigorous coupled-wave analyses |
11/20/2002 | EP1257471A1 System and method for check-weighing the content of a blister |
11/20/2002 | EP1019670A4 Highly accurate three-dimensional surface digitizing system and methods |
11/20/2002 | CN2521583Y Optical coding device |
11/20/2002 | CN1380968A Position detemrining apparatus for coordinate positioning machine |
11/20/2002 | CN1380540A Static force loading measuring and controlling equipment for material microstructure tester and its method |
11/20/2002 | CN1380531A Standardized photo-electric measurement and calculation equipment for room area |
11/20/2002 | CN1380530A Method for making auxiliary measurement by using back light to irradiate line array CCD |
11/20/2002 | CN1094601C Observation apparatus and fusion splicer for optical fibers |
11/19/2002 | US6484086 Method for detecting road slope and system for controlling vehicle speed using the method |
11/19/2002 | US6484066 Image life tunnel scanner inspection system using extended depth of field technology |
11/19/2002 | US6483950 Determining a depth |
11/19/2002 | US6483594 Apparatus and method for determining the active dopant profile in a semiconductor wafer |
11/19/2002 | US6483585 Instruments for analyzing binding assays based on attenuation of light by thin films |
11/19/2002 | US6483580 Spectroscopic scatterometer system |
11/19/2002 | US6483577 Vehicle alignment sensor system |