Patents for C30B 15 - Single-crystal growth by pulling from a melt, e.g. czochralski method (9,854)
05/1999
05/04/1999US5900058 Apparatus for producing single crystal
05/04/1999US5900055 Method of manufacturing silicon monocrystal by continuously charged Czochralski method
05/04/1999US5900054 Method of manufacturing oxide single crystal
04/1999
04/29/1999WO1999020815A1 Process for preparing a silicon melt from a polysilicon charge
04/28/1999EP0911430A1 Single crystal growth method
04/28/1999EP0911429A1 Quartz glass crucible for producing silicon single crystal and method for producing the crucible
04/27/1999US5897706 Methods for crucible attachment to support base of single crystal pulling apparatus and support base assembly apparatus and support base employed therein
04/22/1999WO1999019545A1 Die for shaped crystal growth from a molten bath
04/21/1999EP0909840A1 Method for producing a silicon single crystal having few crystal defects, and a silicon single crystal and silicon wafers produced by the method
04/20/1999US5895527 Single crystal pulling apparatus
04/14/1999EP0908958A1 In-situ diffusion of dopant impurities during dendritic web growth of crystal ribbon
04/14/1999CN2313933Y Quartz crucible
04/08/1999WO1999016940A1 Method and system for controlling growth of a silicon crystal
04/08/1999WO1999016939A1 Heat shield for crystal puller
04/06/1999US5891245 Single crystal pulling method and apparatus for its implementation
04/06/1999US5891244 Apparatus for the manufacture of SOI wafer and process for preparing SOI wafer therewith
04/01/1999WO1999015717A1 Single crystal pulling apparatus
03/1999
03/30/1999US5888299 Apparatus for adjusting initial position of melt surface
03/30/1999US5888298 Member-handling mechanism, and member-handling jig for a crystal pulling apparatus
03/30/1999US5888293 Material supplied for fabricating single-crystal semiconductor
03/24/1999EP0903429A2 Process for producing heavily doped silicon
03/24/1999EP0903428A2 Apparatus and method for determining crystal diameters
03/24/1999EP0903427A1 Apparatus and method for producing crystals by the czochralski method and crystals produced by this method
03/23/1999US5887015 Heater mechanism for crystal pulling apparatus
03/23/1999US5886737 Method for detecting the optimal melt temperature in the single-crystal semiconductor manufacturing process and apparatus thereof
03/23/1999US5885365 Cleaning using pure water, followed by warming with warm pure water heated to at least about 50 degrees c. and then drying in clean air; used to melt material for pulling a semiconductor single crystal by a czochralski method
03/23/1999US5885347 Apparatus and method for lifting single crystals
03/23/1999US5885344 Non-dash neck method for single crystal silicon growth
03/23/1999US5885071 Outer and inner layers of quartz glass, aluminum-containing intermediate layer; prevention of migration of impurities
03/18/1999WO1999013138A1 Single crystal pull-up apparatus and single crystal pull-up method
03/18/1999DE19740257A1 Seed crystal holder used in Czochralski single crystal growth process
03/16/1999US5882402 Method for controlling growth of a silicon crystal
03/16/1999US5882398 Method of manufacturing single crystal of silicon
03/16/1999US5882397 Crystal pulling method
03/11/1999WO1999012197A1 Compression bonded semiconductor device and power converter using the same
03/11/1999WO1999011844A1 Method and device for monitoring a melt for producing crystals
03/11/1999DE19739247A1 Twisting vibration detector for silicon@ monocrystal
03/10/1999EP0900862A1 Seed crystal holder
03/10/1999CN1210155A Graphite support vessels having low concentration of calcium impurities, and use thereof for production of single-crystal silicon
03/09/1999US5879452 Czochralski crystal growth system with an independently supported pull head
03/09/1999US5879451 Apparatus for measuring weight of crystal being pulled
03/09/1999US5879449 Crystal growth
03/09/1999US5879448 Crystal pulling methods and apparatus
03/09/1999US5879098 Device for the tight crossing of a partition by a mobile member
03/04/1999WO1999010570A1 High-quality silicon single crystal and method of producing the same
03/04/1999DE19738438A1 Crystal diameter determination during Czochralski growth process
03/04/1999DE19737581A1 Seed crystal for pulling single crystal
03/03/1999EP0899777A2 Carbon heater
03/03/1999EP0899363A1 Process and apparatus for reducing the load on a seed crystal
03/02/1999US5876630 Mixture containing carbonate; single crystals
03/02/1999US5876496 Method for feeding a granular raw material and feeding apparatus
03/02/1999US5876495 Method of pulling semiconductor single crystals
02/1999
02/25/1999WO1999009237A1 Apparatus and method for producing single crystal
02/23/1999US5873938 Single crystal pulling apparatus
02/18/1999WO1999007922A1 Non-dash neck method for single crystal silicon growth
02/17/1999EP0897192A1 Silicon single crystal and process for producing single-crystal silicon thin film
02/16/1999US5871583 Apparatus for producing silicon single crystal
02/16/1999US5871582 Melt receiver for a semiconductor single-crystal manufacturing device
02/16/1999US5871581 Single crystal pulling apparatus
02/16/1999US5871580 Compound semiconductor single crystal from melt or solution by use of a large diameter seed crystal.
02/16/1999US5871578 Methods for holding and pulling single crystal
02/11/1999WO1999006615A1 Heat shield assembly and method of growing vacancy rich single crystal silicon
02/09/1999US5868836 Semiconductor single-crystal lift device
02/09/1999US5868835 Apparatus for recharging of silicon granules in a czochralski single crystal growing operation
02/09/1999US5868832 With coils that produce zero axial field and material between coils that enhances radial field strength while maintaining zero point
02/09/1999US5868831 Process for controlling the growth of a crystal
02/04/1999WO1999005338A2 Surface converted graphite components and methods of making same
02/03/1999CN1206755A Method for making monocrystal silicon and wafer by controlling pulling-speed distribution and products thereof
02/02/1999US5866094 Method of feeding dopant for continuously-charged method and a dopant composition
02/02/1999US5866092 Mixed oxide of gallium, gadolinium and ytterbium
02/02/1999US5865887 Method for improving mechanical strength of the neck section of czochralski silicon crystal
01/1999
01/28/1999WO1999004066A1 Method and system for controlling growth of a silicon crystal
01/26/1999US5863326 Pressurized skull crucible for crystal growth using the Czochralski technique
01/21/1999DE19731590A1 Apparatus and method for observation of growing semiconductor crystals with a volatile component
01/20/1999EP0892091A1 Graphite support vessels having a low concentration of calcium impurities and use thereof for production of single-crystal silicon
01/13/1999EP0890662A1 Method and apparatus for manufacturing a silicon single crystal having few crystal defects, and a silicon single crystal and silicon wafers manufactured by the same
01/12/1999US5858486 Czochralski process furnace component comprises a high purity, semiconductor standard composite including a carbon fiber reinforced carbon matrix
01/12/1999US5858088 Device for lifting crystal bodies
01/12/1999US5858087 Single crystal pulling apparatus
01/12/1999US5858085 Method for growing a semiconductor single-crystal
01/12/1999US5857840 Vacuum pump with a centrifugal dust collector and a metal mesh dust collector mounted in parallel
01/05/1999US5855232 Automatic metering/supplying apparatus for granular substances
12/1998
12/30/1998EP0887443A1 Method of manufacturing a silicon monocrystal, and method of holding the same
12/29/1998US5853480 Apparatus for fabricating a single-crystal semiconductor
12/29/1998US5853479 Apparatus for drawing single crystals by the czochralski method
12/23/1998CN1202540A In-situ diffusion of boron or phosphorus during dendritic web growth of silicon ribbon
12/22/1998US5852623 Cerium activated colquirite laser crystal
12/22/1998US5851956 Method of manufacturing oxide crystal
12/22/1998US5851287 Seed crystal holder
12/22/1998US5851286 Crystal pulling apparatus
12/22/1998US5851284 Process for producing garnet single crystal
12/22/1998US5851283 Method and apparatus for production of single crystal
12/18/1998CA2240695A1 Method of manufacturing multiple-piece graphite crucible
12/17/1998DE19825745A1 Silicon single crystal Czochralski growth process
12/16/1998CN1201843A Superconducting magnet apparatus
12/10/1998WO1998055238A1 High purity composite useful as a susceptor
12/09/1998EP0882818A1 Silicon crystal and device and method for manufacturing same
12/08/1998US5846323 Crystal manufacturing apparatus
12/08/1998US5846322 Apparatus for drawing single crystals
12/08/1998US5846318 Method and system for controlling growth of a silicon crystal
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