Patents for C30B 15 - Single-crystal growth by pulling from a melt, e.g. czochralski method (9,854) |
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05/04/1999 | US5900058 Apparatus for producing single crystal |
05/04/1999 | US5900055 Method of manufacturing silicon monocrystal by continuously charged Czochralski method |
05/04/1999 | US5900054 Method of manufacturing oxide single crystal |
04/29/1999 | WO1999020815A1 Process for preparing a silicon melt from a polysilicon charge |
04/28/1999 | EP0911430A1 Single crystal growth method |
04/28/1999 | EP0911429A1 Quartz glass crucible for producing silicon single crystal and method for producing the crucible |
04/27/1999 | US5897706 Methods for crucible attachment to support base of single crystal pulling apparatus and support base assembly apparatus and support base employed therein |
04/22/1999 | WO1999019545A1 Die for shaped crystal growth from a molten bath |
04/21/1999 | EP0909840A1 Method for producing a silicon single crystal having few crystal defects, and a silicon single crystal and silicon wafers produced by the method |
04/20/1999 | US5895527 Single crystal pulling apparatus |
04/14/1999 | EP0908958A1 In-situ diffusion of dopant impurities during dendritic web growth of crystal ribbon |
04/14/1999 | CN2313933Y Quartz crucible |
04/08/1999 | WO1999016940A1 Method and system for controlling growth of a silicon crystal |
04/08/1999 | WO1999016939A1 Heat shield for crystal puller |
04/06/1999 | US5891245 Single crystal pulling method and apparatus for its implementation |
04/06/1999 | US5891244 Apparatus for the manufacture of SOI wafer and process for preparing SOI wafer therewith |
04/01/1999 | WO1999015717A1 Single crystal pulling apparatus |
03/30/1999 | US5888299 Apparatus for adjusting initial position of melt surface |
03/30/1999 | US5888298 Member-handling mechanism, and member-handling jig for a crystal pulling apparatus |
03/30/1999 | US5888293 Material supplied for fabricating single-crystal semiconductor |
03/24/1999 | EP0903429A2 Process for producing heavily doped silicon |
03/24/1999 | EP0903428A2 Apparatus and method for determining crystal diameters |
03/24/1999 | EP0903427A1 Apparatus and method for producing crystals by the czochralski method and crystals produced by this method |
03/23/1999 | US5887015 Heater mechanism for crystal pulling apparatus |
03/23/1999 | US5886737 Method for detecting the optimal melt temperature in the single-crystal semiconductor manufacturing process and apparatus thereof |
03/23/1999 | US5885365 Cleaning using pure water, followed by warming with warm pure water heated to at least about 50 degrees c. and then drying in clean air; used to melt material for pulling a semiconductor single crystal by a czochralski method |
03/23/1999 | US5885347 Apparatus and method for lifting single crystals |
03/23/1999 | US5885344 Non-dash neck method for single crystal silicon growth |
03/23/1999 | US5885071 Outer and inner layers of quartz glass, aluminum-containing intermediate layer; prevention of migration of impurities |
03/18/1999 | WO1999013138A1 Single crystal pull-up apparatus and single crystal pull-up method |
03/18/1999 | DE19740257A1 Seed crystal holder used in Czochralski single crystal growth process |
03/16/1999 | US5882402 Method for controlling growth of a silicon crystal |
03/16/1999 | US5882398 Method of manufacturing single crystal of silicon |
03/16/1999 | US5882397 Crystal pulling method |
03/11/1999 | WO1999012197A1 Compression bonded semiconductor device and power converter using the same |
03/11/1999 | WO1999011844A1 Method and device for monitoring a melt for producing crystals |
03/11/1999 | DE19739247A1 Twisting vibration detector for silicon@ monocrystal |
03/10/1999 | EP0900862A1 Seed crystal holder |
03/10/1999 | CN1210155A Graphite support vessels having low concentration of calcium impurities, and use thereof for production of single-crystal silicon |
03/09/1999 | US5879452 Czochralski crystal growth system with an independently supported pull head |
03/09/1999 | US5879451 Apparatus for measuring weight of crystal being pulled |
03/09/1999 | US5879449 Crystal growth |
03/09/1999 | US5879448 Crystal pulling methods and apparatus |
03/09/1999 | US5879098 Device for the tight crossing of a partition by a mobile member |
03/04/1999 | WO1999010570A1 High-quality silicon single crystal and method of producing the same |
03/04/1999 | DE19738438A1 Crystal diameter determination during Czochralski growth process |
03/04/1999 | DE19737581A1 Seed crystal for pulling single crystal |
03/03/1999 | EP0899777A2 Carbon heater |
03/03/1999 | EP0899363A1 Process and apparatus for reducing the load on a seed crystal |
03/02/1999 | US5876630 Mixture containing carbonate; single crystals |
03/02/1999 | US5876496 Method for feeding a granular raw material and feeding apparatus |
03/02/1999 | US5876495 Method of pulling semiconductor single crystals |
02/25/1999 | WO1999009237A1 Apparatus and method for producing single crystal |
02/23/1999 | US5873938 Single crystal pulling apparatus |
02/18/1999 | WO1999007922A1 Non-dash neck method for single crystal silicon growth |
02/17/1999 | EP0897192A1 Silicon single crystal and process for producing single-crystal silicon thin film |
02/16/1999 | US5871583 Apparatus for producing silicon single crystal |
02/16/1999 | US5871582 Melt receiver for a semiconductor single-crystal manufacturing device |
02/16/1999 | US5871581 Single crystal pulling apparatus |
02/16/1999 | US5871580 Compound semiconductor single crystal from melt or solution by use of a large diameter seed crystal. |
02/16/1999 | US5871578 Methods for holding and pulling single crystal |
02/11/1999 | WO1999006615A1 Heat shield assembly and method of growing vacancy rich single crystal silicon |
02/09/1999 | US5868836 Semiconductor single-crystal lift device |
02/09/1999 | US5868835 Apparatus for recharging of silicon granules in a czochralski single crystal growing operation |
02/09/1999 | US5868832 With coils that produce zero axial field and material between coils that enhances radial field strength while maintaining zero point |
02/09/1999 | US5868831 Process for controlling the growth of a crystal |
02/04/1999 | WO1999005338A2 Surface converted graphite components and methods of making same |
02/03/1999 | CN1206755A Method for making monocrystal silicon and wafer by controlling pulling-speed distribution and products thereof |
02/02/1999 | US5866094 Method of feeding dopant for continuously-charged method and a dopant composition |
02/02/1999 | US5866092 Mixed oxide of gallium, gadolinium and ytterbium |
02/02/1999 | US5865887 Method for improving mechanical strength of the neck section of czochralski silicon crystal |
01/28/1999 | WO1999004066A1 Method and system for controlling growth of a silicon crystal |
01/26/1999 | US5863326 Pressurized skull crucible for crystal growth using the Czochralski technique |
01/21/1999 | DE19731590A1 Apparatus and method for observation of growing semiconductor crystals with a volatile component |
01/20/1999 | EP0892091A1 Graphite support vessels having a low concentration of calcium impurities and use thereof for production of single-crystal silicon |
01/13/1999 | EP0890662A1 Method and apparatus for manufacturing a silicon single crystal having few crystal defects, and a silicon single crystal and silicon wafers manufactured by the same |
01/12/1999 | US5858486 Czochralski process furnace component comprises a high purity, semiconductor standard composite including a carbon fiber reinforced carbon matrix |
01/12/1999 | US5858088 Device for lifting crystal bodies |
01/12/1999 | US5858087 Single crystal pulling apparatus |
01/12/1999 | US5858085 Method for growing a semiconductor single-crystal |
01/12/1999 | US5857840 Vacuum pump with a centrifugal dust collector and a metal mesh dust collector mounted in parallel |
01/05/1999 | US5855232 Automatic metering/supplying apparatus for granular substances |
12/30/1998 | EP0887443A1 Method of manufacturing a silicon monocrystal, and method of holding the same |
12/29/1998 | US5853480 Apparatus for fabricating a single-crystal semiconductor |
12/29/1998 | US5853479 Apparatus for drawing single crystals by the czochralski method |
12/23/1998 | CN1202540A In-situ diffusion of boron or phosphorus during dendritic web growth of silicon ribbon |
12/22/1998 | US5852623 Cerium activated colquirite laser crystal |
12/22/1998 | US5851956 Method of manufacturing oxide crystal |
12/22/1998 | US5851287 Seed crystal holder |
12/22/1998 | US5851286 Crystal pulling apparatus |
12/22/1998 | US5851284 Process for producing garnet single crystal |
12/22/1998 | US5851283 Method and apparatus for production of single crystal |
12/18/1998 | CA2240695A1 Method of manufacturing multiple-piece graphite crucible |
12/17/1998 | DE19825745A1 Silicon single crystal Czochralski growth process |
12/16/1998 | CN1201843A Superconducting magnet apparatus |
12/10/1998 | WO1998055238A1 High purity composite useful as a susceptor |
12/09/1998 | EP0882818A1 Silicon crystal and device and method for manufacturing same |
12/08/1998 | US5846323 Crystal manufacturing apparatus |
12/08/1998 | US5846322 Apparatus for drawing single crystals |
12/08/1998 | US5846318 Method and system for controlling growth of a silicon crystal |