| Patents for C23F 4 - Processes for removing metallic material from surfaces, not provided for in group or (4,769) |
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| 05/16/2013 | US20130118896 Method and system for ion beam delayering of a sample and control thereof |
| 05/10/2013 | WO2013065531A1 Ion beam etching method for magnetic films and ion beam etching apparatus |
| 05/09/2013 | US20130112138 Particle sources and methods for manufacturing the same |
| 05/08/2013 | CN103091692A Impedance type nickel film heatmeter based on laser etching method and manufacturing method thereof |
| 05/02/2013 | US20130105302 Charged particle beam device and sample production method |
| 05/01/2013 | CN103074633A Etching method |
| 05/01/2013 | CN102154650B Thick aluminum etching method during producing bipolar integrated circuit |
| 04/30/2013 | US8431103 Method of manufacturing graphene, graphene manufactured by the method, conductive film comprising the graphene, transparent electrode comprising the graphene, and radiating or heating device comprising the graphene |
| 04/24/2013 | CN101770973B Plasma process equipment and static chuck device |
| 03/28/2013 | US20130075248 Etching method, etching apparatus, and storage medium |
| 03/27/2013 | CN1567078B Wiring and making method thereof including the described wired semiconductor device and dry etching process |
| 03/27/2013 | CN102067279B Method and system for supplying a cleaning gas into a process chamber |
| 03/26/2013 | US8404050 Plasma processing apparatus and method |
| 03/20/2013 | CN102122607B Method and apparatus for controlling the spatial temperature distribution |
| 02/27/2013 | CN101924015B Gas input device and semiconductor processing device |
| 02/27/2013 | CN101373731B Electrostatic chuck apparatus and temperature control method thereof |
| 02/13/2013 | CN102931075A Etching method and mask structure of metal layer |
| 02/13/2013 | CN102931045A Method for processing etching process monitoring signal and etching end-point control method |
| 02/13/2013 | CN102925901A Slide surface and surface processing method of the same |
| 02/06/2013 | CN102912346A Valve forming mould covered with wear-resistant heat insulation film layer and manufacturing method of valve forming mould |
| 01/17/2013 | US20130017686 Plasma processing apparatus and plasma processing method |
| 01/09/2013 | CN202663641U Upper electrode structure of dry-etching machine |
| 01/02/2013 | CN102856150A Plasma reaction cavity cleaning device and plasma reaction cavity cleaning method thereof |
| 01/02/2013 | CN102850937A Chemical mechanical polishing (CMP) liquid |
| 01/02/2013 | CN102230179B Method for preparing metal nano stripes |
| 12/26/2012 | CN101521143B Lining mechanism for semiconductor processing equipment and manufacturing method thereof |
| 12/26/2012 | CN101303963B Method and apparatus for eliminating migration of etching pattern |
| 12/19/2012 | CN102828186A Electrolyte plasma polisher for quantity production |
| 12/19/2012 | CN102033650B Method for performing laser etching on silver paste indium tin oxide film |
| 12/13/2012 | WO2012169588A1 Gas for plasma generation, plasma generation method, and atmospheric pressure plasma generated thereby |
| 12/12/2012 | CN102820261A Aluminum etching method |
| 12/06/2012 | DE112010005201T5 Herstellungsweise für ein metallenes Material und das metallene Material Production method for a metal material and the metal material |
| 12/06/2012 | DE102012209194A1 Legieren einer Edelstahloberfläche Thickening a stainless steel surface |
| 12/05/2012 | CN202576569U Electrolytic plasma polisher |
| 12/05/2012 | CN101126147B Ion beam treating dielectric surface method and device for applying the same |
| 11/28/2012 | CN1945807B Apparatus for controlling temperature of a substrate |
| 11/28/2012 | CN102140640B Slide member and surface processing method of the same |
| 11/15/2012 | US20120285623 Plasma processing apparatus and method |
| 11/14/2012 | CN101479031B Monoparticulate-film etching mask and process for producing the same, process for producing fine structure with the monoparticulate-film etching mask, and fine structure obtained by the production pro |
| 11/14/2012 | CN101378003B Alternate gas delivery and evacuation system for plasma processing apparatuses |
| 11/13/2012 | US8308897 Plasma processing apparatus and plasma processing method |
| 11/07/2012 | CN102766838A Anti-rust, oil-resistant and antioxidation secondary steel surface treatment method |
| 10/31/2012 | CN101356304B Optical metrological scale and laser-based manufacturing method therefor |
| 10/26/2012 | WO2012142709A1 Method and compositions for removing microelectronic components from circuit boards |
| 10/24/2012 | CN102751380A Texturization technology of solar battery |
| 10/17/2012 | CN102732889A Method and apparatus for removing metal on wafer clamp |
| 10/09/2012 | US8282998 Forming component of a motor vehicle indicating or lighting device in a predetermined material and exposing at least one surface of component to laser radiation |
| 10/04/2012 | US20120247954 Plasma processing apparatus |
| 10/03/2012 | CN102713000A Method of plasma etching and plasma chamber cleaning using F2 and COF2 |
| 10/03/2012 | CN101303965B Method and apparatus for eliminating migration of etching pattern |
| 09/26/2012 | EP2501839A2 Gas delivery for beam processing systems |
| 09/26/2012 | EP2501837A1 Method of plasma etching and plasma chamber cleaning using f2 and cof2 |
| 09/26/2012 | CN102691066A Method and device for treating burrs of electrode plate of lithium battery |
| 09/26/2012 | CN102691065A Substrate processing method and storage medium |
| 09/26/2012 | CN101466873B Etching process |
| 09/25/2012 | US8273211 Flat panel display manufacturing apparatus |
| 09/18/2012 | US8267040 Plasma processing apparatus and plasma processing method |
| 09/12/2012 | CN102666917A An electrostatic chuck with an angled sidewall |
| 09/11/2012 | US8262769 Method of detinning Sn plating layer on Cu-based material |
| 09/05/2012 | CN102653391A Method for processing metal micro-structure |
| 09/05/2012 | CN101159228B Processing gas supplying mechanism, supplying method and gas processing unit |
| 08/28/2012 | CA2497002C Composition and method for stripping coatings from substrates |
| 08/23/2012 | US20120211796 Metal Wiring and Method of Manufacturing the Same, and Metal Wiring Substrate and Method of Manufacturing the Same |
| 08/23/2012 | US20120211356 FIB Process for Selective and Clean Etching of Copper |
| 08/22/2012 | CN101764044B Method for pretreating technical cavity of plasma device |
| 08/22/2012 | CN101459051B Exhaust ring for plasma apparatus |
| 08/02/2012 | WO2012102139A1 Method for treating metal film and treatment device |
| 08/02/2012 | DE112010003895T5 Verarbeitungsflüssigkeit zur Unterdrückung eines Musterzusammenbruchs einer feinen Metallstruktur und Verfahren zur Herstellung einer feinen Metallstruktur, bei dem diese eingesetzt wird Processing liquid for suppressing a pattern collapse of a fine metal structure and method for producing a fine metal structure, in which it is used |
| 07/31/2012 | US8231800 Plasma processing apparatus and method |
| 07/18/2012 | CN102597312A Gas delivery for beam processing systems |
| 07/18/2012 | CN102593045A Substrate processing method storage medium |
| 07/11/2012 | CN102575360A Processing liquid for suppressing pattern collapse of fine metal structure and method for producing fine metal structure using same |
| 07/11/2012 | CN102574237A System for and method of cleaning of copper wire using plasma, activated or reduced gas atmosphere |
| 07/05/2012 | WO2012090474A1 Method for processing electrode film, method for processing magnetic film, laminate having magnetic film, and method for producing the laminate |
| 07/04/2012 | EP2471623A1 Cleaning device using an electric arc |
| 07/04/2012 | EP2470688A1 Focused ion beam process for selective and clean etching of copper |
| 07/04/2012 | EP2470376A1 Treatment of parts with metallized finish areas with a differentiated appearance |
| 07/04/2012 | CN202307811U 一种干法刻蚀坚硬无机材料基板icp刻蚀机的预真空腔 A dry etching icp hard inorganic material substrate etching machine pre-vacuum chamber |
| 07/04/2012 | CN1795287B Thin film forming device and thin film forming method |
| 07/04/2012 | CN102534622A Method for forming solar dry textured black silicon by plasma excitation |
| 07/04/2012 | CN101680826B Method for quantitative analysis of tin or tin alloy plating layer |
| 07/04/2012 | CN101465276B Air-intake device and semiconductor processing equipment applying the same |
| 07/04/2012 | CN101256940B Gas supply system and integrated unit for semiconductor manufacturing device |
| 06/27/2012 | CN102516887A Polishing solution and plasma polishing process |
| 06/20/2012 | CN101796618B Method and apparatus for diagnosing status of parts in real time in plasma processing equipment |
| 06/19/2012 | CA2465195C Electrode assembly for the removal of surface oxides by electron attachment |
| 06/13/2012 | CN102497998A Treatment of parts with metallized finish areas with a differentiated appearance |
| 06/13/2012 | CN102492950A Bionic multi-scale structural surface with excellent tribological performance and preparation method |
| 06/06/2012 | CN102486465A Multifunctional ion beam sputtering and etching and in-situ physical property analysis system |
| 05/30/2012 | EP1637624B1 Thin film forming apparatus |
| 05/30/2012 | CN202259195U Device for performing dry etching on hard inorganic material substrate |
| 05/30/2012 | CN101074473B Ceramic coating member for semiconductor processing apparatus |
| 05/23/2012 | EP2455949A1 Metal laminated substrate for use as an oxide superconducting wire material, and manufacturing method therefor |
| 05/23/2012 | EP1081749B1 Protective member for inner surface of chamber and plasma processing apparatus |
| 05/23/2012 | CN102473486A Metal laminated substrate for use as an oxide superconducting wire material, and manufacturing method therefor |
| 05/23/2012 | CN102467987A 封装用导线及其制造方法 Package with a wire and its manufacturing method |
| 05/23/2012 | CN101533764B Shower head and substrate processing apparatus |
| 05/16/2012 | CN102459704A 用于蚀刻的方法和设备 Methods and apparatus for etching |
| 05/09/2012 | CN1905135B Plasma etching apparatus |
| 05/09/2012 | CN101615569B Vacuum processor |