Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
03/1991
03/26/1991US5002798 Metal chalcogenide film on a substrate, a target material, evaporation
03/26/1991US5002797 Process for aluminum-encapsulated ammonium perchlorate by vapor deposition
03/26/1991US5002734 Processes for preparing chalcogenide alloys
03/26/1991US5002648 Process for producing an inorganic thin film on a substrate using a target
03/26/1991US5002464 Double buffer vacuum system
03/26/1991US5002010 Vacuum vessel
03/21/1991WO1991003821A1 Gold diffusion thin film resistors and process
03/21/1991DE4027896A1 Producing thin coatings by using ionised vapour - in device having glow discharge unit protected from direct exposure to vapour cluster beam
03/20/1991EP0418091A2 Preparation of high-purity thin film
03/20/1991EP0418001A1 Multilayer coating of a nitride-containing compound and its production
03/20/1991EP0417951A2 Fe-Si-Al alloy magnetic thin film and method of manufacturing the same
03/20/1991EP0417802A1 Hydrogen storage body
03/20/1991EP0417780A2 Method and device for evaporating an arc discharge cathode with cathode spots with reduced macroparticle emission
03/20/1991EP0417221A1 Process for detecting the attainment of a predetermined depth in target body erosion and target body therefor
03/20/1991EP0417067A1 Energy intensive surface reactions using a cluster beam.
03/19/1991US5001403 Method and apparatus for centering an electron beam
03/19/1991US5001018 Fe-Co base magnetic film and process for producing the same
03/19/1991US5000984 Method of making a magnetic recording medium
03/19/1991US5000834 Facing targets sputtering device
03/19/1991US5000114 Continuous vacuum vapor deposition system having reduced pressure sub-chambers separated by seal devices
03/19/1991CA2024867A1 Smooth-surfaced magnetic recording medium
03/14/1991WO1991004348A1 Deposition heaters
03/14/1991CA2066573A1 Deposition heaters
03/13/1991EP0416887A2 Ceramic-coated metal sheet
03/13/1991EP0416545A2 Laminated film and method for producing the same
03/13/1991EP0416241A2 Apparatus for coating a substrate
03/13/1991EP0415916A1 Cataphoretic process for screening color ray tubes.
03/12/1991US4999760 High voltage rectifier and associated control electronics
03/12/1991US4999458 Electrical current lead-in device at a vacuum chamber
03/12/1991US4999259 Chrome-coated stainless steel having good atmospheric corrosion resistance
03/12/1991US4999222 Metallized polyethylene plexifilamentary film-fibril sheet
03/12/1991US4999096 Method of and apparatus for sputtering
03/12/1991CA1281178C Apparatus for coating substrate devices
03/07/1991WO1991003141A1 Thin-film el element
03/07/1991DE3929614A1 Prodn. of vanadium-cobalt multilayer - having vertical magnetic anisotropic properties, using anionic sputtering technique with each metal being separately pptd.
03/06/1991EP0415217A1 Thermal land bound machine comprising a heat resistant member, a heat resistant composite structure and a method of producing the heat resistant composite structure.
03/06/1991EP0415206A2 Production method of metal foil and metal foil produced by the method
03/06/1991EP0216919B1 Method and target for sputter depositing thin films
03/06/1991CN1049688A Workpeace coated with solid solution layer and method for its production
03/05/1991US4997813 Oxides of thallium, copper, calciu, barium on magnesium oxide substrate
03/05/1991US4997673 Vacuum evaporation of aluminum with concurrent or alternate nitrogen ion irradiation; low temperature, efficiency
03/05/1991US4997636 Diamond growth
03/05/1991US4997538 Process for depositing a black-colored coating on a substrate and a black-colored coating obtained using this process
03/05/1991US4997295 Polyphenylene sulfide and fluoroplastic retainer; lubricating film coating
03/01/1991CA2023280A1 Production method of metal foil and metal foil produced by the method
02/1991
02/27/1991EP0414560A2 Method of manufacturing polyimide thin film and method of manufacturing liquid crystal orientation film of polyimide
02/27/1991EP0414270A2 Fuel cell utilizing solidous electrolyte
02/27/1991EP0413853A1 Workpiece coated with a solid solution crystalline layer, process and apparatus for its manufacture
02/27/1991EP0413834A1 Diamond-covered member and process for producing the same
02/27/1991CN2072086U Cathode target for magnetron sputtering
02/26/1991US4996190 Superconducting thin film and a process for depositing the same
02/26/1991US4996105 Used as electromagnetic wave shielding window glass
02/26/1991US4996078 Particle displacement inside a vacuum
02/26/1991US4995958 Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile
02/21/1991WO1991002108A1 High-temperature-resistant, corrosion-resistant coating, in particular for components of gas turbines
02/21/1991WO1991002102A1 Film based on silicon dioxide and production thereof
02/21/1991DE3927132A1 Free-standing thin film prodn. - by gas phase precipitating onto loose particulate ancillary substrate
02/20/1991EP0413423A2 Thin film metal alloy magnetic recording disk
02/20/1991EP0413354A1 Sputtering target for DC magnetron reactive sputtering, process for forming thin layer by use of the target, and optical disk having a layer formed by the process
02/20/1991EP0413291A2 Method and device for sputtering of films
02/19/1991US4994162 Continuous sputtering, heating
02/19/1991US4993361 Chemical vapor deposition
02/18/1991CA2023509A1 Sputtering target for dc magnetron reactive sputtering, process for forming thin layer by use of the target, and optical disk having a layer formed by the process
02/15/1991CA2023092A1 Method and device for sputtering of films
02/14/1991DE4024168A1 Coating metallic substrates with glass ceramic mixed layer - to provide good wear, and corrosion resistance in thin coating
02/13/1991EP0412810A1 Zinc oxide sintered body, and preparation process and use thereof
02/13/1991EP0412199A1 Single-crystal wafer having a superconductive ceramic thin film formed thereon
02/12/1991US4992298 Dual ion beam ballistic alloying process
02/12/1991US4992153 Without the use of high voltage
02/12/1991US4992152 Reducing hillocking in aluminum layers formed on substrates
02/12/1991US4992082 Method of toughening diamond coated tools
02/12/1991US4991541 Device and process for treating fine particles
02/08/1991WO1991002103A1 Method of depositing optical oxide coatings at enhanced rates
02/08/1991CA2059525A1 Method of depositing optical oxide coatings at enhanced rates
02/07/1991DE4024488A1 Radiation screen mfr. - from totally reflective fibres having vapour deposited metal coating
02/07/1991DE4006457C1 Appts. for vapour deposition of material under high vacuum - has incandescent cathode and electrode to maintain arc discharge
02/07/1991DE3925526A1 Radiation screen mfr. - from totally reflective fibres having sputter deposited metal coating
02/06/1991EP0412007A2 Process for preparing superconducting thin films
02/06/1991EP0412000A1 Process for preparing superconducting thin films
02/06/1991EP0411482A2 Electron gun arrangement for use in the electron beam evaporation process
02/06/1991EP0411359A2 Device for measuring the thickness of thin layers
02/06/1991EP0411256A2 Cathodic sputtering apparatus
02/06/1991EP0411079A1 Method for the deposition of at least one thickness of at least one decorative material to an object, and decorative object obtained by such method.
02/06/1991EP0302072B1 Consolidation of deposited metal
02/05/1991USRE33530 Cathodic atomization of target material
02/05/1991US4990754 Apparatus for transmitting heat under vacuum by grains
02/05/1991US4990362 Removing surface layer titanium plate; forming a nonmagnetic transition metal film
02/05/1991US4990361 Method for producing magnetic recording medium
02/05/1991US4990234 Vacuum sputtering of nickel silicide and oxygen
02/05/1991US4990233 Method for retarding mineral buildup in downhole pumps
02/05/1991US4990229 High density plasma deposition and etching apparatus
02/05/1991US4989543 Process and means for producing films for use in electronics and/or optoelectronics using plasma
01/1991
01/31/1991DE4017220A1 Multicolour coating layer on plastic films for interference filters - is produced on roll and has thin metal film, transparent varnish with varying thickness and final metal layer
01/30/1991EP0410627A1 Oxide film with preferred crystal orientation, method of manufacturing the same, and magneto-optical recording medium
01/30/1991EP0410504A2 A double chamber vacuum plant for deposition processes of thin layers
01/30/1991EP0410401A1 Method for coating a surface of a substrate
01/30/1991EP0410337A2 Protection coatings made of germanium ceramics
01/30/1991EP0410269A1 Membrane consisting of silicon carbide and silicon nitride, method for the preparation thereof and mask for X-ray lithography utilizing the same
01/29/1991US4988578 Method for manufacturing a thin film magnetic recording medium
01/29/1991US4988424 Apparatus for making a multilayer element, masking, electroconductive heaters