Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
01/1991
01/29/1991US4988422 Process and apparatus for depositing coatings of high electrical resistance by cathode sputtering
01/29/1991US4988421 Vapor deposition, diamond particles, adhesion, binders, sputtering
01/29/1991US4987933 Fluid flow control method and apparatus for minimizing particle contamination
01/29/1991US4987857 Vacuum deposition apparatus with dust collector electrode
01/23/1991EP0409451A1 Process for depositing optical thin films on both planar and non-planar substrates
01/22/1991US4987007 Diamond-like carbon on silicon from graphite target
01/22/1991US4986890 Thin film deposition system
01/22/1991US4986841 Substrates for electronic components; doping with phosphorus and oxygen
01/22/1991US4986212 Metallizing apparatus
01/19/1991CA2021367A1 Process for depositing optical thin films on both planar and non-planar substrates
01/16/1991EP0408383A1 Highly purified titanium material, method for preparation of it and sputtering target using it
01/16/1991EP0408265A2 Process of forming a gold film on a diamond substrate by ion beam sputtering and apparatus for carrying out the process
01/16/1991EP0408205A1 Polyimide substrate having a textured surface metallizing such a substrate
01/16/1991EP0407941A1 Thin film of Ln2-xcexcuo4-y single crystal and process for producing the same
01/15/1991US4984531 Device for accepting and holding a workpiece in vacuum coating apparatus
01/14/1991WO1991001510A1 Electrochromic element, materials for use in such element, processes for making such element and such materials and use of such element in an electro
01/14/1991CA2063608A1 Electrochromic element, materials for use in such element, processes for making such element and such materials and use of such element in an electrochromic glass device
01/11/1991CA2020708A1 Coated substrates and process
01/11/1991CA2019155A1 Polyimide substrate having a textured surface and metallizing such a substrate
01/10/1991WO1991000378A1 Device for coating substrates by cathode sputtering
01/10/1991WO1991000377A1 Process for making diamond, doped diamond, diamond-cubic boron nitride composite films at low temperature
01/10/1991WO1991000376A1 Method for applying a wear-resistant coating
01/10/1991WO1991000375A1 Bearings
01/10/1991WO1991000374A1 Process and device for coating substrates
01/09/1991EP0407312A1 Apparatus for obtaining materials made of a substrate and a planar shaped coating of purified titanium
01/09/1991EP0407298A1 Method for monitoring the thickness of an antireflection layer and apparatus for carrying out the same
01/09/1991EP0407129A2 Process for producing molding for precision fine line-circuit
01/09/1991EP0407088A1 Amorphous semiconductor film and process for its production
01/09/1991EP0406902A2 Liquid transfer article having a vapor deposited protective polymer film
01/09/1991EP0406871A2 Laser deposition method and apparatus
01/09/1991EP0406669A2 Thin film making method on semiconductor substrate and temperature controlling systems therefor
01/09/1991EP0406641A1 Apparatus for obtaining metal-free stripes on vacuum coated continuous foils, especially for capacitors
01/09/1991EP0406484A1 Mounting for lenses especially for looking glass to be coated in an apparatus for high vacuum evaparation or for sputtering
01/09/1991EP0406483A2 Apparatus for supporting and turning lenses, particularly for spectacle lenses to be coated in a high vacuum sputtering or evaporation plant
01/09/1991CN2068969U Multi-cathod evaporating and ionizing sources by pulse electric are
01/08/1991US4983806 Method and device for cooling electron beam gun
01/08/1991US4983575 Superconducting thin films made of stacked composite oxide layers
01/08/1991US4983421 Method for producing magnetic recording media
01/08/1991US4983269 Monitoring physical value, detectors, signals, discontinuity, cathode
01/08/1991US4982696 Apparatus for forming thin film
01/08/1991US4982695 Vacuum evaporation
01/08/1991CA1278773C Method and apparatus for arc evaporating large area targets
01/08/1991CA1278771C Solar reflector with transparent base and transparent films of metal oxide or nitride and metal
01/03/1991DE3920772A1 Geraet zur beschichtung von substraten durch kathodenzerstaeubung Device for coating substrates by cathode sputtering
01/03/1991CA2019978A1 Process for producing molding for precision fine-line circuit
01/02/1991EP0405677A2 Superconducting electronic thin-layer device and method for fabricating the same
01/02/1991EP0405451A1 Method for producing a polycrystalline silicon layer with definite grain size and texture on a substrat
01/02/1991EP0405343A2 Controlling procedure of an evaporation process
01/02/1991EP0405304A2 Thin film resistors whose surface resistance values are comprised between 1M-ohms and several G-ohms and process of making it
01/02/1991EP0404973A1 Process and apparatus for coating substrates
01/02/1991EP0247140B1 Sputtering method for reducing hillocking in aluminum layers formed on substrates
01/01/1991USH872 Focussed laser beam melting of refractory, metal, or polymer rods to eject charged particles to form composite coating
01/01/1991US4981839 Method of forming superconducting oxide films using zone annealing
01/01/1991US4981756 Zirconium or hafnium carbides or nitrides
01/01/1991US4981714 Method of producing ferroelectric LiNb1-31 x Tax O3 0<x<1) thin film by activated evaporation
01/01/1991US4981568 Apparatus and method for producing high purity diamond films at low temperatures
01/01/1991US4981566 Arrangement for measuring the thickness of thin layers
12/1990
12/31/1990CA2018886A1 Process for making diamond, doped diamond, diamond-cubic boron nitride composite films at low temperature
12/27/1990WO1990015888A1 Installation for applying coatings on articles by explosion of a conductor
12/27/1990EP0403987A2 Method for supplying vacuum evaporation material and apparatus therefor
12/27/1990EP0403986A1 Method for manufacturing substrates for depositing diamond thin films
12/27/1990EP0403985A1 Transparent plastic substrate pre-treating process for vacuum coating and device for implementing this process
12/27/1990EP0403936A2 Method for producing a conductive oxide pattern
12/27/1990EP0403617A1 Graded composition primer layer
12/27/1990EP0403552A1 Physical vapor deposition dual coating apparatus and process.
12/26/1990CN1048068A Metal ion diffusion method and its device for metallic plate (belt) and its products
12/25/1990US4980615 Electron beam control circuit in electron beam evaporators with alternating acceleration voltages
12/25/1990US4980562 Method and apparatus for high efficiency scanning in an ion implanter
12/25/1990US4980239 Having sufficient adhesion strength
12/25/1990US4980197 Method of producing metallic structures on inorganic non-conductors
12/25/1990US4980195 Method for inhibiting inland corrosion of steel
12/25/1990US4980041 Method of making liquid crystal devices with improved adherence
12/25/1990US4979802 Synthetic resin half-mirror
12/25/1990US4979468 Installation for the evaporation of metals
12/25/1990US4979466 Controlled heating; vapor deposition
12/22/1990CA2019211A1 Method for the preliminary treatment of transparent plastic substrates intended to be coated in vacuum
12/20/1990DE3919147A1 Plasma coating plastic substrates with aluminium - using target made of aluminium alloy contg. silicon to improve adhesion of coating to plastic
12/20/1990DE3051199C2 Wafer load lock and transfer system for vacuum chamber
12/19/1990EP0403418A2 High density plasma deposition and etching apparatus
12/19/1990EP0402568A2 Method of manufacturing a titanium magnetic disk substrate
12/19/1990EP0386182A4 Nonwoven insulating webs
12/19/1990CN2067711U Gas seperating device for continuous processing equipment with multi-chamber
12/19/1990CN1047890A Method for coating organic film on rubidium, iron, and boron products and apparatus thereof
12/19/1990CA2019197A1 Coated glass article
12/18/1990US4978588 Plated steel sheet for a can
12/18/1990US4978586 Multiple coating layers having bonding layers in between; steel cord/fabric; tires, hoses, belts
12/18/1990US4978567 Wafer holding fixture for chemical reaction processes in rapid thermal processing equipment and method for making same
12/18/1990US4978556 Electrode for vapor deposition and vapor-deposition method using same
12/18/1990US4978437 Method of applying optical coatings of silicon compounds by cathode sputtering, and a sputtering cathode for the practice of the method
12/18/1990CA1277955C Anode for magnetic sputtering
12/16/1990CA2010355A1 Method of manufacturing a titanium magnetic disk substrate
12/13/1990WO1990015018A1 Coated dielectric material for an ozone generator
12/13/1990WO1990013687A3 Apparatus and method for treating flat substrates under reduced pressure
12/13/1990DE4011515C1 Coating substrate with metal (alloy) - by magnetic sputtering, with substrate mounted on surface held at negative voltage
12/12/1990EP0402128A2 Method of forming an oxide superconductor/semiconductor junction
12/12/1990EP0402046A2 Heat-shrinkable article
12/12/1990EP0401663A2 Thin unoriented layer of microcristalline aluminium nitride on a surface, and method for its production
12/12/1990EP0401622A1 Target cooling procedure and device for cooling targets
12/12/1990EP0401488A1 Process for producing high-hardened coatings on titanium materials and their alloys
12/12/1990EP0401255A1 Method for obtaining transverse uniformity during thin film deposition on extended substrate