Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
05/1991
05/29/1991EP0428682A1 Magnetic structure for electron-beam heated evaporation source.
05/29/1991DE4037747A1 Printed circuit board - made by vapour coating substrate prepd. with photoresist pattern
05/29/1991DE4006456C1 Appts. for vaporising material in vacuum - has electron beam gun or laser guided by electromagnet to form cloud or pre-melted spot on the target surface
05/29/1991CN2077869U Vacuum multizone magnetic control cathode sputtering head
05/28/1991US5019552 Long-laser-pulse method of producing thin films
05/28/1991US5019442 Overlay films
05/28/1991US5019234 System and method for depositing tungsten/titanium films
05/28/1991US5018659 Method of bonding a metal oxide to a metal
05/28/1991CA2004088A1 Thick, low-stress films and coated substrates formed therefrom, and methods for making same
05/22/1991EP0428358A2 Geometries and configurations for magnetron sputtering apparatus
05/21/1991US5017439 Aluminum, magnesium
05/21/1991US5017277 Laser sputtering apparatus
05/21/1991US5017245 Lithographic plates
05/21/1991US5017073 Transport system for conveying workpiece between first and second media
05/21/1991US5016566 Apparatus for forming films by evaporation in vacuum
05/21/1991US5016563 Method of manufacturing thin compound oxide film and apparatus for manufacturing thin oxide film
05/21/1991US5016561 Continuous vacuum processing apparatus
05/18/1991CA2030099A1 Masking structure
05/16/1991WO1991006972A1 Method and apparatus relating to ion implantation
05/16/1991WO1991006969A1 Metal-ion source and process for the generation of metal ions
05/15/1991EP0427332A1 Method of applying a boron layer to a steel substrate and a tool provided with a boron layer
05/14/1991US5015502 Gas turbine engine airfoils with ceramic on an alloy
05/14/1991US5015493 Vapor deposition by reaction of gas in a vacuum vessel, glow discharges
05/14/1991US5015492 Method and apparatus for pulsed energy induced vapor deposition of thin films
05/14/1991US5015353 Reaction of silicon with nitrogen to form silicon nitride
05/14/1991US5015352 Preparation method for amorphous superlattice alloys
05/14/1991US5015308 Corrosion-resistant and heat-resistant amorphous aluminum-based alloy thin film and process for producing the same
05/09/1991WO1991007519A1 Method for coating substrates with silicon based compounds
05/08/1991EP0425900A2 Molded synthetic resin articles having thin metal film and production process thereof
05/07/1991US5013614 Aluminum and tin alloy
05/07/1991US5013583 Method of producing a magnetic recording medium
05/07/1991US5013578 Apparatus for coating a surface with a metal utilizing a plasma source
05/07/1991US5013526 Superconducting alloys comprising tungsten, molybdenum, silicon and oxygen
05/07/1991US5013419 Flat cathode with fins, sputtering
05/07/1991US5013416 Process for manufacturing transparent, conductive film
05/07/1991US5013274 Process for restoring locally damaged parts, particularly anticathodes
05/07/1991CA1283886C Thin film sputtering with angular orientation of emission surface and receiving surface
05/07/1991CA1283816C Method and apparatus for plating and coating and articles produced thereby
05/02/1991WO1991005887A1 Vacuum vessel
05/02/1991EP0425471A1 Cold work tool steel with high compression strength and use of these steels
05/02/1991EP0425336A1 Coating made of a chromium-nitrogen alloy for confering good tribological properties to a substrate and process for its manufacture
05/02/1991EP0424422A1 Josephson tunnel element with metallic oxide superconducting material and process for manufacturing the element
04/1991
04/30/1991US5012064 Electron beam evaporation source
04/30/1991US5011793 Forming thin film on substrate in vacuum; heating; pressurization
04/30/1991US5011732 Glass ceramic substrate having electrically conductive film
04/30/1991US5011708 Use of radioactive nickel-63 to inhibit microbially induced corrosion
04/30/1991US5011638 Method of making open-pore structures
04/30/1991US5011585 Process for producing a transparent layer with low resistivity
04/25/1991DE3935408A1 Metallionenquelle Metal ion source
04/24/1991EP0423996A1 Coated filaments for composites
04/24/1991EP0423486A1 Apparatus and process for coating workpieces by arc discharge
04/24/1991EP0423384A1 Control arrangement for an elevator system without a speed sensor
04/24/1991EP0423178A1 Josephson element with oxide ceramic superconducting material and process for manufacturing the element
04/24/1991CN2075655U Double cavity rotary magnetic control splashing film plating machine
04/23/1991US5009930 Method for forming a deposited layer on a skirted substrate
04/23/1991US5009923 Method of forming diamond film
04/23/1991US5009922 Method of forming a transparent conductive film
04/23/1991US5009765 Welding to backing
04/23/1991US5009764 Apparatus for removal of electrical shorts in a sputtering system
04/23/1991US5009762 Sputtering barium titanate and strontium titanate with adjusting target of titanium or titanium oxide
04/23/1991US5009761 Degreasing and cleaning plastic material, applying hard glass layer, coating with specular reflective material
04/23/1991CA1283381C Hollow cathode enhanced plasma for high rate reactive ion etching and deposition
04/23/1991CA1283282C Mask assembly having mask stress relieving feature
04/23/1991CA1283281C Apparatus and method for registration of shadow masked thin film patterns
04/20/1991CA2028013A1 Coated filaments for composites
04/18/1991WO1991005342A1 Optical data recording medium and method of producing the same
04/18/1991WO1991005077A1 Ion vapour deposition apparatus and method
04/18/1991WO1991005076A1 Surface-coated hard member for cutting and abrasion-resistant tools
04/18/1991WO1991005074A1 Surface-coated hard member having excellent abrasion resistance
04/18/1991WO1991005073A1 Thin film fabrication method and device
04/18/1991DE3936550C1 Substrate coating for wear resistance - with titanium nitride in vacuum chamber contg. titanium evaporator and heater with rotary substrate holder
04/17/1991EP0422355A1 Method and apparatus for vapour deposition of material onto a substrate
04/17/1991EP0422323A1 Use of Helium as process gas for coating polymethylmethacrylat substrates with a thin aluminium layer
04/17/1991EP0422099A1 Modular sputtering apparatus
04/17/1991CN1012341B Method for making glass-steel articles
04/16/1991US5008897 Water cooled crucible
04/16/1991US5008149 Composite oxide bonding layer
04/16/1991US5008148 Process for the production of plastic moulded articles with improved weathering resistance
04/16/1991US5007372 Vacuum depositing apparatus
04/10/1991EP0421498A2 Device for the rapid loading of substrates or other articles into vacuum plants
04/10/1991EP0421348A1 Film forming apparatus
04/10/1991EP0421292A2 Optical waveguide device and method of making the same
04/10/1991EP0421040A1 Dielectric metallized plastic films, particularly for electrodes for capacitors
04/10/1991EP0421015A1 Process for producing transparent conductive film
04/10/1991EP0228394B1 An apparatus for coating substrates by plasma discharge
04/09/1991US5006218 Sputtering apparatus
04/09/1991US5006213 Process for coating a substrate with electrically conductive materials
04/09/1991US5005596 Artificial hair for hair-implantation and preparation process
04/09/1991US5005518 Artificial hair for hair-implantation and preparation process and preparation apparatus thereof
04/04/1991WO1991004569A1 Disk scanning apparatus for batch ion implanters
04/04/1991WO1991004352A1 Sputtering apparatus and sputtering processing system using the same
04/03/1991EP0420595A2 Deposited film formation method utilizing selective deposition by use of alkyl aluminum hydride
04/03/1991EP0419461A1 Wafer handling system with bernoulli pick-up
04/02/1991US5004721 As-deposited oxide superconductor films on silicon and aluminum oxide
04/02/1991US5004034 Method of surface bonding materials together by use of a metal matrix composite, and products produced thereby
03/1991
03/30/1991WO1991005075A1 Surface-coated hard member for cutting and abrasion-resistant tools
03/27/1991EP0418905A2 Corrosion- and friction-resistance coatings
03/26/1991US5003151 Method and control arrangement for the evaporation rate of an electron beam
03/26/1991US5002838 Aluminum plating substance for anodizing
03/26/1991US5002837 Zn-Mg alloy vapor deposition plated metals of high corrosion resistance, as well as method of producing them