Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
12/2009
12/23/2009EP2135974A1 Method of surface treatment for metal glass part, and metal glass part with its surface treated by the method
12/23/2009EP2135973A1 Method for the manufacturing of sputtering targets using an inorganic polymer
12/23/2009EP2135972A1 Gold alloy coating, gold alloy coating clad laminate and gold alloy coating clad member
12/23/2009EP2135971A1 Polyurea film and method of forming the same
12/23/2009EP2135970A1 Processing system and method for processing a substrate
12/23/2009EP2135744A1 Heater of an inkjet printhead and method of manufacturing the heater
12/23/2009EP1448366B1 Forming thin films on substrates using a porous carrier
12/23/2009EP1349698B1 Friction fit target assembly for high power sputtering operation
12/23/2009CN101611165A Process for producing molybdenum-based sputtering target plate
12/23/2009CN101611164A Film forming apparatus and film forming method
12/23/2009CN101610649A Casing and fabricating method thereof
12/23/2009CN101609898A Preparation method for metal base fuel battery bipolar plate with hydrophobicity
12/23/2009CN101609868A Manufacturing method for copper oxide nanometer particle film non-volatile memorizer prototype device
12/23/2009CN101609860A Preparation method of CdTe film solar cell
12/23/2009CN101609858A Film deposition method
12/23/2009CN101609735A Method for preparing high purity, high density and high yield Si3N4/SiO2 coaxial nano-cable array
12/23/2009CN101609729A Multilayer transparent electricity conductive film and manufacture method
12/23/2009CN101608305A Method for preparing ZnO nanowire array
12/23/2009CN101608301A Production line of continuous vacuum plasma evaporation metal composite material
12/23/2009CN101608300A High photocatalytic activity TiO2-ZnO double-layer composite film preparation method
12/23/2009CN101608299A High hardness and low friction Cr/CrCN gradient coating technology applicable to surface of profiled reed
12/23/2009CN101608298A Optical film coating device
12/23/2009CN101608297A Physical vapor deposition process and filming equipment for manufacturing color gradual changing film
12/23/2009CN101607472A Heater of an inkjet printhead and method of manufacturing the heater
12/23/2009CN100573968C Patterning method and apparatus, film forming method and apparatus, electrooptics apparatus, and manufacturing method thereof
12/23/2009CN100573817C Pressure reduction vessel and pressure reduction processing apparatus
12/23/2009CN100573802C Vacuum arc source comprising a device for generating a magnetic field
12/23/2009CN100572601C Protective layer for the protection of a component against corrosion and oxidation at elevated temperatures, and component
12/23/2009CN100572597C Fe/MoS2 nano multilayer film and preparation method thereof
12/23/2009CN100572590C Growth of in-situ thin films by reactive evaporation
12/23/2009CN100572589C Manufacturing method of polycrystal film and manufacturing method of oxide superconductor
12/23/2009CN100572588C Magnetron sputtering curved surface spraying three-dimensional trajectory intelligent control method
12/23/2009CN100572587C Power supply system of sputter equipment, system and method of forming voltage control signal
12/23/2009CN100572586C Cumulate molecular beam source for organic thin film
12/23/2009CN100572455C Process for making platelets
12/23/2009CN100572325C Oxide sintered body, sputtering target, transparent conductive thin film and manufacturing method therefor
12/22/2009US7636234 Apparatus configurations for affecting movement of fluids within a microelectric topography processing chamber
12/22/2009US7635528 Coated article
12/22/2009US7635440 Sputtering target, thin film for optical information recording medium and process for producing the same
12/22/2009CA2476855C Method and device for coating a substrate
12/22/2009CA2388016C Method for fabricating electrode for rechargeable lithium battery
12/22/2009CA2356039C A tool of a surface-coated boron nitride sintered compact
12/22/2009CA2294644C Surface coatings
12/18/2009CA2665878A1 Faucet
12/17/2009WO2009151402A1 A process for producing an image on a substrate
12/17/2009WO2009151386A1 Coated cutting tool for metal cutting applications generating high temperatures
12/17/2009WO2009151060A1 Cylindrical sputtering target and method for manufacturing the same
12/17/2009WO2009151032A1 Manufacturing method for aluminum-based alloy sputtering target
12/17/2009WO2009151003A1 Sintered-oxide target for sputtering and process for producing the same
12/17/2009WO2009150997A1 Sputtering apparatus
12/17/2009WO2009150887A1 Hard coating layer and method for forming the same
12/17/2009WO2009149889A1 Glass product
12/17/2009WO2009149888A1 Method for producing a transparent and conductive metal oxide layer by highly ionized pulsed magnetron sputtering
12/17/2009WO2009149864A1 Workpiece carrier
12/17/2009WO2009149563A1 A system and method for fabricating macroscopic objects, and nano-assembled objects obtained therewith
12/17/2009WO2009122233A8 Droplet-free coating systems manufactured by arc-evaporation method
12/17/2009US20090311516 Ti-based composite material and method for making the same
12/17/2009US20090311513 Method for depositing crystalline titania nanoparticles and films
12/17/2009US20090311427 Mask Dimensional Adjustment and Positioning System and Method
12/17/2009US20090311424 Method for forming micropattern
12/17/2009US20090311297 Biocompatible Transparent Sheet, Method for Producing the Same, and Cultured Cell Sheet Used the Same Sheet
12/17/2009US20090309188 Semiconductor device and method of manufacturing same
12/17/2009US20090309104 SYSTEMS AND METHODS FOR CREATING CRYSTALLOGRAPHIC-ORIENTATION CONTROLLED poly-SILICON FILMS
12/17/2009US20090308756 Probe structure coaxial elongated electrical conductor projecting from a support surface, apparatus for use thereof and methods of fabrication thereof
12/17/2009US20090308740 CoCrPt Base Sputtering Target and Production Process for the Same
12/17/2009US20090308739 Wafer processing deposition shielding components
12/17/2009US20090308734 Apparatus and Method for Wafer Level Arc Detection
12/17/2009US20090308733 Thermal Barrier Coating Compositions, Processes for Applying Same and Articles Coated with Same
12/17/2009US20090308732 Apparatus and method for uniform deposition
12/17/2009US20090308635 Sputtering target, transparent conductive film, and transparent electrode for touch panel
12/17/2009US20090308538 Substrate temperature regulation fixed apparatus
12/17/2009US20090308537 Substrate support device and plasma processing apparatus
12/17/2009US20090308317 Carrier with deposition shield
12/17/2009DE112008000313T5 Bedampfungseinrichtung, Bedampfungsverfahren sowie Herstellverfahren für die Bedampfungseinrichtung Vaporization, vapor deposition or production process of vaporization
12/17/2009DE112008000252T5 Sputter-Verfahren und Sputter-Vorrichtung Sputtering method and sputtering apparatus
12/17/2009DE102008028542A1 Verfahren und Vorrichtung zum Abscheiden einer Schicht auf einem Substrat mittels einer plasmagestützten chemischen Reaktion Method and apparatus for depositing a layer on a substrate by a plasma enhanced chemical reaction
12/17/2009DE102008028141A1 Glasprodukt Glass products
12/17/2009CA2765337A1 A system and method for fabricating macroscopic objects, and nano-assembled objects obtained therewith
12/17/2009CA2727650A1 Method for producing a transparent and conductive metal oxide layer by highly ionized pulsed magnetron sputtering
12/17/2009CA2724917A1 Workpiece carrier
12/16/2009EP2133445A1 Coating System and Method for Coating a Substrate
12/16/2009EP2133444A1 Mask support, mask assembly, and assembly comprising a mask support and a mask
12/16/2009EP2132356A2 Pecvd process chamber backing plate reinforcement
12/16/2009EP2132355A2 System and method for glass sheet semiconductor coating and resultant product
12/16/2009EP2132354A1 Method and apparatus for the treatment of strip-shaped substrate in a vacuum coating system
12/16/2009CN201362740Y Work piece carrying tray
12/16/2009CN101606217A Ion implanting apparatus
12/16/2009CN101605923A Surface treating method for cutting tools
12/16/2009CN101605735A Material for transparent conductive film
12/16/2009CN101604624A Gas ring, apparatus for processing semiconductor substrate, and method of processing semiconductor substrate by using the apparatus
12/16/2009CN101603171A Chamber system of equipment for preparing transparent conductive film and process thereof
12/16/2009CN101603170A Method for plating parylene film on surface of LED chip
12/16/2009CN101603169A Film plating device
12/16/2009CN101603168A Micro-heaters, methods for manufacturing the same, and methods for forming patterns using the micro-heaters
12/16/2009CN101603167A Mask dimensional adjustment and positioning system and method
12/16/2009CN101602273A Diamond-like carbon coated glass and preparation method thereof
12/16/2009CN101602272A TiAlN-TiBN multilayer thick film and preparation method
12/16/2009CN101601978A Material mixing method of particles used for target material moulding of sintering body used for chromatic alternating-current plasma display
12/16/2009CN100570770C Ceramics film and production method therefor, and ferroelectric capacitor, semiconductor device, other elements
12/16/2009CN100569996C Methods and apparatuses for transferring articles through a load lock chamber under vacuum