| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 02/10/2010 | CN201400714Y Multi-functional coating device |
| 02/10/2010 | CN201400713Y Baffle plate structure of vacuum coating |
| 02/10/2010 | CN101646799A Magnetron source for deposition on large substrates |
| 02/10/2010 | CN101646798A Method for assembling at least two plates and use of said method for making an ionic sputtering assembly |
| 02/10/2010 | CN101643893A Preparation method of stoichiometric-proportion amorphous GaAs films |
| 02/10/2010 | CN101643892A Sputtering tool |
| 02/10/2010 | CN101643891A Device and process method for filling aluminum into nano through holes by using PVD method |
| 02/10/2010 | CN101643890A Preparation method of resistance change oxide Lu2O3 film and application thereof |
| 02/10/2010 | CN101643889A Part for rotary machine and its method of manufacture |
| 02/10/2010 | CN100588737C Method for preparing p-type copper-sulfur-containing transparent conductor film |
| 02/09/2010 | US7658801 Heat treatment apparatus |
| 02/04/2010 | WO2010014644A1 Electrically conductive protective liner |
| 02/04/2010 | WO2010013831A1 A film depositing apparatus and method |
| 02/04/2010 | WO2010013636A1 Wiring film, thin film transistor, target, wiring film formation method |
| 02/04/2010 | WO2010013497A1 Sputtering target for forming wiring film of flat panel display |
| 02/04/2010 | WO2010013476A1 Plasma processing apparatus and method for manufacturing electronic device |
| 02/04/2010 | WO2010013333A1 Vacuum device and vacuum treatment method |
| 02/04/2010 | WO2010013305A1 Metal film containing dispersed hydroxyapatite particles and method of forming the same |
| 02/04/2010 | WO2010013304A1 Physical vapor deposition apparatus and physical vapor deposition method |
| 02/04/2010 | WO2010013293A1 Plasma device and method of manufacturing crystal |
| 02/04/2010 | WO2010012704A1 Anti-wear layer arrangement and component comprising an anti-wear layer arrangement |
| 02/04/2010 | WO2010012293A1 Arrangement and method for generating a plasma having a defined and stable ionization state |
| 02/04/2010 | WO2009134041A3 Evaporator and vacuum deposition apparatus having the same |
| 02/04/2010 | WO2009054369A9 Sputtering target for magnetic recording film and method for manufacturing such sputtering target |
| 02/04/2010 | US20100028663 Method for manufacturing ultra-hydrophilic thin film coated metal product, and ultra-hydrophilic thin film coated metal product |
| 02/04/2010 | US20100028641 Friction- and wear-reducing coating |
| 02/04/2010 | US20100028636 Multilayer Film-Coated Member And Method For Producing It |
| 02/04/2010 | US20100028570 Transfer sheet and method for forming the same |
| 02/04/2010 | US20100028562 Plasma generating apparatus, deposition apparatus, deposition method, and method of manufacturing display device |
| 02/04/2010 | US20100027383 Transparent member, timepiece, and method of manufacturing a transparent member |
| 02/04/2010 | US20100025685 Method and apparatus for forming contact hole |
| 02/04/2010 | US20100025535 Protection of elements in composite material |
| 02/04/2010 | US20100025253 Method for coating a metal with a ceramic coating, electrolyte used therefor, ceramic coating, and metal material |
| 02/04/2010 | US20100025236 Sb-Te Alloy Sintered Compact Target and Manufacturing Method Thereof |
| 02/04/2010 | US20100025231 Method for cleaning optical element of EUV light source device and optical element cleaning device |
| 02/04/2010 | US20100025230 Vacuum Treatment Apparatus, A Bias Power Supply And A Method Of Operating A Vacuum Treatment Apparatus |
| 02/04/2010 | US20100025229 Apparatus and method for sputtering target debris reduction |
| 02/04/2010 | US20100025228 Method for Preparing Thin GaN Layers by Implantation and Recycling of a Starting Substrate |
| 02/04/2010 | US20100024865 Continuous coating installation, methods for producing crystalline solar cells, and solar cell |
| 02/04/2010 | US20100024731 Processing tool with combined sputter and evaporation deposition sources |
| 02/03/2010 | EP2149704A1 Two-direction shape-memory alloy thin film actuator and method for manufacturing shape-memory alloy thin film used in the actuator |
| 02/03/2010 | EP2149624A1 Multilayer film-coated member and method for producing it |
| 02/03/2010 | EP2149620A1 Multilayer film-coated member and method for producing it |
| 02/03/2010 | EP2148939A1 Vacuum treatment unit and vacuum treatment process |
| 02/03/2010 | EP2148938A1 Apparatuses and methods for cryogenic cooling in thermal surface treatment processes |
| 02/03/2010 | EP2148937A1 Thin film semiconductor material produced through reactive sputtering of zinc target using nitrogen gases |
| 02/03/2010 | EP2148899A1 Transparent barrier film and method for producing the same |
| 02/03/2010 | CN201397808Y Rotary type vacuum lock |
| 02/03/2010 | CN201397398Y Film coating monitor wafer |
| 02/03/2010 | CN201395628Y Air flow control device of sputtering aluminum plating process |
| 02/03/2010 | CN201395627Y Inner dynamic water-cooling system of metal ion implantation equipment |
| 02/03/2010 | CN201395626Y Magnetron sputtering device |
| 02/03/2010 | CN201395625Y Super clean bench of optical coating machine |
| 02/03/2010 | CN101641458A Rotating magnetron sputtering apparatus |
| 02/03/2010 | CN101641457A Evaporation source, vapor deposition apparatus and method of film formation |
| 02/03/2010 | CN101638775A Vacuum coater integrated control system |
| 02/03/2010 | CN101638774A Rotatable sample position of magnetron sputtering device |
| 02/03/2010 | CN101638773A Sputtering device |
| 02/03/2010 | CN101638772A Method for preparing fluorine doped tin oxide transparent conductive film |
| 02/03/2010 | CN101638771A Metal-base ceramic composite target material containing noble metals and manufacturing method thereof |
| 02/03/2010 | CN101638770A Method for improving aluminum solderability of vacuum coating film |
| 02/03/2010 | CN101638769A Film formation apparatus and film formation method using the same |
| 02/03/2010 | CN101638768A Method for plating nickel on organic glass |
| 02/03/2010 | CN100587996C Device for fixing substrate for film sputtering and method for fixing substrate by the device |
| 02/03/2010 | CN100587107C Pulse type magnetron sputtering deposition with preionization |
| 02/03/2010 | CN100587106C Sputtering, depositing split cavity type vacuum film deposition apparatus and working method thereof |
| 02/03/2010 | CN100587105C Evaporation source device |
| 02/03/2010 | CN100587104C Silicon film forming equipment |
| 02/03/2010 | CN100587103C Calibration device for vacuum evaporation plating |
| 02/02/2010 | US7655742 Method of forming thin film |
| 02/02/2010 | US7655543 Separate injection of reactive species in selective formation of films |
| 02/02/2010 | US7655299 Surface-coated cutting tool made of hard metal and manufacturing method for same |
| 02/02/2010 | US7655282 Method of forming patterned film |
| 02/02/2010 | US7655093 Wafer support system |
| 02/02/2010 | US7655092 Tandem process chamber |
| 02/02/2010 | CA2422049C Temporary protective covers |
| 02/02/2010 | CA2356042C A tool of a surface-coated boron nitride sintered compact |
| 01/28/2010 | WO2010011464A1 Low temperature deposition of a vaporized drug |
| 01/28/2010 | WO2010010224A1 System for aligning patterns on a substrate using stencil lithography |
| 01/28/2010 | WO2010009889A1 Method for producing a layer system on a substrate and layer system |
| 01/28/2010 | WO2010009718A2 Component made of an unalloyed or low-alloy steel, method for protecting said components against coke deposition or metal dusting |
| 01/28/2010 | US20100021985 Mechanical process for creating particles in fluid |
| 01/28/2010 | US20100021788 Polymer electrolyte composite film, membrane-electrode assembly and fuel cell |
| 01/28/2010 | US20100021787 Processes for producing catalyst-layer-supporting substrate, catalyst-layer-supporting substrate, membrane electrode assembly, and fuel cell |
| 01/28/2010 | US20100021769 method to improve corrosion performance of exchange coupled granular perpendicular media |
| 01/28/2010 | US20100021763 Easy to write and hard to decay media for hard disk drive applications |
| 01/28/2010 | US20100021746 Aqueous suspension for pyrolytic spray coating |
| 01/28/2010 | US20100021720 Transparent coductive oxide and method of production thereof |
| 01/28/2010 | US20100021695 Engraved plate and substrate with conductor layer pattern using the same |
| 01/28/2010 | US20100021691 Thin layer having composition gradient and production method thereof |
| 01/28/2010 | US20100021659 Small Volume In Vitro Sensor and Methods of Making |
| 01/28/2010 | US20100021649 Method of manufacturing printed circuit board |
| 01/28/2010 | US20100021624 Film Formation Apparatus and Method for Forming a Film |
| 01/28/2010 | US20100021565 Pearlescent Pigments |
| 01/28/2010 | US20100019664 Organic electroluminescence panel and a method for manufacturing the same |
| 01/28/2010 | US20100018859 Radially enlarged type plasma generating apparatus |
| 01/28/2010 | US20100018857 Sputter cathode apparatus allowing thick magnetic targets |
| 01/28/2010 | US20100018855 Inline co-sputter apparatus |
| 01/28/2010 | US20100018854 Trim magnets to adjust erosion rate of cylindrical sputter targets |
| 01/28/2010 | US20100018851 Carbon nanotubes for fuel cells, method for manufacturing the same, and fuel cell using the same |