| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 04/13/2010 | US7695596 Forming uniform patterns by multi-step supporting the substrate in a vacuum deposition process so as to improve the close adhesion of a mask to the substrate |
| 04/13/2010 | US7695590 Chemical vapor deposition plasma reactor having plural ion shower grids |
| 04/13/2010 | US7694648 Organic EL display device and method for fabricating the same |
| 04/13/2010 | US7694647 Cluster tool architecture for processing a substrate |
| 04/13/2010 | CA2350455C Method of producing negative electrode for lithium secondary cell |
| 04/08/2010 | WO2010039314A1 Process for depositing a coating on a blisk |
| 04/08/2010 | WO2010038755A1 Gas barrier film |
| 04/08/2010 | WO2010038642A1 High-purity copper or high-purity copper alloy sputtering target, process for manufacturing the sputtering target, and high-purity copper or high-purity copper alloy sputtered film |
| 04/08/2010 | WO2010038631A1 Deposition apparatus, deposition method, and storage medium having program stored therein |
| 04/08/2010 | WO2010038593A1 Device and method for depositing hard bias stack, and device and method for manufacturing magnetic sensor stack |
| 04/08/2010 | WO2010038421A1 Sputtering apparatus and sputtering method |
| 04/08/2010 | WO2010038384A1 Film forming apparatus and film forming method using same |
| 04/08/2010 | WO2010038271A1 Sputtering apparatus and thin film formation method |
| 04/08/2010 | WO2010037914A1 Process for treating a metal part with multiple-energy he+ and he2+ ions |
| 04/08/2010 | WO2010037288A1 Magnetic path mechanism, magnetron sputtering cathode comprising the mechanism, and manufacturing method of the same |
| 04/08/2010 | WO2010023853A3 Manufacturing method for glass substrate with thin film |
| 04/08/2010 | US20100087352 Process For Creating Shape-Designed Particles In A Fluid |
| 04/08/2010 | US20100086791 Optical film and coating method thereof |
| 04/08/2010 | US20100086672 Method and apparatus for monitoring and controlling the application of performance enhancing materials to creping cylinders |
| 04/08/2010 | US20100086397 Surface Treatments for Turbine Components to Reduce Particle Accumulation During Use Thereof |
| 04/08/2010 | US20100085801 Methods of Forming Thin Films for Molecular Based Devices |
| 04/08/2010 | US20100084628 Branched nanowire and method for fabrication of the same |
| 04/08/2010 | US20100084261 Method for fabricating polymeric wavelength filter |
| 04/08/2010 | US20100084088 Mask, method of manufacturing mask, device for manufacturing mask, method of manufacturing layer of luminescent material, electro-optical device, and electronic device |
| 04/08/2010 | US20100084052 Compositions of corrosion-resistant Fe-based amorphous metals suitable for producing thermal spray coatings |
| 04/08/2010 | US20100083836 Hydrogen permeable film and method for manufacturing the same |
| 04/08/2010 | US20100083489 Carbon nanotube columns and methods of making and using carbon nanotube columns as probes |
| 04/08/2010 | DE19834437B4 Mangan-Legierungen für magnetische Werkstoffe, Sputter-Targets aus Mangan-Legierungen und magnetische Dünnfilme Manganese alloys for magnetic materials, sputtering targets of manganese alloys and magnetic thin films |
| 04/08/2010 | DE112008000803T5 Abscheidungsquelleneinheit, Abscheidungsvorrichtung und Temperatursteuereinrichtung einer Abscheidungsquelleneinheit Deposition source unit deposition apparatus and temperature control device of a deposition source unit |
| 04/08/2010 | DE112005002801B4 Verdampfungsquelle Evaporation source |
| 04/08/2010 | DE102008050499A1 PVD-Beschichtungsverfahren, Vorrichtung zur Durchführung des Verfahrens und nach dem Verfahren beschichtete Substrate PVD coating process, apparatus for implementing the method and coated substrates according to the method |
| 04/08/2010 | DE102005017632B4 Verfahren zur Modifikation der Oberfläche einer Probe mittels eines gepulsten Ionenstrahls oder mittels eines ionenstrahlgenerierten Teilchenstrahls mit homogen oder gaußförmig verteilter Stromdichte A method of modifying the surface of a sample by means of a pulsed ion beam or ion beam generated by a particle beam with homogeneously distributed, or Gaussian current density |
| 04/08/2010 | CA2738633A1 Process for depositing a coating on a blisk |
| 04/07/2010 | EP2172578A1 Method and device for separating a gradient coating |
| 04/07/2010 | EP2172577A2 Surface treatments for turbine components to reduce particle accumulation during use thereof |
| 04/07/2010 | EP2172436A1 Composite oxide sinter, process for producing amorphous composite oxide film, amorphous composite oxide film, process for producing crystalline composite oxide film, and crystalline composite oxide film |
| 04/07/2010 | EP2172292A1 Method of manufacturing bulk metallic structures with submicron grain sizes and structures made with such method |
| 04/07/2010 | EP2171127A1 Fine grained cemented carbide for turning in heat resistant super alloys (hrsa) |
| 04/07/2010 | EP2171122A2 Thin film coating of blades |
| 04/07/2010 | EP2171121A2 Tool with multilayered metal oxide coating |
| 04/07/2010 | EP2171120A2 System and method for component material addition |
| 04/07/2010 | EP1865090B1 Deep-pot-shaped copper sputtering target |
| 04/07/2010 | EP1840240B1 Sb-Te BASED ALLOY POWDER FOR SINTERING AND SINTERED SPUTTERING TARGET PREPARED BY SINTERING SAID POWDER, AND METHOD FOR PREPARING Sb-Te BASED ALLOY POWDER FOR SINTERING |
| 04/07/2010 | EP1774571B1 In-line heater for use in semiconductor wet chemical processing and method of manufacturing the same |
| 04/07/2010 | CN101692461A Nanometer electronic device based on semiconductor nano materials and preparation method thereof |
| 04/07/2010 | CN101692459A Novel perovskite manganese-based oxide film material and preparation method thereof |
| 04/07/2010 | CN101692432A Combined push rod mechanism |
| 04/07/2010 | CN101691670A Method for growing P-type zinc oxide film by using target doped with zinc phosphate |
| 04/07/2010 | CN101691657A Al-基合金溅射靶及其制造方法 Al- based alloy sputtering target and its manufacturing method |
| 04/07/2010 | CN101691656A Al-ni-la-cu alloy sputtering target and manufacturing method thereof |
| 04/07/2010 | CN101691655A Method of preparing BiFeO3 thin film |
| 04/07/2010 | CN101691654A Method of making a coated cutting tool |
| 04/07/2010 | CN101691653A Manufacturing process for promoting antiseptic property of stainless steel materials |
| 04/07/2010 | CN101691652A Deposition method and method for manufacturing light emitting device |
| 04/07/2010 | CN101691651A L-MBE preparation method of InGaZnO transparent conductive film |
| 04/07/2010 | CN101691650A Degreasing agent for vacuum plating |
| 04/07/2010 | CN101350366B Antistatic TFT substrate and processing technique thereof |
| 04/06/2010 | US7692177 Resistance variable memory element and its method of formation |
| 04/06/2010 | US7691434 Method for fabricating magnetoresistive read head having a bias structure with at least one dusting layer |
| 04/06/2010 | US7691243 Internal antennae for plasma processing with metal plasma |
| 04/06/2010 | US7691240 Target assemblies, targets, backing plates, and methods of target cooling |
| 04/06/2010 | US7691226 Electron temperature measurement method, electron temperature measurement program for implementing the method, and storage medium storing the electron temperature measurement program |
| 04/06/2010 | US7690960 Production method of organic EL device and cleaning method of organic EL device production apparatus |
| 04/06/2010 | US7690621 Prestrained thin-film shape memory actuator using polymeric substrates |
| 04/06/2010 | CA2542763C Protective layer for the protection of a component against corrosion and oxidation at elevated temperatures, and component |
| 04/06/2010 | CA2530303C Heat treatable coated article with dual layer overcoat |
| 04/06/2010 | CA2466639C Buffing diamond-like carbon (dlc) to improve scratch resistance |
| 04/03/2010 | CA2680495A1 Surface treatments for turbine components to reduce particle accumulation during use thereof |
| 04/01/2010 | WO2010035718A1 Cylindrical sputtering target, and method for manufacturing same |
| 04/01/2010 | WO2010035716A1 Oxide sintered compact for producing transparent conductive film |
| 04/01/2010 | WO2010035715A1 Oxide sintered compact for producing transparent conductive film |
| 04/01/2010 | WO2010035649A1 Method of manufacturing optical filter |
| 04/01/2010 | WO2010035130A2 Evaporator for organic materials |
| 04/01/2010 | WO2010035128A2 Evaporator for organic materials and method for evaporating organic materials |
| 04/01/2010 | WO2010034367A1 Dielectric mirror and method for the production thereof, and a projection illumination system for microlithography having such a mirror |
| 04/01/2010 | WO2010034187A1 Processing method of anti-compression and abrasion-resistant stainless steel |
| 04/01/2010 | WO2010017054A3 Indium tin oxide (ito) layer forming |
| 04/01/2010 | WO2010016973A3 Oxyfluoridecoating |
| 04/01/2010 | WO2010002755A3 Method of making inorganic or inorganic/organic hybrid barrier films |
| 04/01/2010 | WO2009115830A3 Treatment of metal components |
| 04/01/2010 | WO2009003552A9 Treatment system for flat substrates |
| 04/01/2010 | US20100081067 Mask blank substrate set and mask blank set |
| 04/01/2010 | US20100081012 PERPENDICULAR MEDIA WITH Cr-DOPED Fe-ALLOY-CONTAINING SOFT UNDERLAYER (SUL) FOR IMPROVED CORROSION PERFORMANCE |
| 04/01/2010 | US20100081000 Multilayer Film-Coated Member And Method For Producing It |
| 04/01/2010 | US20100080929 System and method for applying a conformal barrier coating |
| 04/01/2010 | US20100080928 Confining Magnets In Sputtering Chamber |
| 04/01/2010 | US20100080903 Fluoropolymer thin film and method for its production |
| 04/01/2010 | US20100079555 Lead-containing perovskite-type oxide film and method of producing the same, piezoelectric device using a lead-containing perovskite-type oxide film, as well as liquid ejecting apparatus using a piezoelectric device |
| 04/01/2010 | US20100079060 System and method for applying a conformal barrir coating with pretreating |
| 04/01/2010 | US20100078557 Electron beam source and method of manufacturing the same |
| 04/01/2010 | US20100078321 Method for assembling at least two plates and use of method for preparing an ion beam sputtering assembly |
| 04/01/2010 | US20100078320 Microwave plasma containment shield shaping |
| 04/01/2010 | US20100078315 Microstrip antenna assisted ipvd |
| 04/01/2010 | US20100078314 Method for coating fuel system components |
| 04/01/2010 | US20100078313 Sputtering apparatus and method of thin film formation |
| 04/01/2010 | US20100078312 Sputtering Chamber Having ICP Coil and Targets on Top Wall |
| 04/01/2010 | US20100078311 Aluminum Floride Thin Film Deposition Method |
| 04/01/2010 | US20100078310 Fabricating method of magnetoresistive element, and storage medium |
| 04/01/2010 | US20100078309 Sputtering method and sputtering apparatus |
| 04/01/2010 | US20100078308 Process for depositing a coating on a blisk |