Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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05/19/2010 | CN101709470A Preparation method of composite coating containing diffusion barrier generated in situ |
05/19/2010 | CN101709456A Method for preparing polysilicon film on graphite substrate by magnetic control sputtering |
05/19/2010 | CN101709455A Multifunctional magnetic control sputtering film plating device |
05/19/2010 | CN101709454A Rotary sputtering target and method for manufacturing same |
05/19/2010 | CN101709453A Method for preparing ZnO doped Al transparent conductive film at room temperature |
05/19/2010 | CN101709452A Cleaning method for sputtering target material of aluminum or aluminum alloy |
05/19/2010 | CN101709451A 氮化硅薄膜溅射源装置 Silicon nitride films sputter source device |
05/19/2010 | CN101709450A Method for preparing zirconium-titanium-aluminum-nitrogen nitride gradient hard reaction film |
05/19/2010 | CN101346795B Method and installation for the vacuum polishing of a metal strip by means of magnetron sputtering |
05/19/2010 | CN101311300B Ultra high vacuum magnetron sputtering rectangular plane sputtering target |
05/19/2010 | CN101265549B Foam iron-nickel composite metal material and preparation method thereof |
05/19/2010 | CN101224496B Manufacture method of sputtering targets |
05/19/2010 | CN101210312B Film preparation method for balancing film stress |
05/19/2010 | CN101208453B Gallium oxide-zinc oxide sputtering target, method of forming transparent conductive film and transparent conductive film |
05/19/2010 | CN101206935B Method of preparing electron type high-temperature superconductor lanthanum cerium cuprum oxygen film |
05/19/2010 | CN101202198B New type non-filament florescent lamp working in brightness arc transition zone |
05/19/2010 | CN101192666B Anode active material, method of preparing the same, and anode and lithium battery containing the anode active material |
05/19/2010 | CN101189358B Sputtering target and process for producing the same |
05/19/2010 | CN101180574B Front surface mirror |
05/19/2010 | CN101093751B Method for preparing cathode foil with high specific volume |
05/19/2010 | CN101090994B Mask holding mechanism and film forming apparatus |
05/19/2010 | CN101080510B Magnet structure for magnetron sputtering and cathode electrode unit and magnetron sputtering equipment |
05/19/2010 | CN101070592B Composite ion-injection surface modification method for copper and its alloy |
05/19/2010 | CN101034741B Zirconium adulterated lithium manganate anode film material and its making method |
05/18/2010 | US7718983 Sputtered contamination shielding for an ion source |
05/18/2010 | US7718574 Biaxially-textured film deposition for superconductor coated tapes |
05/18/2010 | US7718231 fabricating silicon-on-insulators (SOIs) structures with a very thin (less than 100 nm), but uniform buried oxide; processing time is reduced, yet the throughput is increased by reducing the oxygen implantation dose |
05/18/2010 | US7718222 Apparatus and method for high rate uniform coating, including non-line of sight |
05/18/2010 | US7718117 Tungsten sputtering target and method of manufacturing the target |
05/18/2010 | US7718095 Sputtering target, thin film for optical information recording medium and process for producing the same |
05/18/2010 | US7718045 Ground shield with reentrant feature |
05/18/2010 | US7718044 Method for controlling shaft coating taper |
05/18/2010 | US7718043 Multilayer hard coating for tools |
05/18/2010 | US7718042 Method for manufacturing sputter-coated substrates, magnetron source and sputtering chamber with such source |
05/18/2010 | US7717079 Engine |
05/18/2010 | US7716806 Tantalum sputtering target and method for preparation thereof |
05/14/2010 | WO2010053605A1 Segmented film deposition |
05/14/2010 | WO2010053135A1 Al alloy film for display device, display device and sputtering target |
05/14/2010 | WO2010053060A1 Semiconductor device |
05/14/2010 | WO2010053048A1 Co-Fe ALLOY FOR SOFT MAGNETIC FILMS, SOFT MAGNETIC FILM, AND PERPENDICULAR MAGNETIC RECORDING MEDIUM |
05/14/2010 | WO2010052842A1 Information recording medium and method for producing same, and sputtering target |
05/14/2010 | WO2010052184A2 Wear protection layer and method for the manufacture thereof |
05/14/2010 | WO2010052000A1 Test glass changing system |
05/14/2010 | WO2010033469A3 Dielectric material treatment saystem and method of operating |
05/13/2010 | US20100120238 Semiconductor manufacturing apparatus and method |
05/13/2010 | US20100120191 increase durability by including a carbonate in organic compound layer contains a phenanthroline compound; emit light with high luminance and high efficiency |
05/13/2010 | US20100120145 Three-dimensional biocompatible skeleton structure containing nanoparticles |
05/13/2010 | US20100119913 Metal separator for fuel cell and manufacturing method thereof |
05/13/2010 | US20100119874 Laminated high moment film for head applications |
05/13/2010 | US20100119843 Plasma resistant coatings for plasma chamber components |
05/13/2010 | US20100119819 Coating |
05/13/2010 | US20100119773 Coated Cemented Carbide Cutting Tools and Method for Pre-Treating and Coating to Produce Cemented Carbide Cutting Tools |
05/13/2010 | US20100119735 Methods for depositing ultra thin coatings exhibiting low haze and methods for the preparation of such coatings |
05/13/2010 | US20100117227 Method of preparing detectors for oxide bonding to readout integrated chips |
05/13/2010 | US20100116788 Substrate temperature control by using liquid controlled multizone substrate support |
05/13/2010 | US20100116654 Film coating apparatus |
05/13/2010 | US20100116646 A sensing electrode for ph measurement chiefly in bodily fluids |
05/13/2010 | US20100116645 Surface processing method and manufacturing method of recording medium |
05/13/2010 | US20100116644 Device for carrying out a plasma-assisted process |
05/13/2010 | US20100116643 Device for generating cold plasma in a vacuum chamber and use of said device for thermo-chemical processing |
05/13/2010 | US20100116341 Copper-gallium allay sputtering target, method for fabricating the same and related applications |
05/13/2010 | US20100116331 Photovoltaic device and process for producing same |
05/12/2010 | EP2184743A1 Conductor layer manufacturing method |
05/12/2010 | EP2184378A1 Evaporation source, process for producing optical member, and optical member |
05/12/2010 | EP2183449A1 Vehicle handle and process for its coating |
05/12/2010 | EP2183404A1 Piston ring |
05/12/2010 | EP1996743B1 Use of magnesium-copper compositions for the evaporation of magnesium |
05/12/2010 | DE102009021056A1 Verfahren und Vorrichtung zum Aufbringen oder Einbetten von Partikeln auf oder in eine durch Plasmabeschichtung aufgebrachte Schicht Method and apparatus for applying or embedding of particles on or in a coating applied by plasma coating layer |
05/12/2010 | DE102008056125A1 Testglaswechselsystem zur selektiven Beschichtung und optischen Messung von Schichteigenschaften in einer Vakuumbeschichtungsanlage Test lens changing system for selectively coating and optical measurement of coating properties in a vacuum coating system |
05/12/2010 | DE102008043634A1 Evaporator for evaporating organic materials in vacuum for the production of large-scale coating during the production of organic light diodes or organic solar cells and/or electronics, comprises thin-walled metallic evaporating container |
05/12/2010 | DE102008021912B4 Beschichtungsverfahren und Vorrichtung zum Beschichten Coating methods and apparatus for coating |
05/12/2010 | CN201466051U Solar cell masking band |
05/12/2010 | CN201466048U Pipelined CdTe film solar cell preparing device |
05/12/2010 | CN201464665U Large size microprism type reflection material mould |
05/12/2010 | CN201459236U Transposition mechanism for multiple comparison strips |
05/12/2010 | CN201459235U Integrally detachable observation window and baffle plate mechanism |
05/12/2010 | CN201459234U Viewing window mechanism |
05/12/2010 | CN201459233U Sputtering target material cooling device |
05/12/2010 | CN201459232U Film making device using scanning to conduct steam plating |
05/12/2010 | CN201459231U Evaporation source movable multifunctional film coating device |
05/12/2010 | CN201459230U Baking electrode |
05/12/2010 | CN201459229U Compensation baffle mechanism |
05/12/2010 | CN201459228U Device for cleaning and protecting silver-layer sputtering mask of compact disc |
05/12/2010 | CN1986872B Machine for treating substrates and method |
05/12/2010 | CN1984855B Method for manufacturing target material for sputtering target |
05/12/2010 | CN1944687B Strong laser induced periodical micro nano method and its device for material surface |
05/12/2010 | CN1936071B Substrate carrier |
05/12/2010 | CN1932072B Coating machine and method for operating a coating machine |
05/12/2010 | CN1904653B Reflector member manufacturing method and reflector member manufactured by the method |
05/12/2010 | CN1904133B Sputtering device and sputtering method |
05/12/2010 | CN1891861B Process kit design for reducing particle generation |
05/12/2010 | CN1891852B Sputtering equipment |
05/12/2010 | CN1891663B Indium oxide-tin oxide powder and sputtering target using the same and method for producing the indium oxide-tin oxide powder |
05/12/2010 | CN1882711B High purity hafnium, target and thin film composed of said high purity hafnium, and method for producing high purity hafnium |
05/12/2010 | CN1800434B Method of controlling effusion cell of deposition system |
05/12/2010 | CN1795288B Sealing lock for an spray plating line in for flate product |
05/12/2010 | CN1794376B Inductance framework having sputtering film electrode and its production method |
05/12/2010 | CN1676662B Two dimensional magnetron scanning for planar sputtering |
05/12/2010 | CN1476379B Transparent laminate having low emissivity |
05/12/2010 | CN101705474A Preparation method of iron nitride film with strong Hall effect |