Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
07/2006
07/05/2006CN1797613A Center post of annular field coil in global Tokamak magnet
07/05/2006CN1263102C Plasma etching method and equipment for making semiconductor device
07/05/2006CN1263092C Gas supply device
07/05/2006CN1262887C Photoetch instrument and method for making integrated circuit device
07/04/2006US7072370 Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources
07/04/2006US7071626 Plasma generator
07/04/2006US7071443 Plasma arc torch
07/03/2006CA2530847A1 Automated determination of plasma torch operating mode
07/03/2006CA2530833A1 Method and system of conserving plasma torch consumable
06/2006
06/29/2006WO2006067083A1 Process for determining local emissivity profile of suprathermal electrons
06/29/2006US20060141290 Titania coatings by cvd at atmospheric pressure
06/29/2006US20060141268 Nanoparticle coated nanostructured surfaces for detection, catalysis and device applications
06/29/2006US20060138966 Ion accelerator arrangement
06/29/2006US20060138957 Plasma generating electrode and plasma reactor
06/29/2006US20060138940 Organic light emitting devices and fabrication methods thereof
06/29/2006US20060137642 Plasma jet spark plug
06/29/2006DE202006004253U1 Plasma/radical stream generation device for cleaning workpiece, has pipe centered into rear extension of tubular side piece of inner conducting system so that gas is supplied to open end of coaxial conducting system for production of stream
06/29/2006DE102004060377A1 Verfahren und Vorrichtung zum Betrieb einer Plasmaeinrichtung Method and apparatus for operating a plasma device
06/29/2006DE102004028197B4 Verfahren zur Vorbehandlung verzinkter Stahlbleche oder Aluminiumbleche zum Schweißen Method for pre-galvanized steel sheets or aluminum sheets for welding
06/28/2006EP1675444A1 Process for determining local emissivity profile of suprathermal electrons
06/28/2006EP1675156A1 Plasma generating electrode and plasma reactor
06/28/2006EP1673966A1 Method of forming stable states of dense high-temperature plasma
06/28/2006EP1673585A2 Plasma flare ir and uv emitting devices
06/28/2006CN1795287A Thin film forming device and thin film forming method
06/28/2006CN1794431A Plasma apparatus
06/28/2006CN1794410A Cathode anode micro cavity electrode plasma device structure using one-dimensional nanometer material
06/28/2006CN1261984C Method and apparatus for treating plasma
06/28/2006CN1261233C Method and apparatus for forming a coating
06/27/2006US7067762 Plasma cutting process and machine
06/27/2006US7067405 Atmospheric glow discharge with concurrent coating deposition
06/27/2006US7067204 heaters, decompressors and ultrasonic wave sources, which irradiate liquids for plasma enhanced chemical vapor deposition of films on substrates and for degradation toxins such as dioxins or polychlorinated biphenyl; pollution control
06/27/2006US7067201 Wear resistant coating for keel joint
06/27/2006US7067092 Treatment of gaseous emissions
06/27/2006US7066156 Fuel vaporization systems for vaporizing liquid fuel
06/27/2006US7066107 Shielding system for plasma chamber
06/23/2006CA2506051A1 Power source for plasma device
06/22/2006WO2006065152A1 Apparatus to generate energy using microwave
06/22/2006US20060134346 Method of manufacturing heating/cooling coil with nanometer silver coating layer
06/22/2006US20060134345 Systems and methods for depositing material onto microfeature workpieces
06/22/2006US20060133576 X-ray micro-target source
06/22/2006US20060130758 Methods and arrangement for the reduction of byproduct deposition in a plasma processing system
06/21/2006EP1672966A2 Plasma jet systems and methods
06/21/2006EP1671347A1 Method and apparatus for preventing instabilities in radio-frequency plasma processing
06/21/2006EP1671333A1 Method and device for generating alfven waves
06/21/2006EP1153407A4 Electrostatic fluid accelerator
06/21/2006EP1015161B1 Plasma gun and method using the latter
06/21/2006EP0839217B1 A plasma enhanced chemical processing reactor and method
06/21/2006CN2790102Y Discharging device for plasma cutting torch
06/21/2006CN1792122A Cascade source and a method for controlling the cascade source
06/21/2006CN1791972A 等离子体处理装置 Plasma processing apparatus
06/21/2006CN1260748C Method and device for cleaning harmfel gas by using gas laser and electron-beam irradiation
06/21/2006CN1260013C Ultraviolet lamp system and method
06/15/2006WO2005117507A3 Method for removing at least one inorganic layer from a component
06/15/2006US20060127601 Film formation method
06/15/2006US20060127599 Process and apparatus for preparing a diamond substance
06/15/2006US20060127598 Method for providing a coating on the surfaces of a product with an open cell structure throughout its structure and use of such a method
06/15/2006US20060127597 Method for producing containing fullerene and apparatus for producing same
06/15/2006US20060127271 Non-thermal disinfection of biological fluids using non-thermal plasma
06/15/2006US20060126771 Propulsion motor
06/15/2006US20060124612 Generation of diffuse non-thermal atmosheric plasmas
06/15/2006US20060124455 Thin film forming device and thin film forming method
06/15/2006US20060124245 High selective ratio and high and uniform plasma processing method and system
06/15/2006US20060124244 Plasma processor and plasma processing method
06/15/2006US20060124243 Disturbance-free, recipe-controlled plasma processing system and method
06/15/2006US20060124202 Nitriding method and device
06/15/2006US20060124059 Inductively coupled plasma generation system with a parallel antenna array having evenly distributed power input and ground nodes and improved field distribution
06/14/2006EP1668966A2 Pulsed plasma accelerator and method
06/14/2006EP1668965A1 Cooled plasma torch and method for cooling the torch
06/14/2006EP1414549B1 Device and method for purifying exhaust gas
06/14/2006CN2788509Y Ion source discharge current self-stabilization controller
06/14/2006CN1788104A Thin film forming device and thin film forming method
06/14/2006CN1787881A Ultra low k (ulk) SiCOH film and method
06/14/2006CN1259479C Plasma processed fabric flat structure, its mfg. method and application
06/13/2006US7062347 Maintenance method and system for plasma processing apparatus
06/13/2006US7061184 Plasma electron density measuring and monitoring device
06/13/2006US7060231 Catalytic exhaust system for automobile; denitrification
06/13/2006US7059267 Use of pulsed grounding source in a plasma reactor
06/08/2006WO2006059808A1 Submerged plasma-use electrode, submerged plasma generating device and submerged plasma generating method
06/08/2006WO2006037991A3 Microwave plasma apparatus with vorticular gas flow
06/08/2006US20060121211 Chemical vapor deposition apparatus and chemical vapor deposition method using the same
06/08/2006US20060121210 Plasma processing equipment and method of operating the same
06/08/2006US20060118518 High aspect ratio etch using modulation of RF powers of various frequencies
06/08/2006US20060118241 Plasma processing apparatus
06/07/2006EP1667499A1 Plasma processing method and apparatus thereof
06/07/2006EP1667498A1 Plasma producing electrode and plasma reactor
06/07/2006EP1665908A1 Adaptively plasma source for generating uniform plasma
06/07/2006EP1665324A2 Electron cyclotron resonance (ecr) plasma source having a linear plasma discharge opening
06/07/2006EP1664366A1 New metal strip product
06/07/2006EP1663886A2 Ring plasma jet method and apparatus for making an optical fiber preform
06/07/2006EP1065502B1 Method for analyzing the breakdown characteristics of a gaseous dielectric in a highly non-uniform field
06/07/2006CN2786908Y Coaxial incited invisible plasma antenna
06/07/2006CN1784519A Plasma treatment apparatus and method
06/07/2006CN1783431A Plasma processing apparatus
06/07/2006CN1783430A Capacitive coupling plasma processing apparatus
06/07/2006CN1783429A Plasma control method and plasma control apparatus
06/07/2006CN1783415A Semiconductor processing equipment
06/07/2006CN1782345A Spark igniter of gas turbine engine
06/07/2006CN1258860C Electrodynamic field generator
06/07/2006CN1258805C Semiconductor process chamber electrode and method for making the same
06/06/2006US7056852 High-frequency dielectric ceramic composition, dielectric resonator, dielectric filter, dielectric duplexer and communication system