Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
03/2006
03/30/2006US20060065516 Method of and apparatus for fabricating nano-sized carbon material
03/30/2006US20060065195 Microwave plasma generating device
03/30/2006DE102004044357A1 Component surface treatment executing device, has process chamber attached to one of openings, vacuum pump attached to chamber, and connection supplying electrical energy into receiving chambers for treatment of component
03/30/2006DE102004043967A1 Substrate plasma conditioning device, has low-temperature plasma with two linear electrodes that are arranged on side of substrate, where electrodes are connected with two connecting terminals of high frequency generator unit
03/29/2006EP1641327A2 Plasma-electric power generation system
03/29/2006EP1640608A1 Spacecraft thruster
03/29/2006EP1640474A1 Thin film forming device and thin film forming method
03/29/2006EP1640470A1 Nitriding method and device
03/29/2006EP0953204B1 Capacitively coupled rf-plasma reactor and method for manufacturing workpieces
03/29/2006CN1754409A Plasma processing system
03/29/2006CN1248549C Induction coupling plasma generating equipment containing zigzag coil antenna
03/29/2006CN1248289C Inductive coupling type plasma device
03/29/2006CN1248248C Technology and equipment for preparing magnetic carbon nano-tube by plasma
03/28/2006USRE39051 Fuzzy logic tuning of RF matching network
03/28/2006US7019543 Impedance monitoring system and method
03/28/2006US7019255 Method and apparatus for alignment of components of a plasma ARC torch
03/28/2006US7019254 Plasma arc torch
03/28/2006US7019253 includes chamber and coil system for converting field-generating current into radio frequency magnetic field in the chamber containing ionized gas which reacts with the magnetic plasma
03/28/2006US7018553 Optical monitoring and control system and method for plasma reactors
03/28/2006US7018506 Plasma processing apparatus
03/28/2006US7017594 Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads
03/23/2006WO2006030024A1 Probe for measuring characteristics of an excitation current of a plasma, and associated plasma reactor
03/23/2006US20060062931 Method and device for microwave plasma deposition of a coating on a thermoplastic container surface
03/23/2006US20060062930 Plasma-assisted carburizing
03/23/2006US20060060566 Method and device for substrate etching with very high power inductively coupled plasma
03/23/2006US20060060464 Plasma formed in a fluid
03/23/2006DE4326100B4 Verfahren und Vorrichtung zum Beschichten von Substraten in einer Vakuumkammer, mit einer Einrichtung zur Erkennung und Unterdrückung von unerwünschten Lichtbögen Method and device for coating substrates in a vacuum chamber, with a device for detection and suppression of unwanted arcs
03/23/2006DE19962163B4 Zentrifugen-Fusionsbrennstofftabletten-Injektor Centrifuges fusion fuel pellet injector
03/23/2006DE102004037521A1 Vorrichtung zur Bereitstellung von Targetmaterial für die Erzeugung kurzwelliger elektromagnetischer Strahlung An apparatus for providing a target material for generating short-wave electromagnetic radiation
03/22/2006EP1638377A1 Plasma generating electrode, plasma generation device, and exhaust gas purifying apparatus
03/22/2006EP1638376A1 Plasma generating electrode, plasma generation device, and exhaust gas purifying apparatus
03/22/2006EP1638139A1 Plasma processing device
03/22/2006EP1637624A1 Thin film forming device and thin film forming method
03/22/2006EP1636833A2 Plasma spraying for joining silicon parts
03/22/2006EP1552728B1 A thermal spraying device
03/22/2006EP1493309B1 An atmospheric pressure plasma assembly
03/22/2006EP1479090B1 Channel spark source for generating a stably focussed electron beam
03/22/2006EP1337281B1 Method and device for treating the surfaces of items
03/22/2006CN1751384A Plasma process device
03/22/2006CN1750231A Method and apparatus for removing material from a substrate surface
03/22/2006CN1246887C Plasma processing device and semiconductor mfg. device
03/21/2006US7016470 System and method for X-ray generation
03/21/2006US7015646 Magnetic and electrostatic confinement of plasma with tuning of electrostatic field
03/21/2006US7015414 Method and apparatus for determining plasma impedance
03/21/2006US7015413 Plasma generation system having a refractor
03/21/2006US7014889 Process and apparatus for plasma activated depositions in a vacuum
03/21/2006US7014887 improving metal deposition on patterned dielectric by cleaning in chamber of argon plasma, then cleaning with hydrogen and helium; physical vapor deposition
03/16/2006WO2006028551A2 Method and device for registration and immobilization
03/16/2006US20060057854 High frequency power supply device and plasma generator
03/16/2006US20060057304 Biased pulse DC reactive sputtering of oxide films
03/16/2006US20060055343 Spark management method and device
03/16/2006DE10201992B4 Vorrichtung zur plasmagestützten Bearbeitung von Oberflächen planarer Substrate Apparatus for plasma-assisted processing of surfaces of planar substrates
03/16/2006DE102004042501A1 Vorrichtung zur Bereitstellung eines reproduzierbaren Targetstromes für die energiestrahlinduzierte Erzeugung kurzwelliger elektromagnetischer Strahlung An apparatus for providing a reproducible target current for the energy ray-induced generation of short-wave electromagnetic radiation
03/16/2006CA2571639A1 Method and device for registration and immobilization
03/15/2006EP1635623A2 Plasma spray device and a method for controlling the status of a plasma spray device
03/15/2006EP1449233B1 Microwave plasma generator
03/15/2006CN1747133A Method and apparatus for controlling the volume of a plasma
03/15/2006CN1747132A Plasma processing apparatus
03/15/2006CN1747131A Charged particle beam application system
03/14/2006US7012263 Ion source apparatus and electronic energy optimized method therefor
03/14/2006US7011790 Placing the biological fluid comprising pathogens in a reaction volume; contacting a non-thermal plasma with the biological fluid to kill at least a portion of the pathogens within the biological fluid
03/14/2006CA2158182C Field effect transistor using diamond
03/14/2006CA2148674C Plasma process for reducing friction within the lumen of polymeric tubing
03/09/2006WO2005079218A3 Short torch design for direct liquid sample introduction using conventional and micro-nebulizers for plasma spectrometry
03/09/2006US20060051584 Process for producing a product having a structured surface
03/09/2006US20060051520 Process and apparatus for the plasma coating of workpieces with spectral evaluation of the process parameters
03/09/2006US20060049152 Method and apparatus of coordinating operational feedback in a plasma cutter
03/09/2006US20060048893 Atmospheric pressure plasma processing reactor
03/09/2006DE10358909B4 Plasma-CVD-Vorrichtung sowie Beschichtungsverfahren und Verfahren zur Herstellung eines Halbleiterbauteils unter Verwendung derselben Plasma CVD coating method and apparatus as well as method of manufacturing a semiconductor device using the same
03/09/2006DE10313561B4 Verfahren zum Bearbeiten eines Drahtes A method for processing a wire
03/08/2006EP1633172A2 Electrode and electrode holder with threaded connection
03/08/2006EP1632114A1 Cascade source and a method for controlling the cascade source
03/08/2006EP1631701A2 Atmospheric pressure non-thermal plasma device to clean and sterilize the surface of probes, cannulas, pin tools, pipettes and spray heads
03/08/2006EP1300878B1 Device for plasma processing
03/08/2006CN1745607A Plasma generating electrode assembly
03/08/2006CN1743859A Detection and suppression circuit and method of electrical arcing
03/07/2006US7009342 Plasma electron-emitting source
03/07/2006US7008970 Such as direct natural gas to hydrocarbon fuels and hydrocarbon oxidates, using a dielectric barrier discharge plasma cell, a solid oxide electrochemical cell, oxygen-containing gas and ultraviolet radiation; efficiency
03/02/2006WO2006022905A2 Discharge-enhanced atmospheric pressure chemical vapor deposition
03/02/2006WO2006007122A3 Tunable plasma frequency devices
03/02/2006WO2005045899A3 Low temperature deposition of silicone nitride
03/02/2006US20060045988 Pretreatment process of a substrate in micro/nano imprinting technology
03/02/2006US20060045987 Localized plasma processing
03/02/2006US20060045986 Silicon nitride from aminosilane using PECVD
03/02/2006US20060045228 Dual-plasma fusion and fission fuel cells
03/02/2006US20060042545 Plasma treatment apparatus, method of producing reaction vessel for plasma generation, and plasma treatment method
03/02/2006DE102004039468A1 Vorrichtung zur Erzeugung angeregter und/oder ionisierter Teilchen in einem Plasma An apparatus for generating excited and / or ionized particles in a plasma
03/02/2006DE102004005241B4 Verfahren und Einrichtung zur plasmabasierten Erzeugung weicher Röntgenstrahlung Method and apparatus for plasma-based generation of soft X-rays
03/01/2006EP1631129A2 Multi-position head plasma torch
03/01/2006EP1631128A1 Plasma processing apparatus and method for producing same
03/01/2006EP1629529A2 Method and system for etching a high-k dielectric material
03/01/2006EP1628757A2 Plasmatron fuel converter having decoupled air flow control
03/01/2006EP1628688A1 Treatment of biological material containing living cells using a plasma generated by a gas discharge
03/01/2006EP1438735B1 Methods and apparatus for plasma doping by anode pulsing
03/01/2006EP1044113B1 Plasma discharge device and method with dynamic tuning
03/01/2006CN1742522A Plasma processor and plasma processing method
03/01/2006CN1742521A Device for injection of a pulsed supersonic gas stream
03/01/2006CN1741936A Ion accelerator arrangement
03/01/2006CN1244138C Method for estimating plasma process quality and monitoring plasma technology
03/01/2006CN1243847C Plasma CVD apparatus